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1. 发明申请

US20060104831A1 Method and system for cooling a pump 有权
公开(公告)号：US20060104831A1
公开(公告)日：2006-05-18
申请号：US10987066
申请日：2004-11-12
申请人： Wayne Parent , Gentaro Goshi
发明人： Wayne Parent , Gentaro Goshi
IPC分类号： F04B39/06 , F04B35/04
CPC分类号： F04D29/5873 , F04D7/02 , F04D29/5866 , F04D29/588
摘要： A processing system utilizing a supercritical fluid for treating a substrate is described as having a pump for recirculating the supercritical fluid over the substrate. For various applications in supercritical fluid processing, the fluid temperature for the treatment process can elevate above the temperature acceptable for safe operation of the pump. Therefore, in accordance with one embodiment, a fraction of supercritical fluid from the primary recirculating flow of supercritical fluid over the substrate is circulated from the pressure side of the pump, through a heat exchanger to lower the temperature of the supercritical fluid, through the pump, and it is returned to the primary flow on the suction side of the pump. In accordance with yet another embodiment, supercritical fluid is circulated through the pump from an independent source to vent.

2. 发明授权

US07186093B2 Method and apparatus for cooling motor bearings of a high pressure pump 失效
标题翻译：用于冷却高压泵电机轴承的方法和装置
公开(公告)号：US07186093B2
公开(公告)日：2007-03-06
申请号：US10959483
申请日：2004-10-05
申请人： Gentaro Goshi
发明人： Gentaro Goshi
IPC分类号： F04B39/06 , H02K9/00
CPC分类号： F04D7/02 , F04D29/061 , F04D29/588
摘要： A system for cooling the bearings and motor in a pump assembly used for circulating supercritical fluid is disclosed. The system uses a pressurized coolant fluid that can be substantially pure CO2. The pressure difference between the circulating supercritical fluid and the coolant fluid is minimized to prevent cross-contamination of the fluids. In addition, the coolant fluid can provide a small amount of bearing lubrication.
摘要翻译：公开了一种用于冷却用于循环超临界流体的泵组件中的轴承和马达的系统。该系统使用可以是基本上纯的CO 2的加压冷却剂流体。循环超临界流体和冷却剂流体之间的压差被最小化以防止流体的交叉污染。此外，冷却液可以提供少量的轴承润滑。

3. 发明授权

US07211145B2 Substrate processing apparatus and substrate processing method 失效
标题翻译：基板加工装置及基板处理方法
公开(公告)号：US07211145B2
公开(公告)日：2007-05-01
申请号：US10422408
申请日：2003-04-23
申请人： Gentaro Goshi
发明人： Gentaro Goshi
IPC分类号： C30B29/06
CPC分类号： H01L21/68728 , G03F7/3021 , H01L21/68792 , Y10T117/1004 , Y10T117/1008
摘要： A substrate processing apparatus include a spin chuck capable of holding a semiconductor wafer in a horizontal position, a drive motor for driving the spin chuck for rotation, and a processing vessel accommodating the spin chuck and the drive motor 50 therein and capable of sealing a supercritical fluid, such as supercritical carbon dioxide, therein. The supercritical fluid flows along the upper and the lower surface of the semiconductor wafer at velocities relative to the upper and the lower surface of the semiconductor wafer as the spin chuck holding the semiconductor wafer in a horizontal position rotates to remove contaminants including particles and adhering to the semiconductor wafer from the semiconductor wafer.
摘要翻译：基板处理装置包括能够将半导体晶片保持在水平位置的旋转卡盘，用于驱动旋转卡盘旋转的驱动马达以及容纳旋转卡盘和驱动马达50的处理容器，能够密封超临界流体，如超临界二氧化碳。超临界流体沿着半导体晶片的上表面和下表面以相对于半导体晶片的上表面和下表面的速度流动，因为保持半导体晶片处于水平位置的旋转卡盘旋转以除去包括颗粒的污染物并附着于来自半导体晶片的半导体晶片。

4. 发明申请

US20060073041A1 Temperature controlled high pressure pump 失效
标题翻译：温控高压泵
公开(公告)号：US20060073041A1
公开(公告)日：2006-04-06
申请号：US10959483
申请日：2004-10-05
申请人： Gentaro Goshi
发明人： Gentaro Goshi
IPC分类号： F04B17/00
CPC分类号： F04D7/02 , F04D29/061 , F04D29/588
摘要： A system for cooling the bearings and motor in a pump assembly used for circulating supercritical fluid is disclosed. The system uses a pressurized coolant fluid that can be substantially pure CO2. The pressure difference between the circulating supercritical fluid and the coolant fluid is minimized to prevent cross-contamination of the fluids. In addition, the coolant fluid can provide a small amount of bearing lubrication.
摘要翻译：公开了一种用于冷却用于循环超临界流体的泵组件中的轴承和马达的系统。该系统使用可以是基本上纯的CO 2的加压冷却剂流体。循环超临界流体和冷却剂流体之间的压差被最小化以防止流体的交叉污染。此外，冷却液可以提供少量的轴承润滑。

5. 发明申请

US20060225769A1 Isothermal control of a process chamber 审中-公开
标题翻译：处理室的等温控制
公开(公告)号：US20060225769A1
公开(公告)日：2006-10-12
申请号：US11094876
申请日：2005-03-30
申请人： Gentaro Goshi , William Jones
发明人： Gentaro Goshi , William Jones
IPC分类号： B08B3/02
CPC分类号： H01L21/67248
摘要： An apparatus for use in providing a fluid at a predetermined temperature is disclosed. The apparatus comprises: means for supplying a first quantity of a fluid at a first temperature; means for supplying a second quantity of a fluid at a second temperature; and flow-control means for controlling a ratio of the first quantity of the fluid to the second quantity of the fluid for forming a mixed fluid, wherein the ratio is determined in response to a measured temperature of the mixed fluid.
摘要翻译：公开了一种用于在预定温度下提供流体的装置。该装置包括：用于在第一温度下供应第一量的流体的装置; 用于在第二温度下供应第二量的流体的装置; 以及流量控制装置，用于控制第一量的流体与第二量的用于形成混合流体的流体的比率，其中该比率是根据混合流体的测量温度来确定的。

6. 发明申请

US20060102590A1 METHOD FOR TREATING A SUBSTRATE WITH A HIGH PRESSURE FLUID USING A PREOXIDE-BASED PROCESS CHEMISTRY 审中-公开
标题翻译：使用基于过氧化物的工艺化学处理具有高压流体的基板的方法
公开(公告)号：US20060102590A1
公开(公告)日：2006-05-18
申请号：US10906349
申请日：2005-02-15
申请人： Robert Kevwitch , Gentaro Goshi , Joseph Hillman , Marie Lowe , Brandon Hansen
发明人： Robert Kevwitch , Gentaro Goshi , Joseph Hillman , Marie Lowe , Brandon Hansen
IPC分类号： B44C1/22
CPC分类号： C11D3/3947 , B08B7/0021 , C11D11/0047 , C23G5/00 , G03F7/427 , H01L21/02063 , H01L21/02101 , H01L21/31133 , H01L21/67057 , H05K3/26
摘要： A method and system is described for treating a substrate with a high pressure fluid, such as carbon dioxide in a supercritical state. A process chemistry is introduced to the high pressure fluid for treating the substrate surface. The process chemistry includes a peroxide-based chemistry.
摘要翻译：描述了用于处理具有超临界状态的二氧化碳的高压流体的衬底的方法和系统。将工艺化学物质引入用于处理基材表面的高压流体中。工艺化学包括基于过氧化物的化学。

7. 发明申请

US20060065189A1 Method and system for homogenization of supercritical fluid in a high pressure processing system 审中-公开
标题翻译：高压处理系统中超临界流体均质化的方法和系统
公开(公告)号：US20060065189A1
公开(公告)日：2006-03-30
申请号：US10955325
申请日：2004-09-30
申请人： Darko Babic , Gentaro Goshi
发明人： Darko Babic , Gentaro Goshi
IPC分类号： B08B7/04 , C23C14/00 , B08B3/00 , B05C11/00
CPC分类号： H01L21/67034 , B08B7/0021 , H01L21/67017
摘要： A method and system for providing a homogeneous processing environment in a high pressure processing system is described. A high pressure fluid and a process chemistry are mixed in a pre-mixing system prior to exposure with the fluid in a supercritical state of a substrate in the high pressure processing system. For example, the pre-mixing system can include a fluid circulation system configured to bypass the high pressure processing system until the high pressure fluid and the process chemistry are mixed. Alternatively, the pre-mixing system can include a mixing chamber, and optionally include means for agitating the high pressure fluid and process chemistry in the mixing chamber.
摘要翻译：描述了一种用于在高压处理系统中提供均匀处理环境的方法和系统。在高压处理系统中的衬底的超临界状态的流体暴露之前，将高压流体和工艺化学物质混合在预混合系统中。例如，预混合系统可以包括配置成绕过高压处理系统直到高压流体和工艺化学物质混合的流体循环系统。或者，预混合系统可以包括混合室，并且任选地包括用于搅拌高压流体和在混合室中处理化学物质的装置。

8. 发明授权

US07491036B2 Method and system for cooling a pump 有权
标题翻译：冷却泵的方法和系统
公开(公告)号：US07491036B2
公开(公告)日：2009-02-17
申请号：US10987066
申请日：2004-11-12
申请人： Wayne M. Parent , Gentaro Goshi
发明人： Wayne M. Parent , Gentaro Goshi
IPC分类号： F04B39/06 , F04B39/04 , F04F9/00
CPC分类号： F04D29/5873 , F04D7/02 , F04D29/5866 , F04D29/588
摘要： A processing system utilizing a supercritical fluid for treating a substrate is described as having a pump for recirculating the supercritical fluid over the substrate. For various applications in supercritical fluid processing, the fluid temperature for the treatment process can elevate above the temperature acceptable for safe operation of the pump. Therefore, in accordance with one embodiment, a fraction of supercritical fluid from the primary recirculating flow of supercritical fluid over the substrate is circulated from the pressure side of the pump, through a heat exchanger to lower the temperature of the supercritical fluid, through the pump, and it is returned to the primary flow on the suction side of the pump. In accordance with yet another embodiment, supercritical fluid is circulated through the pump from an independent source to vent.
摘要翻译：描述了一种利用超临界流体处理衬底的处理系统，其具有用于将超临界流体再循环到衬底上的泵。对于超临界流体处理中的各种应用，用于处理过程的流体温度可以提升到高于可接受的温度以使泵的安全运行。因此，根据一个实施例，超临界流体在基体上的一次循环流中的一部分超临界流体从泵的压力侧通过热交换器循环，以通过泵降低超临界流体的温度，并返回到泵的吸入侧的主流。根据另一个实施例，超临界流体通过泵从独立的来源循环通气。

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