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1. 发明授权

US06333508B1 Illumination system for electron beam lithography tool 有权
标题翻译：电子束光刻工具照明系统
公开(公告)号：US06333508B1
公开(公告)日：2001-12-25
申请号：US09580530
申请日：2000-05-30
申请人： Victor Katsap , Pieter Kruit , Daniel Moonen , Warren K Waskiewicz
发明人： Victor Katsap , Pieter Kruit , Daniel Moonen , Warren K Waskiewicz
IPC分类号： H01J37302
CPC分类号： B82Y10/00 , B82Y40/00 , H01J3/18 , H01J37/063 , H01J37/12 , H01J37/3174 , H01J2237/065 , H01J2237/12 , H01J2237/1205 , H01J2237/3175 , H01J2237/31774
摘要： A method and apparatus for controlling beam emittance by placing a quadrupole lens array in a drift space of an illumination system component. The illumination system component may be an electron gun or a liner tube or drift tube, attachable to an electron gun. The quadrupole lens array may be three or more mesh grids or a combination of grids and continuous foils. The quadrupole lens array forms a multitude of microlenses resembling an optical “fly's eye” lens. The quadrupole lens array splits an incoming solid electron beam into a multitude of subbeams, such that the outgoing beam emittance is different from the incoming beam emittance, while beam total current remains unchanged. The method and apparatus permit independent control of beam current and beam emittance, which is beneficial in a SCALPEL illumination system.
摘要翻译：一种通过将四极透镜阵列放置在照明系统部件的漂移空间中来控制光束发射的方法和装置。照明系统部件可以是可附接到电子枪的电子枪或衬管或漂移管。四极透镜阵列可以是三个或更多个网格或网格和连续箔片的组合。四极透镜阵列形成大量类似于光学“飞眼”透镜的微透镜。四极透镜阵列将输入的固体电子束分裂成多个子束，使得输出光束发射不同于入射光束发射，而光束总电流保持不变。该方法和装置允许对束电流和光束发射的独立控制，这在SCALPEL照明系统中是有益的。

2. 发明授权

US07345290B2 Lens array for electron beam lithography tool 有权
标题翻译：用于电子束光刻工具的透镜阵列
公开(公告)号：US07345290B2
公开(公告)日：2008-03-18
申请号：US09414004
申请日：1999-10-07
申请人： Victor Katsap , Pieter Kruit , Daniel Moonen , Warren Kazmir Waskiewicz
发明人： Victor Katsap , Pieter Kruit , Daniel Moonen , Warren Kazmir Waskiewicz
IPC分类号： G21K5/10
CPC分类号： H01J37/065 , H01J37/12 , H01J2237/1205 , H01J2237/31774
摘要： A method and apparatus for controlling beam emittance by placing a lens array in a drift space of an illumination system component. The illumination system component may be an electron gun or a liner tube or drift tube, attachable to an electron gun. The lens array may be one or more mesh grids or a combination of grids and continuous foils. The lens array forms a multitude of microlenses resembling an optical “fly's eye” lens. The lens array splits an incoming solid electron beam into a multitude of subbeams, such that the outgoing beam emittance is different from the incoming beam emittance, while beam total current remains unchanged. The method and apparatus permit independent control of beam current and beam emittance, which is beneficial in a SCALPEL illumination system.
摘要翻译：一种通过将透镜阵列放置在照明系统部件的漂移空间中来控制光束发射的方法和装置。照明系统部件可以是可附接到电子枪的电子枪或衬管或漂移管。透镜阵列可以是一个或多个网状网格或网格和连续箔片的组合。透镜阵列形成大量类似于光学“飞眼”透镜的微透镜。透镜阵列将输入的固体电子束分裂成多个子束，使得输出光束发射不同于入射光束发射，而光束总电流保持不变。该方法和装置允许对束电流和光束发射的独立控制，这在SCALPEL照明系统中是有益的。

3. 发明申请

US20060124858A1 IMAGING DEVICE COMPRISING OPTICALLY COUPLED FIBER OPTIC PLATE ASSEMBLY 有权
标题翻译：包含光耦合光纤板组件的成像装置
公开(公告)号：US20060124858A1
公开(公告)日：2006-06-15
申请号：US11010639
申请日：2004-12-13
申请人： Daniel Moonen
发明人： Daniel Moonen
IPC分类号： H01J37/244 , H01J37/26
CPC分类号： H01J29/892 , H01J37/224 , H01J37/26 , H01J2237/057 , H01J2237/2445
摘要： A fiber optic plate assembly is provided for transferring optical signals to a detector or other optical element within an imaging device or imaging system. The fiber optic plate assembly comprises first and second fiber optic plates coupled via an optical coupling gel configured to permit separation of the two plates from each other to permit repair or replacement of one of the plates. Alternatively, the imaging device may comprise a single fiber optic plate coupled directly to an optical detector.
摘要翻译：提供了一种用于将光学信号传送到成像装置或成像系统内的检测器或其它光学元件的光纤板组件。光纤板组件包括通过光学耦合凝胶耦合的第一和第二光纤板，其配置成允许将两个板彼此分开以允许修复或更换其中一个板。或者，成像装置可以包括直接耦合到光学检测器的单个光纤板。

4. 发明授权

US07964846B2 Retractable lens-coupled electron microscope camera with image sensor in electron microscope vacuum chamber 有权
标题翻译：在电子显微镜真空室中具有图像传感器的伸缩透镜耦合电子显微镜相机
公开(公告)号：US07964846B2
公开(公告)日：2011-06-21
申请号：US12533346
申请日：2009-07-31
申请人： Paul Mooney , Daniel Moonen
发明人： Paul Mooney , Daniel Moonen
IPC分类号： G01N23/00
CPC分类号： H01J37/224 , H01J37/16 , H01J37/244 , H01J2237/18 , H01J2237/2443 , H01J2237/2445
摘要： A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.
摘要翻译：公开了一种用于电子显微镜的镜头相机。相机包括CCD，闪烁体，至少一个透镜和反射镜，使得至少CCD和闪烁体容纳在仅具有一个真空室的电子显微镜的真空室中。在另一个实施例中，CCD，闪烁体，透镜和反射镜被固定到固定的机械连杆上，使得CCD，闪烁体，透镜和反射镜在照相机缩回时一起移动。

5. 发明授权

US07091492B2 Imaging device comprising optically coupled fiber optic plate assembly 有权
标题翻译：成像装置包括光学耦合的光纤板组件
公开(公告)号：US07091492B2
公开(公告)日：2006-08-15
申请号：US11010639
申请日：2004-12-13
申请人： Daniel Moonen
发明人： Daniel Moonen
IPC分类号： H01J37/244 , H01J37/18
CPC分类号： H01J29/892 , H01J37/224 , H01J37/26 , H01J2237/057 , H01J2237/2445
摘要： A fiber optic plate assembly is provided for transferring optical signals to a detector or other optical element within an imaging device or imaging system. The fiber optic plate assembly comprises first and second fiber optic plates coupled via an optical coupling gel configured to permit separation of the two plates from each other to permit repair or replacement of one of the plates. Alternatively, the imaging device may comprise a single fiber optic plate coupled directly to an optical detector.
摘要翻译：提供了一种用于将光学信号传送到成像装置或成像系统内的检测器或其它光学元件的光纤板组件。光纤板组件包括通过光学耦合凝胶耦合的第一和第二光纤板，其配置成允许将两个板彼此分开以允许修复或更换其中一个板。或者，成像装置可以包括直接耦合到光学检测器的单个光纤板。

6. 发明申请

US20100032576A1 RETRACTABLE LENS-COUPLED ELECTRON MICROSCOPE CAMERA WITH IMAGE SENSOR IN ELECTRON MICROSCOPE VACUUM CHAMBER 有权
标题翻译：电子显微镜真空室中的图像传感器的可回收镜头电子显微镜摄像机
公开(公告)号：US20100032576A1
公开(公告)日：2010-02-11
申请号：US12533346
申请日：2009-07-31
申请人： Paul Mooney , Daniel Moonen
发明人： Paul Mooney , Daniel Moonen
IPC分类号： G01T1/20
CPC分类号： H01J37/224 , H01J37/16 , H01J37/244 , H01J2237/18 , H01J2237/2443 , H01J2237/2445
摘要： A lens-coupled camera for an electron microscope is disclosed. The camera includes a CCD, a scintillator, at least one lens, and a mirror, such that at least the CCD and scintillator are housed in the vacuum chamber of the electron microscope, which has only one vacuum chamber. In a further embodiment, the CCD, scintillator, lens and mirror are affixed to a fixed mechanical linkage such that the CCD, scintillator, lens and mirror move together when the camera is retracted.
摘要翻译：公开了一种用于电子显微镜的镜头相机。相机包括CCD，闪烁体，至少一个透镜和反射镜，使得至少CCD和闪烁体容纳在仅具有一个真空室的电子显微镜的真空室中。在另一个实施例中，CCD，闪烁体，透镜和反射镜被固定到固定的机械连杆上，使得CCD，闪烁体，透镜和反射镜在照相机缩回时一起移动。

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