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1. 发明授权

US07847997B2 Projection apparatus for scanningly projection 有权
标题翻译：投影仪用于扫描投影
公开(公告)号：US07847997B2
公开(公告)日：2010-12-07
申请号：US12038112
申请日：2008-02-27
申请人： Thilo Sandner , Harald Schenk , Michael Scholles , Markus Schwarzenberg , Alexander Wolter
发明人： Thilo Sandner , Harald Schenk , Michael Scholles , Markus Schwarzenberg , Alexander Wolter
IPC分类号： G02B26/00
CPC分类号： G02B26/101 , H04N1/40037 , H04N9/3129 , H04N9/3155
摘要： A projection apparatus for scanningly projecting an image onto an image field by means of a radiation beam includes a modulator for modulating an intensity of the radiation beam such that the intensity of the radiation beam changes in a time interval during which a scan point to which the radiation beam is directed sweeps a pixel of the image field.
摘要翻译：用于通过辐射束将图像扫描地投影到图像场上的投影设备包括调制器，用于调制辐射束的强度，使得辐射束的强度在时间间隔内变化，在该时间间隔期间，辐射束被定向扫描图像场的像素。

2. 发明申请

US20090302960A1 Oscillating, deflectable micromechanical element and method for use thereof 有权
标题翻译：摆动，可偏转微机械元件及其使用方法
公开(公告)号：US20090302960A1
公开(公告)日：2009-12-10
申请号：US12298101
申请日：2006-04-24
申请人： Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
发明人： Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
IPC分类号： H03B5/30
CPC分类号： B81B3/0078 , B81B2201/042 , B81B2203/0109
摘要： The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.
摘要翻译：本发明涉及以振荡方式可偏转的微机械元件以及用于操作这些元件的方法。在这方面，本发明的目的是能够以稳定和简单的方式在考虑到相应的机械共振频率的情况下在振荡偏转上操作微机械元件。在根据本发明的元件上存在至少一个弹簧元件，其被保持在其上。它使用电气交流电压在两个反转点之间偏转。一个或多个弹簧元件具有/具有非线性弹簧特性，使得改变的机械共振频率导致依赖于相应的偏转。

3. 发明授权

US07940439B2 Method for generating a micromechanical structure 有权
标题翻译：用于产生微机械结构的方法
公开(公告)号：US07940439B2
公开(公告)日：2011-05-10
申请号：US12058835
申请日：2008-03-31
申请人： Denis Jung , Christian Drabe , Thilo Sandner , Harald Schenk , Thomas Klose , Alexander Wolter
发明人： Denis Jung , Christian Drabe , Thilo Sandner , Harald Schenk , Thomas Klose , Alexander Wolter
IPC分类号： G02B26/08 , H01L21/46
CPC分类号： B81C1/00103 , B81B2203/0384 , B81B2203/04
摘要： In a method for manufacturing a micromechanical structure, first a two-dimensional structure is formed in a substrate. The two-dimensional structure is deflected from the substrate plane by action of force and fixed in the deflected state.
摘要翻译：在微机械结构的制造方法中，首先在基板上形成二维结构。二维结构通过力的作用从基板平面偏转并在偏转状态下固定。

4. 发明授权

US07932788B2 Oscillating, deflectable micromechanical element and method for use thereof 有权
标题翻译：摆动，可偏转微机械元件及其使用方法
公开(公告)号：US07932788B2
公开(公告)日：2011-04-26
申请号：US12298101
申请日：2006-04-24
申请人： Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
发明人： Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
IPC分类号： H03B5/18 , H01L27/14
CPC分类号： B81B3/0078 , B81B2201/042 , B81B2203/0109
摘要： The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.
摘要翻译：本发明涉及以振荡方式可偏转的微机械元件以及用于操作这些元件的方法。在这方面，本发明的目的是能够以稳定和简单的方式在考虑到相应的机械共振频率的情况下在振荡偏转上操作微机械元件。在根据本发明的元件上存在至少一个弹簧元件，其被保持在其上。它使用电气交流电压在两个反转点之间偏转。一个或多个弹簧元件具有/具有非线性弹簧特性，使得改变的机械共振频率导致依赖于相应的偏转。

5. 发明授权

US07490947B2 Microoptic reflecting component 有权
标题翻译：微光反射组件
公开(公告)号：US07490947B2
公开(公告)日：2009-02-17
申请号：US11640497
申请日：2006-12-18
申请人： Thilo Sandner , Wolfram Pufe , Harald Schenk
发明人： Thilo Sandner , Wolfram Pufe , Harald Schenk
IPC分类号： G02B5/08
CPC分类号： G02B26/0866 , G02B26/0825
摘要： The invention relates to active microoptic reflecting components for adapting or changing the focal length or focal position in optical systems. It is the object of the invention to make available a miniaturized reflecting microoptic component for focusing or defocusing incident electromagnetic radiation, with which a variation in the focal distance can be achieved simply and at low cost. On the component according to the invention there is an elastically deformably membrane which is formed at least with one reflecting layer comprising a first material or material mixture and at least with one further layer or substrate which is formed from a second material or material mixture. First and second materials or material mixtures have thermal coefficients of expansion which deviate from each other. In addition a heating or temperature control mechanism is present.
摘要翻译：本发明涉及用于适应或改变光学系统中的焦距或焦点位置的有源微光反射部件。本发明的目的是提供一种用于聚焦或散焦入射电磁辐射的小型化反射微光学元件，通过该小型化可以简单且低成本地实现焦距的变化。在根据本发明的部件上，存在可弹性变形的膜，其至少形成有一个包含第一材料或材料混合物的反射层，并且至少形成有由第二材料或材料混合物形成的另一层或基底。第一和第二材料或材料混合物具有彼此偏离的热膨胀系数。此外，存在加热或温度控制机构。

6. 发明授权

US07760414B2 Optical device comprising a structure for avoiding reflections 有权
标题翻译：光学装置包括用于避免反射的结构
公开(公告)号：US07760414B2
公开(公告)日：2010-07-20
申请号：US12058855
申请日：2008-03-31
申请人： Harald Schenk , Thilo Sandner
发明人： Harald Schenk , Thilo Sandner
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/0833 , G02B27/0018
摘要： An optical device includes a deflectable optical functional structure for interacting with electromagnetic radiation incident thereon, and a protective structure which is associated to the optical functional structure and at least partly transparent for the electromagnetic radiation. The optical functional structure is arranged in a manner tilted relative to the protective structure so that, in a non-deflected position of the optical functional structure, a main beam path of the electromagnetic radiation which interacts with the optical functional structure through the protective structure has an angle relative to a sub-beam path of the electromagnetic radiation reflected at the protective structure.
摘要翻译：光学装置包括用于与入射在其上的电磁辐射相互作用的可偏转光学功能结构，以及与光学功能结构相关联并且对于电磁辐射至少部分透明的保护结构。光学功能结构以相对于保护结构倾斜的方式布置，使得在光学功能结构的非偏转位置中，通过保护结构与光学功能结构相互作用的电磁辐射的主光束路径具有相对于在保护结构处反射的电磁辐射的子光束路径的角度。

7. 发明授权

US07466474B2 Micromechanical device with tilted electrodes 有权
标题翻译：具有倾斜电极的微机械装置
公开(公告)号：US07466474B2
公开(公告)日：2008-12-16
申请号：US12058876
申请日：2008-03-31
申请人： Denis Jung , Christian Drabe , Harald Schenk , Thilo Sandner , Thomas Klose
发明人： Denis Jung , Christian Drabe , Harald Schenk , Thilo Sandner , Thomas Klose
IPC分类号： G02B26/00 , G02B26/08
CPC分类号： G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/0866
摘要： A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.
摘要翻译：微机械装置包括可以从静止位置围绕主轴偏转的微机械功能结构，安装到微机械功能结构的可动电极和固定电极，其可以相对于倾斜轴线倾斜到静止位置的可动电极，其中倾斜轴线平行于主轴线或与主轴线相同。

8. 发明授权

US08842356B2 Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device 有权
标题翻译：具有温度稳定性的微机械装置以及用于在微机械装置上调整限定温度或限定温度过程的方法
公开(公告)号：US08842356B2
公开(公告)日：2014-09-23
申请号：US13408151
申请日：2012-02-29
申请人： Thilo Sandner , Harald Schenk , Joerg Heber , Thomas Klose , Andreas Bergmann , Christian Gerwig , Thomas Knieling
发明人： Thilo Sandner , Harald Schenk , Joerg Heber , Thomas Klose , Andreas Bergmann , Christian Gerwig , Thomas Knieling
IPC分类号： G02B26/00 , G02F1/00 , G02B7/00 , G02B26/08 , G01J5/02 , G01J5/08 , G01J5/06
CPC分类号： G01J5/061 , G01J5/026 , G01J5/0809 , G02B7/008 , G02B26/0816
摘要： A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.
摘要翻译：微机械装置包括微机械功能结构和与微机械功能结构相关联的电磁辐射加热，其形成为在微机械功能结构中引起空间和时间上限定的温度或空间和时间上限定的温度过程。

9. 发明申请

US20080239446A1 MICROMECHANICAL DEVICE WITH TILTED ELECTRODES 有权
标题翻译：具有倾斜电极的微电子设备
公开(公告)号：US20080239446A1
公开(公告)日：2008-10-02
申请号：US12058876
申请日：2008-03-31
申请人： Denis Jung , Christian Drabe , Harald Schenk , Thilo Sandner , Thomas Klose
发明人： Denis Jung , Christian Drabe , Harald Schenk , Thilo Sandner , Thomas Klose
IPC分类号： G02B26/10
CPC分类号： G02B26/0841 , G02B26/085 , G02B26/0858 , G02B26/0866
摘要： A micromechanical device includes a micromechanical functional structure, which can be deflected about a main axis from a rest position, a movable electrode, which is mounted to the micromechanical functional structure, and a fixed electrode, which can be tilted about a tilting axis with respect to the movable electrode in the rest position, wherein the tilting axis is parallel to the main axis or is identical with the main axis.
摘要翻译：微机械装置包括可以从静止位置围绕主轴偏转的微机械功能结构，安装到微机械功能结构的可动电极和固定电极，其可以相对于倾斜轴线倾斜到静止位置的可动电极，其中倾斜轴线平行于主轴线或与主轴线相同。

10. 发明申请

US20120188625A1 MICROMECHANICAL DEVICE WITH TEMPERATURE STABILIZATION AND METHOD FOR ADJUSTING A DEFINED TEMPERATURE OR A DEFINED TEMPERATURE COURSE ON A MICROMECHANICAL DEVICE 有权
标题翻译：具有温度稳定性的微生物装置和用于调节定义温度的方法或在微生物装置上定义的温度课程
公开(公告)号：US20120188625A1
公开(公告)日：2012-07-26
申请号：US13408151
申请日：2012-02-29
申请人： Thilo Sandner , Harald Schenk , Joerg Heber , Thomas Klose , Andreas Bergmann , Christian Gerwig , Thomas Knieling
发明人： Thilo Sandner , Harald Schenk , Joerg Heber , Thomas Klose , Andreas Bergmann , Christian Gerwig , Thomas Knieling
IPC分类号： G02B26/10 , H05B6/80 , B23K26/00 , H05B6/00 , H05B1/00
CPC分类号： G01J5/061 , G01J5/026 , G01J5/0809 , G02B7/008 , G02B26/0816
摘要： A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.
摘要翻译：微机械装置包括微机械功能结构和与微机械功能结构相关联的电磁辐射加热，其形成为在微机械功能结构中引起空间和时间上限定的温度或空间和时间上限定的温度过程。

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