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1. 发明申请

US20050042110A1 MICRO-FABRICATED ELECTROKINETIC PUMP 有权
标题翻译：微型电动泵
公开(公告)号：US20050042110A1
公开(公告)日：2005-02-24
申请号：US10366121
申请日：2003-02-12
申请人： David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
发明人： David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
IPC分类号： F04B17/00 , F04B19/00 , F04F99/00 , F04F11/00 , F04B37/02
CPC分类号： F04B17/00 , F04B19/006
摘要： An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
摘要翻译：用于泵送液体的电动泵包括具有多个窄的，短的和直的孔隙的泵送体，用于将液体引导通过身体。用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。泵体形成在支撑结构上以保持泵体的机械完整性。泵可以使用常规的半导体处理步骤制造。优选使用等离子体蚀刻形成孔。该结构被氧化以使结构绝缘并且还使孔变窄。通过蚀刻衬底并除去界面氧化物层形成支撑结构。形成电极以在泵体上施加电压电位。制造电动泵的另一种方法包括提供蚀刻停止对准标记，使得蚀刻步骤自我终止。

2. 发明授权

US07449122B2 Micro-fabricated electrokinetic pump 有权
标题翻译：微电动动力泵
公开(公告)号：US07449122B2
公开(公告)日：2008-11-11
申请号：US10968376
申请日：2004-10-18
申请人： David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
发明人： David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
IPC分类号： F04B1/00
CPC分类号： F04B17/00 , F04B19/006
摘要： An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
摘要翻译：用于泵送液体的电动泵包括具有多个窄的，短的和直的孔隙的泵送体，用于将液体引导通过身体。用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。泵体形成在支撑结构上以保持泵体的机械完整性。泵可以使用常规的半导体处理步骤制造。优选使用等离子体蚀刻形成孔。该结构被氧化以使结构绝缘并且还使孔变窄。通过蚀刻衬底并除去界面氧化物层形成支撑结构。形成电极以在泵体上施加电压电位。制造电动泵的另一种方法包括提供蚀刻停止对准标记，使得蚀刻步骤自我终止。

3. 发明申请

US20050084385A1 Micro-fabricated electrokinetic pump 有权
公开(公告)号：US20050084385A1
公开(公告)日：2005-04-21
申请号：US10968376
申请日：2004-10-18
申请人： David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
发明人： David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
IPC分类号： F04B17/00 , F04B19/00 , F04F99/00 , F04B1/00
CPC分类号： F04B17/00 , F04B19/006
摘要： An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.

4. 发明授权

US06881039B2 Micro-fabricated electrokinetic pump 有权
标题翻译：微电动动力泵
公开(公告)号：US06881039B2
公开(公告)日：2005-04-19
申请号：US10366121
申请日：2003-02-12
申请人： David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
发明人： David Corbin , Kenneth Goodson , Thomas Kenny , Juan Santiago , Shulin Zeng
IPC分类号： F04B17/00 , F04B19/00 , F04F99/00 , F04F11/00
CPC分类号： F04B17/00 , F04B19/006
摘要： An electrokinetic pump for pumping a liquid includes a pumping body having a plurality of narrow, short and straight pore apertures for channeling the liquid through the body. A pair of electrodes for applying a voltage differential are formed on opposing surfaces of the pumping body at opposite ends of the pore apertures. The pumping body is formed on a support structure to maintain a mechanical integrity of the pumping body. The pump can be fabricated using conventional semiconductor processing steps. The pores are preferably formed using plasma etching. The structure is oxidized to insulate the structure and also narrow the pores. A support structure is formed by etching a substrate and removing an interface oxide layer. Electrodes are formed to apply a voltage potential across the pumping body. Another method of fabricating an electrokinetic pump includes providing etch stop alignment marks so that the etch step self-terminates.
摘要翻译：用于泵送液体的电动泵包括具有多个窄的，短的和直的孔隙的泵送体，用于将液体引导通过身体。用于施加电压差的一对电极形成在孔隙的相对端处的泵体的相对表面上。泵体形成在支撑结构上以保持泵体的机械完整性。泵可以使用常规的半导体处理步骤制造。优选使用等离子体蚀刻形成孔。该结构被氧化以使结构绝缘并且还使孔变窄。通过蚀刻衬底并除去界面氧化物层形成支撑结构。形成电极以在泵体上施加电压电位。制造电动泵的另一种方法包括提供蚀刻停止对准标记，使得蚀刻步骤自我终止。

5. 发明申请

US20050210913A1 Remedies to prevent cracking in a liquid system 有权
公开(公告)号：US20050210913A1
公开(公告)日：2005-09-29
申请号：US11111535
申请日：2005-04-20
申请人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
发明人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
IPC分类号： F04B17/00 , F28D15/02 , F28F19/00 , H01L23/473 , H05K7/20 , B21C3/00 , A23G1/22 , A23G3/12 , A23G3/16 , A23P1/00 , B23B3/10 , B23B19/00 , B23B23/00 , F25B1/00 , F25B39/02
CPC分类号： H01L23/473 , F04B17/00 , F28D15/00 , F28F19/006 , F28F2245/02 , F28F2250/08 , H01L2924/0002 , H01L2924/00
摘要： A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are designed to prevent cracking of their enclosures and chambers. Also described are methods of preventing cracking in a liquid cooling system. In all these cases, the system must be designed to tolerate expansion when water is frozen.

6. 发明申请

US20050183845A1 Remedies to prevent cracking in a liquid system 失效
公开(公告)号：US20050183845A1
公开(公告)日：2005-08-25
申请号：US11111536
申请日：2005-04-20
申请人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
发明人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
IPC分类号： F04B17/00 , F28D15/02 , F28F19/00 , H01L23/473 , H05K7/20 , F16B1/00 , F25B39/02 , F28F7/00
CPC分类号： H01L23/473 , F04B17/00 , F28D15/00 , F28F19/006 , F28F2245/02 , F28F2250/08 , H01L2924/0002 , H01L2924/00
摘要： A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are designed to prevent cracking of their enclosures and chambers. Also described are methods of preventing cracking in a liquid cooling system. In all these cases, the system must be designed to tolerate expansion when water is frozen.

7. 发明申请

US20050183445A1 Remedies to prevent cracking in a liquid system 有权
公开(公告)号：US20050183445A1
公开(公告)日：2005-08-25
申请号：US11111520
申请日：2005-04-20
申请人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
发明人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
IPC分类号： F04B17/00 , F28D15/02 , F28F19/00 , H01L23/473 , H05K7/20 , B23B3/10 , A23G1/22 , A23G3/12 , A23G3/16 , A23P1/00 , B21C3/00 , B23B19/00 , B23B23/00 , F25B1/00 , F25D11/00
CPC分类号： H01L23/473 , F04B17/00 , F28D15/00 , F28F19/006 , F28F2245/02 , F28F2250/08 , H01L2924/0002 , H01L2924/00
摘要： A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are designed to prevent cracking of their enclosures and chambers. Also described are methods of preventing cracking in a liquid cooling system. In all these cases, the system must be designed to tolerate expansion when water is frozen.

8. 发明申请

US20050183444A1 Remedies to prevent cracking in a liquid system 有权
标题翻译：补救措施以防止液体系统中的开裂
公开(公告)号：US20050183444A1
公开(公告)日：2005-08-25
申请号：US11111253
申请日：2005-04-20
申请人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
发明人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
IPC分类号： F04B17/00 , F28D15/02 , F28F19/00 , H01L23/473 , H05K7/20 , A23P1/00 , A23G1/22 , A23G3/12 , A23G3/16 , B21C3/00 , B23B3/10 , B23B19/00 , B23B23/00 , F25B1/00 , F25D11/00
CPC分类号： H01L23/473 , F04B17/00 , F28D15/00 , F28F19/006 , F28F2245/02 , F28F2250/08 , H01L2924/0002 , H01L2924/00
摘要： A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are designed to prevent cracking of their enclosures and chambers. Also described are methods of preventing cracking in a liquid cooling system. In all these cases, the system must be designed to tolerate expansion when water is frozen.
摘要翻译：提供使用最小尺寸和体积的外壳，气穴，可压缩物体和柔性物体的液体冷却系统，以防止冻结时水性溶液的膨胀。在这种系统中，管道，泵和热交换器被设计成防止其外壳和腔室的破裂。还描述了防止液体冷却系统中的裂纹的方法。在所有这些情况下，系统必须设计成在水被冻结时容忍膨胀。

9. 发明申请

US20050183443A1 Remedies to prevent cracking in a liquid system 有权
公开(公告)号：US20050183443A1
公开(公告)日：2005-08-25
申请号：US11111133
申请日：2005-04-20
申请人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
发明人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas Kenny , James Shook
IPC分类号： F04B17/00 , F28D15/02 , F28F19/00 , H01L23/473 , H05K7/20 , F25D11/00 , F25B1/00
CPC分类号： H01L23/473 , F04B17/00 , F28D15/00 , F28F19/006 , F28F2245/02 , F28F2250/08 , H01L2924/0002 , H01L2924/00
摘要： A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are designed to prevent cracking of their enclosures and chambers. Also described are methods of preventing cracking in a liquid cooling system. In all these cases, the system must be designed to tolerate expansion when water is frozen.

10. 发明授权

US07077634B2 Remedies to prevent cracking in a liquid system 有权
标题翻译：补救措施以防止液体系统中的开裂
公开(公告)号：US07077634B2
公开(公告)日：2006-07-18
申请号：US11111133
申请日：2005-04-20
申请人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas W. Kenny , James Gill Shook
发明人： Mark Munch , Kenneth Goodson , David Corbin , Shulin Zeng , Thomas W. Kenny , James Gill Shook
IPC分类号： F04B43/08
CPC分类号： H01L23/473 , F04B17/00 , F28D15/00 , F28F19/006 , F28F2245/02 , F28F2250/08 , H01L2924/0002 , H01L2924/00
摘要： A liquid cooling system utilizing minimal size and volume enclosures, air pockets, compressible objects, and flexible objects is provided to protect against expansion of water-based solutions when frozen. In such a system, pipes, pumps, and heat exchangers are designed to prevent cracking of their enclosures and chambers. Also described are methods of preventing cracking in a liquid cooling system. In all these cases, the system must be designed to tolerate expansion when water is frozen.
摘要翻译：提供使用最小尺寸和体积的外壳，气穴，可压缩物体和柔性物体的液体冷却系统，以防止冻结时水性溶液的膨胀。在这种系统中，管道，泵和热交换器被设计成防止其外壳和腔室的破裂。还描述了防止液体冷却系统中的裂纹的方法。在所有这些情况下，系统必须设计成在水冻结时容忍膨胀。

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