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    • 7. 发明申请
    • Single cell operation supporting robot
    • 单电池操作支持机器人
    • US20050254046A1
    • 2005-11-17
    • US10523637
    • 2002-08-08
    • Hideaki MatsuokaMikako Saito
    • Hideaki MatsuokaMikako Saito
    • C12M3/00G02B21/32G02B27/32
    • C12M23/12C12M23/50C12M35/00C12M41/48G02B21/32
    • A single-cell operation supporting robot for supporting a single-cell operation work with multi-purposes by carrying out a work which an operator himself/herself carries out difficultly, according to the indication of the operator. The robot is equipped with a microscope 1, multi-micro well 4 for storing cells and a single-cell stimulating device 5 which are respectively provided on the stage 1a of the microscope 1, a sample injection transportation means 7 which transports a glass capillary 6 for injecting a sample into the single-cell relatively to and from the multi-microwell 4 and an automatic stage 2, a cell transportation device 9 which transports a glass capillary 8 for holding the single-cell relatively to and from each well of the multi-microwell 4, the single-cell stimulating device 5 and the glass capillary 6, a microscopic spectral measurement device 10 which is combined with the microscope 1, computers 11 and 12 which automatically control an actuation of at least one among the microscope 1, the sample injection transportation device 7, the cell transportation device 9, the automatic stage 2, the single-cell stimulating device 5 and the microscopic spectral measurement device 10, and a manual operation device 17 which inputs signals to the computers 11 and 12 based on an operation by an operator and actuates the microscope and the like.
    • 根据操作者的指示,通过执行操作者自身执行的工作,支持机器人的单电池操作支持多单元操作工作。 机器人装备有显微镜1,用于存储细胞的多微孔4和分别设置在显微镜1的台1a上的单细胞刺激装置5,输送玻璃毛细管的样品注射输送装置7 6,用于将样品相对于多微孔4和自动载物台2注入单细胞;细胞运送装置9,其输送用于保持单细胞的玻璃毛细管8相对于和/ 多微孔4,单细胞刺激装置5和玻璃毛细管6,与显微镜1组合的微观光谱测量装置10,计算机11和12,其自动控制显微镜1中的至少一个的致动, 样品注射输送装置7,细胞运送装置9,自动载物台2,单细胞刺激装置5和微观光谱测定装置10, 根据操作者的操作将信号输入到计算机11和12的手动装置17,并驱动显微镜等。
    • 8. 发明授权
    • Deposited film forming process
    • 沉积成膜工艺
    • US06335281B1
    • 2002-01-01
    • US09334176
    • 1999-06-16
    • Yoshio SegiHideaki MatsuokaHiroyuki KatagiriYasuyoshi Takai
    • Yoshio SegiHideaki MatsuokaHiroyuki KatagiriYasuyoshi Takai
    • H01L2144
    • C23C16/54C23C16/4581C23C16/46
    • In a deposited film forming process or apparatus, a deposited film is formed on a film-forming substrate by reduced-pressure vapor phase growth. The film-forming substrate is set on an auxiliary substrate and an auxiliary-substrate cap member is set at the upper part thereof. A maximum temperature difference between temperature at the upper end of the film-forming substrate and the temperature at the lower end of the auxiliary-substrate cap member provided on the film-forming substrate at its upper part is so controlled as to be not greater than a prescribed value so that a film deposited on the auxiliary-substrate cap member is improved in adhesion. Any deposits of films on the part other than the film-forming substrate can be prevented from coming off and scattering on the film-forming substrate so that deposited films having uniform film thickness and film quality can steadily be formed and also faulty images can occur less frequently. It is also possible to achieve improvements of various properties of films formed, film forming rate, reproducibility, and productivity so that yield can dramatically be improved in mass production.
    • 在沉积膜形成工艺或装置中,通过减压气相生长在成膜基板上形成沉积膜。 成膜基板设置在辅助基板上,辅助基板盖部件设置在其上部。 成膜基板的上端的温度与设置在成膜基板上部的辅助基板盖部件的下端的温度之间的最大温度差被控制为不大于 规定值,使得沉积在辅助基板盖构件上的膜提高了粘附性。 可以防止膜形成基板以外的部分的沉积物在成膜基板上脱落并散射,从而可以稳定地形成膜厚度和膜质量均匀的沉积膜,并且可以发生较少的图像 经常。 也可以实现成膜的各种性能,成膜速度,再现性和生产率的改善,从而大量提高产量。