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    • 3. 发明授权
    • Terminal crimping device
    • 端子压接装置
    • US5887469A
    • 1999-03-30
    • US901281
    • 1997-07-29
    • Tatsuya MaedaChiaki Hatano
    • Tatsuya MaedaChiaki Hatano
    • B30B1/26B30B15/14H01R43/048B21B37/00
    • H01R43/0486B30B1/266B30B15/14Y10T29/53022Y10T29/53235
    • A terminal crimping device includes an elevating crimper for crimping terminals onto exposed conductors of cables and an anvil positioned opposite to said elevating crimper so that the ascend/descend of the crimper is carried out by a servo motor. The terminal crimping device further includes a height sensor for outputting a crimp height at the time of crimping said terminals, a data storage unit for storing a pressing time range for determination on whether or not terminal crimping is normal and a crimper height value for determination of said pressing time; and determining unit for time measuring the time during which an output from said height sensor is not larger than the crimper height and determining that crimping is normal if the measured time is within said pressing time range. Thus, the determination on whether or not the terminal crimping is normal can be surely made.
    • 端子压接装置包括用于将端子压接在暴露的电缆导体上的升降压接器和与所述升降压接器相对定位的砧座,使得压接器的上升/下降由伺服电动机执行。 端子压接装置还包括用于在压接所述端子时输出压接高度的高度传感器,用于存储用于确定端子压接是否正常的按压时间范围的数据存储单元,以及用于确定端子压接装置的压接器高度值 说压力时间 以及确定单元,用于时间测量来自所述高度传感器的输出不大于所述压接器高度的时间,并且如果所测量的时间在所述按压时间范围内,则确定所述压接正常。 因此,可以确定端子压接是否正常的判定。
    • 5. 发明授权
    • Scanning electron microscope
    • 扫描电子显微镜
    • US08124934B2
    • 2012-02-28
    • US12264605
    • 2008-11-04
    • Tatsuya Maeda
    • Tatsuya Maeda
    • G01N23/00
    • H04N5/76H01J37/265H01J37/28H01J2237/2487H01J2237/2817H04N5/772H04N5/775H04N5/781H04N5/907H04N9/8205
    • It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation process, and confirm details resulting in the error. Upon detecting an error from an abnormality, the scanning electron microscope extracts a sample image lm(t2) obtained by retroceding from a sample image lm(te) stored so as to be associated with time te of error occurrence by a predetermined video quantity (for example, total recording time period t2) previously set and registered by an input-output device, from sample images stored in a recording device while being overwritten, and stores a resultant sample image in another recording device.
    • 在扫描电子显微镜中便于执行再现测试的劳动,对执行自动观察过程所引起的问题进行基本分析,并确认导致错误的细节。 扫描电子显微镜从检测到异常的误差时,提取通过从存储的与样品图像lm(te)相反的获得的样本图像lm(t2),以使与出现错误的时间t相关联的预定视频量(对于 例如,由输入 - 输出设备预先设置和登记的总记录时间段t2)从存储在记录设备中的样本图像被重写,并将所得到的样本图像存储在另一个记录设备中。
    • 6. 发明授权
    • Charged particle beam apparatus and methods for capturing images using the same
    • 带电粒子束装置及使用该装置拍摄图像的方法
    • US07807980B2
    • 2010-10-05
    • US11647348
    • 2006-12-29
    • Chie ShishidoMayuka OosakiMitsugu SatoHiroki KawadaTatsuya Maeda
    • Chie ShishidoMayuka OosakiMitsugu SatoHiroki KawadaTatsuya Maeda
    • G21K7/00A61N5/00G21G5/00
    • H01J37/263H01J37/265H01J37/28H01J2237/2826
    • The present invention provides a charged particle beam apparatus used to measure micro-dimensions (CD value) of a semiconductor apparatus or the like which captures images for measurement. For the present invention, a sample for calibration, on which a plurality of polyhedral structural objects with known angles on surfaces produced by the crystal anisotropic etching technology are arranged in a viewing field, is used. A beam landing angle at each position within a viewing field is calculated based on geometric deformation on an image of each polyhedral structural object. Beam control parameters for equalizing the beam landing angle at each position within the viewing field are pre-registered. The registered beam control parameters are applied according to the position of the pattern to be measured within the viewing field when performing dimensional measurement. Accordingly, the present invention provides methods for reducing the variation in the CD value caused by the variation in the electron beam landing angle with respect to the sample with an equal beam landing angle and methods for reducing the instrumental error caused by the difference in the electron beam landing angle between apparatuses.
    • 本发明提供一种用于测量捕获用于测量的图像的半导体装置等的微尺寸(CD值)的带电粒子束装置。 对于本发明,使用用于校准的样品,其上在视场中排列有通过晶体各向异性蚀刻技术产生的表面上具有已知角度的多个多面体结构物体。 基于每个多面体结构物体的图像上的几何变形来计算视野内的每个位置处的束着陆角。 用于均衡视场内每个位置的束着陆角的光束控制参数被预先注册。 当进行尺寸测量时,根据待测图案的位置在观察区域中应用登记的光束控制参数。 因此,本发明提供了减少相对于具有相同束着陆角的样品的电子束着角的变化引起的CD值的变化的方法,以及用于减少由电子差异引起的仪器误差的方法 设备之间的束着陆角度。