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    • 8. 发明授权
    • Method for fabrication of interconnect structure with improved alignment for semiconductor devices
    • 用于制造具有改进的半导体器件对准的互连结构的方法
    • US08614144B2
    • 2013-12-24
    • US13157744
    • 2011-06-10
    • Hirokazu Kato
    • Hirokazu Kato
    • H01L21/31H01L21/469
    • H01L21/76811H01L21/31144H01L21/76813H01L21/76816
    • Methods and structure are provided for creating and utilizing hard masks to facilitate creation of a grating effect to control an anisotropic etching process for the creation of an opening, and subsequent formation of a interconnect structure (e.g., a via) in a multilayered semiconductor device. A first hard mask can be patterned to control etching in a first dimension, and a second hard mask can be patterned to control etching in a second dimension, wherein the second hard mask is patterned orthogonally opposed to the first hard mask. A resist can be patterned by inverting the pattern of a metal line patterning. Interconnects can be formed with critical dimension(s) and also self-aligned.
    • 提供了用于创建和利用硬掩模的方法和结构,以便于创建光栅效应以控制用于产生开口的各向异性蚀刻工艺,以及随后在多层半导体器件中形成互连结构(例如通孔)。 可以对第一硬掩模进行图案化以控制第一维度的蚀刻,并且可以对第二硬掩模进行图案化以控制第二维度中的蚀刻,其中第二硬掩模被图案与第一硬掩模垂直相对。 通过反转金属线图案的图案可以对抗蚀剂进行图案化。 互连可以形成临界尺寸,也可以自对准。
    • 9. 发明授权
    • Information processing apparatus and method for calculating the position and orientation of an image sensing device
    • 用于计算图像感测装置的位置和取向的信息处理装置和方法
    • US08391589B2
    • 2013-03-05
    • US12013123
    • 2008-01-11
    • Daisuke KotakeShinji UchiyamaHirokazu Kato
    • Daisuke KotakeShinji UchiyamaHirokazu Kato
    • G06K9/00
    • G01C11/00G01S5/16G06T7/20G06T7/73
    • Three pieces of candidate position information are calculated based on a plurality of pieces of sensing position information, and three pieces of candidate orientation information are calculated based on a plurality of pieces of sensing orientation information. Sets each of which combines one candidate position information and one candidate orientation information are prepared for all combinations. For each set, the candidate position information and candidate orientation information which configure that set are corrected. An evaluation value is calculated for each corrected set, and one of the sets is selected based on the calculated evaluation values. The candidate position information and candidate orientation information which configure the selected set are respectively recorded in a memory as sensing position information and sensing orientation information.
    • 基于多条感测位置信息计算三条候选位置信息,并且基于多条感测取向信息来计算三条候选方向信息。 对于所有组合,为每个组合一个候选位置信息和一个候选方向信息。 对于每个集合,配置该组的候选位置信息和候选方向信息被校正。 针对每个校正组计算评估值,并且基于所计算的评估值来选择一组。 配置所选择的集合的候选位置信息和候选方向信息分别作为感测位置信息和感测取向信息记录在存储器中。
    • 10. 发明申请
    • PRODUCTION METHOD OF TITANIUM OXIDE SOL
    • 氧化钛溶胶的生产方法
    • US20110274767A1
    • 2011-11-10
    • US13128496
    • 2009-10-27
    • Hirokazu KatoNatsumi Tsuihiji
    • Hirokazu KatoNatsumi Tsuihiji
    • A01N59/16B01J21/06H01B1/02A01P1/00
    • B01J13/0047C01G23/053C01P2002/70C09C1/3669
    • There is provided a method for efficiently producing an anatase-type titanium oxide sol in an extremely advantageous dispersion state. The method comprises mixing a titanium alkoxide, an organic acid, and a quaternary ammonium hydroxide with water in a molar ratio of the organic acid of 0.4 to 4.0 relative to 1 mol of a titanium atom of the titanium alkoxide and in a molar ratio of the quaternary ammonium hydroxide of 0.8 to 1.9 relative to 1 mol of the organic acid to prepare an aqueous mixed solution having a concentration in terms of TiO2 of 0.5 to 10% by mass; heating the aqueous mixed solution to 50 to 100° C. to remove an alcohol; and subjecting the resulting titanium-containing aqueous solution to a hydrothermal treatment at 110 to 170° C.
    • 提供了一种在非常有利的分散状态下有效地生产锐钛矿型氧化钛溶胶的方法。 该方法包括使钛醇盐,有机酸和季铵氢氧化物与水相比,相对于1摩尔钛醇钛的钛原子,有机酸的摩尔比为0.4-4.0摩尔比, 相对于1摩尔有机酸为0.8〜1.9的季铵氢氧化物,以制备TiO 2浓度为0.5〜10质量%的水性混合溶液; 将含水混合溶液加热至50至100℃以除去醇; 并将所得含钛水溶液在110〜170℃进行水热处理。