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    • 1. 发明授权
    • Fine structure forming device
    • 精细结构成型装置
    • US5397420A
    • 1995-03-14
    • US935104
    • 1992-08-27
    • Nobuyoshi SakakibaraTakayuki TominagaMichio HisanagaTadashi HattoriYoshitaka GotohNaohito Mizuno
    • Nobuyoshi SakakibaraTakayuki TominagaMichio HisanagaTadashi HattoriYoshitaka GotohNaohito Mizuno
    • B23K10/00H05H1/30H05H1/00
    • H05H1/30B23K10/00
    • A micro machining apparatus forms a high-aspect structure having an optional depth in a workpiece at low cost. The apparatus applies high-frequency electric power to the workpiece and a machining electrode, to form a plasma zone in the vicinity of the leading end of the machining electrode. The apparatus guides a reactive gas into the plasma zone to activate the gas. The activated gas is adsorbed by the surface of the workpiece that faces the leading end of the machining electrode. The adsorbed gas reacts with the material of the workpiece and locally etches off the surface of the workpiece. A feed mechanism of the apparatus feeds the machining electrode toward the workpiece according to the progress of the etching, thereby forming a trench in the workpiece. Reaction products of the workpiece and reactive gas produced by the etching adhere to and deposit on the sidewall of the trench and form a protective film for protecting the sidewall from being etched, thereby providing the trench with a high aspect ratio.
    • 微加工装置以低成本形成在工件中具有可选深度的高方位结构。 该装置对工件和加工电极施加高频电力,以在加工电极的前端附近形成等离子体区域。 该装置引导反应气体进入等离子体区域以激活气体。 活性气体被工件的面向加工电极前端的表面吸附。 吸附的气体与工件的材料反应并局部地从工件的表面上蚀刻掉。 该装置的进给机构根据蚀刻的进行将加工电极朝向工件进给,从而在工件中形成沟槽。 工件的反应产物和通过蚀刻产生的反应性气体粘附并沉积在沟槽的侧壁上并形成保护膜,以保护侧壁不被蚀刻,从而为沟槽提供高纵横比。
    • 3. 发明授权
    • Optical data reader capable of quickly changing a condensing position of
a light beam
    • 能够快速改变光束聚光位置的光学数据读取器
    • US5498868A
    • 1996-03-12
    • US299365
    • 1994-09-01
    • Hideaki NishikawaTukasa KoumuraMichio Hisanaga
    • Hideaki NishikawaTukasa KoumuraMichio Hisanaga
    • G02B3/14G02B26/10G06K7/10H01J3/14
    • G02B3/14G02B26/105G06K7/10702G06K7/10811
    • An optical data reader including a device for producing a light beam, and a device for changing a condensing position of the light beams before the light beam is reflected from a target such as a bar code. The device for changing the condensing position is either a variable focus lens or mirror, each adapted to change the curvature of the surface of the lens or mirror in order to move the condensing position cyclically and continuously. The variable focus mirror changes the shape of its reflecting surface in response to electrical signals from a driving circuit. Excess pressure within the mirror caused by the mirror surface being attracted inwards is expelled through intake/outlet ports formed in the drive electrode. The variable focus lens alters the focal length of the lens each time the curvature of the surface thereof is changed. Preferably, the curvature of the lens surface is changed by increasing fluid pressure within the lens, while the curvature of the variable focus mirror is electrically driven. Either the variable focus lens or mirror is disposed in the optical path between the light source and the target. The light source is usually a laser or laser diode.
    • 一种光学数据读取器,包括用于产生光束的装置,以及用于在光束从诸如条形码的目标反射之前改变光束的聚光位置的装置。 用于改变冷​​凝位置的装置是可变焦距透镜或反射镜,每一个适于改变透镜或反射镜表面的曲率,以循环地和连续地移动聚光位置。 可变焦距反射镜响应于来自驱动电路的电信号改变其反射表面的形状。 由镜面被向内吸引的反射镜内的过大的压力通过形成在驱动电极中的进/出口被排出。 可变焦距透镜每当其表面的曲率改变时改变透镜的焦距。 优选地,通过增加透镜内的流体压力来改变透镜表面的曲率,同时可变焦距反射镜的曲率被电驱动。 可变焦距透镜或镜子都设置在光源和目标之间的光路中。 光源通常是激光或激光二极管。
    • 4. 发明授权
    • Varifocal lens
    • 变焦镜头
    • US5574598A
    • 1996-11-12
    • US286560
    • 1994-08-05
    • Tukasa KoumuraMichio HisanagaTadashi Hattori
    • Tukasa KoumuraMichio HisanagaTadashi Hattori
    • G02B3/14G02B1/06G02B3/12G02B15/14
    • G02B3/14
    • A varifocal lens whose variable focal length can be controlled by, for example, an electric signal, and suitable for use in bar code readers, etc. A varifocal lens comprises a first pressure chamber defined between a glass substrate and a transparent elastic film. The transparent elastic film is faced to the surface of the planar glass substrate having parallel surfaces with a spacer incorporated therebetween to provide the first pressure chamber. A pump is provided adjacent to the first pressure chamber via a communicating path for charging an operating liquid to the first pressure chamber from a second pressure chamber of the pump by electrically deforming the transparent elastic film to form a lens having a variable focal length. The transparent elastic film has a film thickness distribution as such to provide a spherical plane in the central portion thereof and a third order curved surface in the periphery thereof. In this manner, a lens free of aberration can be obtained when a liquid is fed into the first pressure chamber to form a spherical plane.
    • 可变焦距可以通过例如电信号控制并且适用于条形码读取器等的变焦透镜。变焦透镜包括限定在玻璃基板和透明弹性膜之间的第一压力室。 透明弹性膜面对具有平行表面的平面玻璃基板的表面,间隔件结合在其中以提供第一压力室。 通过用于通过使透明弹性膜电动变形以形成具有可变焦距的透镜从泵的第二压力室向第一压力室充电操作液体的连通路径,设置有与第一压力室相邻的泵。 透明弹性膜的膜厚分布在其中央部分形成球面并在其周边形成三阶曲面。 以这种方式,当液体被供给到第一压力室中以形成球面时,可以获得没有像差的透镜。
    • 5. 发明授权
    • Electrical discharge machine
    • 放电机
    • US5357073A
    • 1994-10-18
    • US27532
    • 1993-03-08
    • Takayuki TominagaMichio HisanagaTadashi Hattori
    • Takayuki TominagaMichio HisanagaTadashi Hattori
    • B23H7/22B23H1/04
    • B23H1/04
    • An electrode for electrical discharge machining. This spark-machining electrode improves the accuracy at which the workpiece is machined by electrical discharge machining. The electrode can dispense with a mechanism which scans the spark-machining electrode or the workpiece. A plurality of needlelike electrodes are formed on the surface of the spark-machining electrode. The needlelike electrodes are so arranged that they are present in craters created by their respective adjacent needlelike electrodes. The plural electrodes form a group. The shape of the surface of this group is formed according to the desired shape to be formed in the workpiece. Art electric discharge occurs mainly at the tips of the needlelike electrodes and so the capacitance is smaller than the capacitance of the prior art flat-plate electrode. Also, the energy of a single electric discharge can be reduced. Furthermore, electric discharge at the side surfaces of the needlelike electrodes can be suppressed because of the effect of concentration of electric field.
    • 放电加工用电极。 该火花加工电极通过放电加工提高了加工工件的精度。 电极可以省去扫描火花加工电极或工件的机构。 在火花加工电极的表面上形成多个针状电极。 针状电极被布置成使它们存在于由它们各自相邻的针状电极产生的凹坑中。 多个电极形成一组。 该组的表面的形状根据要在工件中形成的所需形状形成。 艺术放电主要发生在针状电极的尖端,因此电容小于现有技术的平板电极的电容。 此外,可以减少单个放电的能量。 此外,由于电场浓度的影响,可以抑制针状电极的侧面的放电。