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    • 1. 发明授权
    • Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers
    • 用于检测压力型流量控制器孔堵塞的方法和装置
    • US06302130B1
    • 2001-10-16
    • US09529985
    • 2000-07-18
    • Tadahiro OhmiSeiichi IidaSatoshi KagatsumeJun HiroseKouji NishinoNobukazu IkedaMichio YamajiRyousuke DohiKazuhiro YoshikawaMutsunori KoyomogiTomio UnoEiji IdetaTakashi Hirose
    • Tadahiro OhmiSeiichi IidaSatoshi KagatsumeJun HiroseKouji NishinoNobukazu IkedaMichio YamajiRyousuke DohiKazuhiro YoshikawaMutsunori KoyomogiTomio UnoEiji IdetaTakashi Hirose
    • F17D116
    • G05D7/0635Y10T137/0396Y10T137/7759Y10T137/7761Y10T137/8326
    • A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detecting clogging of an orifice in a pressure-type flow rate controller has a control valve (CV), an orifice (2), a pressure detector (14) for measuring the upstream pressure P1 therebetween, and a flow rate setting circuit (32) wherein, with the upstream pressure P1 maintained about two or more times higher than the downstream pressure P2, the downstream flow rate QC is calculated with the equation QC=KP1 (K=constant) and wherein the control valve (CV) is controlled by the difference signal QY between the calculated flow rate QC and the set flow rate QS. The apparatus comprises: a storage memory M memorizing standard pressure attenuation data Y(t) of the upstream pressure P1 measured with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) not clogged, a pressure detector (14) for determination of the pressure attenuation data P(t) of the upstream pressure P1 with the flow rate switched from the high set flow rate QSH to the low set flow rate QSL with the orifice (2) in the actual conditions, a central processing unit CPU for checking the pressure attenuation data P(t) against standard pressure attenuation data Y(t), and an alarm circuit (46) that turns on a clogging alarm when the pressure attenuation data P(t) deviates from standard pressure attenuation data Y(t) to a specific degree or beyond that.
    • 一种用于通过测量上游侧压力而不破坏使用孔口的流量控制单元中的管道系统来检测孔口堵塞的方法和装置,以延长流量控制单元的寿命并提高其安全性。 检测压力型流量控制器中的孔口堵塞的装置具有控制阀(CV),用于测量其上游压力P1的孔口(2),压力检测器(14)和流量设定电路 (32)其中,在上游压力P1保持大于下游压力P2的两倍或更多倍的情况下,下游流量QC用等式QC = KP1(K =常数)计算,并且其中控制阀(CV)为 由计算流量QC和设定流量QS之间的差分信号QY控制。 该装置包括:存储存储器M,存储以从高设定流量QSH切换到低设定流量QSL的流量测量的上游压力P1的标准压力衰减数据Y(t),其中孔口(2)没有堵塞 ,用于确定上游压力P1的压力衰减数据P(t)的压力检测器(14),其中流量从高设定流量QSH切换到具有孔口(2)的低设定流量QSL 实际情况是用于根据标准压力衰减数据Y(t)检测压力衰减数据P(t)的中央处理单元CPU以及当压力衰减数据P(t)偏离时引起堵塞报警的报​​警电路(46) 从标准压力衰减数据Y(t)到特定程度或以上。
    • 5. 发明授权
    • Gas supply system equipped with pressure-type flow rate control unit
    • 供气系统配有压力式流量控制单元
    • US06289923B1
    • 2001-09-18
    • US09463514
    • 2000-06-02
    • Tadahiro OhmiSatoshi KagatsumeNobukazu IkedaKouji NishinoKazuhiro YoshikawaEiji IdetaRyousuke DohiTomio UnoMichio Yamaji
    • Tadahiro OhmiSatoshi KagatsumeNobukazu IkedaKouji NishinoKazuhiro YoshikawaEiji IdetaRyousuke DohiTomio UnoMichio Yamaji
    • G05D706
    • G05D7/0635Y10T137/7759Y10T137/7761
    • An improved and reduced-size and low-cost gas supply system equipped with a pressure-type flow rate control unit, to be used, for instance, in semiconductor manufacturing facilities is disclosed. Transient flow rate characteristics are improved to prevent the gas from overshooting when the gas supply is started, and to raise the flow rate control accuracy and reliability of facilities. That eliminates non-uniformity of products or semiconductors and raises the production efficiency. The gas supply system equipped with a pressure-type flow rate control unit is so configured that with the pressure on the upstream side of the orifice held about twice or more higher than the downstream side pressure, the gas flow rate is controlled to supply the gas to a gas-using process through an orifice-accompanying valve, the gas supply system comprising a control valve to receive gas from the gas supply source, an orifice-accompanying valve provided on the downstream side of the control valve, a pressure detector provided between the control valve and the orifice-accompanying valve, an orifice provided on the downstream side of the valve mechanism of the orifice-accompanying valve and a calculation control unit where on the basis of the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with an equation Qc=KP1 (K: constant) and the difference between the flow-rate specifying signal Qs and the calculated flow rate Qc is then input as control signal Qy in the drive for the control valve, thereby regulating the opening of the control valve for adjusting the pressure P1 so that the flow rate of the gas to supply can be controlled.
    • 公开了一种改进的,尺寸较小的低成本的气体供应系统,其配备有例如半导体制造设备中使用的压力式流量控制单元。 提高瞬态流量特性,防止气体开始时气体过冲,提高设备的流量控制精度和可靠性。 这消除了产品或半导体的不均匀性并提高了生产效率。 配置有压力式流量控制单元的气体供给系统被配置为使得在孔口的上游侧的压力保持为比下游侧压力高大约两倍或更多的气体,气体流量被控制以供应气体 通过孔口相关阀进行气体使用过程,所述气体供应系统包括用于接收来自气体供应源的气体的控制阀,设置在控制阀的下游侧的孔附件阀,设置在控制阀之间的压力检测器 所述控制阀和所述节流孔相关阀,设置在所述节流阀相关阀的阀机构的下游侧的孔口和计算控制单元,其中,基于由所述压力检测器检测到的压力P1,流量Qc 用公式Qc = KP1(K:常数)计算,然后输入流量指定信号Qs和计算流量Qc之间的差作为控制信号Qy i n是用于控制阀的驱动器,由此调节用于调节压力P1的控制阀的打开,从而可以控制供给气体的流量。
    • 7. 发明授权
    • Structure or construction for mounting a pressure detector
    • 用于安装压力检测器的结构或结构
    • US06606912B2
    • 2003-08-19
    • US09825340
    • 2001-04-04
    • Tadahiro OhmiTakashi HiroseEiji IdetaNobukazu IkedaRyousuke DohiKouji NishinoKazuhiro YoshikawaSatoshi KagatsumeJun HiroseKazuo FukasawaHiroshi KoizumiHideki Nagaoka
    • Tadahiro OhmiTakashi HiroseEiji IdetaNobukazu IkedaRyousuke DohiKouji NishinoKazuhiro YoshikawaSatoshi KagatsumeJun HiroseKazuo FukasawaHiroshi KoizumiHideki Nagaoka
    • G01L700
    • G01L19/0023G01L19/0645G01L19/145G01L19/147
    • A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.
    • 用于安装压力检测器的结构防止了检测器膜片被施加到压力检测器上的应力而被应变,因为检测器安装在设置在管线等中的夹具主体中,从而保持了输出特性和温度特性 检测器在安装前后差异很大。 压力检测器通过将具有隔膜的膜片基座和具有传感器元件的传感器基座组合并紧固在一起而构成,该传感器基座通过隔膜基座的位移而被激活。 压力检测器,其上放置有垫圈,设置在安装在管道中的固定装置本体的安装孔中。 压力检测器通过从安装孔中从上方插入的压紧构件气密地按压并紧固。 压板构件与隔膜基座的块上表面接触,并且垫圈也与隔膜基座的块下表面接触。 浅槽在块体的下表面上在与金属垫片接触的部分的内侧的位置处以环的形式限定,使得浅槽吸收由压紧构件引起的应变。
    • 8. 发明授权
    • Fluid-switchable flow rate control system
    • 流体切换流量控制系统
    • US06314992B1
    • 2001-11-13
    • US09530022
    • 2000-04-24
    • Tadahiro OhmiSatoshi KagatsumeJun HiroseKouji Nishino
    • Tadahiro OhmiSatoshi KagatsumeJun HiroseKouji Nishino
    • G05D706
    • G05D7/0658G05D7/0635Y10T137/7759Y10T137/7761
    • A fluid-switchable flow rate control system that permits free changing of the full scale flow rate and which can control a plurality of kinds of fluids with high precision. The fluid-switchable flow rate control system controls the flow rate of fluid with the pressure P1 on the upstream side of the orifice member held about twice or more higher than the downstream pressure P2, the fluid-switchable flow rate control system comprising an orifice member 8 replaceable with another to provide a suitable orifice diameter according to the kind of fluid and the flow rate range, a control valve 2 provided on the upstream side thereof, a pressure detector 6 provided between the control valve 2 and the orifice member 8, a flow rate calculation circuit 14 where from the pressure P1 detected by the pressure detector, the flow rate Qc is calculated with the equation Qc=KP1 (K=constant), a flow rate-setting circuit 16 for outputting flow rate setting signal Qe, a flow rate conversion circuit 18 for multiplying the calculated flow rate signal Qc by the flow rate conversion rate k into switch-over calculated flow rate signal Qf (Qf=kQc) to change the full scale flow rate, and a calculation control circuit 20 to output the difference between the switch-over calculation flow rate signal Qf and the flow rate setting signal Qe as control signal Qy to the drive 4 of the control valve 2, thereby opening or closing the control valve to bring the control signal Qy to zero, thus controlling the flow rate on the downstream side of the orifice member.
    • 一种可流体切换的流量控制系统,其允许自由改变满量程流量并且可以高精度地控制多种流体。 可流体切换流量控制系统控制流体的流量,其中孔口部件的上游侧的压力P1保持在比下游压力P2大约两倍或更多的高度,流体可切换流量控制系统包括孔口部件 8可替换为另一个,以根据流体种类和流量范围提供合适的孔口直径,设置在其上游侧的控制阀2,设置在控制阀2和孔口构件8之间的压力检测器6, 流量计算电路14,从压力检测器检测出的压力P1,以流量Qc = KP1(K =常数)计算流量Qc,输出流量设定信号Qe的流量设定电路16 用于将计算出的流量信号Qc乘以流量转换率k的流量转换电路18转换为切换计算流量信号Qf(Qf = kQc)以改变满量程流量, 以及计算控制电路20,将切换计算流量信号Qf和作为控制信号Qy的流量设定信号Qe之间的差分输出到控制阀2的驱动器4,由此打开或关闭控制阀以带来 控制信号Qy为零,从而控制孔口部件的下游侧的流量。