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    • 6. 发明授权
    • Specimen observation system for applying external magnetic field
    • 应用外部磁场的试样观测系统
    • US06838675B2
    • 2005-01-04
    • US10450614
    • 2002-01-18
    • Ken HaradaJunji EndoNobuyuki Osakabe
    • Ken HaradaJunji EndoNobuyuki Osakabe
    • G01N23/04G01N27/83G01Q20/02G01Q30/20G01R33/12H01J37/147H01J37/20H01J37/26H01J3/14
    • H01J37/26H01J37/147
    • To prevent the displacement from an optical axis of a charged particle beam from being made independent of the direction (parallel to or perpendicular to the optical axis) of a magnetic field applied to a specimen, a system including an electron microscope and using a charged particle beam optical system is provided with a source of a charged particle beam, a condenser optical system, a specimen to be observed, a system for applying a magnetic field to the specimen, an imaging optical system and an image observation/recording apparatus, is provided with first and second charged particle beam deflection systems in order along a direction in which the charged particle beam travels between the condenser optical system and the specimen, is provided with third and fourth charged particle beam deflection systems in order between the specimen and the imaging lens system, and the quantity and the direction of the deflection of the charged particle beam by each deflection system and the intensity and the bearing of a magnetic field applied to the specimen are related according to predetermined relation.
    • 为了防止来自带电粒子束的光轴的位移不依赖于施加到样本的磁场的方向(平行于或垂直于光轴),包括电子显微镜并使用带电粒子的系统 光束光学系统设置有带电粒子束的源,聚光镜系统,待观察的样本,向样本施加磁场的系统,成像光学系统和图像观察/记录装置 第一和第二带电粒子束偏转系统沿着带电粒子束在聚光器光学系统和样本之间行进的方向依次排列,在样本和成像透镜之间依次设置有第三和第四带电粒子束偏转系统 系统,以及每个偏转系统和强度的带电粒子束的偏转的数量和方向 并且根据预定关系,施加到样本的磁场的轴承相关。
    • 7. 发明授权
    • Charged particle guide apparatus and image viewing apparatus for charged
particle microscope using the same
    • 带电粒子引导装置和使用其的带电粒子显微镜的图像观察装置
    • US5811805A
    • 1998-09-22
    • US702183
    • 1996-08-23
    • Nobuyuki OsakabeJunji EndoTetsuji KodamaTsuneyuki UrakamiHiroshi TsuchiyaShinji Ohsuka
    • Nobuyuki OsakabeJunji EndoTetsuji KodamaTsuneyuki UrakamiHiroshi TsuchiyaShinji Ohsuka
    • H01J37/22H01J37/244H01J37/26
    • H01J37/22H01J37/244
    • An electron-microscope image viewing apparatus capable of measuring of a moving speed or a vibration frequency of an atomic structure, a magnetic structure, an electric structure or the like of a specimen even when the structure changes at a high rate. The apparatus includes a charged particle source for emitting charged particles, an illuminating electron lens system for illuminating a specimen with a beam of the charged particles, an image magnifying/projecting lens system for magnifying an image of the specimen formed by charged particles scattered upon transmission through the specimen and projecting the magnified image onto an image forming plane, at least one charged particle extracting means provided on the image forming plane of the image magnifying/projecting lens system for taking out the charged particles from a predetermined portion of the charged particle beam projected onto the image forming plane, at least one charged particle detector for detecting the charged particles taken out through the charged particle extracting means, and a signal processing means for processing a signal outputted from the charged particle detector.
    • 即使当结构以高速率变化时,也可以测量试样的原子结构,磁性结构,电结构等的移动速度或振动频率的电子显微镜图像观察装置。 该装置包括用于发射带电粒子的带电粒子源,用于用带电粒子束照射样本的照明电子透镜系统,用于放大由透射时散射的带电粒子形成的样本的图像的图像放大/投影透镜系统 通过样本并将放大图像投影到图像形成平面上,至少一个带电粒子提取装置,设置在图像放大/投影透镜系统的图像形成平面上,用于从带电粒子束的预定部分中取出带电粒子 投影到图像形成平面上的至少一个带电粒子检测器,用于检测通过带电粒子提取装置取出的带电粒子;以及信号处理装置,用于处理从带电粒子检测器输出的信号。