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    • 4. 发明授权
    • Foil pressure sensor which can be tested
    • 箔片压力传感器可以测试
    • US06505521B1
    • 2003-01-14
    • US08924941
    • 1997-09-08
    • Volker PetriReinhold MickelerMichael MeyerBogdan SerbanMichel Witte
    • Volker PetriReinhold MickelerMichael MeyerBogdan SerbanMichel Witte
    • G01D700
    • G01L1/20
    • The invention provides a testable foil pressure sensor constructed of two carrier foils which are laminated together. The first carrier foil is coated with a semiconductor material, while the second carrier foil has two adjacent strip conductors which can each be bonded on both ends and which, within spatially bounded areas which form sensor elements, have “comb” structures, with individual fingers which mesh with one another in a no-contact manner. According to the invention, within a sensor element, at least one of the contact fingers of the comb structure is formed by a strip conductor loop and at least one other contact finger is formed by a stub line branching off a strip conductor.
    • 本发明提供了由两个层压在一起的载体箔构成的可测试箔压力传感器。 第一载体箔被半导体材料涂覆,而第二载体箔具有两个相邻的带状导体,每个导体可以分别结合在两端,并且在形成传感器元件的空间有限的区域内具有单独的手指 其以不接触的方式彼此啮合。 根据本发明,在传感器元件内,梳状结构的至少一个接触指状物由带状导体环形成,并且至少一个另外的接触指状物由分支出带状导体的短截线形成。