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    • 3. 发明授权
    • Methods of forming bipolar junction transistors
    • 形成双极结晶体管的方法
    • US5721147A
    • 1998-02-24
    • US712289
    • 1996-09-11
    • Kwang-Joon Yoon
    • Kwang-Joon Yoon
    • H01L29/73H01L21/328H01L21/331H01L29/417H01L29/732H01L21/265
    • H01L29/66272H01L29/41708H01L29/7322Y10S148/01Y10S148/011
    • Methods of forming bipolar junction transistors include the steps of forming a first insulating layer on a face of a semiconductor substrate containing a collector region of first conductivity type therein and then forming an opening in the first insulating layer to expose the collector region at the face. An extrinsic base region contact layer of second conductivity type is then formed on the first insulating layer and in the opening and then an extrinsic base region of second conductivity type is formed in the collector region, at the opening in the first insulating layer. Next, a second insulating layer is formed on the extrinsic base region contact layer and first insulating layer, using the first insulating layer as a mask to prevent contact between the second insulating layer and the collector region at the face. To complete the transistor, an intrinsic base region of second conductivity type is then formed in the collector region and then an emitter region of first conductivity type is formed in the intrinsic base region.
    • 形成双极结型晶体管的方法包括以下步骤:在包含第一导电类型的集电极区域的半导体衬底的表面上形成第一绝缘层,然后在第一绝缘层中形成开口以露出面部的集电极区域。 然后在第一绝缘层和开口中形成第二导电类型的非本征基区接触层,然后在第一绝缘层的开口处在集电极区域形成第二导电类型的非本征基区。 接下来,使用第一绝缘层作为掩模,在外部基极区域接触层和第一绝缘层上形成第二绝缘层,以防止第二绝缘层和面部的集电区之间的接触。 为了完成晶体管,在集电极区域形成第二导电类型的本征基极区域,然后在本征基极区域形成第一导电类型的发射极区域。