专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

1. 发明授权

US08908172B2 Defect inspection device and method of inspecting defect 有权
标题翻译：缺陷检查装置及缺陷检查方法
公开(公告)号：US08908172B2
公开(公告)日：2014-12-09
申请号：US13575050
申请日：2011-02-09
申请人： Takahiro Urano , Toshifumi Honda
发明人： Takahiro Urano , Toshifumi Honda
IPC分类号： G01N21/00 , G01N21/95
CPC分类号： G01N21/9501
摘要： Disclosed is a defect inspection device comprising: an illumination optical portion which illuminates an object to be inspected with illuminating light; a detection optical portion system illuminated by the illumination optical portion and provided with a plurality of detectors which respectively detects components of scattering light which scatter from the inspected object each in a different direction of azimuthal angle or in a different direction of angle of elevation with respect to a surface of the inspected object; and a signal processing portion which makes gain adjustments and defect decisions in parallel on plural signals based on the components of the scattering light from the inspected object detected by the detectors, respectively, the defect decisions being based on a threshold value decision, and which extracts defects based on results of the gain adjustments and of the defect decisions.
摘要翻译：公开了一种缺陷检查装置，包括：照明光学部，其利用照明光照射被检查物体; 由照明光学部分照射的检测光学部分系统，并且设置有多个检测器，其分别检测沿着方位角的不同方向或与不同的仰角方向相对地从被检查物体散射的散射光的分量到被检查物体的表面; 以及信号处理部分，分别基于由检测器检测到的来自被检查对象的散射光的分量，对多个信号并行地进行增益调整和缺陷判定，所述缺陷判定基于阈值判定，并且提取基于增益调整结果和缺陷决定的缺陷。

2. 发明申请

US20130294677A1 DEFECT INSPECTION METHOD AND DEFECT INSPECTION DEVICE 审中-公开
标题翻译：缺陷检查方法和缺陷检查装置
公开(公告)号：US20130294677A1
公开(公告)日：2013-11-07
申请号：US13989840
申请日：2011-10-21
申请人： Takahiro Urano , Toshifumi Honda , Shunji Maeda
发明人： Takahiro Urano , Toshifumi Honda , Shunji Maeda
IPC分类号： G06T7/00
CPC分类号： G06T7/001 , G01N21/956 , G06T2207/30148 , H01L22/12 , H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： There is provided a defect inspection method including the steps of: acquiring image data sets of a sample under a plurality of imaging conditions; storing a plurality of image data sets acquired under the plurality of imaging conditions in an image storage unit; acquiring a defect candidate from each of the plurality of image data sets; cutting out, from the image data sets acquired under at least two imaging conditions and stored in the image storage unit, a partial images each including a position of the defect candidate detected in any of the plurality of image data sets and the periphery of the defect candidate position; and integrating the partial images acquired under at least two imaging conditions corresponding to the defect candidates, thereby classifying the defect candidates.
摘要翻译：提供了一种缺陷检查方法，包括以下步骤：在多个成像条件下获取样本的图像数据集; 将在所述多个成像条件下获取的多个图像数据集合存储在图像存储单元中; 从所述多个图像数据组中的每一个获取缺陷候选; 从在至少两个成像条件下获取并存储在图像存储单元中的图像数据集切割出包括在多个图像数据集中的任何一个中检测到的缺陷候选位置和缺陷周围的部分图像候选人职位; 并且对在与缺陷候选对应的至少两个成像条件下获取的部分图像进行积分，从而对缺陷候选进行分类。

3. 发明申请

US20120293795A1 DEFECT INSPECTION DEVICE AND METHOD OF INSPECTING DEFECT 有权
标题翻译：缺陷检查装置和检查缺陷的方法
公开(公告)号：US20120293795A1
公开(公告)日：2012-11-22
申请号：US13575050
申请日：2011-02-09
申请人： Takahiro Urano , Toshifumi Honda
发明人： Takahiro Urano , Toshifumi Honda
IPC分类号： G01N21/956
CPC分类号： G01N21/9501
摘要： Disclosed is a defect inspection device comprising: an illumination optical portion which illuminates an object to be inspected with illuminating light; a detection optical portion system illuminated by the illumination optical portion and provided with a plurality of detectors which respectively detects components of scattering light which scatter from the inspected object each in a different direction of azimuthal angle or in a different direction of angle of elevation with respect to a surface of the inspected object; and a signal processing portion which makes gain adjustments and defect decisions in parallel on plural signals based on the components of the scattering light from the inspected object detected by the detectors, respectively, the defect decisions being based on a threshold value decision, and which extracts defects based on results of the gain adjustments and of the defect decisions.
摘要翻译：公开了一种缺陷检查装置，包括：照明光学部，其利用照明光照射被检查物体; 由照明光学部分照射的检测光学部分系统，并且设置有多个检测器，其分别检测沿着方位角的不同方向或与不同的仰角方向相对地从被检查物体散射的散射光的分量到被检查物体的表面; 以及信号处理部分，分别基于由检测器检测到的来自被检查对象的散射光的分量，对多个信号并行地进行增益调整和缺陷判定，所述缺陷判定基于阈值判定，并且提取基于增益调整结果和缺陷决定的缺陷。

4. 发明申请

US20120229618A1 DEFECT INSPECTION DEVICE AND DEFECT INSPECTION METHOD 有权
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：US20120229618A1
公开(公告)日：2012-09-13
申请号：US13387369
申请日：2010-08-30
申请人： Takahiro Urano , Kaoru Sakai , Toshifumi Honda
发明人： Takahiro Urano , Kaoru Sakai , Toshifumi Honda
IPC分类号： G06K9/60 , H04N7/18
CPC分类号： G01N21/9501 , G01N21/95607 , G01N2021/8825 , G01N2021/9513 , G06T7/0004 , G06T2207/10061 , G06T2207/30121 , G06T2207/30148 , H01L22/12
摘要： Disclosed is a defect inspection device that has an illumination optical system; a detection optical system; and a processing unit which includes a defect feature quantity calculation unit that calculates the feature quantities of each defect candidate, a defect candidate grouping unit that groups the aforementioned defect candidates on the basis of the feature quantities, a defect classification evaluation value calculation unit that calculates defect classification evaluation values for the aforementioned defect candidates, a defect classification evaluation value updating unit that, on the basis of instructions, updates the evaluation values, a defect classification threshold determination unit that, on the basis of evaluation valued updated by the aforementioned defect classification evaluation value updating unit, determines a classification boundary that is a threshold for classifying defect types of the aforementioned defect candidates, and a defect detection unit that detects defects using the thresholds.
摘要翻译：公开了一种具有照明光学系统的缺陷检查装置，检测光学系统; 以及处理单元，其包括：缺陷特征量计算单元，其计算每个缺陷候选的特征量;缺陷候选分组单元，其基于所述特征量对所述缺陷候选进行分组;缺陷分类评估值计算单元，其计算上述缺陷候补的缺陷分类评价值，基于指示更新评价值的缺陷分类评价值更新部，基于上述缺陷分类更新的评价值的缺陷分类阈值判定部评估值更新单元，确定作为用于分类上述缺陷候选的缺陷类型的阈值的分类边界，以及使用阈值来检测缺陷的缺陷检测单元。

5. 发明授权

US09075026B2 Defect inspection device and defect inspection method 有权
标题翻译：缺陷检查装置和缺陷检查方法
公开(公告)号：US09075026B2
公开(公告)日：2015-07-07
申请号：US13387369
申请日：2010-08-30
申请人： Takahiro Urano , Kaoru Sakai , Toshifumi Honda
发明人： Takahiro Urano , Kaoru Sakai , Toshifumi Honda
IPC分类号： G06K9/60 , G01N21/95 , G06T7/00 , G01N21/956 , G01N21/88 , H01L21/66
CPC分类号： G01N21/9501 , G01N21/95607 , G01N2021/8825 , G01N2021/9513 , G06T7/0004 , G06T2207/10061 , G06T2207/30121 , G06T2207/30148 , H01L22/12
摘要： Disclosed is a defect inspection device that has an illumination optical system; a detection optical system; and a processing unit which includes a defect feature quantity calculation unit that calculates the feature quantities of each defect candidate, a defect candidate grouping unit that groups the aforementioned defect candidates on the basis of the feature quantities, a defect classification evaluation value calculation unit that calculates defect classification evaluation values for the aforementioned defect candidates, a defect classification evaluation value updating unit that, on the basis of instructions, updates the evaluation values, a defect classification threshold determination unit that, on the basis of evaluation valued updated by the aforementioned defect classification evaluation value updating unit, determines a classification boundary that is a threshold for classifying defect types of the aforementioned defect candidates, and a defect detection unit that detects defects using the thresholds.
摘要翻译：公开了一种具有照明光学系统的缺陷检查装置，检测光学系统; 以及处理单元，其包括：缺陷特征量计算单元，其计算每个缺陷候选的特征量;缺陷候选分组单元，其基于所述特征量对所述缺陷候选进行分组;缺陷分类评估值计算单元，其计算上述缺陷候补的缺陷分类评价值，基于指示更新评价值的缺陷分类评价值更新部，基于上述缺陷分类更新的评价值的缺陷分类阈值判定部评估值更新单元，确定作为用于分类上述缺陷候选的缺陷类型的阈值的分类边界，以及使用阈值来检测缺陷的缺陷检测单元。

6. 发明授权

US09109194B2 Device for harvesting bacterial colony and method therefor 有权
标题翻译：收获细菌菌落的装置及其方法
公开(公告)号：US09109194B2
公开(公告)日：2015-08-18
申请号：US13505803
申请日：2010-11-05
申请人： Toshifumi Honda , Hiroko Fujita , Muneo Maeshima , Akira Maekawa , Yoshiko Ishida , Yuta Urano , Shinya Murakami
发明人： Toshifumi Honda , Hiroko Fujita , Muneo Maeshima , Akira Maekawa , Yoshiko Ishida , Yuta Urano , Shinya Murakami
IPC分类号： G06K9/00 , C12M1/26
CPC分类号： C12M33/00 , C12M41/36
摘要： When multiple kinds of bacterial colonies are present in a petri dish and, for example, a drug tolerance is to be measured, harvesting of mixed colonies of different types of bacteria makes it impossible to accurately determine the drug tolerance. Also, it is required to improve the throughput of a device for harvesting a bacterial colony. From images illuminated from multiple directions, isolating bacterial colonies are automatically extracted. Next, the image feature amounts are calculated from the multiple images that are illuminated from multiple directions and colonies are grouped depending on the feature amounts. Then, bacterial colonies to be harvested are determined based on the results of the grouping.
摘要翻译：当培养皿中存在多种细菌菌落时，例如测定药物耐受性时，收集不同类型细菌的混合菌落使得不可能准确地确定药物耐受性。此外，需要提高用于收获细菌菌落的装置的产量。从多个方向照射的图像，分离细菌菌落被自动提取。接下来，根据从多个方向照明的多个图像计算图像特征量，并且根据特征量对殖民地进行分组。然后，基于分组的结果确定要收获的细菌菌落。

7. 发明授权

US08804112B2 Method of defect inspection and device of defect inspection 有权
标题翻译：缺陷检查方法和缺陷检查装置
公开(公告)号：US08804112B2
公开(公告)日：2014-08-12
申请号：US13265935
申请日：2010-04-22
申请人： Yukihiro Shibata , Toshihiko Nakata , Taketo Ueno , Atsushi Taniguchi , Toshifumi Honda
发明人： Yukihiro Shibata , Toshihiko Nakata , Taketo Ueno , Atsushi Taniguchi , Toshifumi Honda
IPC分类号： G01N21/00
CPC分类号： G01N21/95623 , G01N21/95607 , G01N2021/8822 , G01N2201/062 , H01L22/12 , H01L2924/0002 , H01L2924/00
摘要： A method of inspecting defects and a device inspecting defects of detecting defects at high sensitivity and high capture efficiency even on various patterns existing on a wafer. In the device of inspecting defects, an illumination optical system is formed of two systems of a coherent illumination of a laser 5 and an incoherent illumination of LEDs 6a, 6b, 6c and 6d, and light paths are divided in a detecting system corresponding to respective illumination light, spatial modulation elements 55a and 55b are arranged to detecting light paths, respectively, scattered light inhibiting sensitivity is shielded by the spatial modulating elements 55a and 55b, scattered light transmitted through the spatial modulation elements 55a and 55b is detected by image sensors 90a and 90b arranged to respective light paths, and images detected by these two image sensors 90a and 90b are subjected to a comparison processing, thereby determining a defect candidate.
摘要翻译：一种检测缺陷的方法，以及即使在晶片上存在的各种图案，也可以检测高灵敏度和高捕获效率的缺陷检测缺陷。在检查缺陷的装置中，照明光学系统由激光器5的相干照明和LED 6a，6b，6c和6d的非相干照明的两个系统形成，并且光路被分成对应于相应的照明光，空间调制元件55a和55b分别被布置成检测光路，散射光抑制灵敏度被空间调制元件55a和55b屏蔽，传播通过空间调制元件55a和55b的散射光被图像传感器90a检测和90b，并且由这两个图像传感器90a和90b检测到的图像进行比较处理，从而确定缺陷候选。

8. 发明申请

US20130321798A1 DEFECT INSPECTION METHOD, LOW LIGHT DETECTING METHOD AND LOW LIGHT DETECTOR 有权
标题翻译：缺陷检测方法，低光检测方法和低光检测器
公开(公告)号：US20130321798A1
公开(公告)日：2013-12-05
申请号：US13882542
申请日：2011-10-14
申请人： Yuta Urano , Toshifumi Honda , Takahiro Jingu
发明人： Yuta Urano , Toshifumi Honda , Takahiro Jingu
IPC分类号： G01N21/88
CPC分类号： G01N21/8806 , G01N21/4795 , G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2021/8835
摘要： A defect inspection method includes an illumination light adjustment step of adjusting light emitted from a light source, an illumination intensity distribution control step of forming light flux obtained in the illumination light adjustment step into desired illumination intensity distribution, a sample scanning step of displacing a sample in a direction substantially perpendicular to a longitudinal direction of the illumination intensity distribution, a scattered light detection step of counting the number of photons of scattered light emitted from plural small areas in an area irradiated with illumination light to produce plural scattered light detection signals corresponding to the plural small areas, a defect judgment step of processing the plural scattered light detection signals to judge presence of a defect, a defect dimension judgment step of judging dimensions of the defect in each place in which the defect is judged to be present and a display step of displaying a position on sample surface and the dimensions of the defect in each place in which the defect is judged to be present.
摘要翻译：缺陷检查方法包括调整从光源发出的光的照明光调节步骤，将在所述照明光调节步骤中获得的光束形成为期望的照度分布的照度分布控制步骤，将样品置换的样本扫描步骤在与照明强度分布的长度方向大致正交的方向上，对从照明光照射的区域的多个小区域发射的散射光的光数进行计数，生成与多个散射光检测信号对应的散射光检测信号的散射光检测步骤多个小区域，处理多个散射光检测信号以判断缺陷的存在的缺陷判断步骤，判断存在缺陷的每个位置的缺陷的尺寸的缺陷维度判断步骤和显示显示位置的步骤o n样品表面和缺陷的每个位置的缺陷的尺寸。

9. 发明申请

US20130293880A1 DEFECT TESTING METHOD AND DEVICE FOR DEFECT TESTING 审中-公开
标题翻译：缺陷测试方法和缺陷测试装置
公开(公告)号：US20130293880A1
公开(公告)日：2013-11-07
申请号：US13882547
申请日：2011-11-01
申请人： Toshifumi Honda , Yuta Urano , Yukihiro Shibata
发明人： Toshifumi Honda , Yuta Urano , Yukihiro Shibata
IPC分类号： G01N21/95
CPC分类号： G01N21/9501
摘要： In a defect inspection method and an apparatus of the same, for enabling to conduct an inspection of fine defects without applying thermal damages on a sample, the following steps are conducted: mounting a sample on a rotatable table to rotate; irradiating a pulse laser emitting from a laser light source upon the sample rotating; detecting a reflected light from the sample, upon which the pulse laser is irradiated; detecting the reflected light from the sample detected; and detecting a defect on the sample through processing of a signal obtained through the detection, wherein irradiation of the pulse laser emitting from the laser light source upon the sample rotating is conducted by dividing the one pulse emitted from the laser light source into plural numbers of pulses, and irradiating each of the divided pulse lasers upon each of separate positions on the sample, respectively.
摘要翻译：在缺陷检查方法及其装置中，为了能够在对样品施加热损伤的情况下进行细小缺陷的检查，进行以下步骤：将样品安装在旋转台上旋转; 照射从激光光源发射的脉冲激光器对样品旋转; 检测来自所述脉冲激光器的样品的反射光; 检测检测到的样品的反射光; 并且通过处理通过检测获得的信号来检测样本上的缺陷，其中通过将从激光光源发射的一个脉冲除以多个数量来进行从样品旋转时从激光源发射的脉冲激光的照射脉冲，并且分别在样品上的每个分离位置上照射每个分割的脉冲激光器。

10. 发明申请

US20130119250A1 DEFECT INSPECTION METHOD, AND DEVICE THEREOF 有权
标题翻译：缺陷检查方法及其设备
公开(公告)号：US20130119250A1
公开(公告)日：2013-05-16
申请号：US13697025
申请日：2011-04-05
申请人： Naoki Hosoya , Toshifumi Honda , Takashi Hiroi
发明人： Naoki Hosoya , Toshifumi Honda , Takashi Hiroi
IPC分类号： H01J37/28 , H01J37/22
CPC分类号： H01J37/28 , G06T7/001 , G06T7/136 , G06T2207/10061 , G06T2207/30148 , H01J37/222 , H01L22/12
摘要： A conventional pattern inspection, which compares an image to be inspected with a reference image and subjects the resulting difference value to the defect detection using the threshold of defect determination, has difficulty in highly-sensitive inspection. Because defects occur only in specific circuit pattern sections, false reports occur in the conventional pattern inspections which are not based on the position. Disclosed are a defect inspection method and a device thereof which perform a pattern inspection by acquiring a GP image in advance, designating a place to be inspected and a threshold map to the GP image on the GUI, setting the identification reference of the defects, next acquiring the image to be inspected, applying the identification reference to the image to be inspected, and identifying the defects with the identification reference, thereby enabling the highly-sensitive inspection.
摘要翻译：将待检查的图像与参考图像进行比较并将得到的差分值与使用缺陷确定的阈值进行缺陷检测相对照的常规图案检查在高灵敏度检查中是困难的。因为缺陷仅在特定的电路图形部分中发生，所以在常规图案检查中出现虚假报告，而不是基于位置。公开了一种缺陷检查方法及其装置，其通过事先获取GP图像，指定待检查地点和GUI上的GP图像的阈值图来进行图案检查，设置缺陷的识别参考，下一步获取要检查的图像，将所述识别参考应用于要检查的图像，以及使用所述识别参考来识别所述缺陷，由此实现高度敏感的检查。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式