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    • 10. 发明授权
    • Method of and apparatus for generating low-energy neutral particle beam
    • 用于产生低能量中性粒子束的方法和装置
    • US5432342A
    • 1995-07-11
    • US229780
    • 1994-04-19
    • Tatsuya NishimuraHidenao Suzuki
    • Tatsuya NishimuraHidenao Suzuki
    • H05H3/00H05H1/24H05H3/02
    • H05H3/02
    • In a low-energy neutral particle beam generating apparatus having a main discharge chamber, a high-density electron beam generated in an electron beam generating unit is introduced into a main discharge chamber where it is diverged by a positive voltage applied to an anode electrode and a multipolar magnetic field formed by a permanent magnet, a main discharge gas introduced into the main discharge chamber is ionized by collision with the diverged electron beam, thereby generating a uniform plasma in the main discharge chamber, low-energy ions are drawn out from the plasma and electrically neutralized by a perforated electrode having a multiplicity of holes, thereby obtaining a low-energy neutral particle beam of large diameter without the need of using a complicated, large-sized apparatus.
    • 在具有主放电室的低能量中性粒子束产生装置中,在电子束产生单元中产生的高密度电子束被引入主放电室,在主放电室中,通过施加到阳极的正电压而发散, 由永磁体形成的多极磁场,通过与发散的电子束的碰撞而导入主放电室的主放电气体被离子化,从而在主放电室中产生均匀的等离子体,低能离子从 通过具有多个孔的穿孔电极等离子体和电中和,从而获得大直径的低能量中性粒子束,而不需要使用复杂的大型装置。