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    • 1. 发明授权
    • Surface-micromachined out-of-plane tunable optical filters
    • 表面微机械加工的平面外可调滤光片
    • US06351577B1
    • 2002-02-26
    • US09211185
    • 1998-12-14
    • Vladimir Anatolyevich AksyukDavid John BishopAnat Sneh
    • Vladimir Anatolyevich AksyukDavid John BishopAnat Sneh
    • G02B612
    • G02B6/29358G02B6/122G02B6/29395G02B26/001G02B2006/12104
    • The invention provides tunable optical filters which incorporate a surface-micromachined out-of-plane plate having a moveable membrane with a high reflective (HR) coated mirror. The mirror defines one side of a Fabry-Perot (FP) filter cavity and is movable in a direction along an axis of the filter cavity. The other side of the filter cavity is defined by a second HR-coated mirror. In one illustrative embodiment, a first plate is formed on a substrate, and then subsequently released from the substrate and secured in a plane orthogonal to the substrate. The first HR-coated mirror is formed as part of a movable membrane supported in an opening through the first plate. The second mirror is formed on a second plate secured in another plane orthogonal to the plane of the substrate, such that the filter cavity is defined horizontally between the first and second mirrors. In another embodiment, the second mirror is formed on an endface of an external fiber, such that light from the fiber can pass from the second mirror through an opening in the second plate to the first mirror. In another possible embodiment, the second plate is eliminated and the second mirror is formed on the substrate. The first plate is then arranged over the second mirror, in a plane parallel to the substrate, and separated from the substrate by spacers, such that the filter cavity is defined vertically.
    • 本发明提供了可调谐光学滤波器,其结合了具有高反射(HR)涂覆反射镜的可移动膜的表面微加工的平面外板。 反射镜定义了法布里 - 珀罗(FP)过滤器腔的一侧,并且可沿着过滤腔的轴线的方向移动。 过滤腔的另一侧由第二HR涂层镜定义。 在一个说明性实施例中,第一板形成在衬底上,然后随后从衬底释放并固定在与衬底正交的平面中。 第一HR涂覆镜形成为支撑在通过第一板的开口中的可移动膜的一部分。 第二反射镜形成在固定在与基板的平面正交的另一平面中的第二板上,使得过滤腔在水平地限定在第一和第二反射镜之间。 在另一个实施例中,第二反射镜形成在外部光纤的端面上,使得来自光纤的光可以从第二反射镜通过第二板中的开口传递到第一反射镜。 在另一个可能的实施例中,第二板被去除并且第二反射镜形成在基板上。 然后将第一板布置在平行于基板的平面中的第二反射镜上,并且通过间隔件与基板分离,使得过滤腔垂直地限定。
    • 3. 发明授权
    • Micromachined tunable optical filter with controllable finesse and passband wavelength position
    • 微机械可调光滤波器,具有可控的精细度和通带波长位置
    • US06275324B1
    • 2001-08-14
    • US09211184
    • 1998-12-14
    • Anat Sneh
    • Anat Sneh
    • G02B2700
    • G02B26/0841G02B26/001G02B26/02
    • The invention provides tunable optical filters in which operating characteristics such as initial cavity length and mirror tilt, affecting passband wavelength position and filter finesse, respectively, can be controlled independently of membrane tuning bias. An illustrative embodiment incorporates a surface-micromachined plate with an opening in which a moveable frame is supported by, e.g., flexure bars or support arms. A moveable membrane with a high reflective (HR) coated mirror is supported in an opening in the moveable frame. The mirror defines one side of a Fabry-Perot (FP) filter cavity and is movable in a direction along an axis of the filter cavity. The other side of the filter cavity is defined by a second HR-coated mirror. The moveable frame has a number of electrodes arranged on a surface thereof, such that an operating characteristic of the filter, e.g., the cavity length affecting the passband wavelength position or the mirror tilt affecting the filter finesse, can be adjusted by applying signals to at least a subset of the electrodes. The use of a separate set of electrodes for controlling the moveable frame permits the operating characteristic to be adjusted independently of a tuning bias applied to one or more additional electrodes associated with the moveable membrane.
    • 本发明提供了可调谐的光学滤波器,其中分别影响通带波长位置和滤波器精细度的操作特性,例如初始腔长度和镜面倾斜度,可以独立于膜调谐偏置来控制。 示例性实施例包括具有开口的表面微加工板,其中可移动框架由例如挠曲杆或支撑臂支撑。 具有高反射(HR)涂层的反射镜的可移动膜被支撑在可移动框架的开口中。 反射镜定义了法布里 - 珀罗(FP)过滤器腔的一侧,并且可沿着过滤腔的轴线的方向移动。 过滤腔的另一侧由第二HR涂层镜定义。 可移动框架具有布置在其表面上的多个电极,使得可以通过将信号施加到位置来调整滤波器的操作特性,例如影响通带波长位置的腔长度或影响滤波器精细度的镜面倾斜度 至少一部分电极。 使用单独的一组电极来控制可移动框架允许独立于施加到与可移动膜相关联的一个或多个附加电极的调谐偏压来调节操作特性。
    • 4. 发明授权
    • Crosstalk-reduced integrated digital optical switch
    • US5889898A
    • 1999-03-30
    • US799637
    • 1997-02-10
    • Uziel KorenAnat SnehJane Elisa Zucker
    • Uziel KorenAnat SnehJane Elisa Zucker
    • G02F1/015G02F1/313H01S5/50G02B6/26
    • G02F1/3133G02F1/3138G02F2001/0152G02F2001/0153G02F2001/0157H01S5/50
    • Methods and apparatus for performing optical signal switching or other optical routing functions in an optical device or system, in which crosstalk induced by modal interference is suppressed by providing appropriate loss, gain and/or refractive index changes in different parts of a switch structure. An exemplary optical signal switch includes first and second branches each having a refraction-controlled section and an absorption-controlled section. An optical signal path over which an optical signal propagates in passing through the switch is selected to include a portion of at least one of the first and second branches, such that one of the first and second branches is a selected branch and the other branch is a non-selected branch. The refraction-controlled section of the selected branch is configured in a high effective refractive index state which allows the optical signal to propagate along at least a portion of the selected branch, while the refraction-controlled section of the non-selected branch is configured in a low effective refractive index state. The absorption-controlled section of the selected branch is configured in a low absorption state, while the absorption-controlled section of the non-selected branch is configured in a high absorption state to reduce crosstalk within the optical switch. An effective refractive index in a given refraction-controlled section may be provided using electro-refractive techniques such as the quantum-confined Stark effect (QCSE) or the Franz-Keldysh effect, or by carrier-induced effects such as carrier injection or carrier depletion. An absorption change in a given absorption-controlled section may be provided using electro-absorptive techniques or a gain-switching technique. The switch may be configured as a Y-branch switch, a directional coupler, or in other suitable configurations, and may be interconnected with other similar switches to construct 1.times.N, N.times.1, N.times.M and N.times.N switch arrays.