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1. 发明授权

US5349858A Angular acceleration sensor 失效
标题翻译：角加速度传感器
公开(公告)号：US5349858A
公开(公告)日：1994-09-27
申请号：US826867
申请日：1992-01-28
申请人： Takayuki Yagi , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Hiroyasu Nose , Katsuhiko Shinjo , Yasuhiro Simada
发明人： Takayuki Yagi , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Hiroyasu Nose , Katsuhiko Shinjo , Yasuhiro Simada
IPC分类号： G01P15/125 , G01P15/08 , G01P15/18
CPC分类号： G01P15/08 , G01P2015/0828 , G01P2015/086
摘要： An angular acceleration sensor has a weight member, a resilient member for supporting the weight member from the both sides thereof, the resilient member being disposed on a predetermined rotational axis and supporting the weight member for rotation about the rotational axis, and an opposed member opposed to the weight member, an angular acceleration applied to the weight member being detected from a variation in the spacing between the opposed member and the weight member resulting from the rotation of the weight member
摘要翻译：角加速度传感器具有配重构件，用于从其两侧支撑配重构件的弹性构件，所述弹性构件设置在预定旋转轴线上并且支撑所述配重构件围绕所述旋转轴线旋转，并且相对构件相对从配重构件的旋转产生的相对构件和配重构件之间的间隔的变化检测到施加到配重构件的角加速度，

2. 发明授权

US5554851A Parallel plane holding mechanism and apparatus using such a mechanism 失效
标题翻译：使用这种机构的平行平面保持机构和装置
公开(公告)号：US5554851A
公开(公告)日：1996-09-10
申请号：US407245
申请日：1995-03-20
申请人： Yutaka Hirai , Osamu Takamatsu , Katsunori Hatanaka , Masaru Nakayama , Hiroyasu Nose , Takayuki Yagi , Yasuhiro Shimida
发明人： Yutaka Hirai , Osamu Takamatsu , Katsunori Hatanaka , Masaru Nakayama , Hiroyasu Nose , Takayuki Yagi , Yasuhiro Shimida
IPC分类号： B81B3/00 , G01B5/00 , G01B7/34 , G01Q10/00 , G01Q10/02 , G01Q10/04 , G01Q60/10 , G01Q80/00 , G01Q90/00 , G11B9/00 , G11B9/14 , H01L27/10 , H01J37/28
CPC分类号： G01Q10/04 , B82Y35/00 , G01B5/0004 , G11B9/14 , B82Y10/00 , Y10S977/872
摘要： A parallel plane holding mechanism is constructed as follows. Beams are provided on the peripheral portion of a flat plate-shaped weight member. A base plate is provided so as to face the weight member. First and second electrodes are provided on both surfaces of the weight member and the base plate to face each other. A voltage is applied between the first electrode and the second electrode so that the distance between the weight member and the base plate is controlled to move the weight member to thereby hold a reference surface of the weight member to be parallel to a predetermined reference surface.
摘要翻译：平行平面保持机构如下构成。梁设置在平板状的重量部件的周边部分上。基板设置为面对配重构件。第一和第二电极设置在配重构件和基板的两个表面上以彼此面对。在第一电极和第二电极之间施加电压，使得配重构件和基板之间的距离被控制以移动配重构件，从而将配重构件的基准表面保持为平行于预定的参考表面。

3. 发明授权

US5321685A Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same 失效
标题翻译：悬臂型探头，扫描隧道显微镜及使用其的信息处理装置
公开(公告)号：US5321685A
公开(公告)日：1994-06-14
申请号：US979453
申请日：1992-11-20
申请人： Hiroyasu Nose , Kunihiro Sakai , Toshimitsu Kawase , Toshihiko Miyazaki , Katsuhiko Shinjo , Yutaka Hirai , Takayuki Yagi , Katsunori Hatanaka , Keisuke Yamamoto , Yuki Kasanuki , Yoshio Suzuki
发明人： Hiroyasu Nose , Kunihiro Sakai , Toshimitsu Kawase , Toshihiko Miyazaki , Katsuhiko Shinjo , Yutaka Hirai , Takayuki Yagi , Katsunori Hatanaka , Keisuke Yamamoto , Yuki Kasanuki , Yoshio Suzuki
IPC分类号： G01B7/34 , G01Q60/00 , G01N27/00 , G01N37/00 , G01Q10/02 , G01Q10/04 , G01Q30/18 , G01Q60/10 , G01Q60/16 , G01Q60/38 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J37/28
CPC分类号： G11B9/1409 , B82Y35/00 , G01Q10/045 , G01Q60/16 , G11B9/1436 , B82Y10/00 , G01Q80/00 , Y10S977/732 , Y10S977/861 , Y10S977/873 , Y10S977/881 , Y10S977/947
摘要： A cantilever type probe comprising a piezoelectric bimorph cantilever containing a piezoelectric material provided between driving electrodes for driving a cantilever, a probe formed thereon and a drawing electrode for a probe provided along the surface where a probe is formed, wherein there is provided a shielding electrode for electrically isolating the probe and the drawing electrode from the driving electrodes.
摘要翻译：一种悬臂式探头，包括压电双晶片悬臂，其包含设置在用于驱动悬臂的驱动电极之间的压电材料，形成在其上的探针和沿着形成探针的表面设置的用于探针的牵引电极，其中设置有屏蔽电极用于将探针和绘图电极与驱动电极电隔离。

4. 发明授权

US5506829A Cantilever probe and apparatus using the same 失效
标题翻译：悬臂式探头和使用其的仪器
公开(公告)号：US5506829A
公开(公告)日：1996-04-09
申请号：US253606
申请日：1994-06-03
申请人： Takayuki Yagi , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Yuji Kasanuki , Yasuhiro Shimada , Keisuke Yamamoto , Yoshio Suzuki
发明人： Takayuki Yagi , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Yuji Kasanuki , Yasuhiro Shimada , Keisuke Yamamoto , Yoshio Suzuki
IPC分类号： B81B3/00 , G01N27/00 , G01Q10/00 , G01Q10/04 , G01Q60/00 , G01Q60/16 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J37/28 , H01L21/66 , H01L41/09 , H01L41/22
CPC分类号： G01Q10/06 , B82Y35/00 , G01Q20/04 , G01Q60/16 , G01Q70/14 , G11B9/1436 , H01L41/094 , B82Y10/00 , Y10S977/872 , Y10S977/873
摘要： A cantilever probe comprising a cantilever displacement element containing a piezoelectric material provided between driving electrodes for causing displacement of the piezoelectric material, a probe for information input and output provided on the free end of the element, a drawing electrode for the probe and, a non-electroconductive thin film provided on at least a portion of an end of the element.
摘要翻译：一种悬臂探头，包括悬臂位移元件，该悬臂位移元件包含设置在驱动电极之间的用于引起压电材料位移的压电材料，设置在元件自由端上的用于信息输入和输出的探针，用于探针的拉伸电极， - 设置在元件的端部的至少一部分上的导电薄膜。

5. 发明授权

US5317152A Cantilever type probe, and scanning tunnel microscope and information processing apparatus employing the same 失效
标题翻译：悬臂式探头，扫描隧道显微镜及其采用的信息处理装置
公开(公告)号：US5317152A
公开(公告)日：1994-05-31
申请号：US871727
申请日：1992-04-21
申请人： Osamu Takamatsu , Yutaka Hirai , Masaru Nakayama , Takayuki Yagi , Yuji Kasanuki , Yasuhiro Shimada
发明人： Osamu Takamatsu , Yutaka Hirai , Masaru Nakayama , Takayuki Yagi , Yuji Kasanuki , Yasuhiro Shimada
IPC分类号： G01Q10/00 , G01N27/00 , G01N37/00 , G01Q60/10 , G01Q60/16 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J37/26 , H01L41/22
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q20/04 , G11B9/1436 , B82Y10/00 , G01Q80/00 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873 , Y10S977/875
摘要： A cantilever type probe comprises a cantilever-shaped displacement element and a tip which displacement element has a first electrode layer, a first piezoelectric material film and a second piezoelectric material film which films are laminated on opposite sides of the first electrode layer, and a second electrode layer and a third electrode layer which layer are laminated on outer surfaces of the piezoelectric material films, and which tip is connected with a leader electrode located at a free end of the surface of the displacement element; wherein in the width direction of the cantilever both ends of the first electrode layer protrude outward more than each end of the second and third electrode layers. A scanning tunneling microscope comprises the cantilever type probe, a driving means for displacing the probe, a stage for specimen so as to approach and locate the specimen to the tip, and a potential applying means for applying a bias voltage between the tip and the specimen. An information processing apparatus further comprises a second potential applying means for applying a pulse and bias voltage between the tip and the recording medium; wherein an information is written on the recording medium and an information in the recording medium is read out by electric current flowing between the tip and the recording medium.
摘要翻译：悬臂式探头包括悬臂形位移元件和位移元件具有第一电极层的尖端，第一压电材料膜和第二压电材料膜，所述第一压电材料膜和第二压电材料膜层压在第一电极层的相对侧上，并且第二电极层和层压在压电材料膜的外表面上的第三电极层，并且该尖端与位于位移元件的表面的自由端的引导电极连接; 其特征在于，所述第一电极层的所述悬臂的两端的宽度方向上比所述第二电极层和所述第三电极层的端部向外突出。扫描隧道显微镜包括悬臂型探针，用于移动探针的驱动装置，用于样本的台阶，以将样本接近并定位到尖端;以及电位施加装置，用于在尖端和样本之间施加偏置电压。信息处理装置还包括用于在尖端和记录介质之间施加脉冲和偏置电压的第二电位施加装置; 其中信息被写在记录介质上，并且通过在尖端和记录介质之间流动的电流来读出记录介质中的信息。

6. 发明授权

US5357108A Cantilever type displacement element, and scanning tunneling microscope or information processing apparatus using same 失效
标题翻译：悬臂式位移元件，扫描隧道显微镜或使用其的信息处理装置
公开(公告)号：US5357108A
公开(公告)日：1994-10-18
申请号：US895621
申请日：1992-06-09
申请人： Yoshio Suzuki , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Takayuki Yagi , Yuji Kasanuki , Keisuke Yamamoto , Yasuhiro Shimada
发明人： Yoshio Suzuki , Yutaka Hirai , Osamu Takamatsu , Masaru Nakayama , Takayuki Yagi , Yuji Kasanuki , Keisuke Yamamoto , Yasuhiro Shimada
IPC分类号： G01B21/30 , B81B3/00 , G01N27/00 , G01N37/00 , G01Q10/04 , G01Q60/10 , G01Q60/16 , G01Q70/08 , G01Q70/16 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J37/28 , H01L41/09 , H01J37/26
CPC分类号： G01Q60/16 , B82Y35/00 , G11B9/1418 , G11B9/1436 , H01L41/094 , H01L41/096 , H01L41/0966 , B82Y10/00 , G01Q80/00 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873
摘要： A cantilever type displacement element comprises a piezoelectric layer and at least two electrodes for applying a voltage to said piezoelectric layer, at least one of said electrodes being a comb-shaped electrode pair having respectively comb-tooth portions disposed separately as facing and alongside of each other in the width direction of the cantilever.
摘要翻译：悬臂式位移元件包括压电层和用于向所述压电层施加电压的至少两个电极，所述电极中的至少一个是梳状电极对，其中梳齿状电极对具有分别设置为各自的梳齿部分其他在悬臂的宽度方向。

7. 发明授权

US5268571A Micro-displacement element, and scanning tunneling microscope and information processing apparatus using same 失效
标题翻译：微位移元件和扫描隧道显微镜及使用其的信息处理设备
公开(公告)号：US5268571A
公开(公告)日：1993-12-07
申请号：US888789
申请日：1992-05-27
申请人： Keisuke Yamamoto , Yutaka Hirai , Masaru Nakayama , Takayuki Yagi , Yuji Kasanuki , Yoshio Suzuki
发明人： Keisuke Yamamoto , Yutaka Hirai , Masaru Nakayama , Takayuki Yagi , Yuji Kasanuki , Yoshio Suzuki
IPC分类号： B81B3/00 , G01N27/00 , G01N37/00 , G01Q20/04 , G01Q30/02 , G01Q60/10 , G01Q60/16 , G01Q70/06 , G01Q70/14 , G01Q80/00 , G11B9/00 , G11B9/14 , H01L41/09 , H01L41/18 , H02N2/00 , H01J37/26
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q10/045 , G01Q70/06 , G11B9/1436 , H01L41/094 , B82Y10/00 , G01Q80/00 , Y10S977/837 , Y10S977/861 , Y10S977/872 , Y10S977/873
摘要： A micro-displacement element comprises a unimorph cantilever having a piezoelectric thin film, a pair of electrodes between which the piezoelectric thin film is sandwiched, and an elastic thin film. One end of the cantilever is supported by a support, and the other end thereof is provided with a probe. The micro-displacement element can be used particularly as an array of plural elements, for an information processing apparatus in which the element faces to a recording medium such that an information recording pulse voltage or an information reproducing bias voltage can be applied to between the probe and the recording medium.
摘要翻译：微位移元件包括具有压电薄膜的单压电晶片，夹在压电薄膜之间的一对电极和弹性薄膜。悬臂的一端由支撑件支撑，并且其另一端设置有探针。微位移元件可以特别地用作多个元件的阵列，对于其中元件面向记录介质的信息处理设备，使得可以在探头之间施加信息记录脉冲电压或信息再现偏置电压和记录介质。

8. 发明授权

US5966787A Process for producing a probe-driving mechanism 失效
标题翻译：探针驱动机构的制造方法
公开(公告)号：US5966787A
公开(公告)日：1999-10-19
申请号：US646551
申请日：1996-05-08
申请人： Masaru Nakayama , Yutaka Hirai , Takayuki Yagi , Yuji Kasanuki , Keisuke Yamamoto , Yasuhiro Shimada , Yoshio Suzuki
发明人： Masaru Nakayama , Yutaka Hirai , Takayuki Yagi , Yuji Kasanuki , Keisuke Yamamoto , Yasuhiro Shimada , Yoshio Suzuki
IPC分类号： G01B21/30 , B41J2/045 , B41J2/055 , B81B3/00 , G01N37/00 , G01Q10/00 , G01Q10/04 , G01Q60/10 , G01Q60/16 , G01Q70/06 , G01Q70/16 , G01Q80/00 , G11B9/00 , G11B9/14 , H01J37/28 , H01L41/083 , H01L41/09 , H01L41/22
CPC分类号： G01Q60/16 , B82Y35/00 , G01Q10/04 , G01Q10/045 , G01Q70/06 , G11B9/1436 , H01L41/094 , B82Y10/00 , G01Q80/00 , Y10T29/42
摘要： A process for producing a probe-driving mechanism. A laminate of a first and second insulating layer is placed on a support. Electrode layers and piezoelectric layers are successively laminated on the second insulating layer. Part of the support and second insulating layer is removed to form a cantilever.
摘要翻译：一种用于产生探针驱动机构的方法。将第一和第二绝缘层的叠层放置在支撑体上。电极层和压电层依次层叠在第二绝缘层上。部分支撑和第二绝缘层被去除以形成悬臂。

9. 发明授权

US5576060A CVD process of forming hydrogenated a-Si films 失效
标题翻译：形成氢化a-Si膜的CVD工艺
公开(公告)号：US5576060A
公开(公告)日：1996-11-19
申请号：US487561
申请日：1995-06-07
申请人： Yutaka Hirai , Toshiyuki Komatsu , Katsumi Nakagawa
发明人： Yutaka Hirai , Toshiyuki Komatsu , Katsumi Nakagawa
IPC分类号： C23C14/00 , C23C14/16 , C23C16/24 , C23C16/44 , C23C16/455 , C23C16/507 , C23C16/509 , G03G5/082 , H01L31/09 , H01L31/20 , C23C16/00 , B05D3/06
CPC分类号： C23C14/16 , C23C14/0036 , C23C14/0057 , C23C16/24 , C23C16/45523 , C23C16/507 , C23C16/509 , G03G5/08221 , G03G5/08228 , G03G5/08242 , G03G5/08278 , H01L31/095 , H01L31/202 , Y02E10/50 , Y02P70/521
摘要： A CVD process of forming a hydrogenated amorphous silicon film comprising not more than 40 atomic percent of hydrogen atoms is disclosed, which comprises introducing a silicon-containing gas and a gas containing impurity for controlling conductivity of said film into a film-forming space, wherein the concentration of the gas containing the impurity is controlled during film formation to vary the content of the impurity in the thickness direction of the amorphous silicon film.
摘要翻译：公开了形成不超过40原子％氢原子的氢化非晶硅膜的CVD工艺，其包括将含硅气体和含有杂质的气体导入到成膜空间中，其中所述杂质用于控制所述膜的导电性，其中在成膜期间控制含有杂质的气体的浓度以改变非晶硅膜的厚度方向上杂质的含量。

10. 发明授权

US4920387A Light emitting device 失效
标题翻译：发光装置
公开(公告)号：US4920387A
公开(公告)日：1990-04-24
申请号：US406182
申请日：1989-09-13
申请人： Katsuji Takasu , Masafumi Sano , Hisanori Tsuda , Yutaka Hirai
发明人： Katsuji Takasu , Masafumi Sano , Hisanori Tsuda , Yutaka Hirai
IPC分类号： H01L33/00 , H01L33/06 , H01L33/18
CPC分类号： H01L33/18 , B82Y20/00 , H01L33/0012 , H01L33/0058 , H01L33/06 , H05B33/145
摘要： A light emitting device includes a luminescent layer having at least two layers comprising non-single crystalline silicon containing hydrogen atoms laminated and having a homo-junction, and at least a pair of electrodes connected electrically to the luminescent layer, the non-single crystalline silicon layer having an optical band gap of 2.0 eV or higher and a localized level density at mid-gap of 10.sup.16 cm.sup.-3.eV.sup.-1 or less.
摘要翻译：发光器件包括发光层，其具有至少两层，包含层叠并具有均聚点的氢原子的非单晶硅，以及至少一对与发光层电连接的电极，非单晶硅具有2.0eV以上的光学带隙和1016cm -3eV-1以下的中间间隙的局部水平密度的层。

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