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    • 2. 发明申请
    • APPARATUS FOR MANUFACTURING THIN FILM STACKED MEMBER
    • 制造薄膜堆叠成员的装置
    • US20120247389A1
    • 2012-10-04
    • US13393597
    • 2010-11-29
    • Takashi YoshidaShoji YokoyamaTakanori YamadaMasanori NishizawaTakenori Wada
    • Takashi YoshidaShoji YokoyamaTakanori YamadaMasanori NishizawaTakenori Wada
    • C23C16/46
    • H01L21/6776B65H2301/323C23C16/46C23C16/545H01L21/67109H01L31/206Y02E10/50Y02P70/521
    • Provided is an apparatus for manufacturing a thin film stacked member capable of improving the quality of the thin film stacked member by decreasing creases, heat wrinkles, and tension wrinkles in the film through wrinkle smoothing-out. An apparatus for manufacturing a thin film stacked member transports a strip-shape flexible substrate in a horizontal direction with a width direction of the strip-shape flexible substrate as the vertical direction. The strip-shape flexible substrate is transported to a film deposition portion provided in a transport path of the strip-shape flexible substrate. A thin film is stacked on a surface of the strip-shape flexible substrate by means of a film deposition apparatus provided in the film deposition portion. A temperature-raising portion 20 having a roller heater 21 is provided at least before the first of the film deposition portion 30, and the roller heater 21 is set to increase a temperature of the strip-shape flexible substrate 1 to approximately a temperature of the film deposition portion 30.
    • 本发明提供一种薄膜层叠体的制造装置,其能够通过皱纹平滑化来减薄薄膜层叠构件的折痕,热皱纹和张力褶皱而提高其质量。 用于制造薄膜层叠构件的装置沿着带状柔性基板的宽度方向作为垂直方向在水平方向上输送带状柔性基板。 带状柔性基板被输送到设置在带状柔性基板的输送路径中的成膜部。 薄膜通过设在薄膜沉积部分中的薄膜沉积装置堆叠在带状柔性基板的表面上。 具有辊加热器21的升温部20至少在成膜部30的第一面之前设置,并且辊加热器21被设定为将带状柔性基板1的温度升高到 膜沉积部分30。
    • 3. 发明授权
    • Flexible substrate conveying device
    • 柔性基板输送装置
    • US08528725B2
    • 2013-09-10
    • US13512231
    • 2010-12-02
    • Masanori NishizawaShoji YokoyamaTakanori Yamada
    • Masanori NishizawaShoji YokoyamaTakanori Yamada
    • B65G15/12
    • B65H20/02B65H2301/323B65H2801/87H01L21/67706H01L21/67721H01L31/206Y02E10/50Y02P70/521
    • A conveying device has a substrate conveying device for conveying a flexible substrate while holding the flexible substrate upright, with one end part in a width direction of the flexible substrate being on an upper side; and a substrate retaining device. The substrate retaining device has a pair of grip rollers; a support mechanism rotatably supporting the pair of grip rollers; a transmission mechanism transmitting a force to pressure contact one of the grip rollers with the other grip roller; a first driving device configured to adjust a pressure contact force of the pair of grip rollers; an angle adjusting mechanism configured to incline the pair of grip rollers with respect to a conveying direction of the flexible substrate; and a second driving device configured to adjust an inclination angle of the pair of grip rollers with respect to the conveying direction of the flexible substrate.
    • 输送装置具有用于输送柔性基板的基板输送装置,同时将柔性基板保持直立,柔性基板的宽度方向上的一个端部位于上侧; 和基板保持装置。 基板保持装置具有一对夹持辊; 可旋转地支撑所述一对夹持辊的支撑机构; 传递机构,其传递力以与所述另一夹持辊压力接触所述夹持辊之一; 配置为调节所述一对夹持辊的压力接触力的第一驱动装置; 角度调节机构,其构造成相对于所述柔性基板的输送方向倾斜所述一对夹持辊; 以及第二驱动装置,其构造成调整所述一对夹持辊相对于柔性基板的输送方向的倾斜角度。
    • 5. 发明申请
    • FLEXIBLE SUBSTRATE CONVEYING DEVICE
    • 柔性底板输送装置
    • US20120298298A1
    • 2012-11-29
    • US13512231
    • 2010-12-02
    • Masanori NishizawaShoji YokoyamaTakanori Yamada
    • Masanori NishizawaShoji YokoyamaTakanori Yamada
    • B65H20/02B32B37/20
    • B65H20/02B65H2301/323B65H2801/87H01L21/67706H01L21/67721H01L31/206Y02E10/50Y02P70/521
    • A conveying device has a substrate conveying device for conveying a flexible substrate while holding the flexible substrate upright, with one end part in a width direction of the flexible substrate being on an upper side; and a substrate retaining device. The substrate retaining device has a pair of grip rollers; a support mechanism rotatably supporting the pair of grip rollers; a transmission mechanism transmitting a force to pressure contact one of the grip rollers with the other grip roller; a first driving device configured to adjust a pressure contact force of the pair of grip rollers; an angle adjusting mechanism configured to incline the pair of grip rollers with respect to a conveying direction of the flexible substrate; and a second driving device configured to adjust an inclination angle of the pair of grip rollers with respect to the conveying direction of the flexible substrate.
    • 输送装置具有用于输送柔性基板的基板输送装置,同时将柔性基板保持直立,柔性基板的宽度方向上的一个端部位于上侧; 和基板保持装置。 基板保持装置具有一对夹持辊; 可旋转地支撑所述一对夹持辊的支撑机构; 传递机构,其传递力以与所述另一夹持辊压力接触所述夹持辊之一; 配置为调节所述一对夹持辊的压力接触力的第一驱动装置; 角度调节机构,其构造成相对于所述柔性基板的输送方向倾斜所述一对夹持辊; 以及第二驱动装置,其构造成调整所述一对夹持辊相对于柔性基板的输送方向的倾斜角度。
    • 6. 发明申请
    • APPARATUS FOR MANUFACTURING A THIN FILM LAMINATE
    • 用于制造薄膜层压板的装置
    • US20120160165A1
    • 2012-06-28
    • US13388609
    • 2010-08-04
    • Masanori NishizawaShoji YokoyamaTakanori Yamada
    • Masanori NishizawaShoji YokoyamaTakanori Yamada
    • C23C16/54C23C16/52
    • C23C14/562B65H23/0324B65H23/038B65H23/195B65H23/26B65H2301/323B65H2301/51145
    • An apparatus for manufacturing a thin-film laminate prevents loosening of a strip-shaped flexible substrate at the time of conveying or misalignment of the strip-shaped flexible substrate with respect to a winding roller at the time of winding. In the apparatus, a strip-shaped flexible substrate in a lateral direction is conveyed by positioning longitudinally the width direction of the strip-shaped flexible substrate wound in a roll shape. The apparatus includes a deposition device having a deposition chamber for forming a thin film on the strip-shaped flexible substrate, a winding roll for winding a thin-film laminate, and an adjustment roller to prevent a loosening or misalignment of the strip-shaped flexible substrate between a pair of grip rollers and the winding roll, and the pair of grip rollers arranged in front of the adjustment roller to convey the thin-film laminate while maintaining a given height.
    • 薄膜层叠体的制造装置能够防止在卷绕时带状柔性基板相对于卷绕辊的输送或未对准时的条状柔性基板的松动。 在该装置中,横向方向上的带状柔性基板通过纵向定位卷绕成卷状的带状柔性基板的宽度方向而传送。 该装置包括具有用于在带状柔性基板上形成薄膜的沉积室的沉积装置,用于卷绕薄膜层叠体的卷绕辊和调节辊,以防止带状柔性基板的松动或未对准 一对夹持辊和卷绕辊之间的基板,以及布置在调节辊前面的一对夹持辊,以在保持给定高度的同时传送薄膜层压体。