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    • 2. 发明授权
    • Fluorine-containing polymer having acid-reactive group and chemically amplifying type photoresist composition prepared from same
    • 具有酸反应性基团的含氟聚合物和由其制备的化学放大型光致抗蚀剂组合物
    • US06908724B2
    • 2005-06-21
    • US10262893
    • 2002-10-03
    • Takayuki ArakiMeiten KohYoshito TanakaTakuji IshikawaHirokazu AoyamaTetsuo Shimizu
    • Takayuki ArakiMeiten KohYoshito TanakaTakuji IshikawaHirokazu AoyamaTetsuo Shimizu
    • G03F7/004G03F7/038G03F7/039G03F7/075
    • G03F7/039G03F7/0045G03F7/0046G03F7/0382G03F7/0392G03F7/0395G03F7/0397G03F7/0758Y10S430/106Y10S430/108
    • There is provided a novel fluorine-containing polymer having an acid-reactive group which has a high transparency against energy rays (radioactive rays) in a vacuum ultraviolet region (157 nm), and further there are provided a material for fluorine-containing base polymer prepared from the polymer and suitable for a photoresist and a chemically amplifying type resist composition obtained therefrom.The polymer has a number average molecular weight of from 1,000 to 1,000,000 and represented by the formula: —(M1)—(M2)—(A)—, wherein M1 is a structural unit having an acid-labile or acid-degradable functional group, M2 is a structural unit of fluorine-containing acryl ester, A is a structural unit derived from other copolymerizable monomer, the percent by mole ratio M1/M2 is 1 to 99/99 to 1 and the polymer comprises from 1 to 99% by mole of the structural unit M1, from 1 to 99% by mole of the structural unit M2 and from 0 to 98% by mole of the structural unit A1. The material for fluorine-containing base polymer comprises a fluorine-containing polymer having an acid-reactive group such as the above-mentioned polymer and is suitable for a photoresist, and the chemically amplifying type resist composition is obtained from those polymer and material.
    • 提供了一种具有酸反应性基团的新型含氟聚合物,其具有对真空紫外区域(157nm)中的能量射线(放射线)的高透明性,并且还提供了含氟基础聚合物 由聚合物制备并适用于由其获得的光致抗蚀剂和化学放大型抗蚀剂组合物。 聚合物的数均分子量为1,000〜1,000,000,由下式表示: - (M1) - (M2) - (A) - ,其中M1是具有酸不稳定性或酸可降解官能团的结构单元 M2是含氟丙烯酸酯的结构单元,A是来自其它可共聚单体的结构单元,M1 / M2的摩尔比为1〜99/99〜1,聚合物的含量为1〜99% 结构单元M1的摩尔数,结构单元M2的1〜99摩尔%和结构单元A1的0〜98摩尔%。 含氟基础聚合物的材料包括具有酸反应性基团的含氟聚合物如上述聚合物,并且适用于光致抗蚀剂,化学放大型抗蚀剂组合物由那些聚合物和材料获得。
    • 5. 发明授权
    • Manufacturing method for 1,1,1,3,3-pentafluoropropane
    • 1,1,1,3,3-五氟丙烷的制备方法
    • US6060628A
    • 2000-05-09
    • US894694
    • 1997-08-26
    • Hirokazu AoyamaNoriaki ShibataAkinori Yamamoto
    • Hirokazu AoyamaNoriaki ShibataAkinori Yamamoto
    • B01J23/44C07B61/00C07C17/23C07C17/38C07C19/08C07F15/00
    • C07C19/08C07C17/23
    • A manufacturing method for 1,1,1,3,3-pentafluoropropane in which the method is composed of:step A wherein 2,3-dichloro-1,1,1,3,3-pentafluoropropane is reduced with hydrogen under the presence of hydrogenation catalyst in gaseous phase;step B wherein all of the products of the said step A are introduced into a cooler condenser, so that either a component of hydrogen and hydrogen chloride as non-condensation component and another compoment of 1,1,1,3,3-pentafluoropropane as condensation components or a component of hydrogen as non-condensation component and another component of hydrogen chloride and 1,1,1,3,3-pentafluoropropane as condensation component are obtained;step C wherein hydrogen is separated from the non-condensation component of the said step B, and it is recycled to the said step A; andstep D wherein 1,1,1,3,3-pentafluoropropane is separated from the condensation component of the said step B.The producing method based on a manufacturing process of 1,1,1,3,3-pentafluoropropane can be provided with good efficiency and economy in industrial scales.
    • PCT No.PCT / JP96 / 00273 Sec。 371日期:1997年8月26日 102(e)日期1997年8月26日PCT提交1996年2月8日PCT公布。 公开号WO96 / 26914 PCT 日期1996年6月9日1,1,1,3,3-五氟丙烷的制造方法,其中所述方法由以下组成:步骤A,其中2,3-二氯-1,1,1,3,3-五氟丙烷被还原 在氢气催化剂存在下用氢气气相; 步骤B,其中将所述步骤A的所有产物引入冷却器冷凝器中,使得氢和氯化氢的组分作为非缩合成分,另一组分为1,1,1,3,3-五氟丙烷作为 得到缩合成分或作为非缩合成分的氢的成分和作为缩合成分的氯化氢和1,1,1,3,3-五氟丙烷的其他成分; 步骤C,其中氢与所述步骤B的非缩合组分分离,并将其再循环至所述步骤A; 和步骤D,其中将1,1,1,3,3-五氟丙烷与所述步骤B的缩合组分分离。可以提供基于1,1,1,3,3-五氟丙烷的制备方法的制备方法 工业规模效益好,经济效益好。