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1. 发明授权

US08138442B2 Wire electric discharge machining method, semiconductor wafer manufacturing method, and solar battery cell manufacturing method 有权
标题翻译：线放电加工方法，半导体晶片制造方法和太阳能电池单元制造方法
公开(公告)号：US08138442B2
公开(公告)日：2012-03-20
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H7/02 , H01L21/301 , H01L21/306 , B23H9/00
CPC分类号： B23H7/02 , B23H9/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译：本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。具有体积电阻率等于或大于0.5且OHgr·cm且等于或小于5Ω的体积电阻率，硬脆材料的放电加工是通过施加具有脉冲宽度等于或高于1微秒并且等于或低于4微秒，并且在将线电极加工时的峰值电流等于或高于10A并等于或低于50A的线并且在线电极和待加工对象之间产生放电脉冲。

2. 发明申请

US20090212026A1 WIRE ELECTRIC DISCHARGE MACHINING METHOD, SEMICONDUCTOR WAFER MANUFACTURING METHOD, AND SOLAR BATTERY CELL MANUFACTURING METHOD 有权
标题翻译：电线放电加工方法，半导体制造方法和太阳能电池组件制造方法
公开(公告)号：US20090212026A1
公开(公告)日：2009-08-27
申请号：US12093836
申请日：2005-11-16
申请人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
发明人： Tatsushi Sato , Yoshihito Imai , Teiji Takahashi , Takeshi Sakata , Tomoko Sendai , Yoichiro Nishimoto , Shigeru Matsuno , Takeyuki Maegawa , Takaaki Iwata
IPC分类号： B23H1/00
CPC分类号： B23H7/02 , B23H9/00
摘要： Provided are a wire electric discharge machining method for poorly conductive materials, such as solar cell silicon, and a semiconductor wafer manufacturing method and a solar battery cell manufacturing method based on the wire electric discharge machining method. Electrical discharge machining of a high volume resistivity, hard and brittle materials, having a volume resistivity that is equal to or higher than 0.5 Ω·cm and equal to or lower than 5 Ω·cm is performed by applying a pulse voltage having a pulse width that is equal to or higher than 1 μsec and equal to or lower than 4 μsec and having a peak current at the time of machining a wire electrode that is equal to or higher than 10A and equal to or lower than 50A to a wire electrode and generating a discharge pulse between the wire electrode and a subject to be machined.
摘要翻译：本发明提供一种导电材料的导电放电加工方法，例如太阳能电池硅，半导体晶片的制造方法以及基于该放电加工方法的太阳能电池单元的制造方法。通过施加具有脉冲宽度的脉冲电压来执行体积电阻率等于或高于0.5Ω·cm且等于或小于5Ω·cm的高体积电阻率，硬脆性材料的放电加工等于或高于1个音箱并且等于或低于4个音箱，并且在对线电极进行等于或高于10A且等于或小于50A的线电极加工时具有峰值电流，以及在线电极和待加工对象之间产生放电脉冲。

3. 发明授权

US5919380A Three-dimensional electrical discharge machining method and apparatus utilizing NC control 失效
标题翻译：采用NC控制的三维放电加工方法和装置
公开(公告)号：US5919380A
公开(公告)日：1999-07-06
申请号：US606978
申请日：1996-02-26
申请人： Takuji Magara , Akihiro Goto , Yoshihito Imai , Tomoko Sendai , Tatsushi Sato , Hidetaka Miyake
发明人： Takuji Magara , Akihiro Goto , Yoshihito Imai , Tomoko Sendai , Tatsushi Sato , Hidetaka Miyake
IPC分类号： B23H1/04 , B23H7/06 , B23H7/20 , B23H7/26 , B23H7/30 , B23H1/00 , B23H7/28
CPC分类号： B23H7/065 , B23H7/20 , B23H7/30 , B23H2400/10
摘要： To obtain high machining speed and machining accuracy in three-dimensional machining by using of an electrode of simple shape. Applying voltage between an electrode of simple shape and a workpiece, performing three-dimensional control by an NC control while synthesizing a feed of a Z-axis direction for correcting longitudinal consumed amount of an electrode with an X-Y plane feed, storing amount equivalent to an X-Y moving distance in an X-Y plane corresponding to correcting moving amount of the Z-axis direction in an electrical discharge machining method for machining a desired three-dimensional shape and performing a feed of correcting moving amount in the Z-axis direction each time a moving distance in the X-Y plane on a moving locus during machining reaches the above stored amount.
摘要翻译：通过使用简单形状的电极在三维加工中获得高加工速度和加工精度。在简单形状的电极和工件之间施加电压，在通过XY平面进给合成用于校正电极的纵向消耗量的Z轴方向的进给的同时，通过NC控制进行三维控制，相当于在用于加工所需三维形状的放电加工方法中对应于校正Z轴方向的移动量的XY平面中的XY移动距离，并且每次移动时执行Z轴方向上的校正移动量的馈送加工过程中移动轨迹上的XY平面上的距离达到上述存储量。

4. 发明授权

US5837957A Electric discharge machining apparatus 失效
标题翻译：放电加工机
公开(公告)号：US5837957A
公开(公告)日：1998-11-17
申请号：US807866
申请日：1997-02-26
申请人： Tatsushi Sato , Yoshihito Imai , Tomoko Sendai , Hidetaka Miyake , Takashi Yuzawa , Takuji Magara
发明人： Tatsushi Sato , Yoshihito Imai , Tomoko Sendai , Hidetaka Miyake , Takashi Yuzawa , Takuji Magara
IPC分类号： B23H1/04 , B23H1/06 , C04B35/52
CPC分类号： B23H1/04 , B23H1/06
摘要： An electric discharge machining apparatus in which at least either of a tool electrode or a workpiece is made of an anisotropic conductive material, includes, on a good conductive surface 20b of the anisotropic conductive material 2, a portion for connecting an isotropic conductive member 22. Electric discharge is generated on the good conductive surface 20b of the anisotropic conductive material 2. A conductive adhesive agent 23 is employed to bond the anisotropic conductive material 2 and the isotropic conductive member 22 to each other. The anisotropic conductive material is a pyrocarbon material. The pyrocarbon heat resolved carbon material is employed as a tool electrode material. Incombustible dielectric fluid, such as pure water, is employed as dielectric fluid. Moreover, there are provided apparatus for measuring voltage during electric discharge, apparatus for setting a threshold value for use to determine whether the electric discharge is normal electric discharge or abnormal electric discharge and apparatus for interrupting supply of a discharge current in a case where the measured discharge voltage is higher than the threshold value.
摘要翻译：一种放电加工装置，其中工具电极或工件中的至少一个由各向异性导电材料制成，在各向异性导电材料2的良导电表面20b上包括用于连接各向同性导电部件22的部分。在各向异性导电材料2的良好导电表面20b上产生放电。使用导电粘合剂23将各向异性导电材料2和各向同性导电构件22彼此接合。各向异性导电材料是热解碳材料。热解碳碳材料用作工具电极材料。不可燃介质流体，例如纯水，被用作介电流体。此外，还提供了用于在放电期间测量电压的装置，用于设定用于确定放电是正常放电还是异常放电的阈值的装置以及在所测量的情况下中断放电电流的供应的装置放电电压高于阈值。

5. 发明授权

US5894418A Method for creating a machining condition series 失效
标题翻译：创建加工条件系列的方法
公开(公告)号：US5894418A
公开(公告)日：1999-04-13
申请号：US816301
申请日：1997-03-13
申请人： Tatsushi Sato , Tomoko Sendai
发明人： Tatsushi Sato , Tomoko Sendai
IPC分类号： B23Q15/00 , B23H7/20 , G05B19/4093 , G05B13/02
CPC分类号： G05B19/40937 , B23H7/20 , G05B2219/35168 , G05B2219/36281 , G05B2219/36284 , G05B2219/36289 , Y02P90/265
摘要： A method for creating machining conditions and/or machining condition series capable of meeting a plurality of the required machining specifications, in which the method designates at least one of ranges of the machining specifications, ranges of satisfaction degrees the required specifications and functions indicating satisfaction degrees to the required specifications. The method determines a compromise between the required machining specifications The required machining specifications includes surface roughness, consumption rate of the electrode and machining time.
摘要翻译：一种用于创建能够满足多个所需加工规格的加工条件和/或加工条件系列的方法，其中该方法指定加工规格的范围，所需规格的满足度范围和指示满意度的功能中的至少一个达到规定要求。该方法确定所需加工规格之间的折衷要求所需的加工规格包括表面粗糙度，电极消耗速率和加工时间。

6. 发明授权

US5751589A Method for creating a machining condition series 失效
标题翻译：创建加工条件系列的方法
公开(公告)号：US5751589A
公开(公告)日：1998-05-12
申请号：US255819
申请日：1994-06-07
申请人： Tatsushi Sato , Tomoko Sendai
发明人： Tatsushi Sato , Tomoko Sendai
IPC分类号： B23Q15/00 , B23H7/20 , G05B19/4093 , G06F17/00 , G05B13/02
CPC分类号： G05B19/40937 , B23H7/20 , G05B2219/35168 , G05B2219/36281 , G05B2219/36284 , G05B2219/36289 , Y02P90/265
摘要： A method for creating machining conditions and/or machining condition series capable of meeting a plurality of required machining specifications, in which the method designates at least one of ranges of the machining specifications, ranges of satisfaction degrees for the required specifications and functions indicating satisfaction degrees to the required specifications. The method determines a compromise between the required machining specifications. The required machining specifications includes surface roughness, consumption rate of the electrode and machining time.
摘要翻译：一种用于创建能够满足多种所需加工规格的加工条件和/或加工条件系列的方法，其中该方法指定加工规格的范围，所需规格的满足度范围和指示满意度的功能中的至少一个达到规定要求。该方法确定所需加工规格之间的妥协。所需的加工规格包括表面粗糙度，电极消耗率和加工时间。

7. 发明授权

US5756956A Wire-cut electric discharge machining apparatus and control method therefor 失效
标题翻译：线切割放电加工装置及其控制方法
公开(公告)号：US5756956A
公开(公告)日：1998-05-26
申请号：US531076
申请日：1995-09-20
申请人： Seiji Sato , Hisashi Yamada , Takuji Magara , Yoshihito Imai , Tatsushi Sato
发明人： Seiji Sato , Hisashi Yamada , Takuji Magara , Yoshihito Imai , Tatsushi Sato
IPC分类号： B23H1/02 , B23H7/02 , B23H7/04
CPC分类号： B23H7/04
摘要： A wire-cut electric discharge machining apparatus and a control method for the wire-cut EDM apparatus. The amount of current pulses supplied to a machining gap can be measured precisely without a detection delay to thereby detect the occurrence of faulty machining such as wire electrode breakage and centralized arcs.
摘要翻译：一种线切割放电加工装置以及用于线切割EDM装置的控制方法。提供给加工间隙的电流脉冲量可以精确测量而没有检测延迟，从而检测线电极断裂和集中电弧等故障加工的发生。

8. 发明授权

US5380975A Electric discharge machining apparatus 失效
标题翻译：放电加工机
公开(公告)号：US5380975A
公开(公告)日：1995-01-10
申请号：US991643
申请日：1992-12-15
申请人： Tatsushi Sato , Yoshihito Imai
发明人： Tatsushi Sato , Yoshihito Imai
IPC分类号： B23H1/02
CPC分类号： B23H1/022 , B23H2300/20
摘要： An electric discharge machining apparatus of the type in which an electric power for electric discharge is accumulated in capacitors to perform electric discharge machining. To provide an electric discharge machining apparatus in which the manufacturing cost is relatively low, the machining speed is high, the machined surface is not damaged, and the electrode wear is low, a plurality of capacitors are connected in parallel with a machining gap which is formed by a machining electrode and workpiece that face each other. Charging resistors are provided in a charging circuit which is connected between a charging device for charging the capacitors and the capacitors. Switches are connected in series in a discharging circuit which is connected between the capacitors and the machining gap. A control device for controlling the on/off operation of the switches sequentially is provided to performing the electric discharge machining with high speed and high accuracy.
摘要翻译：一种放电加工装置，其放电用电力蓄积在电容器中进行放电加工。为了提供一种放电加工装置，其制造成本相对较低，加工速度高，加工表面不损坏，电极磨损低，多个电容器与加工间隙并联连接，加工间隙为由彼此相对的加工电极和工件形成。在连接在用于对电容器充电的充电装置和电容器之间的充电电路中提供充电电阻器。开关串联连接在电容器和加工间隙之间的放电电路中。提供用于顺序地控制开关的开/关动作的控制装置，以高速，高精度进行放电加工。

9. 发明授权

US06621033B2 Electrical discharge machining apparatus 有权
标题翻译：放电加工机
公开(公告)号：US06621033B2
公开(公告)日：2003-09-16
申请号：US09773559
申请日：2001-02-02
申请人： Tatsushi Sato , Yoshihito Imai , Hidetaka Miyake , Takayuki Nakagawa
发明人： Tatsushi Sato , Yoshihito Imai , Hidetaka Miyake , Takayuki Nakagawa
IPC分类号： B23H104
CPC分类号： B23H1/06 , B23H1/04 , Y10T29/4921 , Y10T428/1216
摘要： A layered anisotropically conductive element, a resistant element, and a feed element constitute an electrode for discharge machining. The layered anisotropically conductive element includes high conductivity layers and low conductivity layers alternately laminated on each other, the high conductivity layers and the low conductivity layers being made of thin metallic plates coated with an insulating film. The layered anisotropically conductive element has an anisotropic conductivity, in which the conductivity in a direction parallel to the low conductivity layers is much higher than that in a direction perpendicular to the low conductivity layers. The resistant element is connected to one of end surfaces of the layered anisotropically conductive element perpendicular to the layers. The feed element is connected to the resistant element.
摘要翻译：层状各向异性导电元件，电阻元件和馈电元件构成用于放电加工的电极。层状各向异性导电元件包括彼此交替层叠的高导电性层和低电导率层，高导电性层和低电导率层由涂覆有绝缘膜的薄金属板制成。层状各向异性导电元件具有各向异性导电性，其中平行于低电导率层的方向上的导电率远高于垂直于低电导率层的方向上的导电率。电阻元件连接到垂直于层的层状各向异性导电元件的端面之一。馈电元件连接到电阻元件。

10. 发明授权

US5496984A Electrical discharge machine and machining method therefor 失效
标题翻译：放电机及其加工方法
公开(公告)号：US5496984A
公开(公告)日：1996-03-05
申请号：US998840
申请日：1992-12-30
申请人： Akihiro Goto , Yoshio Ozaki , Atsushi Taneda , Tatsushi Sato , Yoshihito Imai
发明人： Akihiro Goto , Yoshio Ozaki , Atsushi Taneda , Tatsushi Sato , Yoshihito Imai
IPC分类号： B23H1/02 , B23H7/16
CPC分类号： B23H1/024 , B23H7/16
摘要： A method and apparatus for detecting and controlling the operation of an electric discharge machine for machining a workpiece. The machining is conducted by generating pulse discharges at a machining gap formed by a machining electrode and the workpiece opposed to each other. The alternating-current components or high frequency components of at least one of the current, voltage and impedance of the machining gap, the rectified components thereof, or amplitude, frequency or other signal characteristics thereof are detected and processed for control of the machining. The processing may include frequency analysis, pulse counting, threshold detection and the like using analog and digital processing.
摘要翻译：一种用于检测和控制用于加工工件的放电加工机的操作的方法和装置。通过在由加工电极和相对的工件形成的加工间隙产生脉冲放电来进行加工。检测并处理加工间隙的电流，电压和阻抗，其整流分量或其振幅，频率或其它信号特性中的至少一个的交流分量或高频分量，以进行加工的控制。该处理可以包括使用模拟和数字处理的频率分析，脉冲计数，阈值检测等。

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