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    • 1. 发明申请
    • PRESSURE DIFFERENCE MEASURING CELL
    • 压力差异测量单元
    • US20100281992A1
    • 2010-11-11
    • US12735098
    • 2008-12-12
    • Wolfgang DannhauerMichael PhilippsFriedrich SchwabeDieter Stolze
    • Wolfgang DannhauerMichael PhilippsFriedrich SchwabeDieter Stolze
    • G01L9/00
    • G01L19/0609G01L9/0073G01L13/026
    • A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.
    • 用于记录第一压力和第二压力之间的压力差的压差测量单元包括:弹性测量装置,其具有包括硅的至少一个测量膜或隔膜; 与弹性测量装置压力连接的平台; 用于将第一压力转移到弹性测量装置的第一表面部分上的第一液压路径; 以及用于将第二压力传递到弹性测量装置的第二表面部分上的第二液压路径。 所述第一压力与所述第二压力相反,并且所述测量装置的弹性挠度是所述第一和第二压力之间的差值的量度,其中所述压差测量单元还具有至少一个液压节流阀,其特征在于,所述至少一个 一个液压油门包括多孔硅。
    • 2. 发明授权
    • Pressure difference measuring cell
    • 压力差测量单元
    • US08402836B2
    • 2013-03-26
    • US12735098
    • 2008-12-12
    • Wolfgang DannhauerMichael PhilippsFriedrich SchwabeDieter StolzeAnh Tuan Tham
    • Wolfgang DannhauerMichael PhilippsFriedrich SchwabeDieter StolzeAnh Tuan Tham
    • G01L13/02
    • G01L19/0609G01L9/0073G01L13/026
    • A pressure difference measuring cell for registering pressure difference between a first pressure and a second pressure, comprises: an elastic measuring arrangement having at least one measuring membrane, or diaphragm, that comprises silicon; a platform, which is pressure-tightly connected with the elastic measuring arrangement; a first hydraulic path for transferring a first pressure onto a first surface section of the elastic measuring arrangement; and a second hydraulic path for transferring a second pressure onto a second surface section of the elastic measuring arrangement. The first pressure opposes the second pressure, and the elastic deflection of the measuring arrangement is a measure for the difference between the first and the second pressure, wherein the pressure difference measuring cell has additionally at least one hydraulic throttle, characterized in that the at least one hydraulic throttle comprises porous silicon.
    • 用于记录第一压力和第二压力之间的压力差的压差测量单元包括:弹性测量装置,其具有包括硅的至少一个测量膜或隔膜; 与弹性测量装置压力连接的平台; 用于将第一压力转移到弹性测量装置的第一表面部分上的第一液压路径; 以及用于将第二压力传递到弹性测量装置的第二表面部分上的第二液压路径。 所述第一压力与所述第二压力相反,并且所述测量装置的弹性挠度是所述第一和第二压力之间的差值的量度,其中所述压差测量单元还具有至少一个液压节流阀,其特征在于,所述至少一个 一个液压油门包括多孔硅。