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    • 1. 发明授权
    • Fine structure forming device
    • 精细结构成型装置
    • US5397420A
    • 1995-03-14
    • US935104
    • 1992-08-27
    • Nobuyoshi SakakibaraTakayuki TominagaMichio HisanagaTadashi HattoriYoshitaka GotohNaohito Mizuno
    • Nobuyoshi SakakibaraTakayuki TominagaMichio HisanagaTadashi HattoriYoshitaka GotohNaohito Mizuno
    • B23K10/00H05H1/30H05H1/00
    • H05H1/30B23K10/00
    • A micro machining apparatus forms a high-aspect structure having an optional depth in a workpiece at low cost. The apparatus applies high-frequency electric power to the workpiece and a machining electrode, to form a plasma zone in the vicinity of the leading end of the machining electrode. The apparatus guides a reactive gas into the plasma zone to activate the gas. The activated gas is adsorbed by the surface of the workpiece that faces the leading end of the machining electrode. The adsorbed gas reacts with the material of the workpiece and locally etches off the surface of the workpiece. A feed mechanism of the apparatus feeds the machining electrode toward the workpiece according to the progress of the etching, thereby forming a trench in the workpiece. Reaction products of the workpiece and reactive gas produced by the etching adhere to and deposit on the sidewall of the trench and form a protective film for protecting the sidewall from being etched, thereby providing the trench with a high aspect ratio.
    • 微加工装置以低成本形成在工件中具有可选深度的高方位结构。 该装置对工件和加工电极施加高频电力,以在加工电极的前端附近形成等离子体区域。 该装置引导反应气体进入等离子体区域以激活气体。 活性气体被工件的面向加工电极前端的表面吸附。 吸附的气体与工件的材料反应并局部地从工件的表面上蚀刻掉。 该装置的进给机构根据蚀刻的进行将加工电极朝向工件进给,从而在工件中形成沟槽。 工件的反应产物和通过蚀刻产生的反应性气体粘附并沉积在沟槽的侧壁上并形成保护膜,以保护侧壁不被蚀刻,从而为沟槽提供高纵横比。
    • 2. 发明授权
    • Electrical discharge machine
    • 放电机
    • US5357073A
    • 1994-10-18
    • US27532
    • 1993-03-08
    • Takayuki TominagaMichio HisanagaTadashi Hattori
    • Takayuki TominagaMichio HisanagaTadashi Hattori
    • B23H7/22B23H1/04
    • B23H1/04
    • An electrode for electrical discharge machining. This spark-machining electrode improves the accuracy at which the workpiece is machined by electrical discharge machining. The electrode can dispense with a mechanism which scans the spark-machining electrode or the workpiece. A plurality of needlelike electrodes are formed on the surface of the spark-machining electrode. The needlelike electrodes are so arranged that they are present in craters created by their respective adjacent needlelike electrodes. The plural electrodes form a group. The shape of the surface of this group is formed according to the desired shape to be formed in the workpiece. Art electric discharge occurs mainly at the tips of the needlelike electrodes and so the capacitance is smaller than the capacitance of the prior art flat-plate electrode. Also, the energy of a single electric discharge can be reduced. Furthermore, electric discharge at the side surfaces of the needlelike electrodes can be suppressed because of the effect of concentration of electric field.
    • 放电加工用电极。 该火花加工电极通过放电加工提高了加工工件的精度。 电极可以省去扫描火花加工电极或工件的机构。 在火花加工电极的表面上形成多个针状电极。 针状电极被布置成使它们存在于由它们各自相邻的针状电极产生的凹坑中。 多个电极形成一组。 该组的表面的形状根据要在工件中形成的所需形状形成。 艺术放电主要发生在针状电极的尖端,因此电容小于现有技术的平板电极的电容。 此外,可以减少单个放电的能量。 此外,由于电场浓度的影响,可以抑制针状电极的侧面的放电。
    • 3. 发明授权
    • Varifocal lens
    • 变焦镜头
    • US5574598A
    • 1996-11-12
    • US286560
    • 1994-08-05
    • Tukasa KoumuraMichio HisanagaTadashi Hattori
    • Tukasa KoumuraMichio HisanagaTadashi Hattori
    • G02B3/14G02B1/06G02B3/12G02B15/14
    • G02B3/14
    • A varifocal lens whose variable focal length can be controlled by, for example, an electric signal, and suitable for use in bar code readers, etc. A varifocal lens comprises a first pressure chamber defined between a glass substrate and a transparent elastic film. The transparent elastic film is faced to the surface of the planar glass substrate having parallel surfaces with a spacer incorporated therebetween to provide the first pressure chamber. A pump is provided adjacent to the first pressure chamber via a communicating path for charging an operating liquid to the first pressure chamber from a second pressure chamber of the pump by electrically deforming the transparent elastic film to form a lens having a variable focal length. The transparent elastic film has a film thickness distribution as such to provide a spherical plane in the central portion thereof and a third order curved surface in the periphery thereof. In this manner, a lens free of aberration can be obtained when a liquid is fed into the first pressure chamber to form a spherical plane.
    • 可变焦距可以通过例如电信号控制并且适用于条形码读取器等的变焦透镜。变焦透镜包括限定在玻璃基板和透明弹性膜之间的第一压力室。 透明弹性膜面对具有平行表面的平面玻璃基板的表面,间隔件结合在其中以提供第一压力室。 通过用于通过使透明弹性膜电动变形以形成具有可变焦距的透镜从泵的第二压力室向第一压力室充电操作液体的连通路径,设置有与第一压力室相邻的泵。 透明弹性膜的膜厚分布在其中央部分形成球面并在其周边形成三阶曲面。 以这种方式,当液体被供给到第一压力室中以形成球面时,可以获得没有像差的透镜。
    • 10. 发明授权
    • Rotation sensor
    • 旋转传感器
    • US07337679B2
    • 2008-03-04
    • US11137500
    • 2005-05-26
    • Tadashi HattoriMasashi Sugimoto
    • Tadashi HattoriMasashi Sugimoto
    • G01B7/30
    • G01D11/245G01P1/026
    • A rotation sensor includes a rotation detector mounted on a holder which is in turn inserted in a casing through its opening. A cover is formed by molding a resin so as to cover the opening of the casing and the portion of the holder protruding from the opening of the casing. A pair of relay terminals extend through a base portion of the holder and a gap defined in the holder, are fixed to a support wall, and connected to respective lead pieces of the detector. A resin cover is formed by molding a resin. When forming the cover, pressure is applied to the holder, thereby causing the holder to bulge axially in the holder. This in turn pushes the relay terminals in the axial direction. But since the relay terminals are fixed to the support wall, the support wall will absorb such pushing force, thereby preventing such pushing from being transmitted to the detector. In order to more effectively absorb such pushing force, the relay terminals may be provided with bent portions in the gap.
    • 旋转传感器包括安装在保持器上的旋转检测器,该保持器又通过其开口插入到壳体中。 通过模制树脂以覆盖壳体的开口和保持器从壳体的开口突出的部分而形成盖。 一对继电器端子延伸穿过保持器的基部并且限定在保持器中的间隙固定到支撑壁上,并连接到检测器的相应引线片。 通过模制树脂形成树脂盖。 当形成盖时,将压力施加到保持器,从而使保持件在保持器中轴向凸出。 这继而沿轴向推动继电器端子。 但是由于中继端子固定在支撑壁上,支撑壁将吸收这种推力,从而防止这种推动传递到检测器。 为了更有效地吸收这种推力,中继端子可以在间隙中设置弯曲部分。