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1. 发明授权

US08138442B2 Wire electric discharge machining method, semiconductor wafer manufacturing method, and solar battery cell manufacturing method 有权
标题翻译：线放电加工方法，半导体晶片制造方法和太阳能电池单元制造方法
公开(公告)号：US08138442B2
公开(公告)日：2012-03-20
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H7/02 , H01L21/301 , H01L21/306 , B23H9/00
CPC分类号： B23H7/02 , B23H9/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译：本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。具有体积电阻率等于或大于0.5且OHgr·cm且等于或小于5Ω的体积电阻率，硬脆材料的放电加工是通过施加具有脉冲宽度等于或高于1微秒并且等于或低于4微秒，并且在将线电极加工时的峰值电流等于或高于10A并等于或低于50A的线并且在线电极和待加工对象之间产生放电脉冲。

2. 发明申请

US20090212026A1 WIRE ELECTRIC DISCHARGE MACHINING METHOD, SEMICONDUCTOR WAFER MANUFACTURING METHOD, AND SOLAR BATTERY CELL MANUFACTURING METHOD 有权
标题翻译：电线放电加工方法，半导体制造方法和太阳能电池组件制造方法
公开(公告)号：US20090212026A1
公开(公告)日：2009-08-27
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H1/00
CPC分类号： B23H7/02 , B23H9/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译：本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。通过施加具有脉冲宽度的脉冲电压来执行体积电阻率等于或高于0.5Ω·cm且等于或小于5Ω·cm的高体积电阻率，硬脆性材料的放电加工等于或高于1个音箱并且等于或低于4个音箱，并且在对线电极进行等于或高于10A且等于或小于50A的线电极加工时具有峰值电流，以及在线电极和待加工对象之间产生放电脉冲。

3. 发明授权

US5919380A Three-dimensional electrical discharge machining method and apparatus utilizing NC control 失效
标题翻译：采用NC控制的三维放电加工方法和装置
公开(公告)号：US5919380A
公开(公告)日：1999-07-06
申请号：US606978
申请日：1996-02-26
申请人： Takuji Magara , Akihiro Goto , Yoshihito Imai , Tomoko Sendai , Tatsushi Sato , Hidetaka Miyake
发明人： Takuji Magara , Akihiro Goto , Yoshihito Imai , Tomoko Sendai , Tatsushi Sato , Hidetaka Miyake
IPC分类号： B23H1/04 , B23H7/06 , B23H7/20 , B23H7/26 , B23H7/30 , B23H1/00 , B23H7/28
CPC分类号： B23H7/065 , B23H7/20 , B23H7/30 , B23H2400/10
摘要： To obtain high machining speed and machining accuracy in three-dimensional machining by using of an electrode of simple shape. Applying voltage between an electrode of simple shape and a workpiece, performing three-dimensional control by an NC control while synthesizing a feed of a Z-axis direction for correcting longitudinal consumed amount of an electrode with an X-Y plane feed, storing amount equivalent to an X-Y moving distance in an X-Y plane corresponding to correcting moving amount of the Z-axis direction in an electrical discharge machining method for machining a desired three-dimensional shape and performing a feed of correcting moving amount in the Z-axis direction each time a moving distance in the X-Y plane on a moving locus during machining reaches the above stored amount.
摘要翻译：通过使用简单形状的电极在三维加工中获得高加工速度和加工精度。在简单形状的电极和工件之间施加电压，在通过XY平面进给合成用于校正电极的纵向消耗量的Z轴方向的进给的同时，通过NC控制进行三维控制，相当于在用于加工所需三维形状的放电加工方法中对应于校正Z轴方向的移动量的XY平面中的XY移动距离，并且每次移动时执行Z轴方向上的校正移动量的馈送加工过程中移动轨迹上的XY平面上的距离达到上述存储量。

4. 发明授权

US5837957A Electric discharge machining apparatus 失效
标题翻译：放电加工机
公开(公告)号：US5837957A
公开(公告)日：1998-11-17
申请号：US807866
申请日：1997-02-26
申请人： Tatsushi Sato , Yoshihito Imai , Tomoko Sendai , Hidetaka Miyake , Takashi Yuzawa , Takuji Magara
发明人： Tatsushi Sato , Yoshihito Imai , Tomoko Sendai , Hidetaka Miyake , Takashi Yuzawa , Takuji Magara
IPC分类号： B23H1/04 , B23H1/06 , C04B35/52
CPC分类号： B23H1/04 , B23H1/06
摘要： An electric discharge machining apparatus in which at least either of a tool electrode or a workpiece is made of an anisotropic conductive material, includes, on a good conductive surface 20b of the anisotropic conductive material 2, a portion for connecting an isotropic conductive member 22. Electric discharge is generated on the good conductive surface 20b of the anisotropic conductive material 2. A conductive adhesive agent 23 is employed to bond the anisotropic conductive material 2 and the isotropic conductive member 22 to each other. The anisotropic conductive material is a pyrocarbon material. The pyrocarbon heat resolved carbon material is employed as a tool electrode material. Incombustible dielectric fluid, such as pure water, is employed as dielectric fluid. Moreover, there are provided apparatus for measuring voltage during electric discharge, apparatus for setting a threshold value for use to determine whether the electric discharge is normal electric discharge or abnormal electric discharge and apparatus for interrupting supply of a discharge current in a case where the measured discharge voltage is higher than the threshold value.
摘要翻译：一种放电加工装置，其中工具电极或工件中的至少一个由各向异性导电材料制成，在各向异性导电材料2的良导电表面20b上包括用于连接各向同性导电部件22的部分。在各向异性导电材料2的良好导电表面20b上产生放电。使用导电粘合剂23将各向异性导电材料2和各向同性导电构件22彼此接合。各向异性导电材料是热解碳材料。热解碳碳材料用作工具电极材料。不可燃介质流体，例如纯水，被用作介电流体。此外，还提供了用于在放电期间测量电压的装置，用于设定用于确定放电是正常放电还是异常放电的阈值的装置以及在所测量的情况下中断放电电流的供应的装置放电电压高于阈值。

5. 发明授权

US5894418A Method for creating a machining condition series 失效
标题翻译：创建加工条件系列的方法
公开(公告)号：US5894418A
公开(公告)日：1999-04-13
申请号：US816301
申请日：1997-03-13
申请人： Tatsushi Sato , Tomoko Sendai
发明人： Tatsushi Sato , Tomoko Sendai
IPC分类号： B23Q15/00 , B23H7/20 , G05B19/4093 , G05B13/02
CPC分类号： G05B19/40937 , B23H7/20 , G05B2219/35168 , G05B2219/36281 , G05B2219/36284 , G05B2219/36289 , Y02P90/265
摘要： A method for creating machining conditions and/or machining condition series capable of meeting a plurality of the required machining specifications, in which the method designates at least one of ranges of the machining specifications, ranges of satisfaction degrees the required specifications and functions indicating satisfaction degrees to the required specifications. The method determines a compromise between the required machining specifications The required machining specifications includes surface roughness, consumption rate of the electrode and machining time.
摘要翻译：一种用于创建能够满足多个所需加工规格的加工条件和/或加工条件系列的方法，其中该方法指定加工规格的范围，所需规格的满足度范围和指示满意度的功能中的至少一个达到规定要求。该方法确定所需加工规格之间的折衷要求所需的加工规格包括表面粗糙度，电极消耗速率和加工时间。

6. 发明授权

US5751589A Method for creating a machining condition series 失效
标题翻译：创建加工条件系列的方法
公开(公告)号：US5751589A
公开(公告)日：1998-05-12
申请号：US255819
申请日：1994-06-07
申请人： Tatsushi Sato , Tomoko Sendai
发明人： Tatsushi Sato , Tomoko Sendai
IPC分类号： B23Q15/00 , B23H7/20 , G05B19/4093 , G06F17/00 , G05B13/02
CPC分类号： G05B19/40937 , B23H7/20 , G05B2219/35168 , G05B2219/36281 , G05B2219/36284 , G05B2219/36289 , Y02P90/265
摘要： A method for creating machining conditions and/or machining condition series capable of meeting a plurality of required machining specifications, in which the method designates at least one of ranges of the machining specifications, ranges of satisfaction degrees for the required specifications and functions indicating satisfaction degrees to the required specifications. The method determines a compromise between the required machining specifications. The required machining specifications includes surface roughness, consumption rate of the electrode and machining time.
摘要翻译：一种用于创建能够满足多种所需加工规格的加工条件和/或加工条件系列的方法，其中该方法指定加工规格的范围，所需规格的满足度范围和指示满意度的功能中的至少一个达到规定要求。该方法确定所需加工规格之间的妥协。所需的加工规格包括表面粗糙度，电极消耗率和加工时间。

7. 发明授权

US07259347B2 Electric discharge machine that calculates and displays the machining time 有权
标题翻译：计算和显示加工时间的放电机
公开(公告)号：US07259347B2
公开(公告)日：2007-08-21
申请号：US10493391
申请日：2003-05-20
申请人： Rika Sasaki , Tomoko Sendai , Hidetaka Katougi
发明人： Rika Sasaki , Tomoko Sendai , Hidetaka Katougi
IPC分类号： B23H7/20 , G06F19/00
CPC分类号： B23H7/20
摘要： A change in machining volume is calculated using a shape of the electrode and a shape of the workpiece expressed by three-dimensional models and machining condition data and the machining time is calculated according to actual machining status based on the calculated change in machining volume.
摘要翻译：使用电极的形状和由三维模型和加工条件数据表示的工件的形状来计算加工体积的变化，并且根据计算的加工体积的变化根据实际加工状态计算加工时间。

8. 发明申请

US20060065638A1 Electric discharge machine 有权
标题翻译：放电机
公开(公告)号：US20060065638A1
公开(公告)日：2006-03-30
申请号：US10493391
申请日：2003-05-20
申请人： Rika Sasaki , Tomoko Sendai , Hidetaka Katougi
发明人： Rika Sasaki , Tomoko Sendai , Hidetaka Katougi
IPC分类号： B23H7/20 , G06F19/00
CPC分类号： B23H7/20
摘要： A change in machining volume is calculated using a shape of the electrode and a shape of the workpiece expressed by three-dimensional models and machining condition data and the machining time is calculated according to actual machining status based on the calculated change in machining volume.
摘要翻译：使用电极的形状和由三维模型和加工条件数据表示的工件的形状来计算加工体积的变化，并且根据计算的加工体积的变化根据实际加工状态计算加工时间。

9. 发明授权

US06784395B2 Electric discharge machine with changing processing parameters 失效
标题翻译：放电加工机具有不同的加工参数
公开(公告)号：US06784395B2
公开(公告)日：2004-08-31
申请号：US10169225
申请日：2002-06-27
申请人： Tomoko Sendai , Koji Enomoto , Osamu Yasuda , Yasuhiro Kawai , Seiji Sato
发明人： Tomoko Sendai , Koji Enomoto , Osamu Yasuda , Yasuhiro Kawai , Seiji Sato
IPC分类号： B23H720
CPC分类号： B23H7/20
摘要： A wire-electrical discharge machine infuses a processing liquid in a gap between a wire and a workpiece and processes the workpiece using predetermined processing parameters. The machine includes a processing parameter memory that stores processing parameters, a second memory that stores a relationship between nozzle height and processing energy, a processing energy determining unit that determines the processing energy, for example, during rough processing, based on the relationship, and a processing parameter changing unit that changes the processing parameters based on the processing energy. The workpiece is processed using the changed processing parameters. According to this construction, wire breakage can be prevented and the accuracy of the processed surface can be improved.
摘要翻译：线电放电机将处理液注入到线和工件之间的间隙中，并使用预定的处理参数来处理工件。该机器包括存储处理参数的处理参数存储器，存储喷嘴高度与处理能量之间的关系的第二存储器，例如在粗加工期间基于该关系确定处理能量的处理能量确定单元，以及处理参数改变单元，其基于处理能量改变处理参数。使用改变的处理参数对工件进行处理。根据该结构，能够防止断线，能够提高加工面的精度。

10. 发明授权

US5183988A Electric discharge machining method 失效
标题翻译：电动放电加工方法
公开(公告)号：US5183988A
公开(公告)日：1993-02-02
申请号：US514644
申请日：1990-04-24
申请人： Hiroshi Takeuchi , Tomoko Sendai , Yozo Sakai
发明人： Hiroshi Takeuchi , Tomoko Sendai , Yozo Sakai
IPC分类号： B23H1/02 , B23H7/16 , B23H7/20
CPC分类号： B23H7/16 , B23H7/20
摘要： An electric discharge machining method which is practiced with stable machining condition and with high machining efficiency. The condition which, in machining a workpiece, tends to place the gap between the electrode and workpiece in unstable state is detected, and the period of time for which the condition thus selected lasts is set so that the discharge energy of a pulse voltage applied across the electrode and the workpiece is reduced for the period of time thus set. Therefore, in the electric discharge machining method of the invention, the machining operation is maintained stable with high machining efficiency at all times.
摘要翻译：一种放电加工方法，加工条件稳定，加工效率高。检测在加工工件时趋向于将电极和工件之间的间隙放置在不稳定状态的条件，并且将这样选择的条件持续的时间设定为使得施加在脉冲电压上的脉冲电压的放电能量电极和工件在这样设定的时间段内减少。因此，在本发明的放电加工方法中，加工操作始终保持稳定，加工效率高。

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