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1. 发明申请

US20130199442A1 APPARATUS FOR FLEXIBLE SUBSTRATE POSITION CONTROL 审中-公开
标题翻译：柔性基板位置控制装置
公开(公告)号：US20130199442A1
公开(公告)日：2013-08-08
申请号：US13138744
申请日：2010-12-07
申请人： Takenori Wada , Takashi Yoshida , Shoji Yokoyama , Takanori Yamada , Masanori Nishizawa
发明人： Takenori Wada , Takashi Yoshida , Shoji Yokoyama , Takanori Yamada , Masanori Nishizawa
IPC分类号： H01L21/683
CPC分类号： H01L21/683 , B65H20/02 , B65H23/025 , B65H23/0324 , B65H23/038 , B65H2301/323 , B65H2511/214 , B65H2511/216 , B65H2513/41 , B65H2701/175 , H01L21/67092
摘要： An apparatus (30) for control of the position of a flexible substrate (1) in the vertical width direction has first and second upper sandwiching roller pairs (31, 32) for sandwiching the upper edge of the flexible substrate while sending the flexible substrate. Rotation shafts of the first upper sandwiching rollers (31) are inclined so as to have a deflection angle (α) directed obliquely upward with respect to a first transport direction (F), in a sandwiching portion, of the flexible substrate, and rotation shafts of the second upper sandwiching rollers (32) are inclined so as to have a deflection angle (α) directed obliquely upward with respect to a second transport direction (R) opposite the first transport direction in a sandwiching portion. A switching device for switching the first and second upper sandwiching roller pairs (31, 32) between operative and inoperative states is provided.
摘要翻译：用于控制柔性基板（1）沿垂直宽度方向的位置的装置（30）具有用于在发送柔性基板的同时夹持柔性基板的上边缘的第一和第二上夹持辊对（31,32）。第一上部夹持辊（31）的旋转轴倾斜，以便在柔性基板的夹持部分中具有相对于第一输送方向（F）倾斜向上指向的偏转角（α），以及旋转轴第二上部夹持辊（32）的倾斜角度倾斜，以便在夹持部分中具有相对于与第一输送方向相反的第二输送方向（R）倾斜向上指向的偏转角（α）。提供了一种用于在第一和第二上部夹持辊对（31,32）之间切换操作和不工作状态的开关装置。

2. 发明申请

US20120247389A1 APPARATUS FOR MANUFACTURING THIN FILM STACKED MEMBER 审中-公开
标题翻译：制造薄膜堆叠成员的装置
公开(公告)号：US20120247389A1
公开(公告)日：2012-10-04
申请号：US13393597
申请日：2010-11-29
申请人： Takashi Yoshida , Shoji Yokoyama , Takanori Yamada , Masanori Nishizawa , Takenori Wada
发明人： Takashi Yoshida , Shoji Yokoyama , Takanori Yamada , Masanori Nishizawa , Takenori Wada
IPC分类号： C23C16/46
CPC分类号： H01L21/6776 , B65H2301/323 , C23C16/46 , C23C16/545 , H01L21/67109 , H01L31/206 , Y02E10/50 , Y02P70/521
摘要： Provided is an apparatus for manufacturing a thin film stacked member capable of improving the quality of the thin film stacked member by decreasing creases, heat wrinkles, and tension wrinkles in the film through wrinkle smoothing-out. An apparatus for manufacturing a thin film stacked member transports a strip-shape flexible substrate in a horizontal direction with a width direction of the strip-shape flexible substrate as the vertical direction. The strip-shape flexible substrate is transported to a film deposition portion provided in a transport path of the strip-shape flexible substrate. A thin film is stacked on a surface of the strip-shape flexible substrate by means of a film deposition apparatus provided in the film deposition portion. A temperature-raising portion 20 having a roller heater 21 is provided at least before the first of the film deposition portion 30, and the roller heater 21 is set to increase a temperature of the strip-shape flexible substrate 1 to approximately a temperature of the film deposition portion 30.
摘要翻译：本发明提供一种薄膜层叠体的制造装置，其能够通过皱纹平滑化来减薄薄膜层叠构件的折痕，热皱纹和张力褶皱而提高其质量。用于制造薄膜层叠构件的装置沿着带状柔性基板的宽度方向作为垂直方向在水平方向上输送带状柔性基板。带状柔性基板被输送到设置在带状柔性基板的输送路径中的成膜部。薄膜通过设在薄膜沉积部分中的薄膜沉积装置堆叠在带状柔性基板的表面上。具有辊加热器21的升温部20至少在成膜部30的第一面之前设置，并且辊加热器21被设定为将带状柔性基板1的温度升高到膜沉积部分30。

3. 发明申请

US20120031565A1 FLEXIBLE SUBSTRATE POSITION CONTROL DEVICE 审中-公开
标题翻译：柔性基板位置控制装置
公开(公告)号：US20120031565A1
公开(公告)日：2012-02-09
申请号：US13146908
申请日：2010-01-08
申请人： Shoji Yokoyama , Takanori Yamada , Takenori Wada
发明人： Shoji Yokoyama , Takanori Yamada , Takenori Wada
IPC分类号： B32B38/18 , B65H20/02
CPC分类号： B65H20/02 , B65H23/038 , B65H2301/321 , B65H2301/323 , B65H2301/325 , B65H2403/942 , B65H2404/144 , B65H2404/1451 , C23C14/562 , C23C16/545 , H01L21/67712 , H01L21/67721 , H01L21/6776 , H01L31/0392 , H01L31/03926 , H01L31/206 , Y02E10/50 , Y02P70/521 , Y10T156/17
摘要： A flexible substrate position control device in a processing device, which transports a flexible substrate in a horizontal direction and in a vertical orientation and carries out processing of the substrate by processing units installed in a transport path of the substrate, is provided with a pair of clamping rollers that clamp an upper edge of the substrate, a support mechanism that rotatably supports the pair of clamping rollers, urging means for applying pressing force to the pair of clamping rollers, and adjusting means for adjusting the pressing force applied by the urging means. The pair of clamping rollers has an inclination, in which the direction of pressing relative to the clamping surface of the substrate is towards the edge of the substrate in the width direction, and is supported such that the rotating direction at the clamping surface is the same direction as the transport direction of the substrate.
摘要翻译：处理装置中的柔性基板位置控制装置，其在水平方向和垂直方向上输送柔性基板，并且通过安装在基板的输送路径中的处理单元进行基板的处理，设置有一对夹紧基板的上边缘的夹紧辊，可旋转地支撑该对夹紧辊的支撑机构，用于向一对夹紧辊施加压力的推动装置，以及用于调节由推动装置施加的按压力的调节装置。一对夹持辊具有倾斜，其中相对于基板的夹紧表面的压制方向在宽度方向上朝向基板的边缘，并且被支撑成使得夹紧表面处的旋转方向相同方向作为基板的输送方向。

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