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1. 发明授权

US07065859B2 Method for manufacturing a thin film magnetic head 失效
标题翻译：薄膜磁头制造方法
公开(公告)号：US07065859B2
公开(公告)日：2006-06-27
申请号：US10725407
申请日：2003-12-03
申请人： Koichi Terunuma , Tetsuya Mino , Katsuya Kanakubo , Noriyuki Ito
发明人： Koichi Terunuma , Tetsuya Mino , Katsuya Kanakubo , Noriyuki Ito
IPC分类号： G11B5/193 , B44C1/22 , C25D5/02
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/313 , G11B5/3153 , G11B5/3163 , G11B5/3909 , G11B5/3967 , G11B2005/3996 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： A first magnetic film is formed in a primary pattern which is larger than its definitive pattern and of which edges are located within frames to be used in a frame-plating method for the second magnetic film after forming the first pole portion and the gap film. Then, the second magnetic film is formed by the frame-plating method, and the first magnetic film is etched into the definitive pattern through the second magnetic film as a mask.
摘要翻译：第一磁性膜以形成第一极部和间隙膜的第二磁性膜的第一磁性膜形成为大于其定形图案的主图案，并且其边缘位于用于第二磁性膜的框架镀覆方法的框架内。然后，通过框架镀法形成第二磁性膜，并且通过第二磁性膜作为掩模将第一磁性膜蚀刻到确定的图案中。

2. 发明授权

US06678941B1 Method for manufacturing a thin film magnetic head 失效
标题翻译：薄膜磁头制造方法
公开(公告)号：US06678941B1
公开(公告)日：2004-01-20
申请号：US09603970
申请日：2000-06-26
申请人： Koichi Terunuma , Tetsuya Mino , Katsuya Kanakubo , Noriyuki Ito
发明人： Koichi Terunuma , Tetsuya Mino , Katsuya Kanakubo , Noriyuki Ito
IPC分类号： G11B5127
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/313 , G11B5/3153 , G11B5/3163 , G11B5/3909 , G11B5/3967 , G11B2005/3996 , Y10T29/49041 , Y10T29/49043 , Y10T29/49044 , Y10T29/49046 , Y10T29/49052
摘要： The invention is a method of manufacturing thin film magnetic heads usable for magnetic recording and reproducing drive devices such as magnetic disk drive devices. The method is characterized by forming a first magnetic film in a primary pattern which is larger than its definitive pattern and of which its edges are located within frames which are used in a frame-plating method for a second magnetic film. The second magnetic film is then formed by the frame-plating method and the first magnetic film is etched into its definitive pattern by using the second magnetic film as a mask.
摘要翻译：本发明是制造可用于磁记录和再现诸如磁盘驱动装置的驱动装置的薄膜磁头的方法。该方法的特征在于形成主要图案中的第一磁性膜，其大于其确定性图案，并且其边缘位于用于第二磁性膜的框架镀覆方法中的框架内。然后通过框架电镀法形成第二磁性膜，并且通过使用第二磁性膜作为掩模将第一磁性膜蚀刻成其确定的图案。

3. 发明授权

US06466415B1 Thin film magnetic head including a first pole portion having a depressed portion for receiving a coil 失效
标题翻译：薄膜磁头包括具有用于接收线圈的凹陷部分的第一极部分
公开(公告)号：US06466415B1
公开(公告)日：2002-10-15
申请号：US09604794
申请日：2000-06-28
申请人： Koichi Terunuma , Tetsuya Mino , Katsuya Kanakubo , Noriyuki Ito
发明人： Koichi Terunuma , Tetsuya Mino , Katsuya Kanakubo , Noriyuki Ito
IPC分类号： G11B523
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3116 , G11B5/313 , G11B5/3909 , G11B5/3967
摘要： The invention provides a thin film magnetic head including a first pole portion having depressed portion that is formed therein. The depressed portion descends, backward within the first pole portion, at a first inclination angle &thgr;1 from a first inclination starting point P1. Then, an insulating film is filled up in the depressed portion so that it can be located up to the upper side of the surface of the first pole and have an inclined surface in the side of a medium opposing surface. Additionally, a first magnetic film of a second pole portion can have a larger saturated magnetic flux density than a second magnetic film of the second pole portion, and can include an inclined portion with a second inclination angle &thgr;2 from a second inclination starting point P2.
摘要翻译：本发明提供一种薄膜磁头，其包括形成有凹部的第一极部。凹陷部分在第一极部分内以与第一倾斜起始点P1成第一倾斜角θ1下降。然后，在凹部中填充绝缘膜，使得其可以位于第一极的表面的上侧，并且在介质相对表面的侧面具有倾斜表面。此外，第二极部的第一磁性膜可以具有比第二极部的第二磁性膜更大的饱和磁通密度，并且可以包括从第二倾斜起点P2起的第二倾斜角θ2的倾斜部。

4. 发明授权

US08174793B2 Thin film magnetic head and magnetic disk device and electronic component 有权
标题翻译：薄膜磁头和磁盘装置及电子元器件
公开(公告)号：US08174793B2
公开(公告)日：2012-05-08
申请号：US12820183
申请日：2010-06-22
申请人： Yasuhiro Hasegawa , Hiroshi Fumoto , Yoshiaki Tanaka , Katsuya Kanakubo , Shingo Miyata , Soji Koide , Noriyuki Ito
发明人： Yasuhiro Hasegawa , Hiroshi Fumoto , Yoshiaki Tanaka , Katsuya Kanakubo , Shingo Miyata , Soji Koide , Noriyuki Ito
IPC分类号： G11B5/60
CPC分类号： G11B5/105
摘要： A thin film magnetic head has a plurality of electrode terminals formed on substantially the same surface as the head formation surface on which magnetic head element is laminated. The plurality of electrode terminals is arranged in an array near and along the second side of the head formation surface that is opposite the first side on the ABS side, from which the functional end of the magnetic head is exposed. The plurality of electrode terminals is formed to include a pad and a protrusion formed along a part of the periphery of the pad.
摘要翻译：薄膜磁头具有多个电极端子，其形成在与磁头元件层叠的磁头形成表面基本相同的表面上。多个电极端子沿着头部形成表面的与ABS侧的第一侧相对的第二侧附近排列成阵列，从而使磁头的功能端露出。多个电极端子形成为包括衬垫和沿衬垫的周边的一部分形成的突起。

5. 发明授权

US06751070B2 Thin film magnetic head and method for fabricating the same 失效
标题翻译：薄膜磁头及其制造方法
公开(公告)号：US06751070B2
公开(公告)日：2004-06-15
申请号：US10153689
申请日：2002-05-24
申请人： Noriyuki Ito , Kosuke Tanaka , Koichi Terunuma
发明人： Noriyuki Ito , Kosuke Tanaka , Koichi Terunuma
IPC分类号： G11B539
CPC分类号： B82Y10/00 , G11B5/3163 , G11B5/3903 , G11B5/3932 , G11B5/3967 , Y10T29/49052
摘要： A first and a second longitudinal bias-applying films are formed via a first mask at both sides of a magnetoresistive effective element film so that the difference in surface level between the magnetoresistive effective element film and the first and the second longitudinal bias-applying films is set within ±20 nm. Then, a first and a second electrode films are formed so as to cover edge portions of the magnetoresistive effective element film and the first and the second longitudinal bias-applying films.
摘要翻译：通过第一掩模在磁阻有效元件膜的两侧形成第一和第二纵向偏置施加膜，使得磁阻有效元件膜与第一和第二纵向偏置施加膜之间的表面水平差异为设置在±20 nm以内。然后，形成第一和第二电极膜，以覆盖磁阻有效元件膜和第一和第二纵向偏置施加膜的边缘部分。

6. 发明授权

US06927950B2 Thin-film magnetic head and method of manufacturing same, head gimbal assembly, and hard disk drive 有权
标题翻译：薄膜磁头及其制造方法，磁头万向节组件和硬盘驱动器
公开(公告)号：US06927950B2
公开(公告)日：2005-08-09
申请号：US10193316
申请日：2002-07-12
申请人： Noriyuki Ito , Kosuke Tanaka , Koichi Terunuma
发明人： Noriyuki Ito , Kosuke Tanaka , Koichi Terunuma
IPC分类号： G11B5/39 , G11B5/596
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3903 , G11B5/3909 , G11B5/59683 , G11B2005/3996
摘要： A read head comprises an MR element, two bias field applying layers, and two conductive layers. The two bias field applying layers are adjacent to both side portions of the MR element, and apply a bias magnetic field to the MR element along the longitudinal direction. The two conductive layers feed a sense current to the MR element, each of the conductive layers being disposed to be adjacent to one of surfaces of each of the bias field applying layers and to overlap one of surfaces of the MR element. The conductive layers are each made of a gold alloy having a resistivity of less than 22 μΩ·cm and a hardness as high as or higher than the hardness of a material used for making the bias field applying layers.
摘要翻译：读头包括MR元件，两个偏置场施加层和两个导电层。两个偏置场施加层与MR元件的两侧部分相邻，并且沿MR方向向MR元件施加偏置磁场。两个导电层将感应电流馈送到MR元件，每个导电层被设置为与每个偏置场施加层的一个表面相邻并且与MR元件的一个表面重叠。导电层各自由电阻率小于22μΩ·cm的金合金和高于或高于用于制造偏压场施加层的材料的硬度的硬度制成。

7. 发明授权

US06731474B2 Thin film magnetic head and method of manufacturing the same 失效
标题翻译：薄膜磁头及其制造方法
公开(公告)号：US06731474B2
公开(公告)日：2004-05-04
申请号：US09991994
申请日：2001-11-26
申请人： Koichi Terunuma , Ken-ichi Takano , Noriyuki Ito
发明人： Koichi Terunuma , Ken-ichi Takano , Noriyuki Ito
IPC分类号： G11B539
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/11 , G11B5/3143 , G11B5/3903 , G11B5/3909 , G11B5/3967 , G11B2005/3996
摘要： Provided are a thin film magnetic head and a method of manufacturing the same, which is capable of high density recording and obtaining stable output. The thin film magnetic head includes an MR film sandwiched in between first and second shield layers. The first shield layer includes an inner layer, a magnetization stabilizing layer, an underlayer, and an outer layer laminated in order from the MR film. The second shield layer includes an inner layer, a magnetization stabilizing layer, an isolating layer, and an outer layer laminated in order from the MR film. The magnetization stabilizing layers are formed of antiferromagnetic material, so as to control the direction of magnetization of the inner layers.
摘要翻译：提供一种薄膜磁头及其制造方法，其能够进行高密度记录并获得稳定的输出。薄膜磁头包括夹在第一和第二屏蔽层之间的MR膜。第一屏蔽层包括从MR膜顺序层叠的内层，磁化稳定层，底层和外层。第二屏蔽层包括从MR膜顺序层叠的内层，磁化稳定层，隔离层和外层。磁化稳定层由反铁磁材料形成，以便控制内层的磁化方向。

8. 发明授权

US06636392B2 Thin-film magnetic head with magnetoresistive effect element 失效
公开(公告)号：US06636392B2
公开(公告)日：2003-10-21
申请号：US09899162
申请日：2001-07-06
申请人： Noriyuki Ito , Koichi Terunuma , Fumihiro Hiromatsu
发明人： Noriyuki Ito , Koichi Terunuma , Fumihiro Hiromatsu
IPC分类号： G11B539
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3909 , G11B5/3932 , G11B2005/3996
摘要： A thin-film magnetic head with an MR element, includes an MR film, under films each having a multilayer structure with a first under layer and a second under layer laminated on the first under layer, and magnetic domain control films joined to side end faces of the MR film through the under films.

9. 发明授权

US06563681B1 Magnetoresistance effect film and magnetoresistance effect type head 有权
标题翻译：磁阻效应膜和磁阻效应型头
公开(公告)号：US06563681B1
公开(公告)日：2003-05-13
申请号：US09542912
申请日：2000-04-04
申请人： Tetsuro Sasaki , Koichi Terunuma , Hiroaki Kawashima , Noriyuki Ito
发明人： Tetsuro Sasaki , Koichi Terunuma , Hiroaki Kawashima , Noriyuki Ito
IPC分类号： G11B539
CPC分类号： B82Y25/00 , B82Y10/00 , G11B5/3903 , H01F10/3268
摘要： A soft magnetic layer constituting a spin valve type magnetoresistance effect film comprises a multilayered body having at least two layers and including a first soft magnetic layer substantially made of Co or CoFe, and a second soft magnetic layer substantially made of NiFeX (wherein X represents at least one selected from Ta and Nb) in the order named from the side of a non-magnetic metal layer. More preferably, the soft magnetic layer comprises a multilayered body having at least three layers and including a first soft magnetic layer substantially made of Co or CoFe, a third soft magnetic layer substantially made of NiFe, and a second soft magnetic layer substantially made of NiFeX (wherein X represents at least one selected from Ta and Nb) in the order named from the side of the non-magnetic metal layer. Therefore, the detection sensitivity of a magnetic signal and the output of the magnetic head can be improved. Further, the linearity of the derived signal is also excellent.
摘要翻译：构成自旋阀型磁阻效应膜的软磁性层包括具有至少两层的多层体，并且包括基本上由Co或CoFe制成的第一软磁性层和基本上由NiFeX制成的第二软磁性层（其中X表示从Ta和Nb中选择的至少一种）以非磁性金属层的一侧命名。更优选地，软磁性层包括具有至少三层的多层体，其包括基本由Co或CoFe制成的第一软磁性层，基本上由NiFe制成的第三软磁性层，以及基本由NiFeX制成的第二软磁性层（其中X表示选自Ta和Nb中的至少一种）以从非磁性金属层的一侧命名的顺序。因此，可以提高磁信号的检测灵敏度和磁头的输出。此外，导出的信号的线性也很好。

10. 发明授权

US06444406B1 Method for forming photoresist pattern and manufacturing method of magnetoresistive effect thin-film magnetic head 有权
标题翻译：光致抗蚀剂图案的形成方法和磁阻效应薄膜磁头的制造方法
公开(公告)号：US06444406B1
公开(公告)日：2002-09-03
申请号：US09899203
申请日：2001-07-06
申请人： Noriyuki Ito , Koichi Terunuma , Satoshi Tsukiyama
发明人： Noriyuki Ito , Koichi Terunuma , Satoshi Tsukiyama
IPC分类号： G11B539
CPC分类号： B82Y25/00 , B82Y10/00 , G03F7/40 , G03F7/405 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/3903 , G11B5/3932 , G11B2005/3996 , H01L21/0274 , Y10T29/49032 , Y10T29/49048
摘要： A method for forming a photoresist pattern, includes a step of forming a photoresist pattern having a certain width, and a step of performing thereafter ion milling with respect to side walls of the formed photoresist pattern by using an ion beam with a large incident angle so as to reduce the width of the formed photoresist pattern.
摘要翻译：形成光致抗蚀剂图形的方法包括形成具有一定宽度的光致抗蚀剂图案的步骤，以及通过使用具有大入射角的离子束相对于所形成的光致抗蚀剂图案的侧壁进行离子铣削的步骤以减小形成的光致抗蚀剂图案的宽度。

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