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1. 发明授权

US07225528B2 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07225528B2
公开(公告)日：2007-06-05
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/127 , H01R31/00
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译：一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率用于形成较低的非磁性膜。

2. 发明授权

US07538041B2 Magnetic recording medium, method of manufacturing the same, and intermediate for magnetic recording medium 失效
标题翻译：磁记录介质，其制造方法和磁记录介质的中间体
公开(公告)号：US07538041B2
公开(公告)日：2009-05-26
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： H01L21/302
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译：提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料，并且非磁性形成在非磁性材料的凹部的底面的非磁性材料形成的层16形成在凹凸图案的凸部上，同时凸部和凹部的表面基本平坦化，非磁性层16的厚度为1nm以下。

3. 发明申请

US20050196650A1 Magnetic recording medium 失效
标题翻译：磁记录介质
公开(公告)号：US20050196650A1
公开(公告)日：2005-09-08
申请号：US11065142
申请日：2005-02-24
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
IPC分类号： G11B5/65 , G11B5/82
CPC分类号： G11B5/855 , Y10T428/24355 , Y10T428/24479 , Y10T428/24488 , Y10T428/24537 , Y10T428/2457
摘要： A magnetic recording medium includes at least a disk substrate 1, a magnetic recording layer 5 formed with a predetermined concavo-convex pattern on the disk substrate 1, and a non-magnetic layer 6 formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer 5 or the non-magnetic layer 6. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width (W1 or W2) is made smaller than width W5 of each convex portion of the magnetic recording layer 5 or width W6 of each concave portion where the non-magnetic layer 6 is formed.
摘要翻译：磁记录介质至少包括盘基板1，在盘基板1上形成有预定的凹凸图案的磁记录层5以及形成在凹凸图案的凹部中的非磁性层6。在磁记录层5或非磁性层6上形成由非磁性材料形成的凸形。每个凸形形成为例如上表面宽度（W 1或W 2）的山形）被制成小于磁记录层5的每个凸部的宽度W 5或形成非磁性层6的每个凹部的宽度W 6。

4. 发明申请

US20050086795A1 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US20050086795A1
公开(公告)日：2005-04-28
申请号：US10972325
申请日：2004-10-26
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/127 , G11B5/84 , G11B5/855
CPC分类号： G11B5/855 , Y10T29/49021 , Y10T29/49032 , Y10T29/49043 , Y10T29/49046 , Y10T29/49048 , Y10T29/49052
摘要： A method for manufacturing a magnetic recording medium that has a sufficiently flat surface and includes a recording layer having a concavo-convex pattern that provides favorable accuracy of recording and reproduction. The manufacturing method includes the steps of: forming a lower non-magnetic film over a recording layer having a concavo-convex pattern; and forming an upper non-magnetic film on the lower non-magnetic film to fill concave portions 34 of the concavo-convex pattern. A bias power is applied to an object to be processed at least in the step of forming the upper non-magnetic film, and no bias power or a smaller bias power than the bias power applied in the step of forming the upper non-magnetic film is applied in the formation of the lower non-magnetic film.
摘要翻译：一种制造具有足够平坦表面的磁记录介质的方法，包括具有提供良好记录和再现精度的凹凸图案的记录层。该制造方法包括以下步骤：在具有凹凸图案的记录层上形成下部非磁性膜; 并且在下部非磁性膜上形成上部非磁性膜以填充凹凸图案的凹部34。至少在形成上部非磁性膜的步骤中，对要处理的物体施加偏置功率，并且与形成上部非磁性膜的步骤中施加的偏置功率相比，没有偏置功率或较小的偏置功率用于形成较低的非磁性膜。

5. 发明申请

US20060063042A1 Magnetic recording medium, method of manufacturing the same, and intermediate for magnetic recording medium 失效
标题翻译：磁记录介质，其制造方法和磁记录介质的中间体
公开(公告)号：US20060063042A1
公开(公告)日：2006-03-23
申请号：US11206874
申请日：2005-08-19
申请人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
发明人： Mitsuru Takai , Kazuhiro Hattori , Takahiro Suwa , Shuichi Okawa
IPC分类号： G11B5/706
CPC分类号： G11B5/855
摘要： A magnetic recording medium is provided in which a magnetic recording layer 5 is provided in a predetermined concavo-convex pattern on a substrate 1A, a concave portion in a concavo-convex pattern is filled with a non-magnetic material, and a non-magnetic layer 16 formed of the non-magnetic material positioned at the bottom surface of the concave portion in the non-magnetic materials is formed on a convex portion of the concavo-convex pattern while surface of the convex portion and the concave portion is substantially flattened, and a thickness of the non-magnetic layer 16 is 1 nm or less.
摘要翻译：提供一种磁记录介质，其中在基板1A上以预定的凹凸图案设置磁记录层5，凹凸图案的凹部填充有非磁性材料，形成在非磁性材料的凹部的底面的非磁性材料形成的磁性层16形成在凹凸图案的凸部上，凸部和凹部的表面基本平坦化，非磁性层16的厚度为1nm以下。

6. 发明授权

US07438982B2 Magnetic recording medium including disk substrate, magnetic layer, and non-magnetic layer 失效
标题翻译：包括磁盘基片，磁性层和非磁性层的磁记录介质
公开(公告)号：US07438982B2
公开(公告)日：2008-10-21
申请号：US11065142
申请日：2005-02-24
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa , Mikiharu Hibi
IPC分类号： G11B5/66 , G11B5/72
CPC分类号： G11B5/855 , Y10T428/24355 , Y10T428/24479 , Y10T428/24488 , Y10T428/24537 , Y10T428/2457
摘要： A magnetic recording medium includes at least a disk substrate, a magnetic recording layer formed with a predetermined concavo-convex pattern on the disk substrate, and a non-magnetic layer formed in concave portions of the concavo-convex pattern. Convex shapes made of a non-magnetic material are formed on the magnetic recording layer or the non-magnetic layer. Each convex shape is formed, for example, into a mountain-like shape whose upper surface width is made smaller than a width of each convex portion of the magnetic recording layer or a width of each concave portion where the non-magnetic layer 6 is formed.
摘要翻译：磁记录介质至少包括盘基片，在盘基片上形成有预定的凹凸图案的磁记录层，以及形成在凹凸图案的凹部中的非磁性层。在磁记录层或非磁性层上形成由非磁性材料制成的凸形。每个凸形形成为例如其上表面宽度小于磁记录层的每个凸部的宽度或形成非磁性层6的每个凹部的宽度的山形形状。

7. 发明授权

US07247343B2 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US07247343B2
公开(公告)日：2007-07-24
申请号：US10924991
申请日：2004-08-25
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： B05D5/12
CPC分类号： G11B5/855
摘要： A method for manufacturing a magnetic recording medium for efficiently and certainly manufacturing a magnetic recording medium. The magnetic recording medium has a recording layer formed to have predetermined concavo-convex pattern and an adequately flat surface. According to this method, a non-magnetic material is deposited on and filled into a member to be processed 10 by adjusting sputtering conditions in such a manner as to satisfy the following Eq I: 0.1≦V/V0−0.003×(L·d/t)+1.2 Eq I where V represents a deposition rate which is the film thickness per unit of time, V0 represent a deposition rate in a case that the bias power is zero, t represents the film thickness of the deposited non-magnetic material, L represents the width of a recording element, and d represents the depth of a recessed portion between the recording elements.
摘要翻译：一种用于制造磁记录介质的方法，用于有效且肯定地制造磁记录介质。磁记录介质具有形成为具有预定凹凸图案和足够平坦表面的记录层。根据该方法，通过调整溅射条件，使非磁性材料沉积在待加工构件10中，并满足以下等式I：<？in-line-formula description =“In- 线公式“end =”lead“？> 0.1 <= V / V <0> -0.003x（Ld / t）+1.2 Eq I <？in-line-formula description =”In-line Formulas “end =”tail“？>其中V表示作为每单位时间的膜厚度的沉积速率，V 表示在偏置功率为零的情况下的沉积速率，t表示沉积的非磁性材料的膜厚度L表示记录元件的宽度，d表示记录元件之间的凹部的深度。

8. 发明申请

US20070031706A1 Method for producing magnetic recording medium and magnetic recording medium 审中-公开
标题翻译：磁记录介质和磁记录介质的制造方法
公开(公告)号：US20070031706A1
公开(公告)日：2007-02-08
申请号：US10555670
申请日：2004-09-09
申请人： Shuichi Okawa , Kazuhiro Hattori , Takahiro Suwa , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Takahiro Suwa , Mitsuru Takai
IPC分类号： G11B5/65 , B05D5/12
CPC分类号： G11B5/855
摘要： A method for manufacturing a magnetic recording medium, which enables efficient and ensured manufacture of a magnetic recording medium having a recording layer formed in a concavo-convex pattern and a satisfactorily flat surface, and a magnetic recording medium are provided. According to the method for manufacturing a magnetic recording medium, a material whose state is selectable between a flowing state and a cured state is used as a non-magnetic material 36. After the non-magnetic material 36 is formed in a flowing state on a surface of an object to be processed 10 including a recording layer 32 formed in a concavo-convex pattern over a glass substrate 12, then the non-magnetic material 36 is cured.
摘要翻译：提供了一种制造磁记录介质的方法，其能够有效且确保制造具有形成为凹凸图案和令人满意的平坦表面的记录层的磁记录介质和磁记录介质。根据制造磁记录介质的方法，将其状态在流动状态和固化状态之间可选择的材料用作非磁性材料36.在非磁性材料36以流动状态形成在包括在玻璃基板12上形成为凹凸图案的记录层32的待处理物体10的表面，然后使非磁性材料36固化。

9. 发明申请

US20050048198A1 Method for manufacturing magnetic recording medium 失效
标题翻译：磁记录介质的制造方法
公开(公告)号：US20050048198A1
公开(公告)日：2005-03-03
申请号：US10924991
申请日：2004-08-25
申请人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
发明人： Takahiro Suwa , Mitsuru Takai , Kazuhiro Hattori , Shuichi Okawa
IPC分类号： G11B5/65 , G11B5/84 , G11B5/855 , B05D5/12
CPC分类号： G11B5/855
摘要： A method for manufacturing a magnetic recording medium for efficiently and certainly manufacturing a magnetic recording medium. The magnetic recording medium has a recording layer formed to have predetermined concavo-convex pattern and an adequately flat surface. According to this method, a non-magnetic material is deposited on and filled into a member to be processed 10 by adjusting sputtering conditions in such a manner as to satisfy the following equation (I): 0.1≦V/V0≦−0.003×(L·d/t)+1.2 (I) where V represents a deposition rate which is the film thickness per unit of time, V0 represent a deposition rate in a case that the bias power is zero, t represents the film thickness of the deposited non-magnetic material, L represents the width of a recording element, and d represents the depth of a recessed portion between the recording elements.
摘要翻译：一种用于制造磁记录介质的方法，用于有效且肯定地制造磁记录介质。磁记录介质具有形成为具有预定凹凸图案和足够平坦表面的记录层。根据该方法，通过以满足下述式（I）的方式调整溅射条件，将非磁性材料沉积并填充到待加工构件10中：0.1 <= V / V0 <= 0.003 x（Ld / t）+1.2（I）其中V表示作为每单位时间的膜厚度的沉积速率，V0表示在偏置功率为零的情况下的沉积速率，t表示沉积的膜厚度非磁性材料，L表示记录元件的宽度，d表示记录元件之间的凹部的深度。

10. 发明申请

US20050284842A1 Method of dry etching, method of manufacturing magnetic recording medium, and magnetic recording medium 失效
标题翻译：干蚀刻方法，制造磁记录介质的方法和磁记录介质
公开(公告)号：US20050284842A1
公开(公告)日：2005-12-29
申请号：US11156469
申请日：2005-06-21
申请人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
发明人： Shuichi Okawa , Kazuhiro Hattori , Mikiharu Hibi , Mitsuru Takai
IPC分类号： B44C1/22 , C03C15/00 , C03C25/68 , C23F1/00 , C23F4/00 , G11B5/65 , G11B5/73 , G11B5/74 , G11B5/82 , G11B5/855
CPC分类号： B82Y10/00 , C23F4/00 , G11B5/732 , G11B5/7325 , G11B5/74 , G11B5/743 , G11B5/82 , G11B5/855
摘要： The recording layer (to-be-etched layer), a main mask layer, and a sub mask layer are formed in this order over a substrate, and the sub mask layer is processed into a predetermined concavo-convex pattern. Next, parts of the main mask layer under the concave portions are removed by reactive ion etching using oxygen or ozone as the reactive gas. Parts of the recording layer under the concave portions are also removed by dry etching, whereby the recording layer is shaped into the concavo-convex pattern. The main mask layer is chiefly made of carbon. The sub mask layer is made of a material having an etching rate lower than that of carbon with respect to the reactive ion etching in the step of processing the main mask layer.
摘要翻译：在衬底上依次形成记录层（被蚀刻层），主掩模层和副掩模层，并将子掩模层加工成预定的凹凸图案。接下来，通过使用氧或臭氧作为反应气体的反应离子蚀刻除去凹部下方的主掩模层的一部分。通过干法蚀刻除去凹部下面的记录层的部分，由此将记录层成形为凹凸图案。主掩模层主要由碳制成。在处理主掩模层的步骤中，子掩模层由相对于反应离子蚀刻的蚀刻速率低于碳的蚀刻速率的材料制成。

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