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    • 1. 发明授权
    • Thin-film magnetic head having a three-layer pole tip structure
    • 具有三层极尖结构的薄膜磁头
    • US06169642A
    • 2001-01-02
    • US09150205
    • 1998-09-09
    • Tetsuya MinoYasufumi UnoKoji MatsukumaKoichi TerunumaMasahiro Kondo
    • Tetsuya MinoYasufumi UnoKoji MatsukumaKoichi TerunumaMasahiro Kondo
    • G11B5147
    • G11B5/3967G11B5/3156Y10T29/49046Y10T29/49048
    • A thin-film magnetic head having an air bearing surface, includes a three-layer pole tip structure consisting of a lower pole tip element, a recording gap layer and an upper pole tip element, the structure having side surfaces, a rear surface and top surface, a lower auxiliary pole, a part of which contacts to the lower pole tip element, an upper auxiliary pole, a part of which contacts to the upper pole tip element, the upper auxiliary pole being magnetically connected at its rear portion with respect to the air bearing surface to the lower auxiliary pole so as to form a yoke together with the lower auxiliary pole, a lower insulating layer, surrounding the side surfaces and the rear surfaces of the three-layer pole tip structure, the lower insulating layer being located between the lower and upper auxiliary poles and having a top surface, a coil conductor formed on the top surface of the lower insulating layer, and an upper insulating layer covering the coil conductor, a part of the upper insulating layer being located between the lower insulating layer and the upper auxiliary pole. The top surface of the lower insulating layer is leveled lower than the top surface of the three-layer pole tip structure over at least a region within which the coil conductor is formed.
    • 具有空气轴承表面的薄膜磁头包括由下极端元件,记录间隙层和上极端元件组成的三层极尖端结构,该结构具有侧表面,后表面和顶部 表面,下辅助极,其一部分接触下极端元件,上辅助极,其一部分接触上极尖端元件,上辅助极在其后部相对于 空气支承面到下辅助极,以与下辅助极一起形成轭,下绝缘层围绕三层极尖结构的侧表面和后表面,下绝缘层位于 在上下辅助极之间并且具有顶表面,形成在下绝缘层的顶表面上的线圈导体和覆盖线圈导体的上绝缘层,u的一部分 绝缘层位于下绝缘层和上辅助极之间。 下绝缘层的顶表面在形成线圈导体的至少一个区域上比三层极尖端结构的顶表面平坦。
    • 9. 发明授权
    • Method of manufacturing thin film magnetic head
    • 制造薄膜磁头的方法
    • US06329211B1
    • 2001-12-11
    • US09405005
    • 1999-09-27
    • Koichi TerunumaTetsuya MinoKatsuya KanakuboOsamu Matsuda
    • Koichi TerunumaTetsuya MinoKatsuya KanakuboOsamu Matsuda
    • G11B531
    • G11B5/3967G11B5/3116G11B5/313G11B5/3163Y10T29/49046
    • A first magnetic film to constitute a first yoke part and a first pole part is formed in a given pattern on a substrate, and a write gap film is formed on the part corresponding to the first pole portion of the first magnetic film. Then, a second magnetic film having a second pole portion and a second yoke part is formed on the write gap film by a photolithography so that the second pole portion can have a width of 1.5-2.5 &mgr;m. Thereafter, the sides of the second pole portion are etched by an ion beam etching method to narrow its width, and the write gap film is removed by using, as a mask, the second pole portion to expose the first magnetic film. Subsequently, the exposed first magnetic film is partially removed to form the first pole portion and thereby a thin film magnetic head having a pole portion with a track width of not more than 1 &mgr;m beyond the limit of the photolithography is produced.
    • 构成第一磁轭部的第一磁性膜和第一磁极部以给定的图案形成在基板上,并且在与第一磁性膜的第一极部相对应的部分上形成写入间隙膜。 然后,通过光刻法在写间隙膜上形成具有第二极部分和第二磁轭部分的第二磁性膜,使得第二极部分可以具有1.5-2.5μm的宽度。 此后,通过离子束蚀刻方法蚀刻第二极部分的侧面以使其宽度变窄,并且通过使用第二极部来暴露第一磁性膜来去除写入间隙膜作为掩模。 随后,暴露的第一磁性膜被部分去除以形成第一极部,由此产生具有超过光刻极限的磁道宽度不超过1μm的磁极部分的薄膜磁头。