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1. 发明专利

JP2014177682A Manufacturing method of vapor deposition mask 有权
标题翻译：蒸汽沉积掩模的制造方法
公开(公告)号：JP2014177682A
公开(公告)日：2014-09-25
申请号：JP2013053207
申请日：2013-03-15
申请人： V Technology Co Ltd , 株式会社ブイ・テクノロジー
发明人： SAITO YUJI , KUDO SHUJI , KOSUGE TAKAYUKI , MIZUMURA MICHINOBU
IPC分类号： C23C14/24
CPC分类号： B32B38/10 , B32B15/00 , B32B2310/0843 , C23C14/042
摘要： PROBLEM TO BE SOLVED: To apply equal tension over the entire surface of a mask sheet and fix the sheet to a frame.SOLUTION: There is provided a manufacturing method of a vapor deposition mask having a structure that a metal mask sheet 4 on which a plurality of opening patterns are formed is stretched and fixed to a frame-shaped metal frame 7, in which a first step of adhering a peripheral part of the metal mask sheet 4 to a synthetic fiber mesh 1 to which fixed tension is applied; a second step of cutting off a portion of the mesh 1 corresponding to a vapor deposition effective region having an enough size that includes the plurality of opening patterns of the metal mask sheet 4; a third step of bonding and fixing the frame 7 to the peripheral part of the metal mask sheet 4 from the opposite side of the mesh 1; and a fourth step of removing the mesh 1 from the metal mask sheet 4 are performed.
摘要翻译：要解决的问题：在掩模片的整个表面上施加相等的张力并将片材固定到框架上。解决方案：提供一种蒸镀掩模的制造方法，其具有金属掩模片4，其上形成有形成有多个开口图案被拉伸并固定在框状的金属框架7上，其中将金属掩模片4的周边部分粘附到固定张力的合成纤维网1上的第一步骤; 第二步骤，切除与具有包括金属掩模片4的多个开口图案的足够尺寸的蒸镀有效区域对应的网孔1的一部分; 将框架7从网1的相对侧接合并固定到金属掩模片4的周边部分的第三步骤; 并且执行从金属掩模片4去除网格1的第四步骤。

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