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    • 1. 发明授权
    • Magnetron plasma processing apparatus
    • 磁控管等离子体处理装置
    • US06764575B1
    • 2004-07-20
    • US10069512
    • 2002-03-04
    • Tomomi YamasakiHidetoshi KimuraJunichi AramiHiroo OnoAkira KoshiishiKoji Miyata
    • Tomomi YamasakiHidetoshi KimuraJunichi AramiHiroo OnoAkira KoshiishiKoji Miyata
    • C23C1434
    • H01J37/3266H01J37/3408
    • When a substrate 30 is to be subjected to a magnetron plasma process, a dipole ring magnet 21 is provided, in which a large number of anisotropic segment magnets 22 are arranged in a ring-like shape around the outer wall of a chamber 1. A magnetic field gradient, wherein the magnetic field strength decreases from the E pole side toward the W pole side in a direction perpendicular to a magnetic field direction B, is formed in a plane perpendicular to the direction of an electric field between a pair of electrodes separated from each other. The anisotropic segment magnets have a first section a including anisotropic segment magnets arranged in the vicinity of a region A located outside an E pole side end of the process substrate with an N pole thereof being directed toward this region, and a second portion b including anisotropic segment magnets arranged with an S pole thereof being directed toward this region, to locally increase the magnetic field strengths of the first and second regions.
    • 当对基板30进行磁控管等离子体处理时,设置偶极环磁体21,其中大量的各向异性磁体22围绕室1的外壁排列成环状。 其磁场强度在与磁场方向B垂直的方向从E极侧朝向W极侧的磁场强度形成在与分离的一对电极之间的电场方向垂直的面内 从彼此。 各向异性区段磁体具有第一区段a,其包括各向异性区段磁体,其布置在位于处理衬底的E极侧端外侧的区域A的附近,其N极指向该区域,第二部分b包括各向异性 将其S极布置的段磁体指向该区域,以局部地增加第一和第二区域的磁场强度。
    • 9. 发明授权
    • Apparatus for attaching belt-like materials
    • 用于安装带状材料的装置
    • US4844768A
    • 1989-07-04
    • US181346
    • 1988-04-14
    • Hidetoshi Kimura
    • Hidetoshi Kimura
    • B29D30/30
    • B29D30/3007B29D2030/463Y10T156/13
    • An apparatus for attaching belt-like materials has a rotating unit for rotating a forming drum, a holding unit located apart from the forming drum for holding continuous belt-like materials along entire widths to be supplied to the forming drum, embracing units located between the forming drum and the holding units for embracing the belt-like materials along entire widths. A reciprocating unit is used for reciprocating the embracing units between the holding unit and the forming drum. A cutting unit is used for cutting in width directions the belt-like materials held by the holding unit and the embracing units. The apparatus includes control unit for controlling the rotating unit and the reciprocating unit so that circumferential speeds of the forming drum and moving speeds of the embracing means are at a constant ratio.
    • 用于安装带状材料的装置具有用于旋转成形滚筒的旋转单元,与成形滚筒隔开的保持单元,用于沿着整个宽度保持连续的带状材料以供应到成形滚筒,包围单元位于 成形鼓和用于沿着整个宽度包围带状材料的保持单元。 往复运动单元用于使保持单元和成形滚筒之间的包围单元往复运动。 切割单元用于在宽度方向上切割由保持单元和包围单元保持的带状材料。 该装置包括用于控制旋转单元和往复运动单元的控制单元,使得成形滚筒的圆周速度和包围装置的移动速度保持恒定的比例。