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1. 发明授权

US08842356B2 Micromechanical device with temperature stabilization and method for adjusting a defined temperature or a defined temperature course on a micromechanical device 有权
标题翻译：具有温度稳定性的微机械装置以及用于在微机械装置上调整限定温度或限定温度过程的方法
公开(公告)号：US08842356B2
公开(公告)日：2014-09-23
申请号：US13408151
申请日：2012-02-29
申请人： Thilo Sandner , Harald Schenk , Joerg Heber , Thomas Klose , Andreas Bergmann , Christian Gerwig , Thomas Knieling
发明人： Thilo Sandner , Harald Schenk , Joerg Heber , Thomas Klose , Andreas Bergmann , Christian Gerwig , Thomas Knieling
IPC分类号： G02B26/00 , G02F1/00 , G02B7/00 , G02B26/08 , G01J5/02 , G01J5/08 , G01J5/06
CPC分类号： G01J5/061 , G01J5/026 , G01J5/0809 , G02B7/008 , G02B26/0816
摘要： A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.
摘要翻译：微机械装置包括微机械功能结构和与微机械功能结构相关联的电磁辐射加热，其形成为在微机械功能结构中引起空间和时间上限定的温度或空间和时间上限定的温度过程。

2. 发明申请

US20120188625A1 MICROMECHANICAL DEVICE WITH TEMPERATURE STABILIZATION AND METHOD FOR ADJUSTING A DEFINED TEMPERATURE OR A DEFINED TEMPERATURE COURSE ON A MICROMECHANICAL DEVICE 有权
标题翻译：具有温度稳定性的微生物装置和用于调节定义温度的方法或在微生物装置上定义的温度课程
公开(公告)号：US20120188625A1
公开(公告)日：2012-07-26
申请号：US13408151
申请日：2012-02-29
申请人： Thilo Sandner , Harald Schenk , Joerg Heber , Thomas Klose , Andreas Bergmann , Christian Gerwig , Thomas Knieling
发明人： Thilo Sandner , Harald Schenk , Joerg Heber , Thomas Klose , Andreas Bergmann , Christian Gerwig , Thomas Knieling
IPC分类号： G02B26/10 , H05B6/80 , B23K26/00 , H05B6/00 , H05B1/00
CPC分类号： G01J5/061 , G01J5/026 , G01J5/0809 , G02B7/008 , G02B26/0816
摘要： A micromechanical device includes a micromechanical functional structure and an electromagnetic radiation heating associated with the micromechanical functional structure, which is formed to cause a spatially and temporally defined temperature or a spatially and temporally defined temperature course in the micromechanical functional structure.
摘要翻译：微机械装置包括微机械功能结构和与微机械功能结构相关联的电磁辐射加热，其形成为在微机械功能结构中引起空间和时间上限定的温度或空间和时间上限定的温度过程。

3. 发明申请

US20080028792A1 Method for Manufacturing an Optical Component 审中-公开
标题翻译：光学元件制造方法
公开(公告)号：US20080028792A1
公开(公告)日：2008-02-07
申请号：US10592226
申请日：2005-03-24
申请人： Juergen Ihlemann , Malte Schulz-Ruhtenberg , Joerg Heber
发明人： Juergen Ihlemann , Malte Schulz-Ruhtenberg , Joerg Heber
IPC分类号： G02B5/18 , C03C23/00
CPC分类号： C03C23/0025 , B23K26/009 , B23K26/0661 , B23K26/18
摘要： A method for manufacturing an optical component in which an optical function of the component is created for electromagnetic radiation in an application wavelength range, using laser machining with laser radiation in a machining wavelength range, characterized in that the following steps are carried out: 1) A solid body is provided that is made from a material that in the raw state absorbs the laser radiation in the machining wavelength range, 2) Laser machining is carried out on the solid body employing one or more machining steps and 3) The material of the solid body is transformed into a final state in which the solid body is transparent to the electromagnetic radiation in the application wavelength range and thus fulfills the intended optical function. A method whereby, in order to produce a stepped profile on an optical component a machining cycle is carried out several times, consisting of a step in which an absorption layer is deposited and also consisting of a laser ablation step, and whereby at least once a material transformation step is carried out in which the profile produced is transformed into a final state that is transparent to an application wavelength range.A method whereby firstly a multi-layer system is applied, and then an ablation step is carried out several times and finally a material transformation step is performed.
摘要翻译：一种光学部件的制造方法，其特征在于，在加工波长范围内使用激光加工对激光加工在应用波长范围内产生所述部件的光学功能，其特征在于，进行以下步骤：1）提供由在原始状态下吸收加工波长范围内的激光辐射的材料制成的固体，2）使用一个或多个加工步骤在固体上进行激光加工，以及3）固体变成最终状态，其中固体对于应用波长范围内的电磁辐射是透明的，从而实现预期的光学功能。一种方法，为了在光学部件上产生阶梯轮廓，进行几次加工循环，其包括沉积吸收层的步骤，并且还包括激光烧蚀步骤，并且由此至少一次进行材料变形步骤，其中所生成的轮廓转变成对应用波长范围透明的最终状态。首先应用多层系统的方法，然后进行数次消融步骤，最后进行材料变换步骤。

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