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    • 4. 发明申请
    • Method for manufacturing magnetic recording medium
    • 磁记录介质的制造方法
    • US20090242508A1
    • 2009-10-01
    • US12382653
    • 2009-03-20
    • Kazuhiro HattoriShuichi OkawaNarutoshi FukuzawaTakahiro Suwa
    • Kazuhiro HattoriShuichi OkawaNarutoshi FukuzawaTakahiro Suwa
    • B44C1/22
    • G11B5/855B82Y10/00G11B5/743
    • A filling material different from a first mask layer (temporary coating material) is deposited over a workpiece to fill concave portions. At least part of excess portions of the filling material is removed by a dry etching method such that at least part of the side surfaces of the first mask layer over recording elements are exposed. Then, the first mask layer is removed by a dry etching method which uses a reactive gas having the property of chemically reacting with and removing both the filling material and the first mask layer as a processing gas and in which an etching rate for the first mask layer is higher than that for the filling material, and the etching rate for the filling material is higher than that for a recording layer (a lower layer that is in contact with a lower surface of the first mask layer over recording elements).
    • 不同于第一掩模层(临时涂层材料)的填充材料沉积在工件上以填充凹部。 通过干蚀刻方法去除填充材料的多余部分的至少一部分,使得第一掩模层的超过记录元件的侧表面的至少一部分被暴露。 然后,通过干式蚀刻法除去第一掩模层,该干蚀刻方法使用具有与填充材料和第一掩模层化学反应的特性的反应气体作为处理气体,并且其中第一掩模的蚀刻速率 层高于填充材料的蚀刻速率,并且对于记录层(与记录元件上的第一掩模层的下表面接触的下层)的填充材料的蚀刻速率高。
    • 5. 发明授权
    • Magnetic recording medium and magnetic recording and reproducing apparatus
    • 磁记录介质和磁记录和再现装置
    • US07494727B2
    • 2009-02-24
    • US11187912
    • 2005-07-25
    • Takahiro SuwaKazuya Shimakawa
    • Takahiro SuwaKazuya Shimakawa
    • G11B5/66G11B5/71G11B15/48
    • G11B5/855
    • A magnetic recording medium in which a recording layer is formed in a predetermined concavo-convex pattern and recording and reproducing apparatus comprising the magnetic recording medium are disclosed. The magnetic recording medium has a high areal density and high reliability since the occurrence of a crash of a magnetic head is suppressed. The magnetic recording medium comprises a recording layer formed over a substrate in a predetermined concavo-convex pattern to form recording elements as a convex portion of the concavo-convex pattern and a non-magnetic filler element filled in a concave portion between the recording elements. In this configuration, the top surface of the filler element is formed in a shape partially recessed toward the substrate side to form a groove having a width smaller than the width of the concave portion on the surface of the magnetic recording medium.
    • 公开了一种其中以预定的凹凸图案形成记录层的磁记录介质和包括该磁记录介质的记录和再现装置。 磁记录介质由于磁头碰撞的发生被抑制而具有高的面密度和高的可靠性。 磁记录介质包括以预定的凹凸图案形成在基板上的记录层,以形成作为凹凸图案的凸部的记录元件和填充在记录元件之间的凹部中的非磁性填充元件。 在这种构造中,填充元件的顶表面形成为朝向基板侧部分地凹陷的形状,以形成宽度小于磁记录介质表面上的凹部的宽度的凹槽。
    • 6. 发明授权
    • Magnetic recording medium, recording/reproducing apparatus, and stamper
    • 磁记录介质,记录/再现装置和压模
    • US07474506B2
    • 2009-01-06
    • US11265260
    • 2005-11-03
    • Yoshikazu SoenoTakahiro Suwa
    • Yoshikazu SoenoTakahiro Suwa
    • G11B5/82
    • G11B5/82B82Y10/00G11B5/59688G11B5/743G11B5/855G11B5/865
    • In a magnetic recording medium including a servo pattern region having a servo pattern formed of a concave/convex pattern having convex portions and concave portions and a data recording region, the region having a data track pattern, the concave portions are formed in an address pattern region of the servo pattern region such that the maximum lengths, which are located in the respective same radius regions of the respective lengths along the rotating direction of a substrate of the projecting end surfaces of the convex portions constituting the concave/convex pattern are set to first lengths that are double the minimum lengths along the rotating direction of the projecting end surfaces of the convex portions in the respective same radius regions. With this arrangement, the magnetic recording medium can securely read a magnetic signal and has a servo pattern having excellent surface smoothness.
    • 在包括具有由具有凸部和凹部的凹凸图案形成的伺服图案的伺服图案区域和数据记录区域的磁记录介质中,所述区域具有数据轨道图案,所述凹部以地址图形形成 区域,使得位于构成凹凸图案的凸部的突出端面的基板的旋转方向的各长度的各个相同的半径区域中的最大长度被设定为 第一长度是在相同的半径区域中凸部的突出端面的旋转方向的最小长度的两倍。 通过这种布置,磁记录介质可以安全地读取磁信号并具有具有优异表面平滑度的伺服图案。
    • 9. 发明申请
    • Method for manufacturing magnetic recording medium
    • 磁记录介质的制造方法
    • US20070196565A1
    • 2007-08-23
    • US11709049
    • 2007-02-22
    • Takahiro SuwaKazuya Shimakawa
    • Takahiro SuwaKazuya Shimakawa
    • B05D5/12B05D5/00
    • G11B5/855
    • Provided is a method for manufacturing a magnetic recording medium that has a concavo-convex patterned recording layer, sufficient flatness, and excellent recording/reproducing properties. A filling material is deposited over a workpiece including a substrate; a recording layer formed over the substrate in a predetermined concavo-convex pattern of which convex portions are recording elements; and a detection material formed over the recording elements. Process gas is irradiated to the surface to remove a portion of the filling material and the detection material to flatten the surface. An element contained in the detection material removed and flying off is detected on the basis of its atomic mass number. The irradiation of the process gas is then stopped according to the detection result. The detection material contains an element selected from the group consisting of aluminum, yttrium, zirconium, niobium, rhodium, silver, terbium, tantalum, gold, bismuth, titanium, indium, and tungsten.
    • 提供一种制造具有凹凸图案记录层,足够的平坦度和优异的记录/再现特性的磁记录介质的方法。 填充材料沉积在包括基底的工件上; 记录层,其以预定的凹凸图案形成在所述基板上,所述凹凸图案的凸部是记录元件; 以及形成在记录元件上的检测材料。 将工艺气体照射到表面以去除填充材料和检测材料的一部分以使表面变平。 基于其原子质量数来检测除去和飞出的检测材料中所含的元素。 然后根据检测结果停止处理气体的照射。 检测材料含有选自铝,钇,锆,铌,铑,银,铽,钽,金,铋,钛,铟和钨的元素。
    • 10. 发明申请
    • Information recording medium, recording/reproducing apparatus, and stamper
    • 信息记录介质,记录/再现装置和压模
    • US20060066975A1
    • 2006-03-30
    • US11229650
    • 2005-09-20
    • Yoshikazu SoenoTakahiro Suwa
    • Yoshikazu SoenoTakahiro Suwa
    • G11B15/46G11B5/09
    • G11B5/59688B82Y10/00G11B5/59655G11B5/743G11B5/82G11B5/855G11B5/865
    • On an information recording medium, a data track pattern and a servo pattern composed of a concave/convex pattern including a plurality of convex parts are formed on at least one surface side of a substrate and respective concave parts in the concave/convex pattern are filled with non-magnetic material. In the concave/convex pattern that constructs the data track pattern, the respective convex parts are formed concentrically or in a spiral. The concave/convex pattern that constructs the servo pattern is divided into a plurality of ring-shaped regions that are concentric with the data track pattern and has a unit convex part length along a direction of rotation of the substrate set in each ring-shaped region so that a value produced by dividing an average length of the unit convex part length in each ring-shaped region by a distance from a center of the data track pattern to the ring-shaped region decreases from ring-shaped regions in an inner periphery to ring-shaped regions in an outer periphery.
    • 在信息记录介质上,在衬底的至少一个表面侧上形成数据轨道图案和由包括多个凸部的凹凸图案构成的伺服图案,并且填充凹凸图案中的各个凹部 与非磁性材料。 在构成数据轨迹图案的凹凸图案中,相应的凸部​​同心地或以螺旋形成。 构成伺服图案的凹凸图案被分成与数据轨道图案同心的多个环形区域,并且沿着每个环形区域中的基板的旋转方向具有单位凸部长度 使得通过将每个环形区域中的单位凸部长度的平均长度除以从数据轨道图案的中心到环形区域的距离而产生的值从内周的环形区域减小到 环形区域在外周。