专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明专利

JP2012047910A Optical deflector 审中-公开
标题翻译：光学偏光镜
公开(公告)号：JP2012047910A
公开(公告)日：2012-03-08
申请号：JP2010188743
申请日：2010-08-25
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： OZAKI TAKASHI , FUJITSUKA TOKUO , SHIMAOKA KEIICHI
IPC分类号： G02B26/10 , B81B3/00 , G02B26/08
摘要： PROBLEM TO BE SOLVED: To provide an optical deflector of an electrostatic driving type, in which rigidity of a support member for supporting a movable portion can be reduced.SOLUTION: There is provided an optical deflector in which a mirror provided in a movable part is oscillated by oscillating the movable part by applying a voltage between fixed electrodes provided on a base part and movable electrodes provided in the movable part. In the optical deflector, the movable part is supported by a first support member and a second support member, and the first support member is formed of an insulator only and the second support member is formed of a conductor and an insulator covering the periphery of the conductor, and the second support member is formed longer than the first support member.
摘要翻译：解决的问题：提供一种用于支撑可移动部分的支撑构件的刚性可以减小的静电驱动型光学偏转器。解决方案：提供了一种光学偏转器，其中通过在设置在基座上的固定电极和设置在可动部分中的可动电极之间施加电压来振荡可动部件，使可动部件中的反射镜摆动。在光学偏转器中，可移动部分由第一支撑部件和第二支撑部件支撑，第一支撑部件仅由绝缘体形成，第二支撑部件由导体和覆盖外部的绝缘体导体，并且第二支撑构件形成为比第一支撑构件更长。版权所有（C）2012，JPO＆INPIT

2. 发明专利

JP2012032481A Optical deflection apparatus 审中-公开
标题翻译：光学偏转装置
公开(公告)号：JP2012032481A
公开(公告)日：2012-02-16
申请号：JP2010170267
申请日：2010-07-29
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： FUJITSUKA TOKUO , OZAKI TAKASHI , AOYANAGI ISAO , SHIMAOKA KEIICHI
IPC分类号： G02B26/08 , B81B3/00
摘要： PROBLEM TO BE SOLVED: To provide an optical deflection apparatus capable of accurately oscillating a movable part, and a manufacturing method of the optical deflection apparatus.SOLUTION: An optical deflection apparatus includes: a substrate; a plate-shaped movable part; a flexible beam supporting the movable part at a position separated upward from the substrate so as to oscillate the movable part around an oscillation axis; an actuator for oscillating the movable part; and a lower limit regulation part which is installed on the substrate and can be contacted to and separated from the flexible beam from a lower side of the flexible beam. A lower surface of the flexible beam on a cross section vertical to the oscillation axis is formed to protrude downward and have a curved surface in an area positioned above the lower limit regulation part, or an upper surface of the lower limit regulation part on the cross section vertical to the oscillation axis is formed to protrude upward and have a curved surface.
摘要翻译：要解决的问题：提供一种能够精确地摆动可动部件的光学偏转装置，以及光学偏转装置的制造方法。光学偏转装置包括：基板; 板状可动部; 柔性梁，其在从所述基板向上分离的位置处支撑所述可动部，以使所述可动部围绕摆动轴摆动; 用于使所述可移动部件摆动的致动器; 以及下限调节部件，其安装在基板上并且可以与柔性梁的下侧接触并与柔性梁分离。柔性梁的垂直于振动轴的横截面的下表面被形成为向下突出并且在位于下限限制部分上方的区域中的曲面或者十字形的下限调节部分的上表面垂直于振动轴的截面形成为向上突出并具有弯曲表面。版权所有（C）2012，JPO＆INPIT

3. 发明专利

JP2010249905A Optical apparatus and method of manufacturing the same 审中-公开
标题翻译：光学装置及其制造方法
公开(公告)号：JP2010249905A
公开(公告)日：2010-11-04
申请号：JP2009096786
申请日：2009-04-13
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： AOYANAGI ISAO , SHIMAOKA KEIICHI , FUJITSUKA TOKUO , OZAKI TAKASHI
IPC分类号： G02B26/08 , B81B3/00 , B81C1/00 , G02B5/08 , G02B7/182 , G02B26/10
摘要： PROBLEM TO BE SOLVED: To achieve a balance between that the electrode faces of a fixed electrode and a movable electrode are made large, and that the mirror size of a movable mirror is made large, in an optical apparatus in which the electrode faces of the fixed electrode furnished on a substrate and of the movable electrode furnished on the movable mirror are perpendicular to the rocking axis of the movable mirror. SOLUTION: The fixed electrode and the movable electrode are furnished under the movable mirror such that the electrode faces is be perpendicular to the rocking axis of the movable mirror. The movable electrode extends downward from the lower face of the movable mirror and the fixed electrode extends toward the movable mirror from the substrate. Since the movable electrode and the fixed electrode are provided under the movable mirror, there is no need for a region in which the movable mirror is furnished to be provided on the surface of the movable mirror. The area of the mirrors are made large, compared to the area of a material substrate, and a large aperture ratio is given. The fixed electrode and the movable electrode are used as detection devices of the rocking angle of the movable mirror and as an electrostatic driving system actuator. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题为了实现固定电极和可动电极的电极面之间的平衡，并且使可动镜的镜面尺寸变大，在其中电极设置在基板上的固定电极和设置在可移动反射镜上的可动电极的面垂直于可移动镜的摆动轴。解决方案：固定电极和可动电极设置在可移动镜下，使得电极面垂直于可移动镜的摆动轴线。可移动电极从可移动镜的下表面向下延伸，固定电极从基片向可移动镜延伸。由于可动电极和固定电极设置在可动镜下方，因此不需要在可移动镜的表面上设置可移动镜的区域。与材料基板的面积相比，反射镜的面积大，并且给出了大的开口率。固定电极和可动电极用作可动镜的摆动角度的检测装置和静电驱动系统致动器。版权所有（C）2011，JPO＆INPIT

4. 发明专利

JP2013202711A Mems device 有权
标题翻译： MEMS器件
公开(公告)号：JP2013202711A
公开(公告)日：2013-10-07
申请号：JP2012071914
申请日：2012-03-27
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： OZAKI TAKASHI , FUJITSUKA TOKUO , SHIMAOKA KEIICHI , NONOMURA YUTAKA
IPC分类号： B81B3/00 , G02B26/08
CPC分类号： B81B3/0048 , B81B3/007 , B81B2201/042 , B81B2203/0109
摘要： PROBLEM TO BE SOLVED: To provide a technology that allows a tilting plate to keep a given tilting angle even if warp is caused to occur on the tilting plate in a direction along a tilting axis, with respect to a MEMS device equipped with a tilting plate that tilts against a substrate.SOLUTION: There is disclosed a MEMS device. The MEMS device includes: a substrate; a tilting plate disposed at an interval from the substrate; support members fixed on the substrate; and supporting beams whose one end is connected to the support members while the other end is linked with the tilting plate, while supporting the tilting plate in a manner capable of tilting around a tilting axis. The MEMS device has protrusions formed on one part of the substrate and tilting plate. In the MEMS device, at least one part of the protrusions intersects orthogonally with the tilting axis, and is included in a plane including the joint between the tilting plate and the supporting beam. In the MEMS device, at least the one part of the protrusion comes in contact with the other part of the substrate and the tilting plate when the tilting plate is tilted.
摘要翻译：要解决的问题：提供一种即使在倾斜板沿着倾斜轴线的方向发生翘曲的情况下，倾斜板也能够保持给定的倾斜角度的技术相对于配备有倾斜板的MEMS装置它倾向于衬底。解决方案：公开了一种MEMS器件。 MEMS器件包括：衬底; 倾斜板，与所述基板间隔设置; 支撑构件固定在基板上; 以及支撑梁，其一端连接到支撑构件，而另一端与倾斜板连接，同时以能够围绕倾斜轴线倾斜的方式支撑倾斜板。 MEMS器件具有形成在基板和倾斜板的一部分上的突起。在MEMS装置中，突起的至少一部分与倾斜轴正交地相交，并且包括在包括倾斜板和支撑梁之间的接合部的平面中。在MEMS装置中，当倾斜板倾斜时，突起的至少一部分与基板的另一部分和倾斜板接触。

5. 发明专利

JP2013195650A Deflector 审中-公开
标题翻译：违禁者
公开(公告)号：JP2013195650A
公开(公告)日：2013-09-30
申请号：JP2012061923
申请日：2012-03-19
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： FUJITSUKA TOKUO , OZAKI TAKASHI , AOYANAGI ISAO , MURATA KANAE , SHIMAOKA KEIICHI
IPC分类号： G02B26/08 , B81B3/00
摘要： PROBLEM TO BE SOLVED: To provide a technique for improving reliability and durability without impairing responsiveness in a deflector.SOLUTION: There is provided a deflector which comprises: a substrate; a tilting plate which is supported at an interval from the substrate and can be tilted around a tilting shaft; and a reflection part which is fixed to the tilting plate through a reflection part supporting column. The cross-sectional shape of the reflection part supporting column at the joint part with the tilting plate is formed such that the length in a direction orthogonal to the tilting shaft is longer than the length in a direction along the tilting shaft.
摘要翻译：要解决的问题：提供一种用于提高可靠性和耐久性而不损害偏转器的响应性的技术。解决方案：提供一种偏转器，其包括：基板; 倾斜板，其从基板间隔地支撑并且可以围绕倾斜轴倾斜; 以及反射部，其通过反射部支撑柱固定到倾斜板。与倾斜板的接合部处的反射部支撑柱的横截面形状形成为使得与倾斜轴正交的方向上的长度比沿着倾斜轴的方向的长度长。

6. 发明专利

JP2012045658A Mems device 审中-公开
标题翻译： MEMS器件
公开(公告)号：JP2012045658A
公开(公告)日：2012-03-08
申请号：JP2010188744
申请日：2010-08-25
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： OZAKI TAKASHI , MURATA KANAE , SHIMAOKA KEIICHI
IPC分类号： B81B3/00 , G02B26/08 , H04N1/036
摘要： PROBLEM TO BE SOLVED: To provide a technique for inhibiting occurrence of warping in a movable structure, in a MEMS device equipped with a movable structure supported in a floating state on a substrate.SOLUTION: The MEMS device is equipped with the movable structure supported in a floating state on the substrate. The movable structure includes a lower insulating layer, an electrically conductive layer formed in the upper part of the lower insulating layer, and an upper insulating layer formed in the upper part of the electrically conductive layer. An alignment margin is provided in the outer shape of the lower insulating layer. The MEMS device is characterized in that the thickness of the upper insulating layer is larger than that of the lower insulating layer.
摘要翻译：要解决的问题：提供一种在可移动结构中抑制发生翘曲的技术，在装备有以浮动状态支撑在基板上的可移动结构的MEMS装置中。解决方案：MEMS器件配备有以浮置状态支撑在基板上的可移动结构。可动结构包括下绝缘层，形成在下绝缘层的上部的导电层和形成在导电层的上部的上绝缘层。在下绝缘层的外形中设置有对准边缘。 MEMS器件的特征在于，上绝缘层的厚度大于下绝缘层的厚度。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2012032482A Optical deflector and method for manufacturing optical deflector 有权
标题翻译：光学偏转器和制造光学偏转器的方法
公开(公告)号：JP2012032482A
公开(公告)日：2012-02-16
申请号：JP2010170268
申请日：2010-07-29
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： FUJITSUKA TOKUO , OZAKI TAKASHI , AOYANAGI ISAO , SHIMAOKA KEIICHI
IPC分类号： G02B26/08 , B81B3/00 , B81C1/00 , H04N1/113
摘要： PROBLEM TO BE SOLVED: To provide an optical deflector capable of accurately swinging a movable part, and a method for manufacturing the optical deflector.SOLUTION: The optical deflector includes a substrate, the movable part, a flexible beam which supports the movable part in a position off the substrate so that the movable part can swing around a swing axis, a fixed electrode provided on the substrate in a position facing a lower surface of the movable part, and a movable electrode provided on the movable part. A projection projecting toward the substrate is formed on the lower surface of the movable part. The projection has a peak in a plane which includes the swing axis of the movable part and is perpendicular to the movable part. In a period when the movable part is swung, the projection is in contact with the substrate.
摘要翻译：要解决的问题：提供一种能够精确摆动可动部件的光学偏转器，以及制造光学偏转器的方法。解决方案：光学偏转器包括基板，可动部分，柔性光束，其在离开基板的位置支撑可动部分，使得可动部件能够围绕摆动轴线摆动;设置在基板上的固定电极面向可动部的下表面的位置，以及设置在可动部上的可动电极。在可动部的下表面上形成向基板突出的突起。突起在包括可动部的摆动轴的平面中具有与可动部垂直的峰。在可动部件摆动的期间，突起与基板接触。版权所有（C）2012，JPO＆INPIT

8. 发明专利

JP2010181586A Optical apparatus 审中-公开
标题翻译：光学装置
公开(公告)号：JP2010181586A
公开(公告)日：2010-08-19
申请号：JP2009024531
申请日：2009-02-05
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： YAMAZAKI SHINTARO , SHIMAOKA KEIICHI
IPC分类号： G02B26/08 , B81B3/00 , G02B5/08
摘要： PROBLEM TO BE SOLVED: To increase driving torque of a movable part rockably supported on an optical apparatus in which a light beam is deflected by rocking a mirror by electromagnetic driving system by increasing the outermost peripheral wiring length of a driving coil.
SOLUTION: The electromagnetic driving type optical apparatus is provided with driving coil installation parts separated from the movable parts. The mirrors are fixed on the upper part of the movable parts, the driving coil installation parts are disposed below the movable parts and fixed to each other by connection parts. When an electric current flows in the driving coils wired at the driving coil installation parts in a magnetic field, Lorentz force exerts on the driving coil installation parts and the movable parts and the driving coil installation parts fixed by the connection parts rock in an integrated manner. In the driving coil installation parts on which the driving coils are installed and the movable parts are provided as separate components, the outer periphery of the driving coil installation parts is made larger than that of the movable parts and the outermost peripheral wiring length of the driving coils can be made long, thus the driving torque for the movable parts can be made large.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：通过增加驱动线圈的最外周线布线长度，通过电磁驱动系统摆动反射镜来增加可摆放地支撑在光学装置上的可移动部件的驱动扭矩。解决方案：电磁驱动型光学装置设置有与可动部分分离的驱动线圈安装部。镜子固定在可动部件的上部，驱动线圈安装部件设置在可动部件的下方，并通过连接部件彼此固定。当在电磁场中驱动线圈安装部分的驱动线圈中流过电流时，洛伦兹力以一体的方式施加在驱动线圈安装部件和由连接部件固定的可动部件和驱动线圈安装部件。在安装有驱动线圈的驱动线圈安装部件和可移动部件作为单独的部件设置时，使驱动线圈安装部件的外周大于可动部件的外周和驱动线圈的最外周线的长度可以使线圈长，从而可以使可动部件的驱动转矩大。版权所有（C）2010，JPO＆INPIT

9. 发明专利

JP2010139546A Mirror 审中-公开
标题翻译：镜子
公开(公告)号：JP2010139546A
公开(公告)日：2010-06-24
申请号：JP2008313171
申请日：2008-12-09
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： OMURA YOSHITERU , SHIMAOKA KEIICHI , AOYANAGI ISAO
IPC分类号： G02B26/10 , G02B26/08 , H04N1/036
摘要： PROBLEM TO BE SOLVED: To prevent the curvature of a surface metallic film of a mirror and a flat plate part heated by incident light to the surface metallic film.
SOLUTION: An n-type semiconductor 76d is disposed on one flexible beam 10b and a p-type semiconductor 76a is disposed on the other flexible beam 10a. When an electric current flows between the n-type semiconductor 76d and the p-type semiconductor 76a, heat is transferred between the flat plate part 8 and a substrate 4. That means a Peltier element is formed. The direction of the heat transfer between the flat plate part 8 and the substrate 4 is determined by the direction of the electric current to the Peltier element 90. The surface metallic film 16 or the like is cooled when it is heated and heated when it is cooled. The curvature of the surface metallic film 16 and the flat plate part 18 is prevented by adjusting the temperature of the surface metallic film 16.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：为了防止反射镜的表面金属膜和由入射光加热到表面金属膜的平板部分的曲率。解决方案：n型半导体76d设置在一个柔性梁10b上，p型半导体76a设置在另一个柔性梁10a上。当电流在n型半导体76d和p型半导体76a之间流动时，在平板部8和基板4之间传递热量。这意味着形成珀耳帖元件。平板部8与基板4之间的传热方向由通向珀耳帖元件90的电流的方向决定。当表面金属膜16等被加热加热时被冷却冷却。通过调节表面金属膜16的温度来防止表面金属膜16和平板部18的曲率。版权所有（C）2010，JPO＆INPIT

10. 发明专利

JP2010054628A Optical device 审中-公开
标题翻译：光学装置
公开(公告)号：JP2010054628A
公开(公告)日：2010-03-11
申请号：JP2008217339
申请日：2008-08-26
申请人： Toyota Central R&D Labs Inc , 株式会社豊田中央研究所
发明人： FUJITSUKA TOKUO , OZAKI TAKASHI , SHIMAOKA KEIICHI , NOMURA TAKESHI , YAMAZAKI SHINTARO , OMURA YOSHITERU
IPC分类号： G02B26/08 , G02B5/08
CPC分类号： G02B26/0841
摘要： PROBLEM TO BE SOLVED: To provide an optical device with high durability.
SOLUTION: In the optical device 2, when an attractive force F1 is generated between a D2-side end portion of a movable layer 20 and a substrate 10, the movable layer 20 inclines at angle θ1 in the direction the D2-side end portion approaches the substrate 10. At that time, a movable mirror 30 inclines at angle θ2 with struts 14a and 14b as support points in the direction a D1-side end portion leaves the movable layer 20. As a result, the movable mirror 30 inclines at angle θ3 (=θ1+θ2) from the substrate 10. Not only the movable mirror 30 but also the movable layer 20 are inclined, whereby the inclination angle θ2 of the movable mirror 30 necessary for ensuring the inclination angle θ3 from the substrate 10 is reduced. The load placed on a connection part of the movable mirror 30 is reduced. Thus, the durability of the optical device is improved.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供具有高耐久性的光学装置。解决方案：在光学装置2中，当在可移动层20的D2侧端部和基板10之间产生吸引力F1时，可动层20以D2侧朝向角度θ1倾斜此时，可动反射镜30以角度θ2倾斜，支柱14a和14b作为支撑点沿着D1侧端部离开可移动层20的方向。结果，可移动反射镜30 与基板10成角度θ3（=θ1+θ2）倾斜。不仅可动镜30而且可动层20倾斜，从而确保与基板的倾斜角θ3所需的可动镜30的倾斜角度θ2 10减少。放置在可移动镜30的连接部分上的载荷减小。因此，提高了光学装置的耐久性。版权所有（C）2010，JPO＆INPIT

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式