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    • 1. 发明授权
    • Process for oxidation of an article
    • 制品氧化过程
    • US5510158A
    • 1996-04-23
    • US348259
    • 1994-11-28
    • Tatsumi HiramotoTatsushi IgarashiHiromitsu MatsunoTakeo MatsushimaShinichi Iso
    • Tatsumi HiramotoTatsushi IgarashiHiromitsu MatsunoTakeo MatsushimaShinichi Iso
    • B08B7/00C03C23/00C23G5/00H01L21/311C23C16/48B05D3/00
    • H01L21/31138B08B7/0057C03C23/0075C23G5/00
    • An oxidation process for an article to be treated in which, by generating ozone with a high concentration, a high treatment rate is achieved. In particular, an oxygen-containing fluid is irradiated with a vacuum ultraviolet rays emitted from a dielectric barrier discharge lamp in which xenon gas is encapsulated, producing a photochemical reaction from which ozone and an activated oxygen result. By causing this ozone and activated oxygen to contact the surface of the article to be treated, the surface of the article is oxidized. An even higher treatment rate can be achieved by generating the activated oxygen with the simultaneous use of a far ultraviolet ray source, thereby increasing the activity of the activated oxygen. Advantageously, the oxidation of the article to be treated with the vacuum ultraviolet rays and far ultraviolet rays is performed in accordance with the relationship:(p.times.d)/(1+I.sup.1/2)=0.33where I is a radiation density (mW/cm.sup.2) of the far ultraviolet rays on a surface of the article to be treated in which there is no light absorption between the far ultraviolet ray source and the surface of the article to be treated, d is a shortest distance (cm) of passage of the vacuum ultraviolet rays emitted from the dielectric barrier discharge lamp to the surface of the article to be treated, and p is an oxygen partial pressure (atm) of the oxygen-containing gas, which is present between the dielectric barrier discharge lamp and the article to be treated.
    • 通过产生高浓度臭氧,处理率高的待处理物品的氧化处理。 特别地,从包封有氙气的电介质阻挡放电灯发出的真空紫外线照射含氧流体,产生产生臭氧和活性氧的光化学反应。 通过使该臭氧和活性氧与被处理物的表面接触,制品的表面被氧化。 通过同时使用远紫外线源产生活性氧,从而提高活性氧的活性,可以实现更高的治疗率。 有利地,根据以下关系进行用真空紫外线和远紫外线处理的制品的氧化:(pxd)/(1 + I1 / 2)= 0.33其中I是辐射密度(mW / cm2 )在远紫外线源和被处理物的表面之间不存在光吸收的待处理物品的表面上的远紫外线的距离d为通过的最短距离(cm) 从介电阻挡放电灯发射到待处理物体的表面的真空紫外线,p是存在于电介质阻挡放电灯与制品之间的含氧气体的氧分压(atm), 被处理。
    • 9. 发明授权
    • Dielectric barrier discharge lamp
    • 介质阻挡放电灯
    • US5666026A
    • 1997-09-09
    • US530655
    • 1995-09-20
    • Hiromitsu MatsunoNobuyuki HishinumaKenichi HiroseKunio KasagiFumitoshi TakemotoYoshinori AiuraTatsushi Igarashi
    • Hiromitsu MatsunoNobuyuki HishinumaKenichi HiroseKunio KasagiFumitoshi TakemotoYoshinori AiuraTatsushi Igarashi
    • G21K5/00H01J65/00H01J65/04H01J17/16H01J61/06
    • H01J65/046
    • A dielectric barrier discharge lamp having a generally cylindrical double-tube arrangement of an outer tube coaxially disposed about an inner tube, with an outer electrode disposed on an outside surface of the outer tube, an inner electrode disposed on an inside surface of the inner tube, and a discharge space provided between the outer tube and the inner tube which is filled with a discharge gas for formation of excimer molecules by dielectric barrier discharge achieves firm engagement of the inner electrode against the inner tube and a stable discharge over a long time even if part of the electrode corrodes due to the ozone produced or it wears. This is achieved by embodiments in which the inner electrode is a generally tubular part which is slit in an axial direction along the full length thereof. The tubular part can be a single cylindrically sheet having opposite longitudinally extending edges spaced from each other by a gap or overlapped. Alternatively, the tubular part can be formed of a pair of substantially semi-cylindrical parts which are separated by a gap between each pair of longitudinally extending edges.
    • 一种电介质阻挡放电灯,其具有大致圆柱形的双管布置,外管同轴地设置在内管周围,外电极设置在外管的外表面上,内电极设置在内管的内表面上 并且设置在外管和内管之间的放电空间,其填充有用于通过电介质阻挡放电形成准分子分子的放电气体,使得内部电极与内管牢固接合,并且长时间稳定地放电甚至 如果电极的一部分由于产生的臭氧或其磨损而腐蚀。 这是通过其中内部电极是沿着其整个长度沿轴向方向狭缝的大致管状部分的实施例来实现的。 管状部件可以是单个圆柱形片材,其具有彼此间隔开或重叠的相对的纵向延伸边缘。 或者,管状部分可以由一对基本上半圆柱形的部分形成,这些部分由每对纵向延伸边缘之间的间隙分开。
    • 10. 发明授权
    • Cadmium ARC lamp with improved UV emission
    • 镉ARC灯具有改善的紫外线发射
    • US5541481A
    • 1996-07-30
    • US282267
    • 1994-07-29
    • Akiyasu YamaguchiYukio YasudaHiromitsu MatsunoTatsushi Igarashi
    • Akiyasu YamaguchiYukio YasudaHiromitsu MatsunoTatsushi Igarashi
    • H01J61/12H01J61/18H01J61/30H01J61/86
    • H01J61/86H01J61/12H01J61/18H01J61/302
    • A cadmium rare gas discharge lamp of the short arc type that has a high power of the spectra in a wavelength range of 210 nm to 230 nm and a stable lamp voltage in lighting operation for a long period. An arc tube 1 is provided within which are disposed opposed, spaced apart electrodes 2, 3 and thermal insulation films 6, 7. A rare gas is encapsulated together with metal cadmium and a quartz glass is used for the material of the arc tube whose OH radical has a weight content of no more than 200 ppm. Electrodes 4 and 5 are spaced apart no more than 10 mm, so that with a lamp current at least 20 amperes, an arc of the electrode-stable type is formed and radiant light of Cd ions obtained. For the encapsulated rare gas, in one embodiment at least one of the rare gases neon, argon or krypton, are used and are encapsulated at a gas pressure of 35 kPa to 2.5 MPa at a standard temperature of 25.degree. C. The arc tube 1 is formed of quartz glass, electrodes 2 and 3 are placed opposite one another. In another embodiment, a halogen gas is encapsulated in the arc to in an amount from 4.5.times.10.sup.-10 mol/cm.sup.3 of arc tube volume to 2.1.times.10.sup.-7 mol/cm.sup.3 of are tube volume.
    • 一种短弧型的镉稀释气体放电灯,其在210nm至230nm的波长范围内具有高功率的光谱,并且在长时间的照明操作中具有稳定的灯电压。 设置有电弧管1,其中设置相对的间隔开的电极2,3和绝热膜6,7,稀有气体与金属镉一起被密封,并且石英玻璃用于电弧管的材料,其OH 自由基的重量含量不超过200ppm。 电极4和5的间隔不超过10毫米,使得灯电流至少为20安培,形成电极稳定型弧,并获得Cd离子的辐射光。 对于包封的稀有气体,在一个实施方案中,使用至少一种稀有气体氖,氩或氪,并在25℃的标准温度下以35kPa至2.5MPa的气体压力包封。电弧管1 由石英玻璃形成,电极2和3彼此相对放置。 在另一个实施方案中,将卤素气体以弧形管体积的4.5×10 -10 mol / cm 3封装到管体积的2.1×10 -7 mol / cm 3的量。