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1. 发明授权

US5292399A Plasma etching apparatus with conductive means for inhibiting arcing 失效
标题翻译：具有用于抑制电弧放电的导电装置的等离子体蚀刻装置
公开(公告)号：US5292399A
公开(公告)日：1994-03-08
申请号：US819573
申请日：1992-01-08
申请人： Terrance Y. Lee , Fred C. Redeker , Petru N. Nitescu , Robert J. Steger , David W. Groechel , Semyon Sherstinsky , Maya Shendon , Samuel Luong
发明人： Terrance Y. Lee , Fred C. Redeker , Petru N. Nitescu , Robert J. Steger , David W. Groechel , Semyon Sherstinsky , Maya Shendon , Samuel Luong
IPC分类号： H01L21/00 , H01L21/687
CPC分类号： H01L21/68721 , H01L21/67069 , Y10S156/915
摘要： An improved plasma etching apparatus is disclosed for the plasma etching of semiconductor wafers. The improvement includes conductive means for inhibiting arcing from electrical charges accumulating on one or more non-conductive protective surfaces on members at rf potential within the apparatus, such as the metal pedestal which supports the wafer being etched and supplies the rf potential to it, and the clamping ring mechanism which clamps the wafer to the pedestal. The conductive means may include one or more conductive plugs extending through one or more of the protective surfaces or a conductive ring surrounding the wafer on the top surface of the metal pedestal. The conductive material is selected from the class consisting of carbon; a silicide; titanium nitride; a carbide; and a semiconductor such as silicon doped to provide a resistivity ranging from about 0.001 to about 20 ohm-cm.
摘要翻译：公开了用于半导体晶片的等离子体蚀刻的改进的等离子体蚀刻装置。该改进包括导电装置，用于抑制积聚在装置内的rf电位的构件上的一个或多个不导电保护表面上的电荷的电弧，例如支撑被蚀刻的晶片并将rf电位提供给它的金属基座，以及夹紧环机构，其将晶片夹持到基座。导电装置可以包括延伸穿过一个或多个保护表面的一个或多个导电插塞或围绕金属基座的顶表面上的晶片的导电环。导电材料选自碳; 硅化物氮化钛; 硬质合金以及掺杂硅的半导体，以提供约0.001至约20欧姆 - 厘米的电阻率。

2. 发明授权

US5348497A High voltage vaccum feed-through electrical connector 失效
标题翻译：高压真空馈电电连接器
公开(公告)号：US5348497A
公开(公告)日：1994-09-20
申请号：US931096
申请日：1992-08-14
申请人： Petru N. Nitescu
发明人： Petru N. Nitescu
IPC分类号： H01J37/32 , H01L21/683 , H01R13/24 , H01R13/53
CPC分类号： H01J37/32577 , H01L21/6831 , H01R13/53 , H01R13/24
摘要： A high voltage contact assembly comprising two dielectric housing members adapted for fastening together, the first dielectric housing member having a first conductor inserted therein, the second dielectric housing member having a second conductor inserted therein and spring means sandwiched between the first conductor and the second conductor, the second conductor fastened to a high voltage cable member, such that, when the dielectric housing members are fastened together, the first conductor member extends above the surface of the first housing member. The contact assembly of the invention is useful for mounting in a base plate support for an electrostatic chuck in an etch chamber.
摘要翻译：一种高压接触组件，包括适于紧固在一起的两个电介质壳体构件，所述第一绝缘壳体构件具有插入其中的第一导体，所述第二绝缘壳体构件具有插入其中的第二导体和夹在所述第一导体和所述第二导体之间的弹簧装置所述第二导体被固定到高压电缆构件上，使得当所述绝缘壳体构件紧固在一起时，所述第一导体构件在所述第一壳体构件的表面上方延伸。本发明的接触组件可用于安装在蚀刻室中用于静电卡盘的基板支撑件中。

3. 发明授权

US5641375A Plasma etching reactor with surface protection means against erosion of walls 失效
标题翻译：具有表面保护功能的等离子体蚀刻反应器可防止壁侵蚀
公开(公告)号：US5641375A
公开(公告)日：1997-06-24
申请号：US291369
申请日：1994-08-15
申请人： Petru N. Nitescu , Hoan Hai Nguyen
发明人： Petru N. Nitescu , Hoan Hai Nguyen
IPC分类号： H01L21/302 , H01J37/32 , H01L21/02 , H01L21/3065
CPC分类号： H01J37/32495 , Y10S156/916
摘要： A thin flexible removeable shield made of electrically conducting material presses against the interior walls of an apertured processing chamber to protect the processing chamber walls from erosion from the reactive plasma gases. The shield and walls are electrically interconnected with a sleeve-like conductive insert overlapping a surface portion of the shield and passing through the shield and lining a chamber aperture, with the insert also insuring the positioning of the insert against the wall. The remaining exposed surface of the shield has a protective anodization. A conductive connector preferably also connects the insert to another interior chamber structure at the same electrical potential as the chamber walls.
摘要翻译：由导电材料制成的薄柔性可移除屏蔽件压靠有孔处理室的内壁，以保护处理室壁免受反应性等离子体气体的侵蚀。屏蔽层和壁与套筒状导电插件电连接，该导电插入件与屏蔽件的表面部分重叠并穿过屏蔽件并衬套室孔，插入件还确保插入件抵靠壁的位置。屏蔽的剩余暴露表面具有保护阳极氧化。导电连接器优选还将插入件连接到与室壁相同的电位的另一内部室结构。

4. 发明授权

US5462080A Heated removable throttle valve 失效
标题翻译：加热可拆卸节流阀
公开(公告)号：US5462080A
公开(公告)日：1995-10-31
申请号：US114893
申请日：1993-08-31
申请人： Richard W. Plavidal , Petru N. Nitescu , Greg Mudwilder , Richard Crockett
发明人： Richard W. Plavidal , Petru N. Nitescu , Greg Mudwilder , Richard Crockett
IPC分类号： F16K1/22 , F16K27/02 , F16K47/08 , F16K49/00 , F16K51/02
CPC分类号： F16K27/0218 , F16K47/08 , F16K49/002 , Y10T137/6048 , Y10T137/6497 , Y10T137/6606 , Y10T137/8122
摘要： A two piece throttling valve is disclosed. The valve assembly includes a stationary outer housing with an inner removable operable assembly. In this configuration the piping (pump stack) does not have to disassembled to remove, clean or replace the internal valve pieces or the in-line screen. The inner assembly can be quickly removed for cleaning. The entire valve assembly is heated to reduce deposition of volatile process byproducts on the internal valve surfaces and reduce the cleaning frequency. A wedge plate is provided in the outer stationary valve housing to mate with a sloped bottom surface of the inner valve housing such that when the inner assembly is in position in the outer valve housing there is a tight fit between adjacent sealing surfaces around the valve bore. A single flat surface seal provides vacuum sealing between the inner assembly and outer housing. A dual valve stem (shaft) seal seals the valve shaft. The seal includes an inner O-ring made of a chemically resistant material and an outer O-ring that is less chemically resistant, but has a dual-quad profile to prevent vacuum leakage. A screen in the fluid passage adjacent to and supported by the outer housing can easily be accessed from the inside of the outer housing.
摘要翻译：公开了一种两件式节流阀。阀组件包括具有内部可拆卸可操作组件的固定外壳。在这种配置中，管道（泵组）不需要拆卸，以拆卸，清洁或更换内部阀片或直列式屏幕。内部组件可以快速拆卸清洁。加热整个阀门组件以减少内部阀门表面上挥发性过程副产物的沉积并降低清洗频率。在外部固定阀壳体中设置楔形板，以与内部阀壳体的倾斜的底部表面配合，使得当内部组件在外部阀壳体中的适当位置时，在阀孔周围的相邻密封表面之间紧密配合。单个平面密封件在内部组件和外部壳体之间提供真空密封。双阀杆（轴）密封件密封阀轴。密封件包括由耐化学腐蚀材料制成的内O形环和外部O形环，其耐化学性较差，但具有双重四边形以防止真空泄漏。靠近外壳的流体通道中的屏幕可以容易地从外壳的内部进入。

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