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1. 发明申请

US20050046058A1 Method and apparatus for imprinting disk substrate and method of manufacturing disk-shaped recording medium 审中-公开
标题翻译：用于印刷盘基片的方法和装置以及制造盘形记录介质的方法
公开(公告)号：US20050046058A1
公开(公告)日：2005-03-03
申请号：US10921871
申请日：2004-08-20
申请人： Takahiro Suwa , Kazuhiro Hattori , Minoru Fujita
发明人： Takahiro Suwa , Kazuhiro Hattori , Minoru Fujita
IPC分类号： B29C33/30 , B05D5/00 , B29C39/26 , B29D11/00 , B29L11/00 , G11B5/84 , G11B7/26 , G11B11/105
CPC分类号： G11B7/263 , G11B5/8404
摘要： In a disk substrate imprinting operation, a disk substrate formed with a shape transfer layer is mounted on a mount table, a position of the disk substrate on the mount table is adjusted in a state of being supported at a taper portion of a position adjusting member which is disposed to be movable vertically with respect to the disk substrate, a position of a stamper disposed so as to oppose to the disk substrate is preliminarily adjusted with respect to the position adjusted disk substrate is preliminarily adjusted, and in this state, a fine pattern is shaped to the shape transfer layer of the disk substrate by the stamper.
摘要翻译：在盘基板印刷操作中，将形成有形状转印层的盘基板安装在安装台上，在支撑在位置调整构件的锥形部分的状态下调整安装台上的盘基板的位置其被配置为相对于盘基板垂直移动，预先调整相对于位置调整盘基板的与盘基板相对设置的压模的位置，在该状态下，图案通过压模成形为盘基板的形状转印层。

2. 发明授权

US07247251B2 Method for manufacturing a magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07247251B2
公开(公告)日：2007-07-24
申请号：US11050769
申请日：2005-02-07
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
IPC分类号： H01F1/00
CPC分类号： G11B5/855 , H01F41/32
摘要： A method for manufacturing a magnetic recording medium is provided, which can efficiently manufacture a magnetic recording medium that includes a recording layer formed in a concavo-convex pattern, has a sufficiently flat surface, and provides good recording and reproduction precision. The method includes: a non-magnetic material filling step of depositing a non-magnetic material over a recording layer formed in a predetermined concavo-convex pattern over a substrate, thereby filling a concave portion of the concavo-convex pattern with the non-magnetic material; and a flattening step of removing the excess part of the non-magnetic material above the recording layer by ion beam etching to flatten the surfaces of the non-magnetic layer and the recording layer.
摘要翻译：提供了一种用于制造磁记录介质的方法，其可以有效地制造包括以凹凸图案形成的记录层的磁记录介质，具有足够平坦的表面，并且提供良好的记录和再现精度。该方法包括：非磁性材料填充步骤，将非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，从而用非磁性填充凹凸图案的凹部材料; 以及通过离子束蚀刻去除记录层上方的非磁性材料的剩余部分的平坦化步骤，以使非磁性层和记录层的表面变平。

3. 发明授权

US07225528B2 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07225528B2
公开(公告)日：2007-06-05
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/127 , H01R31/00
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译：一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率用于形成较低的非磁性膜。

4. 发明申请

US20070059562A1 Magnetic recording medium 审中-公开
标题翻译：磁记录介质
公开(公告)号：US20070059562A1
公开(公告)日：2007-03-15
申请号：US11600725
申请日：2006-11-17
申请人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
发明人： Kazuhiro Hattori , Mitsuru Takai , Takahiro Suwa
IPC分类号： G11B5/65
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/74 , G11B5/743 , G11B5/851 , G11B11/10582
摘要： A magnetic recording medium which is prevented from deterioration of the partitioned recording elements is provided. A magnetic recording medium has partitioned recording elements, a non-magnetic body filled in grooves between the partitioned recording elements, and a barrier film formed between the partitioned recording elements and the non-magnetic body.
摘要翻译：提供防止划分的记录元件劣化的磁记录介质。磁记录介质具有划分的记录元件，填充在分隔的记录元件之间的凹槽中的非磁性体以及形成在分隔的记录元件和非磁性体之间的阻挡膜。

5. 发明申请

US20060292400A1 Magnetic recording medium, magnetic recording and reproducing apparatus, and method for manufacturing magnetic recording medium 审中-公开
标题翻译：磁记录介质，磁记录和再现装置以及磁记录介质的制造方法
公开(公告)号：US20060292400A1
公开(公告)日：2006-12-28
申请号：US11472419
申请日：2006-06-22
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/64 , G11B5/65
CPC分类号： G11B5/855
摘要： A magnetic recording medium that includes a recording layer formed in a predetermined concavo-convex pattern in which recording elements are formed as convex portions, has high areal density, cannot cause crash of a magnetic head easily, and has high reliability, and a magnetic recording and reproducing apparatus including that magnetic recording medium are provided. The magnetic recording medium includes: the recording elements formed as the convex portions of the recording layer formed in a predetermined concavo-convex pattern over a substrate; and a filling material with which a concave portion between the recording elements is filled. The surface roughness of a portion of a surface of the medium above the filling material is larger than that of portions of the surface above the recording elements.
摘要翻译：包括以预定的凹凸图案形成的记录层的磁记录介质，其中记录元件形成为凸部，具有高的面密度，不容易使磁头发生碰撞，并且具有高可靠性，并且磁记录并且提供包括该磁记录介质的再现装置。磁记录介质包括：记录元件，形成为在衬底上以预定的凹凸图案形成的记录层的凸部; 以及填充有记录元件之间的凹部的填充材料。在填充材料之上的介质的表面的一部分的表面粗糙度大于记录元件上方表面的部分的表面粗糙度。

6. 发明授权

US08124255B2 Magnetic recording medium and magnetic recording and reproducing apparatus 失效
标题翻译：磁记录介质和磁记录和再现装置
公开(公告)号：US08124255B2
公开(公告)日：2012-02-28
申请号：US12457194
申请日：2009-06-03
申请人： Shuichi Okawa , Kazuhiro Hattori , Narutoshi Fukuzawa , Takahiro Suwa
发明人： Shuichi Okawa , Kazuhiro Hattori , Narutoshi Fukuzawa , Takahiro Suwa
IPC分类号： G11B5/65
CPC分类号： G11B5/82 , B82Y10/00 , G11B5/743 , G11B5/746 , G11B5/855
摘要： A highly reliable magnetic recording medium is provided which has a recording layer formed in a concavo-convex pattern and wherein the recording layer is unlikely to cause a change in magnetic properties. The magnetic recording medium includes a substrate, a recording layer formed in a predetermined concavo-convex pattern over the substrate, convex portions of the concavo-convex pattern serving as recording elements; and a filler portion filling a concave portion between the recording elements. The filler portion comprises a metal-based main filler material and oxygen. Oxygen is unevenly distributed in the filler portion so that the ratio of the number of oxygen atoms to the total of the number of atoms of the main filler material and the number of oxygen atoms is greater in an upper surface portion of the filler portion than in a lower portion of the filler portion.
摘要翻译：提供了一种高度可靠的磁记录介质，其具有形成为凹凸图案的记录层，并且其中记录层不太可能导致磁性变化。磁记录介质包括基板，在基板上形成为预定的凹凸图案的记录层，作为记录元件的凹凸图案的凸部; 以及填充部分填充记录元件之间的凹部。填料部分包括金属基填料和氧气。氧气不均匀地分布在填料部分中，使得填料部分的上表面部分中的氧原子数与主填料材料的原子数和氧原子数的总和的比例大于在填充部分的下部。

7. 发明授权

US07740903B2 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07740903B2
公开(公告)日：2010-06-22
申请号：US11708595
申请日：2007-02-21
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： B05D5/12 , B05D3/00 , B44C1/22 , C23F1/00 , G11B7/24 , G11B5/33
CPC分类号： G11B5/855 , B82Y10/00 , G11B5/743 , G11B5/82
摘要： A method for manufacturing magnetic recording media is provided, by which a magnetic recording medium that has a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and good recording/reproducing properties can be manufactured. The method includes the steps of: depositing a first filling material over a workpiece to cover recording elements formed as convex portions of the concavo-convex pattern, and to fill at least part of a concave portion; depositing a detection material over the first filling material; depositing a second filling material over the detection material; and irradiating a surface of the workpiece with a process gas to flatten the surface. In the flattening step, a component of the detection material removed from and flying off the workpiece is detected to stop the irradiation with the process gas based on a result of detecting the component of the detection material.
摘要翻译：提供一种制造磁记录介质的方法，通过该方法可以制造具有形成为凹凸图案的记录层，足够平坦的表面和良好的记录/再现特性的磁记录介质。该方法包括以下步骤：在工件上沉积第一填充材料以覆盖形成为凹凸图案的凸部的记录元件，并填充凹部的至少一部分; 在第一填充材料上沉积检测材料; 在所述检测材料上沉积第二填充材料; 并用工艺气体照射工件的表面以使表面变平。在平坦化步骤中，基于检测到检测材料的成分的结果，检测出从工件移除并从工件飞离的检测材料的成分，停止用处理气体的照射。

8. 发明授权

US07538041B2 Magnetic recording medium, method of manufacturing the same, and intermediate for magnetic recording medium 失效
标题翻译：磁记录介质，其制造方法和磁记录介质的中间体
公开(公告)号：US07538041B2
公开(公告)日：2009-05-26
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： H01L21/302
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译：提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料，并且非磁性形成在非磁性材料的凹部的底面的非磁性材料形成的层16形成在凹凸图案的凸部上，同时凸部和凹部的表面基本平坦化，非磁性层16的厚度为1nm以下。

9. 发明授权

US07378029B2 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07378029B2
公开(公告)日：2008-05-27
申请号：US11059487
申请日：2005-02-17
申请人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
发明人： Kazuhiro Hattori , Shuichi Okawa , Takahiro Suwa , Mikiharu Hibi
IPC分类号： G11B3/70
CPC分类号： G11B5/855 , G11B5/851 , H01F41/32
摘要： A method for manufacturing a magnetic recording medium is provided, by which a magnetic recording medium having a recording layer formed in a concavo-convex pattern, a sufficiently flat surface, and high recording and reproducing precision is efficiently manufactured. In a non-magnetic material filling step, a non-magnetic material is deposited over a recording layer formed in a predetermined concavo-convex pattern over a substrate to fill concave portions of the concavo-convex pattern with the non-magnetic material. In a flattening step, an excess part of the non-magnetic material above the recording layer is removed by dry etching, to flatten surfaces of the recording layer and the non-magnetic material. Processing conditions are set so as to substantially equalize an etching rate of the non-magnetic material with an etching rate of the recording layer with respect to the dry etching in the flattening step.
摘要翻译：提供了一种用于制造磁记录介质的方法，通过该方法，有效地制造具有以凹凸图案形成的记录层，足够平坦表面和高记录和再现精度的磁记录介质。在非磁性材料填充步骤中，非磁性材料沉积在基板上以预定的凹凸图案形成的记录层上，以用非磁性材料填充凹凸图案的凹部。在平坦化步骤中，通过干蚀刻除去记录层上方的非磁性材料的过量部分，使记录层和非磁性材料的表面平坦化。设定处理条件，以便在平坦化步骤中，相对于干蚀刻，记录层的蚀刻速率基本上使非磁性材料的蚀刻速率相等。

10. 发明授权

US07300595B2 Method for filling concave portions of concavo-convex pattern and method for manufacturing magnetic recording medium 失效
标题翻译：填充凹凸图案的凹部的方法和制造磁记录介质的方法
公开(公告)号：US07300595B2
公开(公告)日：2007-11-27
申请号：US11015670
申请日：2004-12-20
申请人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
IPC分类号： B44C1/22
CPC分类号： G11B5/855
摘要： A method for filling concave portions of a concavo-convex pattern by which the concave portions of the concavo-convex pattern can be filled to flatten the surface with reliability, and a method for manufacturing a magnetic recording medium by which a magnetic recording medium having a magnetic recording layer of concavo-convex pattern with a sufficiently flat surface can be manufactured efficiently. A filler for filling the concave portions is deposited over the surface of an object to be processed, the object being provided with a concavo-convex pattern. A cladding is further deposited over the filler. Then, an excess part of the filler and the cladding above the surface of the object are removed for flattening, by using a dry etching method having a lower etching rate to the cladding than to the filler.
摘要翻译：用于填充凹凸图案的凹部的方法，通过该凹凸图案填充凹凸图案的凹部以可靠地使表面平坦化的方法，以及制造磁记录介质的方法，通过该方法具有可以有效地制造具有足够平坦表面的凹凸图案的磁记录层。用于填充凹部的填充剂沉积在待处理物体的表面上，该物体具有凹凸图案。在填料上进一步沉积包层。然后，通过使用对填料具有较低蚀刻速率的干式蚀刻方法，除去填充物的多余部分和物体表面上方的包层以进行平坦化。

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