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1. 发明授权

US4935625A Electron holography apparatus 失效
标题翻译：电子全息设备
公开(公告)号：US4935625A
公开(公告)日：1990-06-19
申请号：US238143
申请日：1988-08-30
申请人： Shuji Hasegawa , Junji Endo , Nobuyuki Osakabe , Akira Tonomura
发明人： Shuji Hasegawa , Junji Endo , Nobuyuki Osakabe , Akira Tonomura
IPC分类号： G01Q30/02 , G03H5/00 , H01J37/04 , H01J37/22 , H01J37/26
CPC分类号： H01J37/26 , G03H5/00 , H01J2237/1514 , H01J2237/228 , H01J2237/2614
摘要： An electron holography apparatus includes an electron microscope which is provided with an electron source, a beam splitter for dividing an electron beam emitted from the electron source into first and second electron beams, and a phase controller for controllably changing a phase difference between the first and second electron beams, and further includes an image detector for detecting an electron interference fringe pattern which varies in accordance with the phase difference between the first and second electron beams, as a picture image, and an image data processor for determining the phase distribution of one of the first and second electron beams from detected image data.
摘要翻译：一种电子全息摄影装置，具备：具有电子源的电子显微镜，将从电子源射出的电子束分割成第一和第二电子束的分束器，以及相位控制器，用于可控地改变第一和第二电子束之间的相位差第二电子束，还包括用于检测根据第一和第二电子束之间的相位差而变化的电子干涉条纹图案作为图像图像的图像检测器，以及用于确定第一和第二电子束的相位分布的图像数据处理器的来自检测到的图像数据的第一和第二电子束。

2. 发明授权

US5814815A Phase-contrast electron microscope and phase plate therefor 失效
标题翻译：相差电子显微镜及相位板
公开(公告)号：US5814815A
公开(公告)日：1998-09-29
申请号：US768355
申请日：1996-12-17
申请人： Takao Matsumoto , Nobuyuki Osakabe , Akira Tonomura
发明人： Takao Matsumoto , Nobuyuki Osakabe , Akira Tonomura
IPC分类号： H01J37/26
CPC分类号： H01J37/263 , H01J37/26 , H01J2237/1514 , H01J2237/226 , H01J2237/2614
摘要： An electrostatic potential in a vacuum in the vicinity of a focused electron beam of a direct wave formed on an optical axis of a back focal plane of an objective lens used in an electron microscope can be externally controlled. Therefore, the electrostatic potential is controlled by supplying an electric potential to a ring-shaped electrode from the outside. The outer sides of the electrode are interposed between both of insulators and conductors so as to shield the electrostatic potential against the outer side of a ring, whereby a phase shift is supplied only to an electron beam that passes through the inside of the ring. A phase-contrast electron microscope can be realized which includes a phase plate corresponding to an electron beam, which is capable of observing a phase object with contrast.
摘要翻译：在电子显微镜中使用的物镜的后焦平面的光轴上形成的直接波的聚焦电子束附近的真空中的静电电位可以被外部控制。因此，通过从外部向环形电极提供电位来控制静电势。电极的外侧被插入在两个绝缘体和导体之间，以便将静电电位屏蔽在环的外侧，由此相对于通过环的内部的电子束被提供。可以实现相位对比电子显微镜，其包括对应于电子束的相位板，其能够观察相对物体的对比度。

3. 发明授权

US4642461A Field emission type electron microscope using a multi-stage acceleration tube 失效
标题翻译：场发射型电子显微镜采用多级加速管
公开(公告)号：US4642461A
公开(公告)日：1987-02-10
申请号：US676313
申请日：1984-11-29
申请人： Junji Endo , Akira Tonomura , Susumu Ozasa , Tsuyoshi Matsuda , Chikara Kimura , Nobuyuki Osakabe
发明人： Junji Endo , Akira Tonomura , Susumu Ozasa , Tsuyoshi Matsuda , Chikara Kimura , Nobuyuki Osakabe
IPC分类号： H01J37/06 , H01J37/073 , H01J37/248 , H01J37/26 , G01N23/00
CPC分类号： H01J37/073
摘要： A field emission type electron microscope using a multi-stage acceleration tube wherein an acceleration voltage to be applied to at least one, always inclusive of a first-stage acceleration electrode, of acceleration electrodes is changed in interlocked relationship with a change in a field emission voltage to be applied to a field emission electrode, so that power of an electrostatic lens can be kept constant.
摘要翻译：使用多级加速管的场致发射型电子显微镜，其中施加到加速电极的至少一个总是包括第一级加速电极的加速电压与场致发射的变化互锁的关系改变施加到场发射电极的电压，使得静电透镜的功率可以保持恒定。

4. 发明授权

US5192867A Electron optical measurement apparatus 失效
标题翻译：电子光学测量装置
公开(公告)号：US5192867A
公开(公告)日：1993-03-09
申请号：US697576
申请日：1991-05-09
申请人： Nobuyuki Osakabe , Junji Endo , Akira Tonomura , Masahiro Tomita , Tadao Furutsu
发明人： Nobuyuki Osakabe , Junji Endo , Akira Tonomura , Masahiro Tomita , Tadao Furutsu
IPC分类号： H01J37/147 , H01J37/20 , H01J37/26 , H01J37/29
CPC分类号： H01J37/20 , H01J37/147 , H01J37/26 , H01J37/29 , H01J2237/1514 , H01J2237/228 , H01J2237/2614
摘要： In an electron holography apparatus having an electron source, a specimen holder, an electron lens system, and an electron biprism, the electron biprism is so constructed as to be rotatable about the electron optics axis. The rotation angle about the electron optics axis is commanded by the operator of the electron holography apparatus. A central wire of the electron biprism is allowed to be translated in a direction orthogonal to the electron optics axis, thus permitting the application of the fringe scanning method. The center of an aperture is selectively allowed to be aligned with that of the electron biprism to ensure that the measurement apparatus can be used selectively as either the electron holography apparatus or an electron microscope.
摘要翻译：在具有电子源，样本保持器，电子透镜系统和电子双棱镜的电子全息设备中，电子双棱镜被构造成可围绕电子光轴旋转。围绕电子光轴的旋转角度由电子全息设备的操作者命令。允许电子双棱镜的中心线在与电子光轴垂直的方向上平移，从而允许施加边缘扫描方法。选择性地允许孔的中心与电子双棱镜的中心对准，以确保测量装置可以选择性地用作电子全息设备或电子显微镜。

5. 发明授权

US4998788A Reflection electron holography apparatus 失效
标题翻译：反射电子全息设备
公开(公告)号：US4998788A
公开(公告)日：1991-03-12
申请号：US462769
申请日：1990-01-10
申请人： Nobuyuki Osakabe , Akira Tonomura
发明人： Nobuyuki Osakabe , Akira Tonomura
IPC分类号： H01J37/22 , G01Q30/04 , H01J37/28 , H01J37/29
CPC分类号： H01J37/29 , H01J2237/1514
摘要： An apparatus forming a reflection electron hologram, wherein a fraction of an electron wave from an electron source illuminate a specimen and caused to be reflected thereat, the remaining electron wave does not illuminate the specimen, but passes aside, the specimen, and the electron wave reflected from the specimen and the electron wave not illuminating, but passes aside, the specimen, are superimposed one upon the other.

6. 发明授权

US4532422A Electron holography microscope 失效
标题翻译：电子全息显微镜
公开(公告)号：US4532422A
公开(公告)日：1985-07-30
申请号：US472232
申请日：1983-03-04
申请人： Setsuo Nomura , Akira Tonomura , Nobuo Hamamoto , Akira Fukuhara
发明人： Setsuo Nomura , Akira Tonomura , Nobuo Hamamoto , Akira Fukuhara
IPC分类号： H01J37/22 , G03H5/00 , H01J37/26 , G01N23/00
CPC分类号： G03H5/00 , H01J37/26 , H01J2237/228 , H01J2237/2614
摘要： The present invention provides an electron holography microscope producing an interference pattern having contour moire lines which is displayed on a cathode-ray tube. With the invention the three-dimensional structure of a specimen can be readily observed on the cathode-ray tube. The electron holography microscope of the present invention comprises a television camera which picks up the interference pattern a straight line fringe output means for delivering a straight line fringe pattern the direction and interval of which are selected at will. Outputs of the television camera and the means are added in a multiplier and the result is displayed on the cathode-ray tube.
摘要翻译：本发明提供一种产生具有显示在阴极射线管上的轮廓莫尔线的干涉图案的电子全息显微镜。利用本发明，可以在阴极射线管上容易地观察到样品的三维结构。本发明的电子全息显微镜包括：电视摄像机，用于拾取干涉图案的直线条纹输出装置，用于输送随意选择的方向和间隔的直线条纹图案。将电视摄像机和装置的输出添加到乘法器中，并将结果显示在阴极射线管上。

7. 发明授权

US5426521A Aberration correction method and aberration correction apparatus 失效
标题翻译：畸变校正方法和像差校正装置
公开(公告)号：US5426521A
公开(公告)日：1995-06-20
申请号：US995507
申请日：1992-12-22
申请人： Jun Chen , Guanming Lai , Kazuo Ishizuka , Akira Tonomura
发明人： Jun Chen , Guanming Lai , Kazuo Ishizuka , Akira Tonomura
IPC分类号： G02B27/00 , G02B27/46 , G02F1/13 , G02F1/139 , G03H1/00 , G03H1/22 , G03H5/00 , G03H1/08 , G03H1/16
CPC分类号： G02B27/0025 , G02B27/46 , G03H1/2205 , G02F1/1393 , G02F2203/18 , G03H1/0005 , G03H1/2294 , G03H2001/2207 , G03H2223/54 , G03H2223/55 , G03H2225/32
摘要： A method of and apparatus for efficiently correcting an aberration of an optical system used to record a hologram at the stage of reconstructing an image of the hologram. At the stage of reconstructing an image of a hologram (3), which contains the record of interference fringes formed by a reference plane wave and an object wave modulated by a sample, by applying a plane wave for reconstruction to the hologram (3) from a laser (1), an aberration of an optical system used to record the hologram (3) is canceled by the phase distribution on a liquid crystal panel (6) having a spatial phase modulation function, which is disposed on the Fourier transform plane, thereby correcting the aberration. The phase distribution on the liquid crystal panel (6) can be changed flexibly by a computer (9) in accordance with the aberration coefficients or degree of defocusing of the recording optical system.
摘要翻译：一种用于在重建全息图像的阶段有效地校正用于记录全息图的光学系统的像差的方法和装置。在重建包含由参考平面波形成的干涉条纹和由样本调制的物体波的记录的全息图（3）的阶段，通过将重构的平面波应用于全息图（3）从激光器（1）中，用于记录全息图（3）的光学系统的像差被设置在傅立叶变换平面上的具有空间相位调制函数的液晶面板（6）上的相位分布所抵消，从而校正像差。可以通过计算机（9）根据记录光学系统的像差系数或散焦程度灵活地改变液晶面板（6）上的相位分布。

8. 发明授权

US4945247A Field emission electron gun system 失效
标题翻译：场发射电子枪系统
公开(公告)号：US4945247A
公开(公告)日：1990-07-31
申请号：US365827
申请日：1989-06-14
申请人： Takeshi Kawasaki , Junji Endo , Shigeto Isakozawa , Masahiro Tomita , Akira Tonomura
发明人： Takeshi Kawasaki , Junji Endo , Shigeto Isakozawa , Masahiro Tomita , Akira Tonomura
IPC分类号： H01J29/48 , H01J37/073 , H01J37/145
CPC分类号： H01J37/073
摘要： In a field emission electron gun system with a multi-stage acceleration tube comprising a field emission electron source, a field emission electrode for extracting the electrons, a magnetic lens having a magnetic gap between the field emission electron source and the field emission electrode or a magnetic lens having a magnetic pole which also serves as the field emission electrode, and at least two-stages of acceleration electrodes for accelerating the electrons, a magnetization current I for the magnetic lens is changed interlocking with a field emission voltage V.sub.1 applied between the field emission electron source and the field emission electrode so that IN/.sqroot.V.sub.1 (N: the number of windings of the magnetic lens) takes a predetermined value and a first acceleration voltage V.sub.2 applied between the field emission electron source and the first-stage acceleration electrode is changed interlocking with the field emission voltage V.sub.1 so that V.sub.2 /V.sub.1 takes a predetermined value.
摘要翻译：在具有包括场发射电子源的多级加速管的场发射电子枪系统中，用于提取电子的场发射电极，在场发射电子源和场发射电极之间具有磁隙的磁透镜或具有也用作场发射电极的磁极的磁性透镜以及用于加速电子的至少两级的加速电极，用于磁性透镜的磁化电流I与施加在磁场之间的场致发射电压V1互锁地变化发射电子源和场发射电极，使得IN / 2ROOT V1（N：磁性透镜的绕组数）取预定值，施加在场发射电子源和第一级加速电极之间的第一加速电压V2 与场致发射电压V1互锁，使得V2 / V1取规定值。

9. 发明授权

US4748132A Micro fabrication process for semiconductor structure using coherent electron beams 失效
标题翻译：使用相干电子束的半导体结构的微制造工艺
公开(公告)号：US4748132A
公开(公告)日：1988-05-31
申请号：US941841
申请日：1986-12-15
申请人： Tadashi Fukuzawa , Akira Tonomura , Naoki Chinone
发明人： Tadashi Fukuzawa , Akira Tonomura , Naoki Chinone
IPC分类号： H01S5/00 , H01L21/027 , H01L21/266 , H01L29/12 , H01L29/772 , H01S5/34 , G03C5/00 , H01L21/203
CPC分类号： B82Y20/00 , B82Y10/00 , H01L21/0277 , H01L21/266 , H01L29/125 , H01L29/127 , H01L29/7722 , H01S5/341 , Y10S148/046 , Y10S148/072 , Y10S148/137 , Y10S438/949 , Y10S438/95 , Y10S438/962
摘要： As a process for fabricating uniform patterns fine enough to produce a quantum size effect, the use of electron halography is proposed. Disclosed examples employing a process are methods of manufacturing a semiconductors laser whose threshold current is approximately 1 mA, and a permeable transistor and bistable device whose response rates are 100 GHz.
摘要翻译：作为用于制造足够精细以产生量子尺寸效应的均匀图案的方法，提出了使用电子黑影。使用该方法的公开实施例是制造阈值电流约为1mA的半导体激光器的方法，以及响应速率为100GHz的可渗透晶体管和双稳态器件。

10. 发明授权

US5446589A Interference device and method for observing phase informalities 失效
标题翻译：干涉装置和观察阶段非正规性的方法
公开(公告)号：US5446589A
公开(公告)日：1995-08-29
申请号：US103682
申请日：1993-08-10
申请人： Qing X. Ru , Junji Endo , Akira Tonomura
发明人： Qing X. Ru , Junji Endo , Akira Tonomura
IPC分类号： G02B27/50 , G01Q90/00 , G03H1/04 , G03H5/00 , H01J37/26 , H01J37/295 , G02B26/06
CPC分类号： G03H1/0404 , G03H5/00
摘要： An interference device and method for observing phase information, using electron or other waves with the amplitude difficult to split by a half mirror. Using an interference device comprising in combination two scattering films A1 and A2 capable of scattering incident waves randomly, first lens systems B1 and B2 that are located between said two scattering films to form the image of one scattering film A1 on the other scattering film A2, a second lens system B3 for forming on an observation surface C the image of a specimen 2 located at a position where a component going straight through said one scattering film is converged in a spot form through said first lens system or a part thereof, and means for recording an interference pattern formed on the observation surface C, an interference pattern is detected while the specimen 2 is inserted in the arrangement, and an interference pattern is detected while the specimen 2 is removed from the arrangement, so that the difference between both the interference patterns, or the sum or product of them, can be found to observe the phase information of the specimen directly as interference fringes.
摘要翻译：一种用于观测相位信息的干涉装置和方法，使用电子束或其他具有难以用半透半反镜分裂的波的波。使用包括两个能够随机散射入射波的两个散射膜A1和A2的干涉装置，位于所述两个散射膜之间的第一透镜系统B1和B2，以在另一散射膜A2上形成一个散射膜A1的图像，第二透镜系统B3，用于在观察表面C上形成位于通过所述第一透镜系统或其一部分以直线通过所述一个散射膜的部件会聚在一起的位置的样本2的图像;以及装置为了记录形成在观察表面C上的干涉图案，在样本2被插入到该装置中时检测到干涉图案，并且在从装置移除样本2的同时检测干涉图案，从而两者之间的差异可以发现干涉图案或其总和或乘积直接作为干涉条纹观察样本的相位信息 es。

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