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    • 1. 发明专利
    • GATE VALVE
    • JPH11315940A
    • 1999-11-16
    • JP14052898
    • 1998-05-07
    • ULVAC CORP
    • MATSUMOTO TAISUKE
    • F16K3/18
    • PROBLEM TO BE SOLVED: To eliminate the need for replacement of a seal ring for a long period by gradually enlarging a thickness from a part farthest from a supporting point to a nearest part in a first case, and gradually enlarging the thickness from the part nearest from the supporting point to a farthest part in a second case. SOLUTION: In a pressure contact position where a valve element 10 is turningly moved from an opposing position, O-rings whose thickness are different from each other are used corresponding to an un-uniform clearance generated between the valve element 10 and a valve seat 3, and thereby, the O-rings are brought into pressure contact with each other uniformly between the valve element 10 and the valve seat 3 so as to uniform a breaking degree. It is thus possible to prevent increase of a rate of gas which is bypassed the O-rings from a low vacuum pressure side to a high vacuum pressure side, and it is also possible to prevent deterioration of vacuum back ground of a high vacuum side. The valve element 10 is arranged outside a vacuum region of the driving mechanism for opening and closing the valve element 10 so as to prevent contamination by particles generated by means of rotating or sliding.
    • 5. 发明专利
    • STRUCTURAL PARTS FOR COATING FORMING DEVICE
    • JPH11124661A
    • 1999-05-11
    • JP29942097
    • 1997-10-16
    • ULVAC CORP
    • MATSUMOTO TAISUKE
    • C23C14/00C23C4/08C23C16/44
    • PROBLEM TO BE SOLVED: To provide structural parts for a coating forming device which does not fall apart even if a coating forming material to be adhered grows and the coating thickness increases in the process of coating formation, thus free from the generation of particles and capable of easily falling apart the adhered coating forming material at the time of maintenance or the like in structural parts set to the inside of a coating forming device. SOLUTION: In one side of a sheet of an aluminum alloy, grooves with 1 mm width are digged at 2 mm pitch in both longitudinal and horizontal directions, the corners of ruggedness formed with the depth as 2 mm are rounded to form into a base metal 1. The rugged faces are thermally sprayed with copper more easily dissoluble into sulfuric acid compared to the base metal 1 to form lower layer easily dissoluble metallic coating 2, and the surface is thermally sprayed with SUS420J2 to form porous metallic coating 3, which is formed into structural parts for a coating forming device. An adhered coating forming material 5 does not fall apart at the time of coating formation, and, at the time of maintenance, by its immersion into sulfuric acid, the sulfuric acid, via the porous metallic coating 3, infiltrates into and dissolves the lower layer easily dissoluble metallic coating 2, by which the adhered coating forming material 5 easily falls apart.
    • 9. 发明专利
    • VACUUM BEARING
    • JPH10115321A
    • 1998-05-06
    • JP28932996
    • 1996-10-11
    • ULVAC CORP
    • MATSUMOTO TAISUKE
    • F16C33/37F16C33/66
    • PROBLEM TO BE SOLVED: To provide a vacuum bearing which is hard to produce dust and does not increase rotational torque and can be stably used for a long time even if it is used under high vacuum and high temperature. SOLUTION: In a vacuum cross bearing 20 comprising an inner ring 21, outer rings 22A, 22B, rollers 23 disposed annularly with their axes alternately intersecting at right angle and sandwiched by the outer rings 22A, 22B, and lubricant rollers 24 inserted between every two rollers 23, the inserted lubricant roller 24 is made by vacuum-impregnating a sintered body made by mixing metal tungsten powder 50 volume % as matrix with tungsten disulfide powder 50 volume % as solid lubricant and by vacuum-sintering them with fluoride-base high vacuum lubricant oil comprising perfluoro-alkyl-polyether and having a vapor pressure of not more than 10 Pa.