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    • 3. 发明授权
    • Radiation-sensitive polymer and radiation-sensitive composition
containing the same
    • 辐射敏感聚合物和含有它的辐射敏感组合物
    • US5100762A
    • 1992-03-31
    • US549736
    • 1990-07-09
    • Youko TanakaShigeru KubotaHideo HoribeHiroshi KoezukaTeruhiko Kumada
    • Youko TanakaShigeru KubotaHideo HoribeHiroshi KoezukaTeruhiko Kumada
    • C08L43/00G03F7/004G03F7/075
    • G03F7/075C08L43/00G03F7/0042
    • A radiation-sensitive polymer is capable of resistance to the dry etching when it is applied to form very fine patterns in VLSIs and other semiconductor devices, wherein the polymer is a radiation-sensitive polymer that contains at least one unit represented by the general formula (I): ##STR1## (where X is an alkyl group, a halogen atom or a halogenated alkyl group; R.sup.1 is an alkyl group, an alkoxy or an aryl group; R.sup.2 is carbon monoxide; M is Si, Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer), and which optionally contains at least one unit represented by the general formula (II): ##STR2## (where Y is an alkyl group, a halogen atom or a halogenated alkyl group; R.sup.3 is an alkyl group or an aryl group) and/or at least one unit represented by the general formula (III):--SO.sub.2 --R.sup.4 (III)(where R.sup.4 is a divalent alkyl or aryl group).
    • 当辐射敏感聚合物被施加以在VLSI和其它半导体器件中形成非常精细的图案时,能够耐干蚀刻,其中该聚合物是含有至少一个由通式表示的单元的辐射敏感性聚合物 I):其中X是烷基,卤原子或卤代烷基; R 1是烷基,烷氧基或芳基; R 2是一氧化碳; M是Si,Ge, Sn,Ti,Mo或W; k是由(M-1)的化合价定义的数字; l是0或正整数),并且任选地含有至少一个由通式(II)表示的单元: (II)(其中Y是烷基,卤原子或卤代烷基; R3是烷基或芳基)和/或至少一个由通式(III)表示的单元: - SO 2 -R 4(III)(其中R 4是二价烷基或芳基)。
    • 6. 发明授权
    • Channel selector valve and method of driving the same, compressor with the channel selector valve, and device for controlling refrigerating cycle
    • 通道切换阀及其驱动方法,具有通道切换阀的压缩机,以及用于控制制冷循环的装置
    • US06684651B1
    • 2004-02-03
    • US09743079
    • 2001-01-02
    • Yoshitaka YoshizawaKenji SuzukiMitsuaki NodaShigeru KubotaTadashi AokiHiroshi ItoNobuyuki KiuchiSeiichi Nakahara
    • Yoshitaka YoshizawaKenji SuzukiMitsuaki NodaShigeru KubotaTadashi AokiHiroshi ItoNobuyuki KiuchiSeiichi Nakahara
    • G12B100
    • F16K11/0655F25B41/046Y10T137/86839
    • Upon a selector operation of a valve such as a four-way selector valve provided in a refrigerating cycle for selecting a channel of fluid, prevention of environmental pollution and energy saving and the like are effectively achieved. A sliding valve is coupled with a piston in a housing of a channel selector valve provided in a refrigerating cycle and the sliding valve moves due to a difference in pressure and so on at both sides of the piston, thereby a channel of fluid is selected. A processing section of a control device is constituted with microcomputers of an indoor and outdoor control sections, while a detecting section of the control device includes temperature sensor, detection means for detecting pressure, detection means for detecting flow rate, detection means for detecting voltage/current, and detection means for detecting frequency. Driving sections of an electrically-driven expansion valve, an indoor heat exchanger, an outdoor heat exchanger and a compressor are means that function in response to execution of control programs so that physical quantity, such as pressure, differential pressure and flow rate in the channel selector valve provided in the refrigerating cycle, and a rate of change in physical quantity, such as a rate of change in pressure, a rate of change in differential pressure and a rate of change in flow rate, are controlled, thereby a channel of the fluid is selected by the channel selector valve.
    • 在设置在用于选择流路的冷冻循环中的四通换向阀等阀的选择操作时,有效地实现防止环境污染和节能等。 滑阀与设置在制冷循环中的通道切换阀的壳体中的活塞联接,并且滑阀由于活塞两侧的压力差等而移动,从而选择流体通道。 控制装置的处理部分由室内和室外控制部分的微型计算机组成,而控制装置的检测部分包括温度传感器,用于检测压力的检测装置,检测流量的检测装置,检测电压/ 电流和检测装置,用于检测频率。 电动膨胀阀,室内热交换器,室外热交换器和压缩机的驱动部分是响应于控制程序的执行起作用的装置,使得通道中的物理量例如压力,压差和流量 设置在制冷循环中的选择阀,以及压力变化率,压差变化率和流量变化率等物理量的变化率被控制,由此, 流体由流路切换阀选择。
    • 9. 发明授权
    • Chip separation and alignment apparatus
    • 芯片分离和对准装置
    • US4953749A
    • 1990-09-04
    • US280222
    • 1988-12-05
    • Shigeru KubotaShoji KanouMasahiro Kubo
    • Shigeru KubotaShoji KanouMasahiro Kubo
    • B65G47/14H05K13/02
    • H05K13/027B65G47/1407
    • A chip separation and alignment apparatus capable of accurately and readily accomplishing separation and alignment of chips with a simple construction. The apparatus includes a chip separation and alignment section and a chip separation section. The chip separation and alignment section includes a chip cassette formed into a flat rectangular box-like shape, in which are formed a chip storage chamber, a chip alignment hole provided with an upper end opening through which the chip alignment hole is communicated with a lower portion of the chip storage chamber and a lower end opening, and at least one air ejection port arranged near the upper end opening to intermittently eject air therethrough. The chip separation section is arranged at the lower end opening of the chip alignment hole to separate chips one by one and to successively supply the separated chips to a subsequent step.
    • 一种能够以简单的结构准确且容易地实现芯片的分离和对准的芯片分离和对准装置。 该装置包括芯片分离和对准部分和芯片分离部分。 芯片分离和取向部分包括形成为扁平矩形盒状形状的芯片盒,其中形成有芯片存储室,芯片对准孔设置有上端开口,芯片对准孔通过该上端开口与下部 芯片存储室的一部分和下端开口,以及布置在上端开口附近的至少一个空气喷射口,以间歇地喷出空气。 芯片分离部设置在芯片对准孔的下端开口处,逐个分离芯片,并将分离的芯片依次供给到随后的步骤。
    • 10. 发明授权
    • Chip separation and alignment apparatus
    • 芯片分离和对准装置
    • US4801044A
    • 1989-01-31
    • US54497
    • 1987-05-27
    • Shigeru KubotaShoji KanouMasahiro Kubo
    • Shigeru KubotaShoji KanouMasahiro Kubo
    • B65G47/14H05K13/02B23Q7/12B65H3/08
    • H05K13/027B65G47/1407
    • A chip separation and alignment apparatus capable of accurately and readily accomplishing separation and alignment of chips with a simple construction. The apparatus includes a chip separation and alignment section and a chip separation section. The chip separation and alignment section includes a chip cassette formed into a flat rectangular box-like shape, in which are formed a chip storage chamber, a chip alignment hole provided with an upper end opening through which the chip alignment hole is communicated with a lower portion of the chip storage chamber and a lower end opening, and at least one air ejection port arranged near the upper end opening to intermittenly eject air therethrough. The chip separation section is arranged at the lower end opening of the chip alignment hole to separate chips one by one and to successively supply the separated chips to a subsequent step.
    • 一种能够以简单的结构准确且容易地实现芯片的分离和对准的芯片分离和对准装置。 该装置包括芯片分离和对准部分和芯片分离部分。 芯片分离和取向部分包括形成为扁平矩形盒状形状的芯片盒,其中形成有芯片存储室,芯片对准孔设置有上端开口,芯片对准孔通过该上端开口与下部 芯片存储室的一部分和下端开口,以及布置在上端开口附近的至少一个空气喷射口,以间断地喷出空气。 芯片分离部设置在芯片对准孔的下端开口处,逐个分离芯片,并将分离的芯片依次供给到随后的步骤。