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    • 6. 发明授权
    • Micro-fabricated electrokinetic pump
    • 微电动动力泵
    • US07449122B2
    • 2008-11-11
    • US10968376
    • 2004-10-18
    • David CorbinKenneth GoodsonThomas KennyJuan SantiagoShulin Zeng
    • David CorbinKenneth GoodsonThomas KennyJuan SantiagoShulin Zeng
    • F04B1/00
    • F04B17/00F04B19/006
    • An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
    • 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。
    • 9. 发明申请
    • MICRO-FABRICATED ELECTROKINETIC PUMP
    • 微型电动泵
    • US20050042110A1
    • 2005-02-24
    • US10366121
    • 2003-02-12
    • David CorbinKenneth GoodsonThomas KennyJuan SantiagoShulin Zeng
    • David CorbinKenneth GoodsonThomas KennyJuan SantiagoShulin Zeng
    • F04B17/00F04B19/00F04F99/00F04F11/00F04B37/02
    • F04B17/00F04B19/006
    • An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
    • 用于泵送液体的电动泵包括具有多个窄的,短的和直的孔隙的泵送体,用于将液体引导通过身体。 用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。 泵体形成在支撑结构上以保持泵体的机械完整性。 泵可以使用常规的半导体处理步骤制造。 优选使用等离子体蚀刻形成孔。 该结构被氧化以使结构绝缘并且还使孔变窄。 通过蚀刻衬底并除去界面氧化物层形成支撑结构。 形成电极以在泵体上施加电压电位。 制造电动泵的另一种方法包括提供蚀刻停止对准标记,使得蚀刻步骤自我终止。
    • 10. 发明申请
    • Electroosmotic micropumps with applications to fluid dispensing and field sampling
    • 电渗雾微乳液,适用于流体分配和现场取样
    • US20050034842A1
    • 2005-02-17
    • US10638732
    • 2003-08-11
    • David HuberShuhuai YaoJuan Santiago
    • David HuberShuhuai YaoJuan Santiago
    • B01L3/02C01B5/00F04B19/00F28F7/00
    • C01B5/00B01L3/0241B01L2200/143B01L2300/069B01L2400/0418F04B19/006
    • Apparatus and methods according to the present invention preferably utilize electroosmotic pumps in fluid handling and field sampling applications. The electroosmotic pumps used in these applications are capable of generating high pressure and flow without moving mechanical parts and the associated generation of unacceptable electrical and acoustic noise, as well as the associated reduction in reliability. Having multiple small flow channels in parallel provides both a high flow rate and high pressure in liquid handling. These electroosmotic pumps are fabricated with materials and structures that improve performance, efficiency, and reduce weight and manufacturing cost relative to presently available micropumps. These electroosmotic pumps also allow for recapture of evolved gases and deposited materials, which may provide for long-term closed-loop operation. Apparatus and methods according to the present invention also allow active regulation of the fluid handling and field sampling devices through electrical control of the flow through the pump. Electroosmotic pumping enables precise dispensing of samples to form genetic, proteomic, or small molecule arrays. A fluid sensor which can be optical, capacitive or other type of electrical sensor is integrated with the electroosmotic pump for measuring liquid levels in liquid drawing and dispensing operations.
    • 根据本发明的设备和方法优选地在流体处理和现场取样应用中使用电渗泵。 在这些应用中使用的电渗泵能够在不移动机械部件的情况下产生高压力和流量,并且相关产生不可接受的电气和噪音噪声以及相关联的可靠性降低。 具有多个小流量通道并联提供液体处理中的高流速和高压力。 这些电渗泵由材料和结构制成,相对于目前可获得的微量泵,其材料和结构提高了性能,效率并降低了重量和制造成本。 这些电渗泵还允许重新捕获可能提供长期闭环操作的放出气体和沉积材料。 根据本发明的装置和方法还允许通过对通过泵的流的电控制来主动调节流体处理和现场取样装置。 电渗抽吸可以精确分配样品以形成遗传,蛋白质组或小分子阵列。 可以将光学,电容或其它类型的电传感器的流体传感器与电渗泵一体化,以测量液体抽取和分配操作中的液位。