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    • 8. 发明申请
    • METHOD FOR MANUFACTURING SOLID-STATE IMAGING DEVICE
    • 制造固态成像装置的方法
    • US20110237014A1
    • 2011-09-29
    • US13153941
    • 2011-06-06
    • Susumu HiyamaTomoyuki Hirano
    • Susumu HiyamaTomoyuki Hirano
    • H01L31/18
    • H01L27/14601H01L27/14603H01L27/1462H01L27/14685H01L27/14689
    • A method for manufacturing a solid-state imaging device in which a charge generator that detects an electromagnetic wave and generates signal charges is formed on a semiconductor substrate and a negative-charge accumulated layer having negative fixed charges is formed above a detection plane of the charge generator. The method includes the steps of: forming an oxygen-feed film capable of feeding oxygen on the detection plane of the charge generator; forming a metal film that covers the oxygen-feed film on the detection plane of the charge generator; and performing heat treatment for the metal film in an inactive atmosphere to thereby form an oxide of the metal film between the metal film and the oxygen-feed film on the detection plane of the charge generator, the oxide being to serve as the negative-charge accumulated layer.
    • 一种制造固态成像装置的方法,其中在半导体衬底上形成检测电磁波并产生信号电荷的电荷产生器,并且在电荷的检测平面上方形成具有负固定电荷的负电荷累积层 发电机。 该方法包括以下步骤:在电荷发生器的检测面上形成能够供给氧的氧供给膜; 形成覆盖所述电荷发生器的检测面上的氧供给膜的金属膜; 在惰性气氛中对金属膜进行热处理,从而在电荷发生器的检测面上形成金属膜与氧气供给膜之间的金属膜的氧化物,氧化物用作负电荷 累积层
    • 9. 发明授权
    • Method for manufacturing solid-state imaging device
    • 固态成像装置的制造方法
    • US07968365B2
    • 2011-06-28
    • US12364130
    • 2009-02-02
    • Susumu HiyamaTomoyuki Hirano
    • Susumu HiyamaTomoyuki Hirano
    • H01L31/06H01L31/0216
    • H01L27/14601H01L27/14603H01L27/1462H01L27/14685H01L27/14689
    • A method for manufacturing a solid-state imaging device in which a charge generator that detects an electromagnetic wave and generates signal charges is formed on a semiconductor substrate and a negative-charge accumulated layer having negative fixed charges is formed above a detection plane of the charge generator, the method includes the steps of: forming an oxygen-feed film capable of feeding oxygen on the detection plane of the charge generator; forming a metal film that covers the oxygen-feed film on the detection plane of the charge generator; and performing heat treatment for the metal film in an inactive atmosphere to thereby form an oxide of the metal film between the metal film and the oxygen-feed film on the detection plane of the charge generator, the oxide being to serve as the negative-charge accumulated layer.
    • 一种制造固态成像装置的方法,其中在半导体衬底上形成检测电磁波并产生信号电荷的电荷产生器,并且在电荷的检测平面上方形成具有负固定电荷的负电荷累积层 该方法包括以下步骤:形成能够在电荷产生器的检测平面上供氧的氧气进料膜; 形成覆盖所述电荷发生器的检测面上的氧供给膜的金属膜; 在惰性气氛中对金属膜进行热处理,从而在电荷发生器的检测面上形成金属膜与氧气供给膜之间的金属膜的氧化物,氧化物用作负电荷 累积层