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    • 4. 发明授权
    • Preparation process of compound semiconductor
    • 化合物半导体的制备工艺
    • US4767494A
    • 1988-08-30
    • US909287
    • 1986-09-19
    • Naoki KobayashiToshiki MakimotoYoshiji Horikoshi
    • Naoki KobayashiToshiki MakimotoYoshiji Horikoshi
    • C30B25/02H01L21/205H01L21/365
    • C30B25/02C30B29/40C30B29/48C30B29/68H01L21/02395H01L21/02463H01L21/02505H01L21/02546H01L21/02551H01L21/02576H01L21/02579H01L21/0262
    • A compound semiconductor thin film is formed by growing a plurality of molecular layers one over another. According to the present invention, while a carrier gas and a small quantity of hydride containing an element in Group V or VI are normally flowed, an organometallic compound which is diluted with hydrogen and which contains an element in Group III or II and a hydride which is diluted with hydrogen and which contains an element in Group V or VI are alternately introduced over a substrate so that an atomic layer of an element in Group III or II and an atomic layer of an element in Group V or VI are alternately grown over the substrate. According to this method, grown layers having a high degree of purity can be obtained. A portion such as a Ga-Ga two-layer structure formed in the growth of a surface of an element in Group III or II can easily be eliminated by the introduction of a hydrogen halide so that the surface defects and deep levels are significantly decreased and perfect crystals can be obtained. According to the present invention, a high-concentration doping of a III-V compound semiconductor becomes possible. The method of the present invention is advantageous in the fabrication of high-speed FETs and multi-quantum-well lasers using compound semiconductors.
    • 化合物半导体薄膜通过使多个分子层彼此生长而形成。 根据本发明,载体气体和少量含有第V或VI族元素的氢化物通常流动,用氢稀释并含有III或II族元素的有机金属化合物和氢化物 用氢稀释,并且含有V或VI族中的元素交替引入衬底上,使得III或II族元素的原子层和V或VI族元素的原子层交替生长在 基质。 根据该方法,可以得到高纯度的生长层。 通过引入卤化氢可以容易地消除在III或II族元素的表面生长中形成的Ga-Ga两层结构的部分,使得表面缺陷和深度水平显着降低, 可以获得完美的晶体。 根据本发明,III-V族化合物半导体的高浓度掺杂是可能的。 本发明的方法在制造使用复合半导体的高速FET和多量子阱激光器方面是有利的。
    • 9. 发明授权
    • Surface communication apparatus
    • 表面通信装置
    • US08797116B2
    • 2014-08-05
    • US13320133
    • 2010-05-10
    • Naoki KobayashiHiroshi Toyao
    • Naoki KobayashiHiroshi Toyao
    • H01P3/00H01P5/00
    • H04B5/00H01P1/20H01Q15/0013H01Q15/008
    • Provided is a surface communication apparatus that includes: propagation sheet through which electromagnetic waves are propagated; an electromagnetic wave transmission unit disposed on a surface of propagation sheet to transmit the electromagnetic waves to propagation sheet, and an electromagnetic wave reception unit disposed on the surface of propagation sheet to receive the electromagnetic waves propagated through propagation sheet. The electromagnetic wave transmission unit includes an electromagnetic wave generator, and a transmission electromagnetic wave coupler that couples electromagnetic waves generated by the electromagnetic wave generator with propagation sheet. The electromagnetic wave reception unit includes a reception electromagnetic wave coupler that couples the electromagnetic waves propagated through propagation sheet, and an electromagnetic wave output unit that outputs the electromagnetic waves coupled by the reception electromagnetic wave coupler. Propagation sheet has a periodic structure that sets wavelengths of the electromagnetic waves propagated through propagation sheet to be longer than the length of propagation sheet in its extending direction.
    • 提供一种表面通信装置,其包括:传播电磁波的传播片; 布置在传播片表面上的电磁波传输单元,用于将电磁波传输到传播片;以及电磁波接收单元,设置在传播片的表面上,以接收通过传播片传播的电磁波。 电磁波传输单元包括电磁波发生器和将由电磁波发生器产生的电磁波与传播片耦合的传输电磁波耦合器。 电磁波接收单元包括将通过传播片传播的电磁波耦合的接收电磁波耦合器和输出由接收电磁波耦合器耦合的电磁波的电磁波输出单元。 传播片具有周期性结构,其将通过传播片传播的电磁波的波长设置成比传播片在其延伸方向上的长度更长。