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1. 发明申请

US20090032693A1 Scanning Electron Microscope Alignment Method and Scanning Electron Microscope 有权
标题翻译：扫描电子显微镜对准方法和扫描电子显微镜
公开(公告)号：US20090032693A1
公开(公告)日：2009-02-05
申请号：US12182704
申请日：2008-07-30
申请人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
发明人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
IPC分类号： G01D18/00 , G01N23/00
CPC分类号： G01N23/225 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/1501 , H01J2237/1532
摘要： The present invention aims to provide an axis alignment method, astigmatism correction method and SEM for implementing these methods, which can prevent an alignment or correction error attributable to conditions of a specimen. A first aspect is to obtain the difference between the optimal values acquired from an automatic axis alignment result on a standard sample and from each of automatic axis alignment results on a observation target sample, and to correct an optimal value adjusted using the standard sample by use of the difference thus obtained. A second aspect is to acquire an optimal stigmator value (astigmatism correction signal) by using the standard sample, to store the optimal stigmator value as a default value, to add the optimal stigmator value and the default value depending on the height of an observation target sample pattern, and to perform an astigmatism correction on the basis of the resultant stigmator value.
摘要翻译：本发明旨在提供一种用于实现这些方法的轴对准方法，像散校正方法和SEM，其可以防止由于样品的条件引起的对准或校正误差。第一方面是获得从标准样品的自动轴对准结果获取的最佳值与观察目标样品上的自动轴对准结果中的每一种之间的差异，并且通过使用校正使用标准样品调整的最佳值的差异。第二方面是通过使用标准样本来获取最佳标称值（像散校正信号），以将最佳标称值作为默认值来存储，以根据观察目标的高度添加最优标示符值和默认值样本图案，并且基于得到的标记值进行散光校正。

2. 发明授权

US08188427B2 Scanning electron microscope alignment method and scanning electron microscope 有权
标题翻译：扫描电子显微镜对准方法和扫描电子显微镜
公开(公告)号：US08188427B2
公开(公告)日：2012-05-29
申请号：US12182704
申请日：2008-07-30
申请人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
发明人： Junichi Kakuta , Kazuhiro Ueda , Tatsuya Maeda , Hiroyuki Saito , Katsuhiro Sasada
IPC分类号： G01N23/00 , G21K7/00
CPC分类号： G01N23/225 , H01J37/1471 , H01J37/153 , H01J37/28 , H01J2237/1501 , H01J2237/1532
摘要： A method and apparatus for alignment and astigmatism correction for a scanning electron microscope can prevent an alignment or correction error attributable to the conditions of a particular specimen. First, a difference is determined between optimal values acquired from an automatic axis alignment result on a standard sample, and those obtained from each of a plurality automatic axis alignment results on a observation target sample. An optimal value is then adjusted using the standard sample, by use of the difference thus obtained. Correspondingly, an optimal stigmator value (astigmatism correction signal) is acquired by using the standard sample, and storing the optimal stigmator value as a default value. The optimal stigmator value and the default value depending on the height of an observation target sample pattern are added, and an astigmatism correction is performed on the basis of the resultant stigmator value.
摘要翻译：用于扫描电子显微镜的对准和像散校正的方法和装置可以防止由特定样品的条件引起的对准或校正误差。首先，在从标准样品的自动轴对准结果获得的最佳值与从观察对象样本的多个自动轴对准结果中得到的最佳值之间确定差异。然后使用标准样品通过使用由此获得的差异来调整最佳值。相应地，通过使用标准样品获取最佳标称值（像散校正信号），并将最佳标定值存储为默认值。添加根据观察目标样本图案的高度的最佳标称值和默认值，并根据得到的标示符值进行像散校正。

3. 发明授权

US5614713A Scanning electron microscope 失效
标题翻译：扫描电子显微镜
公开(公告)号：US5614713A
公开(公告)日：1997-03-25
申请号：US617030
申请日：1996-03-18
申请人： Atsushi Kobaru , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
发明人： Atsushi Kobaru , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
IPC分类号： H01J37/20 , H01J37/21 , H01J37/22 , H01J37/244 , H01J37/26
CPC分类号： H01J37/22 , H01J2237/216 , H01J2237/2482
摘要： An electron beam is focused on a specimen by a focusing lens. A light beam is incident on the position of irradiation of the specimen with the electron beam and the reflected light beam is detected by a linear light detector. The output of the detector is used to measure the height of the specimen at the position of irradiation of the electron beam. The specimen is moved in a plane perpendicular to an optical axis of the focusing lens. A specimen height measuring device carries out the height measurement of the specimen at a position to be observed on the specimen and at positions thereon which are in the vicinity of the position to be observed, when those positions are located at the position of irradiation of the electron beam. The specimen height measuring device averages the measured values so as to produce a focusing correction signal on the basis thereof and controls the focusing lens on the basis of the focusing correction signal.
摘要翻译：电子束通过聚焦透镜聚焦在样本上。光束入射到具有电子束的样本的照射位置，并且通过线性光检测器检测反射光束。检测器的输出用于测量样品在电子束照射位置的高度。样本在垂直于聚焦透镜的光轴的平面内移动。样本高度测量装置在样本上观察的位置和在待观察位置附近的位置上执行样本的高度测量，当这些位置位于待观察位置的位置时电子束。样本高度测量装置对测量值进行平均，以便基于此产生聚焦校正信号，并且基于聚焦校正信号控制聚焦透镜。

4. 发明授权

US5598002A Electron beam apparatus 失效
标题翻译：电子束装置
公开(公告)号：US5598002A
公开(公告)日：1997-01-28
申请号：US632664
申请日：1996-03-28
申请人： Hideo Todokoro , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
发明人： Hideo Todokoro , Tadashi Otaka , Tatsuya Maeda , Katsuhiro Sasada
IPC分类号： H01J37/141 , H01J37/20 , H01J37/21 , H01L21/027 , G02B21/18
CPC分类号： H01J37/21 , H01J2237/216 , H01J2237/2482
摘要： An electron beam apparatus focusses an electron beam onto a specimen by means of an objective magnetic lens. In order to detect changes in the height of the specimen, a laser light beam from a laser source is incident on the specimen and the reflected laser beam is detected by a light detector. Any change in the height of the specimen changes the path of the laser beam to the detector. Therefore, by monitoring the detector, the focussing of the electron beam on the specimen can be controlled by varying the current to an excitation coil of the objective magnetic lens or by moving the specimen via a mounting stage. At least one of the pole pieces of the objective lens is on the opposite side of the path of the laser beam to the source of the electron beam, so that the objective magnetic lens may be close to the specimen, permitting a short focal length. Thus, the laser beam may pass between the pole pieces. An optical microscope may also be provided to permit the specimen to be viewed. The viewing path of the optical microscope extends through an opening in one or both of the pole pieces of the objective magnetic lens.
摘要翻译：电子束装置通过物镜磁性透镜将电子束聚焦在样本上。为了检测样品的高度变化，来自激光源的激光束入射到样品上，并且通过光检测器检测反射的激光束。样品高度的任何变化会改变激光束到检测器的路径。因此，通过监视检测器，可以通过改变到物镜磁性透镜的激励线圈的电流或通过安装级移动样本来控制电子束在样本上的聚焦。物镜的极片中的至少一个位于激光束到电子束源的路径的相对侧，使得物镜磁性透镜可能靠近样本，允许短焦距。因此，激光束可以在极片之间通过。还可以提供光学显微镜以允许观察样品。光学显微镜的观察路径延伸穿过物镜磁性透镜的一个或两个极片中的开口。

5. 发明申请

US20080109755A1 Scanning electron microscope with measurement function 审中-公开
标题翻译：扫描电子显微镜具有测量功能
公开(公告)号：US20080109755A1
公开(公告)日：2008-05-08
申请号：US11953777
申请日：2007-12-10
申请人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
发明人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
IPC分类号： G06F3/048
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/28 , H01J2237/221 , H01J2237/2816 , H01J2237/2817
摘要： A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
摘要翻译：一种扫描电子显微镜，可以一次有效地进行多个测量项目的测量，并可以方便地进入，确认和修改自动测量参数。从扫描电子显微镜拍摄的图像中创建线轮廓的参数作为自动测量参数（AMP）输入，用作所有测量项目的常用条件。此外，边缘检测方法和测量计算方法的多个组合被输入作为自动测量参数以对多个项进行测量。

6. 发明申请

US20060219917A1 Scanning electron microscope with measurement function 审中-公开
公开(公告)号：US20060219917A1
公开(公告)日：2006-10-05
申请号：US11398522
申请日：2006-04-06
申请人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
发明人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
IPC分类号： G21K7/00 , G01N23/00
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/28 , H01J2237/221 , H01J2237/2816 , H01J2237/2817
摘要： A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.

7. 发明授权

US07053371B2 Scanning electron microscope with measurement function 有权
标题翻译：扫描电子显微镜具有测量功能
公开(公告)号：US07053371B2
公开(公告)日：2006-05-30
申请号：US10779848
申请日：2004-02-18
申请人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
发明人： Yuuki Ojima , Katsuhiro Sasada , Kazuhiro Ueda , Tsuyoshi Morimoto
IPC分类号： G03F7/20 , G03F7/40
CPC分类号： H01J37/265 , G01N23/2251 , H01J37/28 , H01J2237/221 , H01J2237/2816 , H01J2237/2817
摘要： A scanning electron microscope which efficiently makes measurements for plural measurement items at a time and allows easy entry, confirmation and revision of auto measurement parameters. Parameters for creation of a line profile from an image captured by the scanning electron microscope are entered as auto measurement parameters (AMP) to be used as common conditions for all measurement items. Also, plural combinations of edge detection methods and measurement calculation methods are entered as auto measurement parameters to make measurements for plural items.
摘要翻译：一种扫描电子显微镜，可以一次有效地进行多个测量项目的测量，并可以方便地进入，确认和修改自动测量参数。从扫描电子显微镜拍摄的图像中创建线轮廓的参数作为自动测量参数（AMP）输入，用作所有测量项目的常用条件。此外，边缘检测方法和测量计算方法的多个组合被输入作为自动测量参数以对多个项进行测量。

8. 发明授权

US07626166B2 Electron microscope 有权
标题翻译：电子显微镜
公开(公告)号：US07626166B2
公开(公告)日：2009-12-01
申请号：US12038076
申请日：2008-02-27
申请人： Hiroyuki Saito , Katsuhiro Sasada
发明人： Hiroyuki Saito , Katsuhiro Sasada
IPC分类号： H01J37/16 , H01J3/14 , G01N23/04
CPC分类号： G01N23/225 , H01J37/10 , H01J37/18 , H01J37/265 , H01J37/28 , H01J2237/022 , H01J2237/204 , H01J2237/2817
摘要： An object of the present invention is to prevent foreign bodies attracted by a magnetic field of an objective lens or an electric field of an electrode plate and adhered to a surface of the objective lens or electrode plate from dropping onto the surface of a sample and adhering there during observation of the sample.To achieve the above object, an electron microscope in which, when a sample to be measured is moved away from below an objective lens, an exciting current to the objective lens of a scanning electron microscope is turned off or excitation thereof is made weaker than before the sample to be measured being moved away, or an applied voltage to an acceleration cylinder for accelerating an electron beam is turned off or made lower than before the sample to be measured being moved away is proposed.
摘要翻译：本发明的目的是防止被物镜的磁场或电极板的电场所吸引的异物附着在物镜或电极板的表面上，从而落在样品的表面上并粘附在样品观察期间。为了实现上述目的，一种电子显微镜，其中当待测量的样品从物镜的下方移开时，扫描电子显微镜的物镜的激励电流被关闭或使其激发弱于之前要测量的样本被移开，或提供加速电子束的加速气缸的施加电压被关闭或低于被测量样品移开之前。

9. 发明申请

US20080203301A1 Electron Microscope 有权
标题翻译：电子显微镜
公开(公告)号：US20080203301A1
公开(公告)日：2008-08-28
申请号：US12038076
申请日：2008-02-27
申请人： Hiroyuki Saito , Katsuhiro Sasada
发明人： Hiroyuki Saito , Katsuhiro Sasada
IPC分类号： G01N23/04 , H01J3/14
CPC分类号： G01N23/225 , H01J37/10 , H01J37/18 , H01J37/265 , H01J37/28 , H01J2237/022 , H01J2237/204 , H01J2237/2817
摘要： An object of the present invention is to prevent foreign bodies attracted by a magnetic field of an objective lens or an electric field of an electrode plate and adhered to a surface of the objective lens or electrode plate from dropping onto the surface of a sample and adhering there during observation of the sample.To achieve the above object, an electron microscope in which, when a sample to be measured is moved away from below an objective lens, an exciting current to the objective lens of a scanning electron microscope is turned off or excitation thereof is made weaker than before the sample to be measured being moved away, or an applied voltage to an acceleration cylinder for accelerating an electron beam is turned off or made lower than before the sample to be measured being moved away is proposed.
摘要翻译：本发明的目的是防止被物镜的磁场或电极板的电场所吸引的异物附着在物镜或电极板的表面上，从而落在样品的表面上并粘附在样品观察期间。为了实现上述目的，一种电子显微镜，其中当待测量的样品从物镜的下方移开时，扫描电子显微镜的物镜的激励电流被关闭或使其激发弱于之前要测量的样本被移开，或提供加速电子束的加速气缸的施加电压被关闭或低于被测量样品移开之前。

10. 发明授权

US09671223B2 Pattern dimension measurement method using electron microscope, pattern dimension measurement system, and method for monitoring changes in electron microscope equipment over time 有权
公开(公告)号：US09671223B2
公开(公告)日：2017-06-06
申请号：US13807281
申请日：2011-05-20
申请人： Chie Shishido , Maki Tanaka , Katsuhiro Sasada
发明人： Chie Shishido , Maki Tanaka , Katsuhiro Sasada
IPC分类号： G01B15/04 , G01Q40/00 , H01J37/26 , H01J37/28
CPC分类号： G01B15/04 , G01Q40/00 , H01J37/263 , H01J37/28 , H01J2237/22 , H01J2237/24514 , H01J2237/24578 , H01J2237/2823 , H01J2237/2826
摘要： Beforehand, the device characteristic patterns of each critical dimension SEM are measured, a sectional shape of an object to undergo dimension measurement is presumed by a model base library (MBL) matching system, dimension measurements are carried out by generating signal waveforms through SEM simulation by inputting the presumed sectional shapes and the device characteristic parameters, and differences in the dimension measurement results are registered as machine differences. In actual measurements, from the dimension measurement results in each critical dimension SEM, machine differences are corrected by subtracting the registered machine differences. Furthermore, changes in critical dimension SEM's over time are monitored by periodically measuring the above-mentioned device characteristic parameters and predicting the above-mentioned dimension measurement results. According to the present invention, actual measurements of machine differences, which require considerable time and effort, are unnecessary. In addition, the influence of changes in samples over time, which is problematic in monitoring changes in devices over time, can be eliminated.

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