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1. 发明授权

US07575975B2 Method for forming a planar and vertical semiconductor structure having a strained semiconductor layer 有权
标题翻译：用于形成具有应变半导体层的平面和垂直半导体结构的方法
公开(公告)号：US07575975B2
公开(公告)日：2009-08-18
申请号：US11263120
申请日：2005-10-31
申请人： Voon-Yew Thean , Jian Chen , Bich-Yen Nguyen , Mariam G. Sadaka , Da Zhang
发明人： Voon-Yew Thean , Jian Chen , Bich-Yen Nguyen , Mariam G. Sadaka , Da Zhang
IPC分类号： H01L21/00 , H01L21/84 , H01L21/8234 , H01L27/088
CPC分类号： H01L21/845 , H01L27/1211 , H01L29/7842 , H01L29/785 , Y10S438/938
摘要： Forming a semiconductor structure includes providing a substrate having a strained semiconductor layer overlying an insulating layer, providing a first device region for forming a first plurality of devices having a first conductivity type, providing a second device region for forming a second plurality of devices having a second conductivity type, and thickening the strained semiconductor layer in the second device region so that the strained semiconductor layer in the second device region has less strain that the strained semiconductor layer in the first device region. Alternatively, forming a semiconductor structure includes providing a first region having a first conductivity type, forming an insulating layer overlying at least an active area of the first region, anisotropically etching the insulating layer, and after anisotropically etching the insulating layer, deposing a gate electrode material overlying at least a portion of the insulating layer.
摘要翻译：形成半导体结构包括提供具有覆盖在绝缘层上的应变半导体层的衬底，提供用于形成具有第一导电类型的第一多个器件的第一器件区域，提供第二器件区域，用于形成具有第第二导电类型，并且使第二器件区域中的应变半导体层变厚，使得第二器件区域中的应变半导体层具有较小的第一器件区域中的应变半导体层的应变。或者，形成半导体结构包括提供具有第一导电类型的第一区域，形成覆盖第一区域的至少有源区域的绝缘层，各向异性地蚀刻绝缘层，以及在各向异性蚀刻绝缘层之后，覆盖绝缘层的至少一部分的材料。

2. 发明授权

US07615806B2 Method for forming a semiconductor structure and structure thereof 有权
标题翻译：半导体结构的形成方法及其结构
公开(公告)号：US07615806B2
公开(公告)日：2009-11-10
申请号：US11263119
申请日：2005-10-31
申请人： Voon-Yew Thean , Jian Chen , Bich-Yen Nguyen , Mariam G. Sadaka , Da Zhang
发明人： Voon-Yew Thean , Jian Chen , Bich-Yen Nguyen , Mariam G. Sadaka , Da Zhang
IPC分类号： H01L27/10
CPC分类号： H01L21/823807 , H01L21/823821 , H01L21/82385 , H01L21/845 , H01L27/1211 , H01L29/7842 , H01L29/785
摘要： Forming a semiconductor structure includes providing a substrate having a strained semiconductor layer overlying an insulating layer, providing a first device region for forming a first plurality of devices having a first conductivity type, providing a second device region for forming a second plurality of devices having a second conductivity type, and thickening the strained semiconductor layer in the second device region so that the strained semiconductor layer in the second device region has less strain that the strained semiconductor layer in the first device region. Alternatively, forming a semiconductor structure includes providing a first region having a first conductivity type, forming an insulating layer overlying at least an active area of the first region, anisotropically etching the insulating layer, and after anisotropically etching the insulating layer, deposing a gate electrode material overlying at least a portion of the insulating layer.
摘要翻译：形成半导体结构包括提供具有覆盖在绝缘层上的应变半导体层的衬底，提供用于形成具有第一导电类型的第一多个器件的第一器件区域，提供第二器件区域，用于形成具有第第二导电类型，并且使第二器件区域中的应变半导体层变厚，使得第二器件区域中的应变半导体层具有较小的第一器件区域中的应变半导体层的应变。或者，形成半导体结构包括提供具有第一导电类型的第一区域，形成覆盖第一区域的至少有源区域的绝缘层，各向异性地蚀刻绝缘层，以及在各向异性蚀刻绝缘层之后，覆盖绝缘层的至少一部分的材料。

3. 发明授权

US07067868B2 Double gate device having a heterojunction source/drain and strained channel 有权
公开(公告)号：US07067868B2
公开(公告)日：2006-06-27
申请号：US10952676
申请日：2004-09-29
申请人： Voon-Yew Thean , Mariam G. Sadaka , Ted R. White , Alexander L. Barr , Venkat R. Kolagunta , Bich-Yen Nguyen , Victor H. Vartanian , Da Zhang
发明人： Voon-Yew Thean , Mariam G. Sadaka , Ted R. White , Alexander L. Barr , Venkat R. Kolagunta , Bich-Yen Nguyen , Victor H. Vartanian , Da Zhang
IPC分类号： H01L27/108
CPC分类号： H01L29/785 , H01L29/42392 , H01L29/66628 , H01L29/66742 , H01L29/7842 , H01L29/78621 , H01L29/78648 , H01L29/78687
摘要： A semiconductor device (10) is formed by positioning a gate (22) overlying a semiconductor layer (16) of preferably silicon. A semiconductor material (26) of, for example only, SiGe or Ge, is formed adjacent the gate over the semiconductor layer and over source/drain regions. A thermal process diffuses the stressor material into the semiconductor layer. Lateral diffusion occurs to cause the formation of a strained channel (17) in which a stressor material layer (30) is immediately adjacent the strained channel. Extension implants create source and drain implants from a first portion of the stressor material layer. A second portion of the stressor material layer remains in the channel between the strained channel and the source and drain implants. A heterojunction is therefore formed in the strained channel. In another form, oxidation of the stressor material occurs rather than extension implants to form the strained channel.

4. 发明授权

US07018901B1 Method for forming a semiconductor device having a strained channel and a heterojunction source/drain 失效
标题翻译：用于形成具有应变通道和异质结源极/漏极的半导体器件的方法
公开(公告)号：US07018901B1
公开(公告)日：2006-03-28
申请号：US10954121
申请日：2004-09-29
申请人： Voon-Yew Thean , Mariam G. Sadaka , Ted R. White , Alexander L. Barr , Venkat R. Kolagunta , Bich-Yen Nguyen , Victor H. Vartanian , Da Zhang
发明人： Voon-Yew Thean , Mariam G. Sadaka , Ted R. White , Alexander L. Barr , Venkat R. Kolagunta , Bich-Yen Nguyen , Victor H. Vartanian , Da Zhang
IPC分类号： H01L21/336
CPC分类号： H01L21/2254 , H01L29/665 , H01L29/66787 , H01L29/7848 , H01L29/785 , H01L29/78648
摘要： A semiconductor device (10) is formed by positioning a gate (22) overlying a semiconductor layer (16) of preferably silicon. A semiconductor material (26) of, for example only, SiGe or Ge, is formed adjacent the gate over the semiconductor layer and over source/drain regions. A thermal process diffuses the stressor material into the semiconductor layer. Lateral diffusion occurs to cause the formation of a strained channel (17) in which a stressor material layer (30) is immediately adjacent the strained channel. Extension implants create source and drain implants from a first portion of the stressor material layer. A second portion of the stressor material layer remains in the channel between the strained channel and the source and drain implants. A heterojunction is therefore formed in the strained channel. In another form, oxidation of the stressor material occurs rather than extension implants to form the strained channel.
摘要翻译：半导体器件（10）通过将覆盖在优选硅的半导体层（16）上的栅极（22）定位而形成。例如仅SiGe或Ge的半导体材料（26）形成在半导体层上方的栅极和源极/漏极区域附近。热处理将应力源材料扩散到半导体层。发生横向扩散以形成应变通道（17），其中应力材料层（30）紧邻应变通道。延伸植入物从应力源材料层的第一部分产生源和漏植入物。应力源材料层的第二部分保留在应变通道和源极和漏极植入物之间的通道中。因此，在应变通道中形成异质结。在另一种形式中，发生应力源材料的氧化而不是延伸植入物以形成应变通道。

5. 发明授权

US07265004B2 Electronic devices including a semiconductor layer and a process for forming the same 有权
标题翻译：包括半导体层的电子器件及其形成方法
公开(公告)号：US07265004B2
公开(公告)日：2007-09-04
申请号：US11273092
申请日：2005-11-14
申请人： Voon-Yew Thean , Brian J. Goolsby , Linda B. McCormick , Bich-Yen Nguyen , Colita M. Parker , Mariam G. Sadaka , Victor H. Vartanian , Ted R. White , Melissa O. Zavala
发明人： Voon-Yew Thean , Brian J. Goolsby , Linda B. McCormick , Bich-Yen Nguyen , Colita M. Parker , Mariam G. Sadaka , Victor H. Vartanian , Ted R. White , Melissa O. Zavala
IPC分类号： H01L21/84
CPC分类号： H01L21/84 , H01L21/823807 , H01L21/823842 , H01L21/823857 , H01L21/823878 , H01L27/1203
摘要： An electronic device can include a first semiconductor portion and a second semiconductor portion, wherein the compositions of the first and second semiconductor portions are different from each other. In one embodiment, the first and second semiconductor portions can have different stresses compared to each other. In one embodiment, the electronic device may be formed by forming an oxidation mask over the first semiconductor portion. A second semiconductor layer can be formed over the second semiconductor portion of the first semiconductor layer and have a different composition compared to the first semiconductor layer. An oxidation can be performed, and a concentration of a semiconductor element (e.g., germanium) within the second portion of the first semiconductor layer can be increased. In another embodiment, a selective condensation may be performed, and a field isolation region can be formed between the first and second portions of the first semiconductor layer.
摘要翻译：电子设备可以包括第一半导体部分和第二半导体部分，其中第一半导体部分和第二半导体部分的组成彼此不同。在一个实施例中，第一和第二半导体部分可以具有彼此不同的应力。在一个实施例中，可以通过在第一半导体部分上形成氧化掩模来形成电子器件。可以在第一半导体层的第二半导体部分上形成第二半导体层，并且与第一半导体层相比具有不同的组成。可以进行氧化，并且可以增加第一半导体层的第二部分内的半导体元素（例如锗）的浓度。在另一个实施例中，可以执行选择性冷凝，并且可以在第一半导体层的第一和第二部分之间形成场隔离区。

6. 发明授权

US07226833B2 Semiconductor device structure and method therefor 有权
标题翻译：半导体器件结构及其方法
公开(公告)号：US07226833B2
公开(公告)日：2007-06-05
申请号：US10977423
申请日：2004-10-29
申请人： Ted R. White , Alexander L. Barr , Bich-Yen Nguyen , Marius K. Orlowski , Mariam G. Sadaka , Voon-Yew Thean
发明人： Ted R. White , Alexander L. Barr , Bich-Yen Nguyen , Marius K. Orlowski , Mariam G. Sadaka , Voon-Yew Thean
IPC分类号： H01L21/8234
CPC分类号： H01L29/78696 , H01L21/84 , H01L27/1203 , H01L27/1207 , H01L29/045 , H01L29/66772
摘要： Two different transistors types are made on different crystal orientations in which both are formed on SOI. A substrate has an underlying semiconductor layer of one of the crystal orientations and an overlying layer of the other crystal orientation. The underlying layer has a portion exposed on which is epitaxially grown an oxygen-doped semiconductor layer that maintains the crystalline structure of the underlying semiconductor layer. A semiconductor layer is then epitaxially grown on the oxygen-doped semiconductor layer. An oxidation step at elevated temperatures causes the oxide-doped region to separate into oxide and semiconductor regions. The oxide region is then used as an insulation layer in an SOI structure and the overlying semiconductor layer that is left is of the same crystal orientation as the underlying semiconductor layer. Transistors of the different types are formed on the different resulting crystal orientations.
摘要翻译：在不同的晶体取向上制作了两种不同的晶体管类型，其中两者都形成在SOI上。衬底具有晶体取向之一的底层半导体层和另一晶体取向的上覆层。底层具有暴露在其上的部分外延生长保持下面的半导体层的晶体结构的氧掺杂半导体层。然后在氧掺杂半导体层上外延生长半导体层。在高温下的氧化步骤使得氧化物掺杂区域分离成氧化物和半导体区域。然后将氧化物区域用作SOI结构中的绝缘层，并且剩下的上覆半导体层具有与下面的半导体层相同的晶体取向。不同类型的晶体管形成在不同的结晶取向上。

7. 发明授权

US07056778B2 Semiconductor layer formation 失效
标题翻译：半导体层形成
公开(公告)号：US07056778B2
公开(公告)日：2006-06-06
申请号：US10919784
申请日：2004-08-17
申请人： Chun-Li Liu , Mariam G. Sadaka , Alexander L. Barr , Bich-Yen Nguyen , Voon-Yew Thean , Shawn G. Thomas , Ted R. White , Qianghua Xie
发明人： Chun-Li Liu , Mariam G. Sadaka , Alexander L. Barr , Bich-Yen Nguyen , Voon-Yew Thean , Shawn G. Thomas , Ted R. White , Qianghua Xie
IPC分类号： H01L21/338
CPC分类号： H01L29/161 , H01L21/26506 , H01L21/823807 , H01L21/823878 , H01L21/84 , H01L29/1054 , Y10S438/933
摘要： A process for forming strained semiconductor layers. The process include flowing a chlorine bearing gas (e.g. hydrogen chloride, chlorine, carbon tetrachloride, and trichloroethane) over the wafer while heating the wafer. In one example, the chorine bearing gas is flowed during a condensation process on a semiconductor layer that is used as a template layer for forming a strain semiconductor layer (e.g. strain silicon). In other examples, the chlorine bearing gas is flowed during a post bake of the wafer after the condensation operation.
摘要翻译：一种形成应变半导体层的工艺。该方法包括在加热晶片的同时使含氯气体（例如氯化氢，氯气，四氯化碳和三氯乙烷）流过晶片。在一个实例中，在用作形成应变半导体层（例如应变硅）的模板层的半导体层上的冷凝过程中，含有轴承气体流动。在其他实例中，在冷凝操作之后，在晶片的后烘烤期间，含氯气体流动。

8. 发明授权

US07821067B2 Electronic devices including a semiconductor layer 有权
标题翻译：包括半导体层的电子器件
公开(公告)号：US07821067B2
公开(公告)日：2010-10-26
申请号：US11836844
申请日：2007-08-10
申请人： Voon-Yew Thean , Brian J. Goolsby , Linda B. McCormick , Bich-Yen Nguyen , Colita M. Parker , Mariam G. Sadaka , Victor H. Vartanian , Ted R. White , Melissa O. Zavala
发明人： Voon-Yew Thean , Brian J. Goolsby , Linda B. McCormick , Bich-Yen Nguyen , Colita M. Parker , Mariam G. Sadaka , Victor H. Vartanian , Ted R. White , Melissa O. Zavala
IPC分类号： H01L21/84
CPC分类号： H01L21/84 , H01L21/823807 , H01L21/823842 , H01L21/823857 , H01L21/823878 , H01L27/1203
摘要： An electronic device can include a first semiconductor portion and a second semiconductor portion, wherein the compositions of the first and second semiconductor portions are different from each other. In one embodiment, the first and second semiconductor portions can have different stresses compared to each other. In one embodiment, the electronic device may be formed by forming an oxidation mask over the first semiconductor portion. A second semiconductor layer can be formed over the second semiconductor portion of the first semiconductor layer and have a different composition compared to the first semiconductor layer. An oxidation can be performed, and a concentration of a semiconductor element (e.g., germanium) within the second portion of the first semiconductor layer can be increased. In another embodiment, a selective condensation may be performed, and a field isolation region can be formed between the first and second portions of the first semiconductor layer.
摘要翻译：电子设备可以包括第一半导体部分和第二半导体部分，其中第一半导体部分和第二半导体部分的组成彼此不同。在一个实施例中，第一和第二半导体部分可以具有彼此不同的应力。在一个实施例中，可以通过在第一半导体部分上形成氧化掩模来形成电子器件。可以在第一半导体层的第二半导体部分上形成第二半导体层，并且与第一半导体层相比具有不同的组成。可以进行氧化，并且可以增加第一半导体层的第二部分内的半导体元素（例如锗）的浓度。在另一个实施例中，可以执行选择性冷凝，并且可以在第一半导体层的第一和第二部分之间形成场隔离区。

9. 发明授权

US07700420B2 Integrated circuit with different channel materials for P and N channel transistors and method therefor 有权
标题翻译：用于P和N沟道晶体管的不同沟道材料的集成电路及其方法
公开(公告)号：US07700420B2
公开(公告)日：2010-04-20
申请号：US11402395
申请日：2006-04-12
申请人： Voon-Yew Thean , Bich-Yen Nguyen , Mariam G. Sadaka , Victor H. Vartanian , Ted R. White
发明人： Voon-Yew Thean , Bich-Yen Nguyen , Mariam G. Sadaka , Victor H. Vartanian , Ted R. White
IPC分类号： H01L21/00 , H01L21/84
CPC分类号： H01L21/823807 , H01L21/823878 , H01L21/8258 , H01L27/1203
摘要： A substrate includes a first region and a second region. The first region comprises a III-nitride layer, and the second region comprises a first semiconductor layer. A first transistor (such as an n-type transistor) is formed in and on the III-nitride layer, and a second transistor (such as a p-type transistor) is formed in and on the first semiconductor layer. The III-nitride layer may be indium nitride. In the first region, the substrate may include a second semiconductor layer, a graded transition layer over the second semiconductor layer, and a buffer layer over the transition layer, where the III-nitride layer is over the buffer layer. In the second region, the substrate may include the second semiconductor layer and an insulating layer over the second semiconductor layer, where the first semiconductor layer is over the insulating layer.
摘要翻译：衬底包括第一区域和第二区域。第一区域包括III族氮化物层，第二区域包括第一半导体层。在III族氮化物层上形成第一晶体管（例如n型晶体管），并且在第一半导体层上形成第二晶体管（例如p型晶体管）。 III族氮化物层可以是氮化铟。在第一区域中，衬底可以包括第二半导体层，在第二半导体层上的渐变过渡层，以及过渡层上的缓冲层，其中III族氮化物层在缓冲层之上。在第二区域中，衬底可以包括第二半导体层和在第二半导体层上的绝缘层，其中第一半导体层在绝缘层之上。

10. 发明授权

US07419866B2 Process of forming an electronic device including a semiconductor island over an insulating layer 有权
标题翻译：在绝缘层上形成包括半导体岛的电子器件的工艺
公开(公告)号：US07419866B2
公开(公告)日：2008-09-02
申请号：US11375893
申请日：2006-03-15
申请人： Mariam G. Sadaka , Bich-Yen Nguyen , Voon-Yew Thean
发明人： Mariam G. Sadaka , Bich-Yen Nguyen , Voon-Yew Thean
IPC分类号： H01L21/8238
CPC分类号： H01L21/32 , H01L21/02238 , H01L21/02255 , H01L21/31662 , H01L21/84
摘要： A process of forming an electronic device can include forming a patterned oxidation-resistant layer over a semiconductor layer that overlies a substrate, and patterning the semiconductor layer to form a semiconductor island. The semiconductor island includes a first surface and a second surface opposite the first surface, and the first surface lies closer to the substrate, as compared to the second surface. The process can also include forming an oxidation-resistant material along a side of the semiconductor island or selectively depositing a semiconductor material along a side of the semiconductor island. The process can further include exposing the patterned oxidation-resistant layer and the semiconductor island to an oxygen-containing ambient, wherein a first portion of the semiconductor island along the first surface is oxidized during exposing the patterned oxidation-resistant layer, the semiconductor island, and the oxidation-resistant material to an oxygen-containing ambient.
摘要翻译：形成电子器件的方法可以包括在覆盖在衬底上的半导体层上形成图案化的抗氧化层，并且图案化半导体层以形成半导体岛。半导体岛包括与第一表面相对的第一表面和第二表面，并且第一表面与第二表面相比更靠近基底。该方法还可以包括沿着半导体岛的一侧形成耐氧化材料或者沿半导体岛的一侧选择性地沉积半导体材料。该方法还可以包括将图案化的抗氧化层和半导体岛暴露于含氧环境中，其中沿着第一表面的半导体岛的第一部分在曝光图案化的抗氧化层，半导体岛，并将抗氧化材料转化为含氧环境。

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