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1. 发明授权

US5900941A High speed pattern inspection method and system 失效
标题翻译：高速模式检测方法和系统
公开(公告)号：US5900941A
公开(公告)日：1999-05-04
申请号：US864964
申请日：1997-05-29
申请人： Takayoshi Matsuyama , Ken-ichi Kobayashi , Katsuyoshi Nakashima , Yasunori Hada
发明人： Takayoshi Matsuyama , Ken-ichi Kobayashi , Katsuyoshi Nakashima , Yasunori Hada
IPC分类号： G01B11/30 , G01N21/956 , H01L21/66 , G01B11/00
CPC分类号： G01N21/95607
摘要： A pattern inspection method includes the steps of: copying design data representative of a design pattern in a storage unit; generating index data and storing the index data in the storage unit, the index data indicating data at what position of the design pattern is stored at which location of the storage unit; picking up an image of a real pattern on a stage and generating real pattern data; reading the design data by using the index data in accordance with a position on the real pattern; generating design pattern data in accordance with the read design data; and comparing the real pattern data with the design pattern data to detect any defect in the real pattern data. A pattern inspection method and system is provided which can perform die-to-database inspection at high speed.
摘要翻译：图案检查方法包括以下步骤：将表示设计图案的设计数据复制到存储单元中; 生成索引数据并将索引数据存储在存储单元中，指示数据指示设计图案的什么位置的数据存储在存储单元的哪个位置; 在舞台上拾取真实图案的图像并生成实际图案数据; 通过使用根据实际图案上的位置的索引数据来读取设计数据; 根据读取的设计数据生成设计图案数据; 并将实际图案数据与设计图案数据进行比较，以检测实际图案数据中的任何缺陷。提供了可以高速执行模 - 数据库检查的模式检查方法和系统。

2. 发明授权

US6064484A Pattern inspection method and system 失效
标题翻译：图案检查方法和系统
公开(公告)号：US6064484A
公开(公告)日：2000-05-16
申请号：US814414
申请日：1997-03-11
申请人： Ken-ichi Kobayashi , Takayoshi Matsuyama , Showgo Matsui
发明人： Ken-ichi Kobayashi , Takayoshi Matsuyama , Showgo Matsui
IPC分类号： G01B11/00 , H01L21/66
CPC分类号： G01B11/00
摘要： A pattern inspection method includes the steps of: obtaining first image data by optically picking up an actually formed pattern such as a reticle; aligning a position of the first image data with second image data of a pattern at a different layer from that of the first image data; and performing a first pattern inspection using the first and second image data. Defect inspection can be executed in a short time with a practically sufficient precision.
摘要翻译：图案检查方法包括以下步骤：通过光学拾取实际形成的图案（例如掩模版）来获得第一图像数据; 将第一图像数据的位置与不同于第一图像数据的图案的图案的第二图像数据对准; 以及使用所述第一和第二图像数据执行第一图案检查。缺陷检查可以在短时间内以实际足够的精度执行。

3. 发明授权

US06327379B2 Pattern inspection method and apparatus 失效
标题翻译：图案检验方法及装置
公开(公告)号：US06327379B2
公开(公告)日：2001-12-04
申请号：US08908553
申请日：1997-08-08
申请人： Takayoshi Matsuyama , Ken-ichi Kobayashi
发明人： Takayoshi Matsuyama , Ken-ichi Kobayashi
IPC分类号： G06K900
CPC分类号： G06T7/001 , G06T2207/30148
摘要： An actual pattern image including an auxiliary pattern in a periphery of a pattern of an object to be inspected is recognized. The image of the auxiliary pattern is deleted from the recognized image and an auxiliary-pattern-image-deleted recognized image is produced. An inspection image to be used for inspection is produced from design data from which the auxiliary pattern is removed. The auxiliary-pattern-image-deleted recognized image is compared with the inspection image.
摘要翻译：识别包括待检查对象的图案的周边中的辅助图案的实际图案图像。从识别的图像中删除辅助图案的图像，并产生辅助图案图像删除的识别图像。用于检查的检查图像是从除去辅助图案的设计数据产生的。将辅助图像图像删除的识别图像与检查图像进行比较。

4. 发明授权

US07811501B2 Mold, method of producing the mold, and method of producing molded article using the mold 有权
标题翻译：模具，制造模具的方法以及使用该模具制造模制品的方法
公开(公告)号：US07811501B2
公开(公告)日：2010-10-12
申请号：US11661992
申请日：2005-09-05
申请人： Tetsuaki Nishida , Ken-ichi Kobayashi , Akira Morishige
发明人： Tetsuaki Nishida , Ken-ichi Kobayashi , Akira Morishige
IPC分类号： B29C33/38 , C01G31/02
CPC分类号： C03C3/122 , B29C33/38 , B29C45/26
摘要： A mold which is processed by ion beam irradiation or electron beam irradiation and in which a throughput of the mold is high and a decrease in the throughput or electrostatic discharge due to charging does not occur, a method of producing the mold, and a method of producing a molded article produced using the mold. When molding a plastic resin, at least one of a cavity and a core is provided on the surface of a conductive glass substrate. A method of producing a mold for molding a plastic resin or the like includes forming at least one of a cavity and a core by irradiating an ion beam on the surface of a conductive vanadate glass substrate that contains vanadium pentoxide (V2O5) as a main component and that has an electric conductivity in the range of 1.0×10−1 to 1.0×10−8 S/cm.
摘要翻译：通过离子束照射或电子束照射处理的模具，其中模具的生产量高，并且不会发生由于充电而导致的生产量或静电放电的降低，模具的制造方法和生产使用该模具制造的模制品。当模塑塑料树脂时，在导电玻璃基板的表面上设置空腔和芯中的至少一个。制造模塑塑料树脂等的方法包括通过在含有五氧化二钒（V2O5）作为主要成分的导电钒酸盐玻璃基板的表面上照射离子束来形成空腔和芯中的至少一个导电率在1.0×10-1-1.0×10-8S / cm的范围内。

5. 发明申请

US20100006756A1 CHARGED PARTICLE BEAM APPARATUS AND METHOD FOR GENERATING CHARGED PARTICLE BEAM IMAGE 审中-公开
标题翻译：充电颗粒光束装置和产生充电颗粒光束图像的方法
公开(公告)号：US20100006756A1
公开(公告)日：2010-01-14
申请号：US11917838
申请日：2006-06-15
申请人： Norimichi Anazawa , Jun Nitta , Michio Ohshima , Tatenori Jinriki , Naoyuki Nakamura , Akira Yonezawa , Ken-ichi Kobayashi , Hao Zhang
发明人： Norimichi Anazawa , Jun Nitta , Michio Ohshima , Tatenori Jinriki , Naoyuki Nakamura , Akira Yonezawa , Ken-ichi Kobayashi , Hao Zhang
IPC分类号： G01N23/225
CPC分类号： H01J37/026 , H01J37/28 , H01J2237/0047 , H01J2237/16 , H01J2237/18 , H01J2237/26 , H01J2237/3175
摘要： When the surface of a semiconductor wafer, a photomask or the like sample is charged by irradiation with a charged particle beam, the charging is liable to hamper image observation, inspection and handling. Therefore, the sample and the surface or vicinity of the sample being charged by an electron beam or the like is held in an atmosphere or a reduced pressure atmosphere or in a predetermined gaseous atmosphere within a preliminary evacuation chamber, a sample chamber or the like, containing a soft X-ray generator which irradiates the sample or the vicinity thereof with soft X-rays which are controlled to generate positive ions and negative ions and remove charges on the surface of the sample.
摘要翻译：当通过照射带电粒子束来对半导体晶片，光掩模等样品的表面进行充电时，充电将妨碍图像观察，检查和处理。因此，将样品和被电子束等充电的样品的表面或附近保持在预抽真空室，样品室等中的气氛或减压气氛中或预定的气体气氛中，含有软X射线发生器，用软X射线照射样品或其附近，该X射线被控制以产生正离子和负离子并去除样品表面上的电荷。

6. 发明申请

US20080003165A1 Fullerene Hollow Structure Needle Crystal and C60-C70 Mixed Fine Wire, and Method for Preparation Thereof 失效
标题翻译：富勒烯中空结构针晶和C60-C70混合细线及其制备方法
公开(公告)号：US20080003165A1
公开(公告)日：2008-01-03
申请号：US10593870
申请日：2005-02-14
申请人： Kun'ichi Miyazawa , Masahisa Fujino , Masaru Tachibana , Ken-ichi Kobayashi , Tadatomo Suga
发明人： Kun'ichi Miyazawa , Masahisa Fujino , Masaru Tachibana , Ken-ichi Kobayashi , Tadatomo Suga
IPC分类号： C01B31/02
CPC分类号： B82Y40/00 , B82Y30/00 , C01B32/15 , C01B32/152 , C30B7/00 , C30B29/02 , C30B29/62
摘要： A needle crystal in the form of a capsule comprising fullerene molecules such as C60 and a C60 platinum derivative and having a hollow portion (a fullerene shell capsule) is provided. The fullerene shell capsule which has been prepared by the liquid-liquid interface precipitation method, which comprises (1) a step in which a solution containing a first solvent dissolving fullerene therein is combined with a second solvent in which the solubility of fullerene is lower than in the above first solvent; (2) a step in which a liquid-liquid interface is formed between the above solution and the above second solvent; and (3) a step in which a carbon fine wire is precipitated on the above liquid-liquid interface, has a novel characteristic in its form and can be used as a catalyst supporting material, a raw material for a plastic composite material, a storage material for gas such as hydrogen, a catalyst for fuel cell, or the like. Further, provided are novel C60-C70 mixed fine wire which is fullerene fine wire comprising two components of C60 and C70, and a method for preparing the mixed fine wire.
摘要翻译：提供了包含富勒烯分子例如C 60和C 60 Pt衍生物并具有中空部分（富勒烯壳胶囊）的胶囊形式的针状晶体。通过液 - 液界面沉淀法制备的富勒烯壳胶囊，其包括（1）将含有其中溶解富勒烯的第一溶剂的溶液与富勒烯的溶解度低于第二溶剂的第二溶剂组合的步骤在上述第一溶剂中; （2）在上述溶液和上述第二溶剂之间形成液 - 液界面的步骤; （3）在上述液 - 液界面上析出碳细线的步骤，具有新颖的形态特征，可用作催化剂载体材料，塑料复合材料用原料，储存气体如氢气，燃料电池用催化剂等。此外，提供了作为包含C 60和C 20的两个组分的富勒烯细线的新颖的C 60 -C 70混合细线， 70 <！ - SIPO - >和细混合线的制备方法。

7. 发明授权

US08246926B2 Fullerene hollow structure needle crystal and C60-C70 mixed fine wire, and method for preparation thereof 失效
标题翻译：富勒烯中空结构针状晶体和C60-C70混合细线及其制备方法
公开(公告)号：US08246926B2
公开(公告)日：2012-08-21
申请号：US10593870
申请日：2005-02-14
申请人： Kun'ichi Miyazawa , Masahisa Fujino , Masaru Tachibana , Ken-ichi Kobayashi , Tadatomo Suga
发明人： Kun'ichi Miyazawa , Masahisa Fujino , Masaru Tachibana , Ken-ichi Kobayashi , Tadatomo Suga
IPC分类号： C01B31/02
CPC分类号： B82Y40/00 , B82Y30/00 , C01B32/15 , C01B32/152 , C30B7/00 , C30B29/02 , C30B29/62
摘要： A needle crystal in the form of a capsule comprising fullerene molecules such as C60 and a C60 platinum derivative and having a hollow portion (a fullerene shell capsule) is provided. The fullerene shell capsule which has been prepared by the liquid-liquid interface precipitation method, which comprises (1) a step in which a solution containing a first solvent dissolving fullerene therein is combined with a second solvent in which the solubility of fullerene is lower than in the above first solvent; (2) a step in which a liquid-liquid interface is formed between the above solution and the above second solvent; and (3) a step in which a carbon fine wire is precipitated on the above liquid-liquid interface, has a novel characteristic in its form and can be used as a catalyst supporting material, a raw material for a plastic composite material, a storage material for gas such as hydrogen, a catalyst for fuel cell, or the like. Further, provided are novel C60-C70 mixed fine wire which is fullerene fine wire comprising two components of C60 and C70, and a method for preparing the mixed fine wire.
摘要翻译：提供了包含富勒烯分子如C60和C60铂衍生物并具有中空部分（富勒烯壳胶囊）的胶囊形式的针状晶体。通过液 - 液界面沉淀法制备的富勒烯壳胶囊，其包括（1）将含有其中溶解富勒烯的第一溶剂的溶液与富勒烯的溶解度低于第二溶剂的第二溶剂组合的步骤在上述第一溶剂中; （2）在上述溶液和上述第二溶剂之间形成液 - 液界面的步骤; （3）在上述液 - 液界面上析出碳细线的步骤，其形状具有新颖特征，可用作催化剂载体材料，塑料复合材料用原料，储存气体如氢气，燃料电池用催化剂等。此外，提供了作为包含C60和C70两种成分的富勒烯细线的新型C60-C70混合细线以及混合细线的制备方法。

8. 发明申请

US20090212660A1 ULTRASONIC MOTOR AND METHOD FOR MANUFACTURING ULTRASONIC MOTOR 审中-公开
标题翻译：超声波电机及制造超声波电机的方法
公开(公告)号：US20090212660A1
公开(公告)日：2009-08-27
申请号：US11912137
申请日：2006-04-20
申请人： Masaya Iwaki , Tomoko Iwaki , Koji Akashi , Norimichi Anazawa , Ken-ichi Kobayashi
发明人： Masaya Iwaki , Tomoko Iwaki , Koji Akashi , Norimichi Anazawa , Ken-ichi Kobayashi
IPC分类号： H02N2/00 , H01L41/22
CPC分类号： H02N2/007 , Y10T29/42
摘要： [Purpose] The present invention relates to an ultrasonic motor having a stator which includes a piezoelectric element for moving a rotor in a prescribed direction by applying a predetermined ultrasonic voltage thereto, and the rotor which is fixed to the stator by a frictional force, and a method for manufacturing an ultrasonic motor, and it has for its purpose to attain decrease of dust appearance by enhancement of a wear resistance, a different hardness, or the like in such a way that a contact part of at least either of a stator and a rotor which constitute the ultrasonic motor is irradiated with ions.[Constitution] An ultrasonic motor characterized in that either or both of contact parts of a stator and a rotor is/are irradiated with ions, thereby to enhance a wear resistance of the contact part or parts.
摘要翻译：超声波电动机技术领域本发明涉及具有定子的超声波电动机，该定子包括：通过施加规定的超声波电压使规定的方向上的转子向规定的方向移动的压电元件和通过摩擦力固定在定子上的转子，一种超声波马达的制造方法，其目的是通过提高耐磨性，不同的硬度等来降低灰尘外观，使得定子和用离子照射构成超声波马达的转子。 [结构]一种超声波马达，其特征在于，定子和转子的接触部中的任一个或两者被离子照射，从而提高接触部件的耐磨性。

9. 发明授权

US4653500A Electrocardiographic amorphous alloy electrode 失效
标题翻译：心电非晶合金电极
公开(公告)号：US4653500A
公开(公告)日：1987-03-31
申请号：US809967
申请日：1985-12-17
申请人： Soichi Osada , Hirokatsu Inoue , Chuji Shimizu , Yasuaki Onodera , Ken-ichi Kobayashi , Kazuo Kozima , Shigeyoshi Shioda
发明人： Soichi Osada , Hirokatsu Inoue , Chuji Shimizu , Yasuaki Onodera , Ken-ichi Kobayashi , Kazuo Kozima , Shigeyoshi Shioda
IPC分类号： A61B5/0408 , A61B5/04 , A61B5/0416 , C22C45/02 , H01B1/02
CPC分类号： A61B5/0416 , H01B1/02
摘要： An electrocardiographic amorphous alloy electrode is manufactured from an iron-based (or nickel-based) amorphous alloy containing chromium as a metallic element and also containing at least one member of a group consisting of phosphorus, carbon, silicon and boron as a non-metallic element or semi-metallic elements.
摘要翻译：一种心电非晶合金电极由含有铬作为金属元素的铁基（或镍基）非晶态合金制成，并且还包含至少一种由磷，碳，硅和硼组成的组，作为非金属元素或半金属元素。

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