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1. 发明申请

US20090097087A1 MICROMECHANICAL SENSOR- OR ACTUATOR COMPONENT AND METHOD FOR THE PRODUCTION OF MICROMECHANICAL SENSOR- OR ACTUATOR COMPONENTS 审中-公开
标题翻译：微生物传感器或致动器部件及生产微机械传感器或致动器部件的方法
公开(公告)号：US20090097087A1
公开(公告)日：2009-04-16
申请号：US12251784
申请日：2008-10-15
申请人： Alexander Wolter , Thilo Sander , Harald Schenk
发明人： Alexander Wolter , Thilo Sander , Harald Schenk
IPC分类号： G02B26/00 , H01L21/50
CPC分类号： B81B7/0067 , B81B2203/0384 , Y10T29/49
摘要： The invention relates to a micromechanical sensor- or actuator component with an optical function and to a production method. A substrate thereby has electrodes and electrical contactings, an optical, electrically actuated element which can be deflected relative to the substrate. A transparent cover is likewise present. The object of the invention is to produce a micromechanical sensor- or actuator component with an optical function and a method for the production of such components with which to reduce or even avoid reflections which might impair the function of the micromechanical sensor- or actuator component. According to the invention, the optical main axis of the cover is thereby orientated non-perpendicular to the surface of the substrate.
摘要翻译：本发明涉及具有光学功能和生产方法的微机械传感器或致动器部件。因此，基板具有电极和电接触，光学电驱动元件可相对于基板偏转。透明盖同样存在。本发明的目的是制造具有光学功能的微机械传感器或致动器部件，以及用于生产这样的部件的方法，以减少甚至避免可能损害微机械传感器或致动器部件的功能的反射。根据本发明，盖的光学主轴由此定向成与基板的表面非垂直。

2. 发明授权

US08357944B2 Semiconductor substrate and methods for the production thereof 有权
标题翻译：半导体衬底及其制造方法
公开(公告)号：US08357944B2
公开(公告)日：2013-01-22
申请号：US12063382
申请日：2006-08-10
申请人： Christian Drabe , Alexander Wolter , Roger Steadman , Andreas Bergmann , Gereon Vogtmeier , Ralf Dorscheid
发明人： Christian Drabe , Alexander Wolter , Roger Steadman , Andreas Bergmann , Gereon Vogtmeier , Ralf Dorscheid
IPC分类号： H01L29/18
CPC分类号： H01L21/76898 , H01L23/481 , H01L27/14636 , H01L31/02005 , H01L2223/6622 , H01L2924/0002 , H01L2924/00012 , H01L2924/00
摘要： The invention relates to semiconductor substrates and methods for producing such semiconductor substrates. In this connection, it is the object of the invention to provide semiconductor substrates which can be produced more cost-effectively and with which a high arrangement density as well as good electrical conductivity and closed surfaces can be achieved. In accordance with the invention, an electrically conductive connection is guided from its front side through the substrate up to the rear side. The electrically conductive connection is completely surrounded from the outside. The insulator is formed by an opening which is filled with material. The inner wall is provided with a dielectric coating and/or filled with an electrically insulating or conductive material. The electrically conductive connection is formed with a further opening which is filled with an electrically conductive material and is arranged in the interior of the insulator. The openings are formed with step-free inner walls aligned orthogonally to the front side or tapering continuously in the direction of the rear side.
摘要翻译：本发明涉及半导体衬底及其制造方法。在这方面，本发明的目的是提供可以更经济有效地制造并且可以实现高排列密度以及良好导电性和封闭表面的半导体衬底。根据本发明，导电连接从其前侧通过基板被引导到后侧。导电连接从外部完全包围。绝缘体由填充有材料的开口形成。内壁设置有电介质涂层和/或填充有电绝缘或导电材料。导电连接形成有另外的开口，其填充有导电材料并且布置在绝缘体的内部。开口形成有与前侧正交对准或者在后侧方向连续地逐渐变细的无梯度内壁。

3. 发明申请

US20120033214A1 Micro-optical Electromagnetic Radiation Diffraction Grating and Method for Manufacture 审中-公开
$Micro-optical Electromagnetic Radiation Diffraction Grating and Method for Manufacture$
标题翻译：微光电磁辐射衍射光栅及其制造方法
公开(公告)号：US20120033214A1
公开(公告)日：2012-02-09
申请号：US13207540
申请日：2011-08-11
申请人： Fabian Zimmer , Alexander Wolter , Harald Schenk
发明人： Fabian Zimmer , Alexander Wolter , Harald Schenk
IPC分类号： G01J3/45 , C23F1/02 , B05D3/02 , B05D3/06 , G02B5/18 , B05D5/06
CPC分类号： G02B5/1847 , G02B5/1861 , G02B26/0808
摘要： The invention relates to electromagnetic radiation microoptical diffraction gratings and to a method suitable for the manufacture thereof. The diffraction gratings in accordance with the invention can be used as microspectrometers in the form of scanning microgratings. The microgratings are provided with a surface structure and are able to be manufactured cost effectively and in high volumes. The surface structure is formed at a surface of a substrate and is formed from linear structural elements arranged substantially equidistantly and aligned substantially parallel to one another. At least part of the surface of the substrate and of the structural elements is coated with at least one further layer which forms a uniform sinusoidal surface contoured in a wave-shape (sinusoidal) manner and having alternating arranged wave peaks and wave troughs. A reflective layer can additionally be applied to increase the intensity of reflected radiation.
摘要翻译：本发明涉及电磁辐射微光衍射光栅及其制造方法。根据本发明的衍射光栅可以用作扫描微光学形式的微光谱仪。微型研磨机具有表面结构，并且能够以高成本且高成本地制造。表面结构形成在基板的表面，并且由基本上等距地布置并基本上彼此平行排列的线性结构元件形成。衬底表面和结构元件的至少一部分涂覆有至少一个另外的层，其形成具有波形（正弦）方式并且具有交替布置的波峰和波谷的均匀正弦曲面。另外可以应用反射层以增加反射辐射的强度。

4. 发明申请

US20100295066A1 SEMICONDUCTOR SUBSTRATE AND METHODS FOR THE PRODUCTION THEREOF 有权
标题翻译：半导体基板及其生产方法
公开(公告)号：US20100295066A1
公开(公告)日：2010-11-25
申请号：US12063382
申请日：2006-08-10
申请人： Christian Drabe , Alexander Wolter , Roger Steadman , Andreas Bergmann , Gereon Vogtmeier , Ralf Dorscheid
发明人： Christian Drabe , Alexander Wolter , Roger Steadman , Andreas Bergmann , Gereon Vogtmeier , Ralf Dorscheid
IPC分类号： H01L23/48 , H01L21/70 , H01L31/02 , H01L33/00 , H01L21/768
CPC分类号： H01L21/76898 , H01L23/481 , H01L27/14636 , H01L31/02005 , H01L2223/6622 , H01L2924/0002 , H01L2924/00012 , H01L2924/00
摘要： The invention relates to semiconductor substrates and methods for producing such semiconductor substrates. In this connection, it is the object of the invention to provide semiconductor substrates which can be produced more cost-effectively and with which a high arrangement density as well as good electrical conductivity and closed surfaces can be achieved. In accordance with the invention, an electrically conductive connection is guided from its front side through the substrate up to the rear side. The electrically conductive connection is completely surrounded from the outside. The insulator is formed by an opening which is filled with material. The inner wall is provided with a dielectric coating and/or filled with an electrically insulating or conductive material. The electrically conductive connection is formed with a further opening which is filled with an electrically conductive material and is arranged in the interior of the insulator. The openings are formed with step-free inner walls aligned orthogonally to the front side or tapering continuously in the direction of the rear side.
摘要翻译：本发明涉及半导体衬底及其制造方法。在这方面，本发明的目的是提供可以更经济有效地制造并且可以实现高排列密度以及良好导电性和封闭表面的半导体衬底。根据本发明，导电连接从其前侧通过基板被引导到后侧。导电连接从外部完全包围。绝缘体由填充有材料的开口形成。内壁设置有电介质涂层和/或填充有电绝缘或导电材料。导电连接形成有另外的开口，其填充有导电材料并且布置在绝缘体的内部。开口形成有与前侧正交对准或者在后侧方向连续地逐渐变细的无梯度内壁。

5. 发明申请

US20090250853A1 TORSION RESILIENT ELEMENT FOR HANGING MICROMECHANICAL ELEMENTS WHICH CAN BE DEFLECTED 审中-公开
标题翻译：用于悬挂可扭曲的微小元器件的扭力弹性元件
公开(公告)号：US20090250853A1
公开(公告)日：2009-10-08
申请号：US12297878
申请日：2006-04-24
申请人： Alexander Wolter , Christian Drabe , Thomas Klose
发明人： Alexander Wolter , Christian Drabe , Thomas Klose
IPC分类号： B81B3/00
CPC分类号： B81B3/0078 , B81B2201/042 , B81B2203/0109
摘要： The invention relates to torsion spring elements for the suspension of deflectable micromechanical elements such as reflecting elements pivotable around a rotational axis. It is therefore the object of the invention to provide torsion spring elements for suspensions of deflectable micromechanical elements which can achieve improved properties in operation with respect to known spring elements. Torsion spring elements in accordance with the invention are made so that they have a changing geometrical design in the direction of their longitudinal axis and thereby have non-linear spring characteristics. The longitudinal axis is in this respect aligned between a clamping or support and the deflectable micromechanical element which is held by at least one torsion spring element. In this respect, a torsion spring element in accordance with the invention can have a straight-line region, which is aligned in the direction of the longitudinal axis, and a fork/branching at at least one end face into which the straight-line region merges.
摘要翻译：本发明涉及用于悬挂可偏转微机械元件的扭转弹簧元件，例如围绕旋转轴线可枢转的反射元件。因此，本发明的目的是提供用于可偏转微机械元件的悬架的扭转弹簧元件，其可以相对于已知弹簧元件实现改进的操作性能。根据本发明的扭转弹簧元件被制成使得它们在它们的纵向轴线的方向上具有变化的几何设计，从而具有非线性弹簧特性。在该方面，纵向轴线在夹持件或支撑件与由至少一个扭转弹簧元件保持的可偏转微机械元件之间对齐。在这方面，根据本发明的扭转弹簧元件可以具有在纵向轴线方向上对齐的直线区域和在至少一个端面处的叉/分支，直线区域合并

6. 发明申请

US20060158662A1 Scanner and method for operating a scanner 有权
标题翻译：扫描仪和操作扫描仪的方法
公开(公告)号：US20060158662A1
公开(公告)日：2006-07-20
申请号：US11333644
申请日：2006-01-17
申请人： Uwe Schelinski , Michael Scholles , Alexander Wolter
发明人： Uwe Schelinski , Michael Scholles , Alexander Wolter
IPC分类号： G01B11/24
CPC分类号： G01B11/24
摘要： A scanner for providing a possibility of detecting a surface relief of an object includes a projector configured to guide a light beam in an illumination line over the surface relief to obtain an illuminated location on the surface relief, the projector being further configured to output a projection signal from which a position of the light beam in the illumination line is derivable. Additionally, the scanner includes a collector having a collector micro mirror stimulatable to oscillate in two dimensions and a point-shaped light detector, the collector micro mirror being oscillatingly arranged in a first direction of the illumination line and in a second direction differing from the first direction such that a reflection of the illuminated location within a scan area of the micro scanner mirror is imagable by it onto the point-shaped light detector, and the collector being configured to output a detection signal from which a position of the illuminated location in the first and second directions is derivable.
摘要翻译：用于提供检测物体的表面浮雕的可能性的扫描器包括：投影仪，被配置为将照明线中的光束引导到表面浮雕上，以获得表面浮雕上的照明位置，该投影仪还被配置为输出投影可以从光源中照射光束的位置得到的信号。另外，扫描器包括一个收集器，该收集器具有可刺激的二维振荡的收集器微镜和一个点状光检测器，收集器微镜在照明线的第一方向上以不同于第一方向，使得在微型扫描仪反射镜的扫描区域内的照明位置的反射可以通过其被形成在点状光检测器上，并且集电器被配置为输出检测信号，从该位置处的照明位置的位置第一和第二个方向是可推导的。

7. 发明申请

US20090302960A1 Oscillating, deflectable micromechanical element and method for use thereof 有权
标题翻译：摆动，可偏转微机械元件及其使用方法
公开(公告)号：US20090302960A1
公开(公告)日：2009-12-10
申请号：US12298101
申请日：2006-04-24
申请人： Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
发明人： Harald Schenk , Alexander Wolter , Thilo Sandner , Christian Drabe , Thomas Klose
IPC分类号： H03B5/30
CPC分类号： B81B3/0078 , B81B2201/042 , B81B2203/0109
摘要： The invention relates to micromechanical elements deflectable in an oscillating manner and to a method for the operation of such elements. In this respect, it is the object of the invention to be able to operate the micromechanical elements in a stable and simple manner on the oscillating deflection while taking account of the respective mechanical resonant frequency. A least one spring element is present on elements in accordance with the invention with which it is held. It is deflected between two reversal points using an electrical AC voltage. The one or more spring element(s) has/have non-linear spring characteristics so that a changed mechanical resonant frequency results in dependence on the respective deflection.
摘要翻译：本发明涉及以振荡方式可偏转的微机械元件以及用于操作这些元件的方法。在这方面，本发明的目的是能够以稳定和简单的方式在考虑到相应的机械共振频率的情况下在振荡偏转上操作微机械元件。在根据本发明的元件上存在至少一个弹簧元件，其被保持在其上。它使用电气交流电压在两个反转点之间偏转。一个或多个弹簧元件具有/具有非线性弹簧特性，使得改变的机械共振频率导致依赖于相应的偏转。

8. 发明申请

US20080218835A1 PROJECTION APPARATUS FOR SCANNINGLY PROJECTION 有权
标题翻译：投影机用于扫描投影
公开(公告)号：US20080218835A1
公开(公告)日：2008-09-11
申请号：US12038112
申请日：2008-02-27
申请人： Thilo SANDNER , Harald SCHENK , Michael SCHOLLES , Markus SCHWARZENBERG , Alexander WOLTER
发明人： Thilo SANDNER , Harald SCHENK , Michael SCHOLLES , Markus SCHWARZENBERG , Alexander WOLTER
IPC分类号： G02B26/00
CPC分类号： G02B26/101 , H04N1/40037 , H04N9/3129 , H04N9/3155
摘要： A projection apparatus for scanningly projecting an image onto an image field by means of a radiation beam includes a modulator for modulating an intensity of the radiation beam such that the intensity of the radiation beam changes in a time interval during which a scan point to which the radiation beam is directed sweeps a pixel of the image field.
摘要翻译：用于通过辐射束将图像扫描地投影到图像场上的投影设备包括调制器，用于调制辐射束的强度，使得辐射束的强度在时间间隔内变化，在该时间间隔期间，辐射束被定向扫描图像场的像素。

9. 发明授权

US07369288B2 Micromechanical optical element having a reflective surface as well as its use 有权
标题翻译：具有反射表面的微机械光学元件及其用途
公开(公告)号：US07369288B2
公开(公告)日：2008-05-06
申请号：US11486352
申请日：2006-07-13
申请人： Alexander Wolter , Thomas Klose
发明人： Alexander Wolter , Thomas Klose
IPC分类号： G02B26/08
CPC分类号： G02B26/0841 , B81B3/007 , B81B2201/042 , G02B26/085
摘要： By way of example, it would also be possible to dispense in a manner which is not illustrated with the spring elements 2, and then for the element 1 to carry out an oscillating translational deflection. Micromechanical optical elements have a reflective surface which can be deflected electrostatically or electromagnetically in a known manner and which can be used for a large number of applications. The objective is to provide an element such as this at low cost and with improved dynamic deformation behaviour. The elements with a reflective surface are in this case held by spring elements, in which case the element which can be deflected is held on mutually opposite sides by in each case at least two mutually independent spring elements.
摘要翻译：作为示例，还可以以没有用弹簧元件2示出的方式分配，然后为了元件1执行摆动平移偏转。微机械光学元件具有可以已知方式静电或电磁偏转的反射表面，并且可用于大量应用。目的是以低成本和改进的动态变形行为提供诸如此的元件。具有反射表面的元件在这种情况下由弹簧元件保持，在这种情况下，可以被偏转的元件通过在每种情况下保持在彼此相对的两侧上，至少两个相互独立的弹簧元件。

10. 发明申请

US20080022771A1 MICROMECHANICAL COMPONENT 审中-公开
标题翻译：微生物组分
公开(公告)号：US20080022771A1
公开(公告)日：2008-01-31
申请号：US11782355
申请日：2007-07-24
申请人： Alexander Wolter , Harald Schenk
发明人： Alexander Wolter , Harald Schenk
IPC分类号： G01P15/02
CPC分类号： B81B3/0086 , B81B2203/0109 , B81B2203/0136
摘要： The invention relates to micromechanical components whose operating stability is increased with respect to known solutions. It can be a matter of sensors or also actuators in which a deflectable element can be deflected in at least one dimension.It is the object of the invention to provide micromechanical components which achieve an increased operating stability, in particular with increased electrical voltages and other external disturbances. In components in accordance with the invention, a deflectable element having at least one spring is held at a frame part. The deflectable element is electrically separated from the frame part by grooves and an electrical insulation. An electrical voltage can be applied between the deflectable element and the frame part for the deflection. Path limitation elements are moreover present between regions which are at the same electrical voltage potential or where a negligible current flow occurs on a touching contacting of such regions.
摘要翻译：本发明涉及相对于已知解决方案而言其操作稳定性增加的微机械部件。它可以是传感器或者其中可偏转元件可以在至少一个维度上偏转的致动器。本发明的目的是提供实现增加的操作稳定性的微机械组件，特别是在增加的电压和其它外部干扰的情况下。在根据本发明的部件中，具有至少一个弹簧的可偏转元件保持在框架部分。可偏转元件通过凹槽和电绝缘体与框架部分电隔离。可以在可偏转元件和框架部件之间施加电压用于偏转。此外，路径限制元件存在于具有相同电压电位的区域之间或者在这些区域的触摸接触处发生可忽略的电流流动。

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