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1. 发明授权

US5063582A Liquid cooled X-ray lithographic exposure apparatus 失效
标题翻译：液体冷却X射线光刻曝光装置
公开(公告)号：US5063582A
公开(公告)日：1991-11-05
申请号：US658434
申请日：1991-02-20
申请人： Tetsuzo Mori , Eiji Sakamoto , Shinichi Hara , Koji Uda , Isamu Shimoda , Shunichi Uzawa , Kunitaka Ozawa
发明人： Tetsuzo Mori , Eiji Sakamoto , Shinichi Hara , Koji Uda , Isamu Shimoda , Shunichi Uzawa , Kunitaka Ozawa
IPC分类号： G03F7/20
CPC分类号： G03F7/709 , G03F7/707 , G03F7/70716 , G03F7/70866 , G03F7/70875
摘要： The present invention relates to a temperature control system for a lithographic exposure apparatus wherein a mask and wafer are closely disposed, and predetermined exposure energy is applied to respective shot areas of the wafer through the mask. The exposure energy is a soft-X-ray source, for example. The pattern of the mask is transferred onto the respective shot areas in a step-and-repeat manner. In the apparatus, a temperature control medium liquid is supplied into the wafer chuck which supports the wafer at the exposure position. The flow rate of the temperature control liquid is different during an exposure operation than during a non-exposure-operation. The flow control is determined in consideration of the wafer chuck vibration attributable to the supply of the liquid medium and also, of the heat generation in the wafer by the exposure energy, so that the vibration of the wafer chuck during the exposure operation is suppressed. Simultaneously the temperature rise of the wafer can also be suppressed. The pattern transfer from the mask to the wafer thus be precisely performed.

2. 发明授权

US5001734A SOR exposure system 失效
标题翻译： SOR曝光系统
公开(公告)号：US5001734A
公开(公告)日：1991-03-19
申请号：US401791
申请日：1989-09-01
申请人： Koji Uda , Yutaka Tanaka , Tetsuzo Mori , Isamu Shimoda , Shunichi Uzawa
发明人： Koji Uda , Yutaka Tanaka , Tetsuzo Mori , Isamu Shimoda , Shunichi Uzawa
IPC分类号： H05H13/04 , G03F7/20 , H01L21/027 , H01L21/30
CPC分类号： G03F7/70525 , G03F7/70808 , G03F7/70841 , G03F7/70883 , G03F7/709 , G03F7/70991
摘要： Synchrotron orbital radiation (SOR) exposure system includes a SOR ring and a plurality of exposure apparatus each being coupled to the SOR ring and being arranged to expose a wafer to a mask pattern with X-rays contained in synchrotron radiation from the SOR ring to thereby print the mask pattern on the wafer. Specific arrangement is provided to allow communication of a control of the SOR ring and respective controls of the exposure apparatuses. If any abnormality such as vacuum leakage occurs in one exposure apparatus, the information is transmitted to all the controls to start, in all the exposure apparatuses, appropriate operations to protect the exposure apparatuses against the abnormality. This makes it possible to prevent stoppage of the SOR exposure system as a whole even when any abnormality occurs in one exposure apparatus.

3. 发明授权

US4882776A Image information transmitting system 失效
标题翻译：图像信息传输系统
公开(公告)号：US4882776A
公开(公告)日：1989-11-21
申请号：US834136
申请日：1986-02-24
申请人： Shunichi Uzawa , Tetsuzo Mori , Noboru Koumura
发明人： Shunichi Uzawa , Tetsuzo Mori , Noboru Koumura
IPC分类号： H04N1/00
CPC分类号： H04N1/00111 , H04N1/00095
摘要： An image information transmitting apparatus comprises an image output unit for outputting image information, a modulation unit for pulse-frequency modulating the image information from the image output unit and a demodulation unit for demodulating the modulated signal from the modulation unit to form the image information. The demodulation unit discriminates a signal content by a time interval from a rise to a fall or vice versa of the input modulated signal.
摘要翻译：图像信息发送装置包括用于输出图像信息的图像输出单元，用于对来自图像输出单元的图像信息进行脉冲频率调制的调制单元和用于解调来自调制单元的调制信号以形成图像信息的解调单元。解调单元将信号内容从输入调制信号的上升到下降的时间间隔或反之亦然。

4. 发明授权

US4796301A Image transmission apparatus 失效
标题翻译：图像传输装置
公开(公告)号：US4796301A
公开(公告)日：1989-01-03
申请号：US799280
申请日：1985-11-19
申请人： Shunichi Uzawa , Tetsuzo Mori , Noboru Koumura
发明人： Shunichi Uzawa , Tetsuzo Mori , Noboru Koumura
IPC分类号： H04N1/32 , H04B9/00
CPC分类号： H04N1/00488 , H04N1/0049 , H04N1/32609 , H04N1/32635 , H04N1/32657
摘要： An image transmission apparatus for light-signal image transmission is easy to install and relocate and ensures reliable transmission between a plurality of readers in remote locations and a central recorder. Each reader provides data signals and command signals for controlling the operation of the recorder from the quantized image data of an original. The amplified and frequency-modulated signals proceded by image or command header signals are transmitted to the recorder. A signal intensity from the reader may be discriminated to be above a minimum acceptable level before being recorded, with an indicator of a recorder provided to warn an operator of an unacceptable low level, thereby preventing low-quality recording; a recording state may be indicated to the operator by a lamp or a buzzer. The recorder may further have a transmission request register and a priority encoder for resolving a contention arising when two or more readers simultaneously request service, by generating and assigning priority codes to each reader. The priority codes may be either predetermined, for example, so as to give one reader emergency priority over all other readers, or may be arbitrarily set according to demand.
摘要翻译：用于光信号图像传输的图像传输装置易于安装和重定位，并确保远程位置的多个读取器和中央记录器之间的可靠传输。每个读取器从原件的量化图像数据提供用于控制记录器的操作的数据信号和命令信号。由图像或命令头信号处理的放大和调频信号被传送到记录器。来自读取器的信号强度可以被识别为高于记录之前的最小可接受水平，其中提供了用于向操作者发出不可接受的低电平的记录器的指示器，从而防止低质量记录; 记录状态可以由灯或蜂鸣器指示给操作者。记录器还可以具有传输请求寄存器和优先编码器，用于解决当两个或更多个读取器同时请求服务时产生的竞争，通过生成并向每个读取器分配优先权代码。优先级代码可以是预先确定的，例如给予读者紧急优先于所有其他读取器，或者可以根据需要任意设置。

5. 发明授权

US4894668A Recorder having means for supporting the entire width of a continuous recording medium 失效
标题翻译：记录器具有用于支撑连续记录介质的整个宽度的装置
公开(公告)号：US4894668A
公开(公告)日：1990-01-16
申请号：US277522
申请日：1988-11-28
申请人： Masa K. Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuma
发明人： Masa K. Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuma
IPC分类号： B41J29/02
CPC分类号： B41J29/026 , B41J29/02
摘要： A recorder comprises a recording device housing for housing recording device for making a record on a continuous record medium at a record position, and a device for supporting the weight of the record medium over its entire width upstream of a pinch position thereof formed by pinch and press rollers.

6. 发明授权

US5455616A Recorder having a paper stacker that inhibits inadvertent movement of papers stacked therein 失效
标题翻译：记录器具有纸堆叠器，其能够阻止堆叠在其中的纸张的无意移动
公开(公告)号：US5455616A
公开(公告)日：1995-10-03
申请号：US247407
申请日：1994-05-23
申请人： Masakazu Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuma
发明人： Masakazu Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuma
IPC分类号： B41J29/02 , B41J15/04
CPC分类号： B41J29/026 , B41J29/02
摘要： A recorder comprises a recording device housing for housing a device for forming a record on record medium at a record position and a relatively movable stacker for stacking record media recorded by the recording device and having an open side for removing the stacked media. A convex area on the bottom of the stacker extends othogonally to the length of the stacker at a position spaced from the lengthwise center of the stacker toward the open side. The convex portion inhibits movement of the stacked media which could occur through shocks received by the recorder.
摘要翻译：记录器包括用于容纳用于在记录位置的记录介质上形成记录的装置的记录装置壳体和用于堆叠由记录装置记录的记录介质并具有打开侧以移除堆叠的介质的相对可移动的堆叠器。堆垛机底部的凸起区域与堆垛机的长度方向垂直地延伸到与堆垛机的长度方向中心向开口侧隔开的位置。凸起部分阻止可能由记录器接收的冲击而发生的堆叠的介质的移动。

7. 发明授权

US4884085A Recorder having record medium feed and press rollers and lockable means for urging the press rollers to and from the feed roller 失效
标题翻译：具有记录介质进料和压辊的记录器和用于将压辊推送到进料辊的可锁定装置
公开(公告)号：US4884085A
公开(公告)日：1989-11-28
申请号：US300243
申请日：1989-01-19
申请人： Masakazu Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuna
发明人： Masakazu Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuna
IPC分类号： B41J29/02
CPC分类号： B41J29/026 , B41J29/02
摘要： A recorder has a recording device for recording on a record medium and a feed unit for feeding the medium to the recording position. Feed and press rollers are provided with apparatus for urging the press roller to and from the feed roller and a locking device can lock the press roller at a pressing position.
摘要翻译：记录器具有用于在记录介质上记录的记录装置和用于将介质馈送到记录位置的进给单元。进给辊和压辊设置有用于将加压辊推压到进给辊的装置，并且锁定装置可以将压辊锁定在按压位置。

8. 发明授权

US5964540A Printer apparatus 失效
标题翻译：打印机装置
公开(公告)号：US5964540A
公开(公告)日：1999-10-12
申请号：US488417
申请日：1995-06-07
申请人： Tadashi Shiina , Tetsuo Suzuki , Tetsuzo Mori , Kunitaka Ozawa , Katsunori Hatanaka , Masakazu Ozawa
发明人： Tadashi Shiina , Tetsuo Suzuki , Tetsuzo Mori , Kunitaka Ozawa , Katsunori Hatanaka , Masakazu Ozawa
IPC分类号： B41J25/304 , G06K15/10 , H04N1/50 , B41J3/54
CPC分类号： G06K15/102 , B41J25/304 , H04N1/506 , G06K2215/0077
摘要： A recording apparatus having a memory for storing recording data, and an address counter for controlling addresses in the memory in the direction of the columns or rows. The address counter controls a read start address for starting a process of reading the memory, thereby compensating for deviations in the longitudinal or widthwise direction of recording paper.
摘要翻译：具有用于存储记录数据的存储器的记录装置和用于控制存储器中列或行的方向上的地址的地址计数器。地址计数器控制用于开始读取存储器的处理的读取起始地址，从而补偿记录纸的纵向或宽度方向上的偏差。

9. 发明授权

US5355160A Recorder having separate recording means and feeding means housings 失效
标题翻译：记录器具有分离的记录装置和进给装置壳体
公开(公告)号：US5355160A
公开(公告)日：1994-10-11
申请号：US863475
申请日：1992-04-02
申请人： Masa K. Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuma
发明人： Masa K. Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuma
IPC分类号： B41J29/02 , B41J2/01 , B41J29/13
CPC分类号： B41J29/026 , B41J29/02
摘要： A recorder has a recording apparatus housing and a feeding apparatus housing hinged together for assuming open and closed positions. The recording apparatus housing holds recording apparatus and the feeding apparatus housing holds only feeding apparatus. When the housings are in the closed position, the feeding apparatus feeds paper past the recording apparatus. When they are in the open position, the recording and feeding apparatus are both exposed for easy access.
摘要翻译：记录器具有铰接在一起以用于假定打开和关闭位置的记录装置壳体和进给装置壳体。记录装置壳体保持记录装置，并且进给装置壳体仅保持进给装置。当壳体处于关闭位置时，馈送装置将纸送到记录装置上。当它们处于打开位置时，记录和馈送设备都被暴露以便于访问。

10. 发明授权

US4922267A Recorder having a recording device and a relatively movable stacker for stacking recorded paper 失效
标题翻译：记录器具有用于堆放记录纸的记录装置和相对可移动的堆叠器
公开(公告)号：US4922267A
公开(公告)日：1990-05-01
申请号：US273139
申请日：1988-11-14
申请人： Masakazu Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuma
发明人： Masakazu Ozawa , Kunitaka Ozawa , Katsunori Hatanaka , Tetsuo Suzuki , Tetsuzo Mori , Tadashi Shiina , Ryuichi Ebinuma
IPC分类号： B41J29/02
CPC分类号： B41J29/026 , B41J29/02
摘要： A recorder comprises a recording device housing for housing a device for forming a record on record medium at a record position and a relatively movable stacker for stacking record media recorded by the recording device and having an open side for removing the stacked media. A convex ara on the bottom of the stacker extends othogonally to the length of the stacker at a position spaced from the lengthwise center of the stacker toward the open side.
摘要翻译：记录器包括用于容纳用于在记录位置的记录介质上形成记录的装置的记录装置壳体和用于堆叠由记录装置记录的记录介质并具有打开侧以移除堆叠的介质的相对可移动的堆叠器。在堆垛机底部的凸形凸起与堆垛机的长度方向垂直地延伸到与堆垛机的纵向中心向开口侧隔开的位置处。

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