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    • 7. 发明授权
    • Method and apparatus for manufacturing diamond shaped chips
    • 用于制造菱形芯片的方法和装置
    • US07961932B2
    • 2011-06-14
    • US11865728
    • 2007-10-01
    • Robert J. AllenJohn M. CohnScott W. GouldPeter A. HabitzJuergen KoehlGustavo E. TellezIvan L. WemplePaul S. Zuchowski
    • Robert J. AllenJohn M. CohnScott W. GouldPeter A. HabitzJuergen KoehlGustavo E. TellezIvan L. WemplePaul S. Zuchowski
    • G06K9/00
    • H01L27/0207
    • In a first aspect, an inventive apparatus for imaging a chip on a wafer includes a combined diamond chip image and kerf image having a plurality of sloped sides. The combined diamond chip image and kerf image includes a diamond chip image comprising a plurality of chip image rows that are parallel to at least one diagonal of the diamond chip image, and includes a kerf image adjacent to the diamond chip image. The kerf image comprises at least one kerf image row that is parallel to the at least one diagonal of the diamond chip image. The apparatus further includes a blocking material extending from the combined diamond chip image and kerf image to at least a periphery of an exposure field of a stepper. In a second aspect the imaging apparatus comprises an n-sided polygon-shaped combined chip image and kerf image. Also provided are inventive methods of manufacturing chips, and wafers manufactured in accordance with the inventive methods.
    • 在第一方面中,用于对晶片上的芯片进行成像的本发明的装置包括具有多个倾斜侧面的组合金刚石芯片图像和切口图像。 组合的金刚石芯片图像和切口图像包括金刚石芯片图像,其包括与金刚石芯片图像的至少一个对角线平行的多个芯片图像行,并且包括与金刚石芯片图像相邻的切痕图像。 切口图像包括平行于金刚石切片图像的至少一个对角线的至少一个切痕图像行。 该装置还包括从组合的金刚石片图像和切痕图像延伸到步进器的曝光场的至少周边的阻挡材料。 在第二方面,成像装置包括n侧多边形组合芯片图像和切口图像。 还提供了制造芯片的创造性方法和根据本发明方法制造的晶片。
    • 8. 发明授权
    • Method and apparatus for manufacturing diamond shaped chips
    • 用于制造菱形芯片的方法和装置
    • US07289659B2
    • 2007-10-30
    • US10250295
    • 2003-06-20
    • Robert J. AllenJohn M. CohnScott W. GouldPeter A. HabitzJuergen KoehlGustavo E. TellezIvan L. WemplePaul S. Zuchowski
    • Robert J. AllenJohn M. CohnScott W. GouldPeter A. HabitzJuergen KoehlGustavo E. TellezIvan L. WemplePaul S. Zuchowski
    • G06K9/00
    • H01L27/0207
    • In a first aspect, an inventive apparatus for imaging a chip on a wafer includes a combined diamond chip image and kerf image having a plurality of sloped sides. The combined diamond chip image and kerf image includes a diamond chip image comprising a plurality of chip image rows that are parallel to at least one diagonal of the diamond chip image, and includes a kerf image adjacent to the diamond chip image. The kerf image comprises at least one kerf image row that is parallel to the at least one diagonal of the diamond chip image. The apparatus further includes a blocking material extending from the combined diamond chip image and kerf image to at least a periphery of an exposure field of a stepper. In a second aspect the imaging apparatus comprises an n-sided polygon-shaped combined chip image and kerf image. Also provided are inventive methods of manufacturing chips, and wafers manufactured in accordance with the inventive methods.
    • 在第一方面中,用于对晶片上的芯片进行成像的本发明的装置包括具有多个倾斜侧面的组合金刚石芯片图像和切口图像。 组合的金刚石芯片图像和切口图像包括金刚石芯片图像,其包括与金刚石芯片图像的至少一个对角线平行的多个芯片图像行,并且包括与金刚石芯片图像相邻的切痕图像。 切口图像包括平行于金刚石切片图像的至少一个对角线的至少一个切痕图像行。 该装置还包括从组合的金刚石片图像和切痕图像延伸到步进器的曝光场的至少周边的阻挡材料。 在第二方面,成像装置包括n侧多边形组合芯片图像和切口图像。 还提供了制造芯片的创造性方法和根据本发明方法制造的晶片。