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    • 5. 发明申请
    • Thin film device and thin film inductor
    • 薄膜器件和薄膜电感器
    • US20070077395A1
    • 2007-04-05
    • US11540670
    • 2006-10-02
    • Taku Masai
    • Taku Masai
    • G11B5/64
    • H01F17/0006B81C1/0038H01F41/042H01F2017/0046H01L23/5227H01L2924/0002Y10T428/24355H01L2924/00
    • Provided is a thin film device capable of ensuring operating performance by ensuring the adhesion of a conductive film and the magnetic characteristic of a magnetic film. A substrate has a surface roughness (an arithmetic mean roughness Ra) within the range expressed in the expression: X μm≦Ra≦0.1 μm. A lower limit X of the surface roughness Ra is a value determined based on a series of parameters including an internal stress σ a thickness T, and an adhesiveness P per unit length of a conductive film. An anchor effect can be used to ensure the adhesion of the conductive film, and also ensure the magnetic characteristic (magnetic permeability) even when a magnetic film is provided on a substrate having a surface irregular structure.
    • 提供一种能够通过确保导电膜的粘附性和磁性膜的磁特性来确保操作性能的薄膜器件。 基板的表面粗糙度(算术平均粗糙度Ra)在以下表达式表示的范围内:X mum <= Ra <=0.1μm。 表面粗糙度Ra的下限X是基于包括内部应力σa厚度T的一系列参数和导电膜的每单位长度的粘附性P确定的值。 即使在具有表面不规则结构的基板上设置磁性膜时,也可以使用锚固效果来确保导电膜的粘附性,并且还确保磁特性(磁导率)。