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1. 发明授权

US6119518A Angular velocity sensor 失效
标题翻译：角速度传感器
公开(公告)号：US6119518A
公开(公告)日：2000-09-19
申请号：US906044
申请日：1997-08-05
申请人： Takeshi Itou , Yasushi Matsuhiro , Muneo Yorinaga , Kazushi Asami , Yoshimi Yoshino , Kazuhiko Miura
发明人： Takeshi Itou , Yasushi Matsuhiro , Muneo Yorinaga , Kazushi Asami , Yoshimi Yoshino , Kazuhiko Miura
IPC分类号： G01C19/56 , G01C19/5621 , G01C19/5628 , G01P9/00
CPC分类号： G01C19/5607
摘要： An angular velocity sensor includes a tuning-fork oscillator having a pair of arms jointed by a trunk, the pair of arms extending in parallel to each other, first and second driving piezoelectric elements arranged only on one surface of the trunk with a gap therebetween in an extending direction of the arms, and angular velocity detecting piezoelectric elements arranged on surfaces of the arms in parallel with the one surface of the trunk on which the first and second piezoelectric elements are arranged.
摘要翻译：角速度传感器包括音叉振荡器，该音叉具有一对臂，所述一对臂由主体连接，所述一对臂彼此平行地延伸，第一和第二驱动压电元件仅布置在躯干的一个表面上，其间具有间隙臂的延伸方向以及布置在臂的表面上并与第一和第二压电元件布置在其上的主体的一个表面平行的角速度检测压电元件。

2. 发明授权

US6116087A Angular velocity sensor 有权
标题翻译：角速度传感器
公开(公告)号：US6116087A
公开(公告)日：2000-09-12
申请号：US208451
申请日：1998-12-10
申请人： Kazushi Asami , Takayuki Ishikawa , Muneo Yorinaga , Yoshimi Yoshino
发明人： Kazushi Asami , Takayuki Ishikawa , Muneo Yorinaga , Yoshimi Yoshino
IPC分类号： G01C19/56 , G01C19/5607 , G01P9/04
CPC分类号： G01C19/5614 , G01C19/5621
摘要： An angular velocity sensor comprises a driving element, a detecting element, and a feedback element, all of which are disposed on an element forming face of an oscillator. An electrostatic capacitance of the feedback element is set to be equal to that of the detecting element. As a result, a synchronous detection circuit can reduce the offset signal due to a phase difference between signals from the feedback element and the detecting element.
摘要翻译：角速度传感器包括驱动元件，检测元件和反馈元件，它们都设置在振荡器的元件形成面上。将反馈元件的静电电容设定为与检测元件相同。结果，同步检测电路可以由于来自反馈元件和检测元件的信号之间的相位差而减小偏移信号。

3. 发明授权

US5536364A Process of plasma etching silicon 失效
标题翻译：等离子体蚀刻硅的工艺
公开(公告)号：US5536364A
公开(公告)日：1996-07-16
申请号：US253704
申请日：1994-06-03
申请人： Takahiko Yoshida , Kazushi Asami , Muneo Yorinaga , Yoshimi Yoshino
发明人： Takahiko Yoshida , Kazushi Asami , Muneo Yorinaga , Yoshimi Yoshino
IPC分类号： H01L21/3065 , H01L21/308
CPC分类号： H01L21/3065 , H01L21/3081 , Y10S438/945
摘要： A plasma etching process for forming a recess or opening on a silicon substrate by generating plasma between a pair of electrodes in an anode-coupled planar-type plasma etching apparatus and etching the silicon substrate located on one of the electrodes with the plasma, an improvement residing in that an etchant is a mixed gas of sulfur hexafluoride and oxygen and an etching mask covering the substrate, except for a portion where the recess or opening is to be formed, is made of chromium or a chromium compound. Preferably the distance between the electrodes is 10 to 30 mm, the volume ratio of sulfur hexafluoride to oxygen is 90:10 to 60:40, the pressure of the etchant gas is 0.15 to 0.4 Torr (20 to 53 Pa), and the temperature of the substrate is not less than 40.degree. C.
摘要翻译：一种等离子体蚀刻工艺，用于通过在阳极耦合的平面型等离子体蚀刻装置中的一对电极之间产生等离子体并且利用等离子体蚀刻位于其中一个电极上的硅衬底，在硅衬底上形成凹部或开口，其特征在于，蚀刻剂是六氟化硫和氧气的混合气体，除了要形成凹部或开口的部分之外，覆盖基板的蚀刻掩模由铬或铬化合物制成。优选地，电极之间的距离为10〜30mm，六氟化硫与氧的体积比为90:10〜60:40，蚀刻剂气体的压力为0.15〜0.4乇（20〜53Pa），温度的基材不低于40℃

4. 发明授权

US5575887A Plasma etching method and device manufacturing method thereby 失效
标题翻译：等离子体蚀刻方法及其制造方法
公开(公告)号：US5575887A
公开(公告)日：1996-11-19
申请号：US409530
申请日：1995-03-24
申请人： Takahiko Yoshida , Kazushi Asami , Muneo Yorinaga , Tsuyoshi Fukada
发明人： Takahiko Yoshida , Kazushi Asami , Muneo Yorinaga , Tsuyoshi Fukada
IPC分类号： H05H1/46 , C23C14/40 , C23F4/00 , H01J37/32 , H01L21/00 , H01L21/302 , H01L21/3065
CPC分类号： H01L21/67069 , H01J37/32082 , H01J37/32697
摘要： A plasma etching method, which can form concave parts and/or opening parts on a substrate by performing etching at a high speed and does not damage an element part formed on the surface of the substrate, is disclosed. On a semiconductor substrate with one surface as an element part forming surface and the other surface having an insulating film thereon as an etching surface are formed concave parts and/or opening parts by means of etching by applying a high-frequency electric power to a reactive gas and generating plasma thereby. The substrate is disposed on an electrode having grounded electric potential with the insulating film positioned on the lower side and a conductive part material having grounded electric potential is disposed around the substrate. When one end of the conductive part material is contacted with the side of the etching surface of the substrate, electric charge generated on the surface of the substrate moves to the conductive part material, and the electric potential of the substrate is lowered.
摘要翻译：公开了一种等离子体蚀刻方法，其可以通过高速蚀刻并且不损坏形成在基板表面上的元件部分而在基板上形成凹部和/或开口部。在具有一个表面作为元件部分形成表面的半导体衬底上，并且其上具有作为蚀刻表面的绝缘膜的另一表面通过对反应性施加高频电力而通过蚀刻形成凹部和/或开口部分气体并产生等离子体。基板设置在具有接地电位的电极上，绝缘膜位于下侧，并且具有接地电位的导电部件材料设置在基板周围。当导电部件材料的一端与基板的蚀刻表面的一侧接触时，在基板表面上产生的电荷移动到导电部件材料，并且基板的电位降低。

5. 发明授权

US06450033B1 Semiconductor physical quantity sensor 失效
标题翻译：半导体物理量传感器
公开(公告)号：US06450033B1
公开(公告)日：2002-09-17
申请号：US09621133
申请日：2000-07-20
申请人： Takeshi Ito , Muneo Yorinaga , Hirofumi Higuchi
发明人： Takeshi Ito , Muneo Yorinaga , Hirofumi Higuchi
IPC分类号： G01P1510
CPC分类号： B81B3/0051 , B81B2201/0235 , B81B2203/055 , G01C19/5719 , G01P15/097 , G01P2015/0814 , G01P2015/0817
摘要： A semiconductor angular velocity sensor has a frame-shaped base portion, a detection oscillator connected to the base portion through a detection beam portion, and a drive oscillator connected to the detection oscillator through a drive beam portion. Each of the beam portions has a pair of beams each generally having a U shape and connected to each other through a bridge portion. Accordingly, the beam portions can have large rotational rigidity not to prevent oscillations of the oscillators.
摘要翻译：半导体角速度传感器具有框状基部，通过检测光束部分连接到基部的检测振荡器和通过驱动光束部连接到检测振荡器的驱动振荡器。每个梁部分具有一对梁，每个梁通常具有U形并且通过桥接部彼此连接。因此，梁部分可以具有大的旋转刚度，而不是防止振荡器的振荡。

6. 发明授权

US06824713B2 Method of producing thermistor element and production apparatus for production apparatus for producing raw materials for thermistor element 失效
标题翻译：制造热敏电阻元件的方法和用于生产热敏电阻元件原料的生产设备
公开(公告)号：US06824713B2
公开(公告)日：2004-11-30
申请号：US10227805
申请日：2002-08-27
申请人： Kaoru Kuzuoka , Itsuhei Ogata , Daisuke Makino , Muneo Yorinaga
发明人： Kaoru Kuzuoka , Itsuhei Ogata , Daisuke Makino , Muneo Yorinaga
IPC分类号： B29B900
CPC分类号： H01C7/008 , H01C17/06533
摘要： Thermistor elements composed mainly of a metal oxide sintered body are prepared by mixing a metal oxide precursor in a liquid phase to prepare a solution or slurry of the precursor. The precursor solution or slurry is sprayed to form droplet particles which are heat treated to form a thermistor raw material powder which powder is then molded and sintered into a shape to provide a metal oxide sintered body.
摘要翻译：主要由金属氧化物烧结体组成的热敏电阻元件通过混合液相中的金属氧化物前体以制备前体的溶液或浆液来制备。将前体溶液或浆料喷雾以形成液滴颗粒，其经过热处理以形成热敏电阻原料粉末，然后将该粉末模制并烧结成形状以提供金属氧化物烧结体。

7. 发明授权

US06380622B1 Electric apparatus having a contact intermediary member and method for manufacturing the same 有权
标题翻译：具有接触中介部件的电气设备及其制造方法
公开(公告)号：US06380622B1
公开(公告)日：2002-04-30
申请号：US09435840
申请日：1999-11-08
申请人： Yasuyoshi Hirai , Kazuhito Nomura , Tomoatsu Makino , Takahiko Yoshida , Masahiro Shiozawa , Atsushi Hashikawa , Muneo Yorinaga
发明人： Yasuyoshi Hirai , Kazuhito Nomura , Tomoatsu Makino , Takahiko Yoshida , Masahiro Shiozawa , Atsushi Hashikawa , Muneo Yorinaga
IPC分类号： H01L2329
CPC分类号： H01L24/72 , H01L2924/01004 , H01L2924/01005 , H01L2924/01006 , H01L2924/01012 , H01L2924/01013 , H01L2924/01024 , H01L2924/01029 , H01L2924/01033 , H01L2924/01042 , H01L2924/01047 , H01L2924/01058 , H01L2924/01074 , H01L2924/01075 , H01L2924/01078 , H01L2924/01079 , H01L2924/01082 , H01L2924/01088 , H01L2924/09701 , H01L2924/1301 , H01L2924/1305 , H01L2924/13055 , H01L2924/19041 , H01L2924/19043 , H01L2924/30105 , Y10T428/25 , Y10T428/251 , H01L2924/00
摘要： A pressed-contact type semiconductor device in which a main electrode surface of a semiconductor element is contacted with an electrode plate by a pressed-contact, which can reduce both an electric resistance and a thermal resistance between the main electrode surface of the semiconductor element and the electrode plate. The pressed-contact type semiconductor device (100) is provided with a semiconductor element (1) having electrode surfaces, a pair of electrode plates (2) contacted with the electrode surfaces by the pressed-contact, a pair of insulating plates (3) contacted with the outer side of the pair of the electrode plates by the pressed-contact, and a pair of radiating plates (4) contacted with the outer side of the pair of the insulating plates by the pressed-contact. A contact intermediary member (5), which is made up of particle member having at least thermal conductivity and electric conductivity, is intercalated between the semiconductor element and the electrode plate. The particle member of the contact intermediary member includes large particles 5a having an average particle diameter of more than 2 &mgr;m, and small particles 5b having an average particle diameter of to or less than 2 &mgr;m. Contact intermediary members (6, 7) are intercalated into gaps generated between the electrode plate and the insulating plate, and between the insulating plate and the radiating plate so as to fill up these gaps. The contact intemediary members are made of powder material having at least thermal conductivity.
摘要翻译：一种压接式半导体器件，其中半导体元件的主电极表面通过压接接触与电极板接触，这可以降低半导体元件的主电极表面和第二半导体元件的主电极表面之间的电阻和热阻电极板。压接型半导体装置（100）具备电极面的半导体元件（1），通过按压接触与电极面接触的一对电极板（2），一对绝缘板（3）通过按压接触与一对电极板的外侧接触，并且通过按压接触与一对绝缘板的外侧接触的一对散热板（4）。由半导体元件和电极板之间插入由至少具有导热性和导电性的粒子构成的接触中间构件（5）。接触中间构件的颗粒构件包括平均粒径大于2μm的大颗粒5a和平均粒径为或小于2μm的小颗粒5b。接触中间构件（6,7）插入在电极板和绝缘板之间以及绝缘板和散热板之间产生的间隙中，以填满这些间隙。接触中间部件由具有至少导热性的粉末材料制成。

8. 发明授权

US5481913A Angular velocity sensor and method of adjusting the same 失效
标题翻译：角速度传感器及其调整方法
公开(公告)号：US5481913A
公开(公告)日：1996-01-09
申请号：US134813
申请日：1993-10-12
申请人： Takeshi Ito , Tomoyuki Kanda , Muneo Yorinaga
发明人： Takeshi Ito , Tomoyuki Kanda , Muneo Yorinaga
IPC分类号： G01C19/56 , G01D5/12 , G01P9/04
CPC分类号： G01C19/5607 , G01D5/12
摘要： An angular velocity sensor which suppresses the generation of noise in a detector piezo-electric element due to vibration of a vibrator caused by expansion and contraction of a driver piezo-electric element. A driver piezo-electric element 6 is adhered to an upper part on the left-side surface of a first square pole 3 of a vibrator 1 and a driver piezo-electric element 7 is adhered to an upper part on the right-side surface of a second square pole 4. Further, a detector piezo-electric element 8 is adhered to a lower part on the front surface of the first square pole 3 of the vibrator 1 and a detector piezo-electric element 9 is adhered to a lower part on the front surface of the second square pole 4. Here, the driver piezo-electric elements 6, 7 and the detector piezo-electric elements 8, 9 are disposed so as to be deviated so that they will not overlap in the axial direction of the square poles.
摘要翻译：一种角速度传感器，其抑制由于驱动压电元件的膨胀和收缩引起的振动器的振动，在检测器压电元件中产生噪声。驱动器压电元件6粘附在振动器1的第一方棒3的左侧表面上的上部，并且驱动器压电元件7粘附到右侧表面上的上部第二方形极4.此外，检测器压电元件8粘附到振动器1的第一方棒3的前表面上的下部，并且检测器压电元件9粘附到下部第二方形极4的前表面。这里，驱动压电元件6,7和检测器压电元件8,9被设置为偏离，使得它们在轴向方向上不会重叠方极

9. 发明授权

US4658650A Vibration and acoustic wave detecting device employing a piezoelectric element 失效
标题翻译：使用压电元件的振动和声波检测装置
公开(公告)号：US4658650A
公开(公告)日：1987-04-21
申请号：US768151
申请日：1985-08-22
申请人： Muneo Yorinaga , Sumiharu Yokoiwa , Hiroaki Yamaguchi
发明人： Muneo Yorinaga , Sumiharu Yokoiwa , Hiroaki Yamaguchi
IPC分类号： G01H11/08 , G01H1/00 , H04R17/00
CPC分类号： G01H11/08
摘要： A vibration and acoustic wave detecting device employing a piezoelectric element has a construction such that a piezoelectric element comprises a first surface electrode disposed on a first surface of the piezoelectric element and having a first output terminal of the detecting device, a second surface electrode opposite to the first surface thereof, a side electrode disposed to surround a side surface of the detecting device and having portions respectively extending over the first and second surfaces, the three electrodes being disposed separately from each other, and a resistor disposed on the piezoelectric element to extend across the first surface electrode and the side electrode and to be connected therewith electrically, and the piezoelectric element further comprises a conductive member which is attached to the piezoelectric element to be in contact with the second surface electrode and the side electrode and hence to provide electrical connection between both electrodes. The conductive member supports the piezoelectric element and also provides its second output terminal. Thus, the piezoelectric element and the resistor are electrically connected in parallel between the first and second output terminals of the detecting device. This construction makes it possible to simply and easily manufacture a detecting device incorporating a resistor for increasing the available frequency bandwidth without causing any problem in the manufacturing process.
摘要翻译：采用压电元件的振动和声波检测装置具有以下结构：压电元件包括设置在压电元件的第一表面上并具有检测装置的第一输出端的第一表面电极，与第一表面电极相对的第二表面电极其第一表面，设置成围绕检测装置的侧表面并且具有分别在第一和第二表面上延伸的部分的三个电极彼此分开设置的侧电极和设置在压电元件上以延伸的电阻器横跨第一表面电极和侧电极并且与其电连接，并且压电元件还包括导电构件，该导电构件附接到压电元件以与第二表面电极和侧电极接触，并且因此提供电两电极之间的连接。导电构件支撑压电元件并且还提供其第二输出端子。因此，压电元件和电阻器并联电连接在检测装置的第一和第二输出端子之间。这种结构使得可以简单且容易地制造包括用于增加可用频带宽度的电阻器的检测装置，而不会在制造过程中引起任何问题。

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