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1. 发明专利

JP2014115267A Dynamic quantity sensor and dynamic quantity sensor system 有权
标题翻译：动态数量传感器和动态数量传感器系统
公开(公告)号：JP2014115267A
公开(公告)日：2014-06-26
申请号：JP2013109119
申请日：2013-05-23
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所 , Toyota Motor Corp , トヨタ自動車株式会社 , Tohoku Univ , 国立大学法人東北大学
发明人： HATA YOSHIYUKI , NONOMURA YUTAKA , FUJIYOSHI MOTOHIRO , FUNAHASHI HIROFUMI , AKASHI TERUHISA , OMURA YOSHITERU , NAKAYAMA TAKAHIRO , YAMAGUCHI TAKATADA , YAMADA HITOSHI , TANAKA HIDEJI , ESASHI MASAKI , MUROYAMA MASANORI , MAKIHATA MITSUTOSHI
IPC分类号： G01L5/16 , G01L1/14 , G01P15/125 , G01P15/18
CPC分类号： G01L1/144 , G01L1/148 , G01P15/125 , G01P15/18 , G01P2015/084
摘要： PROBLEM TO BE SOLVED: To provide a dynamic quantity sensor and a dynamic quantity sensor system capable of accurately detecting the dynamic quantity.SOLUTION: A force sensor 100 comprises: a force receiver 40 for receiving force in a Z direction and in an X direction; a seesaw part 30A rotating in a first rotation direction according to the dynamic quantity in the Z direction that the force receiver 40 receives, and rotating in the first rotation direction according to the dynamic quantity in the X direction that the force receiver 40 receives; and a seesaw part 30C rotating in a second rotation direction according to the dynamic quantity in the Z direction that the force receiver 40 receives, and rotating in the opposite direction from the second direction according to the dynamic quantity in the X direction that the force receiver 40 receives.
摘要翻译：要解决的问题：提供能够精确地检测动态量的动态量传感器和动态量传感器系统。解决方案：力传感器100包括：用于在Z方向和X方向上接收力的力接收器40; 根据动力接收器40接收的Z方向的动量，沿着第一旋转方向旋转的跷跷板部30A，并且根据受力部40接收的X方向的动量，沿第一旋转方向旋转; 以及跷跷板部30C，其按照受力器40接收的Z方向上的动态量沿第二旋转方向旋转，并且根据X方向上的动量向与第二方向相反的方向旋转， 40收到。

2. 发明专利

JP2014004676A Mems structure 有权
标题翻译： MEMS结构
公开(公告)号：JP2014004676A
公开(公告)日：2014-01-16
申请号：JP2012282404
申请日：2012-12-26
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所 , Toyota Motor Corp , トヨタ自動車株式会社
发明人： OMURA YOSHITERU , FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA , AKASHI TERUHISA , FUNAHASHI HIROFUMI , HATA YOSHIYUKI , NAKAYAMA TAKAHIRO
IPC分类号： B81B3/00 , G01C19/5755 , G01P15/125 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide a technique capable of preventing the occurrence of warp such as the distal end of the movable unit flipping up and the concentration of stress at the movable unit or the coupling unit, which are caused from the release of residual strain of a stacked substrate in an MEMS structure formed in the stacked substrate in which linear expansion coefficients of adjacent layers are different.SOLUTION: The present specification discloses an MEMS structure. The MEMS structure includes a substrate unit formed in a first layer; an intermediate fixing unit formed in a second layer, and an upper fixing unit, a coupling unit, and a movable unit formed in a third layer, where the upper fixing unit is fixed to the substrate unit by way of the intermediate fixing unit, the movable unit is cantilever supported by the coupling unit, and the coupling unit is supported by the upper fixing unit. In the MEMS structure, the coupling unit is connected to the upper fixing unit at a position distant from the distal end of the movable unit than an end of the intermediate fixing unit closer to the distal end of the movable unit with respect to a supporting direction of the movable unit.
摘要翻译：要解决的问题：提供一种能够防止由于残留应变的释放引起的可动单元的前端起翘和可动单元或联接单元的应力集中的翘曲的发生的技术在层叠基板中形成的MEMS结构中的层叠基板，其中相邻层的线性膨胀系数不同。解决方案：本说明书公开了一种MEMS结构。 MEMS结构包括形成在第一层中的衬底单元; 形成在第二层中的中间固定单元，以及形成在第三层中的上固定单元，联接单元和可移动单元，其中上固定单元通过中间固定单元固定到基板单元，可移动单元是由联接单元支撑的悬臂，并且联接单元由上固定单元支撑。在MEMS结构中，耦合单元在远离可移动单元的远端的位置处连接到上固定单元，而不是相对于支撑方向更靠近可移动单元的远端的中间固定单元的端部的可移动单元。

3. 发明专利

JP2013250337A Deflector 有权
标题翻译：违禁者
公开(公告)号：JP2013250337A
公开(公告)日：2013-12-12
申请号：JP2012123550
申请日：2012-05-30
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： MURATA KANAE , AOYANAGI ISAO , AKASHI TERUHISA , NONOMURA YUTAKA , FUJITSUKA TOKUO , OZAKI TAKASHI
IPC分类号： G02B26/08 , B81B5/00 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide technology for preventing an oscillation part from coming off without providing a stopper at an upper part of the oscillation part in a deflector having the oscillation part which is oscillatably loaded on a substrate part via a support part.SOLUTION: A deflector includes: a substrate part; a support part of which the lower end is fixed to the substrate part; an oscillation part oscillatably loaded on the upper end of the support part; a reflection part formed on the upper surface of the oscillation part; a drive mechanism for applying torque around an oscillation axis to the oscillation part; and an energization mechanism for energizing the oscillation part toward the support part when at least force for separating the oscillation part from the support part acts on the deflector.
摘要翻译：要解决的问题：提供一种技术，用于防止振动部分在不具有通过支撑部件摆动地装载在基板部分上的振动部分的偏转器中的振荡部分上部设置止动件的情况下解决。偏转器包括：基板部分; 其下端固定到基板部分的支撑部分; 摆动部件可摆动地装载在支撑部分的上端; 反射部，形成在所述振荡部的上表面上; 用于将摆动轴周围的转矩施加到所述振荡部的驱动机构; 以及用于当至少将所述振动部分与所述支撑部分分离的力作用在所述偏转器上时，使所述振动部向所述支撑部通电的通电机构。

4. 发明专利

JP2013126694A Mems device 有权
标题翻译： MEMS器件
公开(公告)号：JP2013126694A
公开(公告)日：2013-06-27
申请号：JP2011276119
申请日：2011-12-16
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA , OMURA YOSHITERU , FUNABASHI HIROBUMI , AKASHI TERUHISA , HATA YOSHIYUKI
IPC分类号： B81B3/00 , G01P15/125 , H01L21/822 , H01L27/04 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a technique capable of preventing bending of a substrate, in a MEMS device including the substrate and a movable part.SOLUTION: A MEMS device including a substrate and a movable part movable relative to the substrate is disclosed. The MEMS device includes a lower conductive layer, an intermediate insulating layer, and an upper conductive layer. The lower conductive layer is formed so as to be thicker than the upper conductive layer. A bending prevention layer is formed at the outer side of the lower conductive layer. The bending prevention layer is formed in a range corresponding to the intermediate insulating layer.
摘要翻译：要解决的问题：提供一种能够防止基板弯曲的技术，在包括基板和可移动部件的MEMS装置中。公开了一种包括基板和可相对于基板移动的可移动部件的MEMS装置。 MEMS器件包括下导电层，中间绝缘层和上导电层。下导电层形成为比上导电层厚。在下导电层的外侧形成弯曲防止层。弯曲防止层形成在与中间绝缘层对应的范围内。版权所有（C）2013，JPO＆INPIT

5. 发明专利

JP2014202548A ＭＥＭＳ装置有权
标题翻译： MEMS器件
公开(公告)号：JP2014202548A
公开(公告)日：2014-10-27
申请号：JP2013077393
申请日：2013-04-03
申请人：株式会社豊田中央研究所 , Toyota Central R&D Labs Inc
发明人： FUJIYOSHI MOTOHIRO , AKASHI TERUHISA , NONOMURA YUTAKA , FUNAHASHI HIROFUMI , HATA YOSHIYUKI , OMURA YOSHITERU
IPC分类号： G01C19/5762 , B81B3/00 , H01L29/84
摘要：【課題】励振部を備えるMEMS装置において、励振に起因する他軸振動の発生を抑制することが可能な技術を提供する。【解決手段】MEMS装置2は、導電材料からなる第1導電層と、絶縁材料からなる絶縁層と、導電材料からなる第2導電層が順に積層された積層基板に形成されている。そのMEMS装置2は、基板部12と、基板部12に対して積層基板の面内方向に励振される励振部16と、励振部16と基板部12を連結する連結部18a、18b、18c、18dを備えている。そのMEMS装置2では、連結部18a、18b、18c、18dが第1導電層と第2導電層の両方に形成されている。【選択図】図1
摘要翻译：要解决的问题：在包括激励单元的MEMS装置中，提供能够抑制由激励引起的另一轴的振动的发生的技术。解决方案：MEMS装置2形成在层叠基板上，顺序堆叠由导电材料制成的第一导电层，由绝缘材料制成的隔离层和由导电材料制成的第二导电层。 MEMS器件2包括：衬底单元12; 激励单元16相对于基板单元12在层叠基板的面内方向上被激励; 以及用于将激励单元16连接到基板单元12的连接单元18a，18b，18c和18d。在MEMS装置2中，连接单元18a，18b，18c和18d形成在第一导电层和第二导电层。

6. 发明专利

JP2014113651A MEMS device 有权
标题翻译： MEMS器件
公开(公告)号：JP2014113651A
公开(公告)日：2014-06-26
申请号：JP2012268320
申请日：2012-12-07
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： AOYANAGI ISAO , MURATA KANAE , NONOMURA YUTAKA , AKASHI TERUHISA
IPC分类号： B81B3/00 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide a technology capable of reducing length of a torsion beam while securing a required resonance frequency of an oscillating plate and strength of the torsion beam.SOLUTION: A MEMS device 2 comprises a support frame 4, an oscillating plate 6, and a pair of torsion beam groups 10a, 10b, which connect the oscillating plate and the support part at both sides in the direction along an oscillation axis so that the oscillating plate can be oscillated around the oscillation axis C to the support frame. In the MEMS device, where the torsional rigidity of one side of the torsional beam groups is kall, the sectional height of each torsional beam is a, the sectional width of each torsional beam is b, the allowable shearing stress of each torsional beam is τmax, and the maximum swinging angle of the oscillating plate is θ, the number n of the torsional beams at one side of the torsion beam groups satisfies the following relation.
摘要翻译：要解决的问题：提供一种能够在确保振荡板的所需共振频率和扭转梁的强度的同时减小扭转梁的长度的技术。解决方案：MEMS装置2包括支撑框架4，振动板6 以及一对扭转梁组10a，10b，其在沿着振动轴线的方向上的两侧连接振荡板和支撑部，使得摆动板能够围绕振荡轴线C摆动到支撑框架。在MEMS器件中，扭转梁组的一侧的扭转刚度为kall，每个扭转梁的截面高度为a，每个扭转梁的截面宽度为b，每个扭转梁的允许剪切应力为τmax ，振动板的最大摆动角为θ，扭转梁组一侧的扭转梁数n满足以下关系。

7. 发明专利

JP2012157941A Method for manufacturing mems device, and mems device 有权
标题翻译：制造MEMS器件的方法和MEMS器件
公开(公告)号：JP2012157941A
公开(公告)日：2012-08-23
申请号：JP2011019885
申请日：2011-02-01
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： HATA YOSHIYUKI , NONOMURA YUTAKA , FUJIYOSHI MOTOHIRO , FUNABASHI HIROBUMI , AKASHI TERUHISA , OMURA YOSHITERU
IPC分类号： B81C1/00 , G01P15/125 , G01P15/18 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a technology capable of whittling the lower end of one of counter electrodes without whittling the lower end of the other of the counter electrodes, in a MEMS device having one pair of counter electrodes which are movable with respect to each other in a direction along a substrate.SOLUTION: The method for manufacturing the MEMS device includes a step of preparing a semiconductor wafer, a step of forming a first groove extending from the bottom surface of the semiconductor wafer to a second conductor layer through a first conductor layer and an insulator layer, a step of forming a protective portion composed of a conductive material in the first groove, a step of forming a resist pattern on the top surface of the semiconductor wafer, a step of forming one pair of counter electrodes in the second conductor layer by a reactive ion etching method, a step of whittling the lower end of one of the counter electrodes by continuing the reactive ion etching process, and a step of selectively removing the insulator layer. In the method for manufacturing the MEMS device, the first groove is formed outside both lateral sides of the other of the counter electrodes with respect to a direction in which the pair of the electrodes face each other.
摘要翻译：要解决的问题：为了提供一种能够在相对电极中的一个的下端进行削尖的技术，而不会使对置电极中的另一个的下端陷入困难，在具有一对对电极的MEMS装置中，该对电极可以与在沿着基板的方向上彼此相对。解决方案：制造MEMS器件的方法包括制备半导体晶片的步骤，通过第一导体层形成从半导体晶片的底表面延伸到第二导体层的第一凹槽和绝缘体的步骤在第一槽中形成由导电材料构成的保护部分的步骤，在半导体晶片的顶表面上形成抗蚀剂图案的步骤，通过在第二导体层中形成一对对电极的步骤反应离子蚀刻方法，通过继续进行反应离子蚀刻工艺，使对置电极中的一个的下端进行微调的工序，以及选择性地除去绝缘体层的工序。在制造MEMS器件的方法中，第一槽相对于一对电极彼此面对的方向形成在对置电极中的另一个的两侧的外侧。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2011237393A Movable body, two axis angular velocity sensor, and three axis acceleration sensor 有权
标题翻译：可移动身体，双轴角速度传感器和三轴加速度传感器
公开(公告)号：JP2011237393A
公开(公告)日：2011-11-24
申请号：JP2010111480
申请日：2010-05-13
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： AKASHI TERUHISA , NONOMURA YUTAKA , FUJIYOSHI MOTOHIRO , FUNAHASHI HIROFUMI , HATA YOSHIYUKI , OMURA YOSHITERU
IPC分类号： G01C19/56 , G01C19/5733 , G01C19/5762 , G01P15/125 , G01P15/18 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a technology capable of producing a compact sensor with high detection sensitivity.SOLUTION: The present invention is embodied as a movable body formed on a substrate. The movable body comprises a first frame body, a second frame body which is placed so as to be partly or completely superimposed on the first frame body with the first and second frame bodies opposing to each other, a coupling section which is linked with the first frame body via a first spring section and with the second frame body via a second spring section, and a stationary section which is linked with the coupling section via a third spring section and fixed to the substrate. Because in the first, second, and third spring sections, a spring constant in one direction is remarkably smaller than those in other directions, a relative displacement in the only one direction is substantially allowed. The directions in which the relative displacement is allowed by the first, second, and third spring sections are perpendicular to one another.
摘要翻译：要解决的问题：提供能够生产具有高检测灵敏度的紧凑型传感器的技术。解决方案：本发明被实施为形成在基板上的可移动体。可移动体包括第一框架体，第二框架体，其被布置成部分地或完全地叠置在第一框架体上，第一和第二框架体彼此相对;联接部分，其与第一框架主体框架体经由第一弹簧部分和与第二框体通过第二弹簧部分，以及固定部分，其经由第三弹簧部分与联接部分连接并固定到基板。因为在第一，第二和第三弹簧部分中，一个方向上的弹簧常数显着小于其它方向上的弹簧常数，因此基本上仅允许一个方向上的相对位移。第一，第二和第三弹簧部分允许相对位移的方向彼此垂直。版权所有（C）2012，JPO＆INPIT

9. 发明专利

JP2010243479A Apparatus having movable body 有权
标题翻译：具有可移动体的装置
公开(公告)号：JP2010243479A
公开(公告)日：2010-10-28
申请号：JP2010043880
申请日：2010-03-01
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： AKASHI TERUHISA , NONOMURA YUTAKA , FUJIYOSHI MOTOHIRO , FUNABASHI HIROBUMI
IPC分类号： G01C19/56 , G01P9/04 , G01P15/125
CPC分类号： G01C19/5719 , G01P2015/082
摘要： PROBLEM TO BE SOLVED: To provide an apparatus whose surface layer has a part that moves along two axial directions (an x-axis direction and a z-axis direction) and which has such a structure that the displacement along the x-axis hardly exerts an influence on the displacement along the z-axis. SOLUTION: The surface layer includes: fixed portions 141 to 144 fixed to a substrate via an intermediate layer; and a free portion free from the substrate. The free portion includes first spring portions 131 to 134, first movable portions 151 and 152, second spring portions 121 to 124, and a second movable portion 110. A spring constant of each of the first spring portions in the z-axis direction is lower than spring constants of each of the first spring portions in the x-axis and a y-axis directions respectively, and a spring constant of each of the second spring portions in the x-axis direction is lower than spring constants of each of the second spring portions in the y-axis and the z-axis directions respectively. The fixed portions, first spring portions, and second spring portions are arranged at positions that are symmetric with respect to the x, y-axes that run through the centroid of the pair of first movable portions. The first movable portions are not influenced by the displacement of the second movable portion along the x-axis direction and move only along the z-axis direction. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种表面层具有沿两个轴向（x轴方向和z轴方向）移动的部分的装置，并且具有这样的结构，即，轴几乎不影响沿z轴的位移。解决方案：表层包括：通过中间层固定到基底的固定部分141至144; 和没有基材的自由部分。自由部分包括第一弹簧部分131至134，第一可动部分151和152，第二弹簧部分121至124和第二可动部分110.每个第一弹簧部分在z轴方向上的弹簧常数较低比各个第一弹簧部分在x轴方向和y轴方向上的弹簧常数都大，并且每个第二弹簧部分在x轴方向上的弹簧常数低于第二弹簧部分的弹簧常数在y轴和z轴方向上的弹簧部分。固定部分，第一弹簧部分和第二弹簧部分布置在相对于穿过该对第一可动部分的质心的x，y轴对称的位置处。第一可动部不受第二可动部沿x轴方向的位移的影响，仅沿z轴方向移动。版权所有（C）2011，JPO＆INPIT

10. 发明专利

JP2014032200A Mems sensors 有权
标题翻译： MEMS传感器
公开(公告)号：JP2014032200A
公开(公告)日：2014-02-20
申请号：JP2013189165
申请日：2013-09-12
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： AKASHI TERUHISA , NONOMURA YUTAKA , FUJIYOSHI MOTOHIRO , FUNAHASHI HIROFUMI , HATA YOSHIYUKI , OMURA YOSHITERU
IPC分类号： G01C19/5762 , B81B3/00 , G01P15/125 , G01P15/18 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a technique that enables a manufacturing of a sensor having excellent detection sensitivity even with a downsized dimension in an entire device.SOLUTION: The present invention is embodied as a movable body to be formed on a substrate. The movable body comprises: a first frame body; a second frame body that mutually faces the first frame body, and is arranged so as to be partially or completely overlapped with each other; a joint part that is connected to the first frame body via a first spring part, and is connected to the second frame body via a second spring part; and a fixture part that is connected to the joint part via a third spring part, and is fixed to the substrate. The first spring part, the second spring part, and the third spring part have a spring constant in one direction extraordinarily lower than a spring constant in the other direction, and substantially allow for a relative displacement only in the one direction. The direction in which the first spring part, the second spring part, and the third spring part allow for the relative displacement is mutually orthogonal.
摘要翻译：要解决的问题：提供一种即使在整个装置中具有小尺寸的尺寸也能够制造具有优异的检测灵敏度的传感器的技术。解决方案：本发明被实施为要在基板上形成的可移动体。可移动体包括：第一框体; 相互面对所述第一框体的第二框体，并且被配置为相互部分或完全重叠; 连接部，其经由第一弹簧部与第一框体连接，经由第二弹簧部与第二框体连接; 以及固定部，其经由第三弹簧部连接到所述接合部，并且固定到所述基板。第一弹簧部分，第二弹簧部分和第三弹簧部分在一个方向上具有特别地低于另一个方向上的弹簧常数的弹簧常数，并且基本上允许仅在一个方向上的相对位移。第一弹簧部分，第二弹簧部分和第三弹簧部分允许相对位移的方向相互正交。

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