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1. 发明专利

JP2014098850A Mems device 有权
标题翻译： MEMS器件
公开(公告)号：JP2014098850A
公开(公告)日：2014-05-29
申请号：JP2012251417
申请日：2012-11-15
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： MURATA KANAE , AOYANAGI ISAO , NONOMURA YUTAKA , AKASHI TERUHISA
IPC分类号： G02B26/10 , B81B3/00 , G02B26/08
CPC分类号： G02B26/08 , G02B26/0825 , G02B26/085 , G02B26/101 , H02K33/00 , H02K33/16 , H02K2201/18
摘要： PROBLEM TO BE SOLVED: To provide an MEMS device having high detection accuracy of a tilt angle of a movable part and being capable of downsizing.SOLUTION: An MEMS device includes: a substrate; a movable part having a magnetic material and being relatively tiltable to the substrate; a first and a second magnetic poles that can apply a magnetic field to the magnetic material; and magnetic field detection means that detects the magnetic field of the magnetic material. In the MEMS device, the first and a second magnetic poles are disposed at a side where the magnetic material of the movable part is provided and the magnetic field detection means is disposed between the first and second magnetic poles. The distance between the first and second magnetic poles is shorter than the length of the movable part in a direction from the first magnetic pole to the second magnetic pole.
摘要翻译：要解决的问题：提供具有可移动部件的倾斜角度的高检测精度并且能够缩小尺寸的MEMS装置。解决方案：MEMS装置包括：基板; 具有磁性材料并且可相对于基底倾斜的活动部件; 可以对磁性材料施加磁场的第一和第二磁极; 以及检测磁性材料的磁场的磁场检测装置。在MEMS器件中，第一和第二磁极设置在可动部件的磁性材料的一侧，并且磁场检测装置设置在第一和第二磁极之间。第一和第二磁极之间的距离比从第一磁极到第二磁极的方向上的可移动部分的长度短。

2. 发明专利

JP2013202711A Mems device 有权
标题翻译： MEMS器件
公开(公告)号：JP2013202711A
公开(公告)日：2013-10-07
申请号：JP2012071914
申请日：2012-03-27
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： OZAKI TAKASHI , FUJITSUKA TOKUO , SHIMAOKA KEIICHI , NONOMURA YUTAKA
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： B81B3/0048 , B81B3/007 , B81B2201/042 , B81B2203/0109
摘要： PROBLEM TO BE SOLVED: To provide a technology that allows a tilting plate to keep a given tilting angle even if warp is caused to occur on the tilting plate in a direction along a tilting axis, with respect to a MEMS device equipped with a tilting plate that tilts against a substrate.SOLUTION: There is disclosed a MEMS device. The MEMS device includes: a substrate; a tilting plate disposed at an interval from the substrate; support members fixed on the substrate; and supporting beams whose one end is connected to the support members while the other end is linked with the tilting plate, while supporting the tilting plate in a manner capable of tilting around a tilting axis. The MEMS device has protrusions formed on one part of the substrate and tilting plate. In the MEMS device, at least one part of the protrusions intersects orthogonally with the tilting axis, and is included in a plane including the joint between the tilting plate and the supporting beam. In the MEMS device, at least the one part of the protrusion comes in contact with the other part of the substrate and the tilting plate when the tilting plate is tilted.
摘要翻译：要解决的问题：提供一种即使在倾斜板沿着倾斜轴线的方向发生翘曲的情况下，倾斜板也能够保持给定的倾斜角度的技术相对于配备有倾斜板的MEMS装置它倾向于衬底。解决方案：公开了一种MEMS器件。 MEMS器件包括：衬底; 倾斜板，与所述基板间隔设置; 支撑构件固定在基板上; 以及支撑梁，其一端连接到支撑构件，而另一端与倾斜板连接，同时以能够围绕倾斜轴线倾斜的方式支撑倾斜板。 MEMS器件具有形成在基板和倾斜板的一部分上的突起。在MEMS装置中，突起的至少一部分与倾斜轴正交地相交，并且包括在包括倾斜板和支撑梁之间的接合部的平面中。在MEMS装置中，当倾斜板倾斜时，突起的至少一部分与基板的另一部分和倾斜板接触。

3. 发明专利

JP2013064724A Semiconductor device 有权
标题翻译：半导体器件
公开(公告)号：JP2013064724A
公开(公告)日：2013-04-11
申请号：JP2012122267
申请日：2012-05-29
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： HATA YOSHIYUKI , NONOMURA YUTAKA , AKASHI TERUHISA , FUNABASHI HIROBUMI , FUJIYOSHI MOTOHIRO , OMURA YOSHITERU
IPC分类号： G01P15/125 , G01P15/18 , H01L29/84
CPC分类号： B81C1/00825 , B81B2201/0235 , B81B2203/033 , B81B2203/0392 , G01C19/5762 , G01C19/5769 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0814 , G01P2015/084
摘要： PROBLEM TO BE SOLVED: To provide a technique for forming a trench without leaving residues of a semiconductor in forming a narrow trench on a thick semiconductor layer.SOLUTION: The semiconductor device where a trench is formed on a semiconductor layer is disclosed. In the semiconductor layer of the semiconductor device, a compensation pattern for compensating a radical change of width of the trench is formed at a place where the width of the trench radically changes. In the semiconductor device, since the compensation pattern is formed at the place where the width of the trench radically changes in the semiconductor layer, generation of a steep slope part which causes residues of the semiconductor is suppressed in performing trench processing by a deep RIE (Reactive Ion Etching) method. Thus, generation of residues of the semiconductor is preventable in forming a narrow trench in the thick semiconductor layer.
摘要翻译：要解决的问题：提供一种在厚半导体层上形成窄沟槽而不留下半导体残留物的沟槽形成技术。公开了在半导体层上形成沟槽的半导体器件。在半导体器件的半导体层中，在沟槽宽度急剧变化的地方形成用于补偿沟槽宽度的根本变化的补偿图案。在半导体器件中，由于补偿图案形成在半导体层中的沟槽宽度发生变化的位置，所以通过深度RIE进行沟槽加工时抑制导致半导体残留的陡峭部分的产生（反应离子蚀刻）方法。因此，在厚半导体层中形成窄沟槽时，可以防止半导体残留物的产生。版权所有（C）2013，JPO＆INPIT

4. 发明专利

JP2012183612A Mems device 审中-公开
标题翻译： MEMS器件
公开(公告)号：JP2012183612A
公开(公告)日：2012-09-27
申请号：JP2011048938
申请日：2011-03-07
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： OMURA YOSHITERU , FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA , AKASHI TERUHISA , HATA YOSHIYUKI , FUNABASHI HIROBUMI
IPC分类号： B81B3/00 , G01P15/125 , G01P15/18 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a technology that suppresses a warpage occurring in a movable electrode fixed to a movable mass body having a laminated structure.SOLUTION: A micro-electromechanical system (MEMS) device includes: a substrate; the movable mass body that is formed by laminating a second conductive region on a first conductive region via a first insulating region and relatively movable to the substrate; an elastically supporting member for coupling the substrate with the movable mass body; a fixed electrode fixed to the substrate; the movable electrode fixed to the movable mass body and disposed opposite to the fixed electrode; and a reinforcing member that is formed by laminating a second conductive reinforcing region on a first conductive reinforcing region via an insulative reinforcing region and is fixed to the movable mass body, the reinforcing member supporting the movable mass electrode from at least both sides.
摘要翻译：解决的问题：提供抑制固定在具有层叠结构的可移动质量体的可动电极中发生翘曲的技术。微机电系统（MEMS）装置包括：基板; 所述移动质量体通过经由第一绝缘区域在第一导电区域上层叠第二导电区域并且能够相对于所述基板形成; 弹性支撑构件，用于将所述基底与所述可移动块体联接; 固定在基板上的固定电极; 所述可动电极固定在所述可移动质量体上并与所述固定电极相对设置; 以及加强部件，其通过绝缘加强区域在第一导电性加强区域上层压第二导电性加强区域而固定到可动体本体，所述加固部件至少从两侧支撑可动质量电极。版权所有（C）2012，JPO＆INPIT

5. 发明专利

JP2012159417A Displacement sensor, method for manufacturing the same, and semiconductor wafer for the same 有权
标题翻译：位移传感器，其制造方法和相同的半导体滤波器
公开(公告)号：JP2012159417A
公开(公告)日：2012-08-23
申请号：JP2011019884
申请日：2011-02-01
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： FUNABASHI HIROBUMI , NONOMURA YUTAKA , HATA YOSHIYUKI , FUJIYOSHI MOTOHIRO , AKASHI TERUHISA , OMURA YOSHITERU
IPC分类号： G01P15/125 , G01P15/18 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To provide a displacement sensor capable of accurately detecting a displacement amount in a direction orthogonal to a laminate direction without being affected by displacement in the laminate direction.SOLUTION: The displacement sensor includes: a substrate; a movable mass body supported displaceably in two axial directions with respect to the substrate; a first fixed electrode and a first movable electrode for detecting a displacement amount in a direction orthogonal to a laminate direction; and a second fixed electrode and a second movable electrode for detecting a displacement amount in the laminate direction. In the displacement sensor, the first fixed electrode and the first movable electrode are formed so that one outer end portions of the first fixed electrode and the first movable electrode are located in the inside of the other outer end portions of the first fixed electrode and the first movable electrode, and the one inner end portions of the first fixed electrode and the first movable electrode are located in the outside of the other inner end portions of the first fixed electrode and the first movable electrode.
摘要翻译：解决的问题：提供一种能够精确地检测与层叠方向正交的方向上的位移量而不受层叠方向的位移的影响的位移传感器。位移传感器包括：基板; 相对于基板在两个轴向上可移动地支撑的可移动质量体; 用于检测与层叠方向正交的方向上的位移量的第一固定电极和第一可动电极; 以及用于检测层叠方向上的位移量的第二固定电极和第二可动电极。在位移传感器中，第一固定电极和第一可动电极形成为使得第一固定电极和第一可动电极的一个外端部位于第一固定电极的另一外端部的内侧，第一可动电极，第一固定电极和第一可动电极的一个内端部位于第一固定电极和第一可动电极的另一内端部的外侧。版权所有（C）2012，JPO＆INPIT

6. 发明专利

JP2011203257A Moving body posture angle detecting apparatus 有权
标题翻译：移动身体角度角度检测装置
公开(公告)号：JP2011203257A
公开(公告)日：2011-10-13
申请号：JP2011086174
申请日：2011-04-08
申请人： Toyota Central R&D Labs Inc , Toyota Motor Corp , トヨタ自動車株式会社 , 株式会社豊田中央研究所
发明人： SUGIHARA HISAYOSHI , NONOMURA YUTAKA , FUJIYOSHI MOTOHIRO
IPC分类号： G01C15/00 , B25J19/02 , G05D1/08
CPC分类号： B25J9/163 , G05B2219/37024 , G05B2219/37388 , G05B2219/40536 , G05B2219/41166 , G05B2219/42152
摘要： PROBLEM TO BE SOLVED: To detect the posture angle of a moving body by preventing the accumulation of integration errors by means of a simple structure without using an expensive, highly accurate angular velocity sensor.SOLUTION: The apparatus has: an angular velocity sensor 10 for detecting an angular velocity of the moving body; an acceleration sensor 20 for detecting an acceleration of the moving body; a means 15 for calculating a small angle quaternion which defines a small rotation angle after passing a short period of time ts from the angular velocity; a means 22 for calculating a tilt angle from the acceleration; a means 25 for calculating an acceleration system quaternion from the tilt angle; a difference calculating means 30 for calculating, as an error, a difference between the low range component of an angular velocity system quaternion and the low range component of the acceleration system quaternion; an error removing means 32 for removing the error from the angular velocity system quaternion; an outputting means 34 for calculating a posture angle from the angular velocity system quaternion from which the error is removed and outputting as the posture angle of the moving body.
摘要翻译：要解决的问题：为了通过简单的结构防止累积误差来检测移动体的姿态角度，而不使用昂贵，高精度的角速度传感器。解决方案：该装置具有：角速度传感器10，用于检测所述移动体的角速度; 用于检测移动体的加速度的加速度传感器20; 用于计算在从角速度经过短时间ts之后限定小旋转角度的小角度四元数的装置15; 用于从加速度计算倾斜角度的装置22; 用于从倾斜角度计算加速度系数四元数的装置25; 差分计算装置30，用于计算角速度系统四元数的低范围分量与加速系数四元数的低范围分量之间的差作为误差; 用于从角速度系统四元数除去误差的误差消除装置32; 输出装置34，用于根据从其中去除误差的角速度系统四元数计算姿态角，并输出作为移动体的姿势角。

7. 发明专利

JP2011177858A Mems structure and manufacturing method thereof 有权
标题翻译： MEMS结构及其制造方法
公开(公告)号：JP2011177858A
公开(公告)日：2011-09-15
申请号：JP2010046496
申请日：2010-03-03
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： FUNABASHI HIROBUMI , NONOMURA YUTAKA , HATA YOSHIYUKI , FUJIYOSHI MOTOHIRO , AKASHI TERUHISA , OMURA YOSHITERU
IPC分类号： B81B3/00 , B81C1/00 , G02B26/08
CPC分类号： H01L21/02 , H01L29/84
摘要： PROBLEM TO BE SOLVED: To manufacture an MEMS structure having a displacement portion and an opposite position by machining a laminated substrate while using etching technique. SOLUTION: On the MEMS structure 1, a first etching groove 7a penetrating an electric conductor lower layer 2, an insulator lower layer 3, and an electric conductor middle layer 4; and a second etching groove 7b penetrating an electric conductor upper layer 6, an insulator upper layer 5, and the electric conductor middle layer 4 are formed. The first etching groove 7a forms a part of an outline of the displacement portion 4a. The second etching groove 7b also forms a part of the outline of the displacement portion 4a. When observed from a laminating direction, at least a part of the first etching groove 7a is provided within a range overlapped with a first extension portion 6a. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：通过在使用蚀刻技术的情况下通过机械加工层压基板来制造具有位移部分和相对位置的MEMS结构。解决方案：在MEMS结构1上，穿过导电体下层2，绝缘体下层3和电导体中间层4的第一蚀刻槽7a; 并且形成贯穿导电体上层6，绝缘体上层5和电导体中间层4的第二蚀刻槽7b。第一蚀刻槽7a形成位移部分4a的轮廓的一部分。第二蚀刻槽7b也形成位移部分4a的轮廓的一部分。当从层叠方向观察时，第一蚀刻槽7a的至少一部分设置在与第一延伸部6a重叠的范围内。版权所有（C）2011，JPO＆INPIT

8. 发明专利

JP2010135664A Semiconductor structure 审中-公开
标题翻译：半导体结构
公开(公告)号：JP2010135664A
公开(公告)日：2010-06-17
申请号：JP2008311860
申请日：2008-12-08
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA
IPC分类号： H01L23/12 , H01L21/60 , H01L29/84
CPC分类号： H01L2224/48091 , H01L2924/00014
摘要： PROBLEM TO BE SOLVED: To keep a state of contact of a curved semiconductor layer with another component for a long time.
SOLUTION: A semiconductor structure 10 includes a first semiconductor layer 11, a second semiconductor layer 15 opposite to the first semiconductor layer 11, and a middle layer 12 disposed at a portion between the first semiconductor layer 11 and the second semiconductor layer 15. The second semiconductor layer 15 has an extension 15d extending to a side from the end of the middle layer 12. The extension 15d is curved toward the first semiconductor 11 side. A through-hole 17 is formed in the contact area of a portion of the extension 15d of the second semiconductor layer 15 with the first semiconductor layer 11 in the second semiconductor layer 15.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：长时间保持弯曲半导体层与其他部件的接触状态。解决方案：半导体结构10包括第一半导体层11，与第一半导体层11相对的第二半导体层15和设置在第一半导体层11和第二半导体层15之间的部分的中间层12 第二半导体层15具有从中间层12的端部延伸的延伸部15d。延伸部15d向第一半导体11侧弯曲。在第二半导体层15的第一半导体层11的第二半导体层15的延伸部分15d的一部分的接触区域中形成有通孔17.版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2017116317A センサ装置审中-公开
公开(公告)号：JP2017116317A
公开(公告)日：2017-06-29
申请号：JP2015249684
申请日：2015-12-22
申请人：株式会社豊田中央研究所 , Toyota Central R&D Labs Inc , トヨタ自動車株式会社 , Toyota Motor Corp , 国立大学法人東北大学 , Tohoku Univ
发明人： HATA YOSHIYUKI , FUJIYOSHI MOTOHIRO , NONOMURA YUTAKA , NAKAYAMA TAKAHIRO , BITO KOJI , ESASHI MASAKI , MUROYAMA MASANORI , TANAKA SHUJI
IPC分类号： G01L1/14 , G01L5/00
摘要：【課題】接触センシング面から見て側面側から直接、外力を受けることなく、センサ構造部及び信号処理用集積回路の欠損及び故障を低減すること。【解決手段】センサ装置は、検出対象物と直接に接触する接触センシング面を外部に露出する一面に有するとともに、接触センシング面の変化に感応してセンサ信号を出力するセンサ構造部と、一方の面に第1凹状部が形成され、該一方の面の反対側の面に第2凹状部が形成された基板と、センサ構造部が出力するセンサ信号を処理する信号処理用集積回路と、を備えている。センサ構造部は、基板の第1凹状部内に配置されている。信号処理用集積回路は、基板の第2凹状部内に配置されている。【選択図】図1

10. 发明专利

JP2013250337A Deflector 有权
标题翻译：违禁者
公开(公告)号：JP2013250337A
公开(公告)日：2013-12-12
申请号：JP2012123550
申请日：2012-05-30
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： MURATA KANAE , AOYANAGI ISAO , AKASHI TERUHISA , NONOMURA YUTAKA , FUJITSUKA TOKUO , OZAKI TAKASHI
IPC分类号： G02B26/08 , B81B5/00 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To provide technology for preventing an oscillation part from coming off without providing a stopper at an upper part of the oscillation part in a deflector having the oscillation part which is oscillatably loaded on a substrate part via a support part.SOLUTION: A deflector includes: a substrate part; a support part of which the lower end is fixed to the substrate part; an oscillation part oscillatably loaded on the upper end of the support part; a reflection part formed on the upper surface of the oscillation part; a drive mechanism for applying torque around an oscillation axis to the oscillation part; and an energization mechanism for energizing the oscillation part toward the support part when at least force for separating the oscillation part from the support part acts on the deflector.
摘要翻译：要解决的问题：提供一种技术，用于防止振动部分在不具有通过支撑部件摆动地装载在基板部分上的振动部分的偏转器中的振荡部分上部设置止动件的情况下解决。偏转器包括：基板部分; 其下端固定到基板部分的支撑部分; 摆动部件可摆动地装载在支撑部分的上端; 反射部，形成在所述振荡部的上表面上; 用于将摆动轴周围的转矩施加到所述振荡部的驱动机构; 以及用于当至少将所述振动部分与所述支撑部分分离的力作用在所述偏转器上时，使所述振动部向所述支撑部通电的通电机构。

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